A probe card correction apparatus

Abstract

The utility model relates to probe card technical field, and disclose a kind of probe card correction equipment, including workbench, the upper fixed mounting of workbench has base, the outside sleeve of telescopic link has spring one, telescopic link and spring one are all fixed connection with clamping block. The utility model is equipped with positioning groove and mounting groove in the inboard of workbench, when needing to clamp probe card, first, probe card is placed into the upper of ground, at this time, ground will be moved downward by the sliding connection effect of sliding block and sliding groove, so that probe card enters the inside of base, and height value is flush with the top end of base, while spring one will provide elastic force and push clamping block to the direction of probe card, reach the effect that clamping block clamps probe card, so that probe card keeps stable, and will not shake, improve correction efficiency.

Description

Technical Field

[0001] This utility model relates to the field of probe card technology, and more specifically, to a probe card calibration device. Background Technology

[0002] Probe cards are key tools in semiconductor testing, mainly used in the wafer testing process, serving as the interface between the tester and the wafer. Probe cards are basically composed of PCB substrate, probes, and other components. Due to the small size of the probes, the probe cards need to be calibrated in a timely manner. However, during calibration, the small size of the probe cards often leads to instability and shaking, affecting the overall calibration efficiency. Utility Model Content

[0003] To overcome the shortcomings of the existing technology, this utility model provides a probe card calibration device, which has the advantage of preventing probe card shaking.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a probe card calibration device, including a workbench, a base fixedly installed above the workbench, a sliding groove slidably connected inside the base, a slider slidably connected inside the sliding groove, a base plate fixedly installed inside the slider, a positioning groove and an installation groove opened inside the workbench, a clamping block provided inside the positioning groove, a telescopic rod fixedly installed inside the installation groove, a spring sleeved on the outside of the telescopic rod, and both the telescopic rod and the spring being fixedly connected to the clamping block.

[0005] As a preferred embodiment of this utility model, a latch is fixedly installed above the clamping block, a first mounting block is fixedly installed above the worktable, a locking rod is slidably connected inside the first mounting block, a limiting ring is fixedly installed on the outer side of the first mounting block, the limiting ring is located on the side of the first mounting block away from the worktable, and a spring is sleeved on the outer side of the first mounting block.

[0006] As a preferred embodiment of this utility model, a second mounting block is fixedly installed above the workbench, the locking rod passes through the inside of the second mounting block, and a second limiting ring is fixedly installed on the outside of the locking rod. The second limiting ring is located on the side of the second mounting block away from the first mounting block.

[0007] As a preferred embodiment of this utility model, a cylinder is fixedly installed at the bottom of the workbench, and a push rod is fixedly installed at the output end of the cylinder. The top of the push rod is fixedly connected to the chassis.

[0008] As a preferred embodiment of this utility model, there are two clamping blocks, both of which are located inside the base. The base is circular, and the diameter of the base is slightly larger than the diameter of the probe card.

[0009] As a preferred embodiment of this utility model, there are two slides and two sliders, which are distributed in opposite directions, and both sliders are fixedly connected to the chassis.

[0010] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0011] 1. This utility model features a positioning groove and an installation groove on the inner side of the workbench. A clamping block is installed inside the positioning groove, and a telescopic rod is fixedly installed inside the installation groove. A spring is sleeved on the outer side of the telescopic rod, and both the telescopic rod and the spring are fixedly connected to the clamping block. When it is necessary to clamp the probe card, the probe card is first placed above the base. At this time, the base will move downward through the sliding connection between the slider and the slide groove, so that the probe card enters the interior of the base and its height is level with the top of the base. At the same time, the spring will provide elastic force to push the clamping block towards the probe card, thereby achieving the effect of clamping the probe card and keeping the probe card stable without shaking, thus improving the calibration efficiency.

[0012] 2. This utility model features a cylinder fixedly installed at the bottom of the workbench, with a push rod fixedly installed at the output end of the cylinder. The top of the push rod is fixedly connected to the base. When the probe card is properly aligned, it may be squeezed against the edge if forcibly removed because the probe card is located inside the base, potentially causing damage to the components. In this case, the cylinder is activated, which drives the push rod upward, causing the base to move upward through the sliding connection between the slider and the groove. This allows the height of the probe card to exceed the height of the base, making it easier to pick up. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This utility model Figure 1 Enlarged schematic diagram of the structure at point A;

[0015] Figure 3 This utility model Figure 1 Enlarged schematic diagram of the structure at point B;

[0016] Figure 4 This utility model Figure 1 Enlarged schematic diagram of the structure at point C;

[0017] Figure 5 This is a schematic diagram of the base structure of this utility model.

[0018] In the diagram: 1. Workbench; 2. Base; 3. Slide groove; 4. Slider; 5. Chassis; 6. Positioning groove; 7. Clamping block; 8. Mounting groove; 9. Telescopic rod; 10. Spring; 11. Lock; 12. First mounting block; 13. Locking rod; 14. Limiting ring one; 15. Spring; 16. Second mounting block; 17. Second limiting ring; 18. Cylinder; 19. Push rod. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] like Figures 1 to 5 As shown, this utility model provides a probe card calibration device, including a workbench 1, a base 2 fixedly installed on the top of the workbench 1, a sliding groove 3 slidably connected inside the base 2, a slider 4 slidably connected inside the sliding groove 3, a base plate 5 fixedly installed inside the slider 4, a positioning groove 6 and an installation groove 8 opened on the inner side of the workbench 1, a clamping block 7 is provided inside the positioning groove 6, a telescopic rod 9 is fixedly installed inside the installation groove 8, a spring 10 is sleeved on the outer side of the telescopic rod 9, and both the telescopic rod 9 and the spring 10 are fixedly connected to the clamping block 7.

[0021] When it is necessary to clamp the probe card, first place the probe card above the base 5. At this time, the base 5 will move downward through the sliding connection between the slider 4 and the slide groove 3, so that the probe card enters the interior of the base 2 and the height is level with the top of the base 2. At the same time, the spring 10 will provide elastic force to push the clamping block 7 towards the probe card, so that the clamping block 7 clamps the probe card, thereby keeping the probe card stable and preventing it from shaking, thus improving the calibration efficiency.

[0022] Among them, a latch 11 is fixedly installed on the top of the clamping block 7, a first mounting block 12 is fixedly installed on the top of the worktable 1, a locking rod 13 is slidably connected inside the first mounting block 12, a limit ring 14 is fixedly installed on the outside of the first mounting block 12, the limit ring 14 is located on the side of the first mounting block 12 away from the worktable 1, and a spring 15 is sleeved on the outside of the first mounting block 12.

[0023] When it is not necessary to clamp the probe card, first pull the locking rod 13 away from the lock buckle 11. Then, after resetting the clamping block 7, release the locking rod 13 so that the spring 15 pushes the first mounting block 12 toward the limiting ring 14 through its elastic force, thereby inserting the locking rod 13 into the lock buckle 11, so as to facilitate locking the clamping block 7.

[0024] The workbench 1 has a second mounting block 16 fixedly installed above it. The locking rod 13 passes through the inside of the second mounting block 16. The locking rod 13 has a second limiting ring 17 fixedly installed on the outside of it. The second limiting ring 17 is located on the side of the second mounting block 16 away from the first mounting block 12.

[0025] The main function of the second limiting ring 17 is to limit the locking rod 13 so that the locking rod 13 is locked to the latch 11 in the correct position, preventing it from falling off.

[0026] Among them, a cylinder 18 is fixedly installed at the bottom of the workbench 1, and a push rod 19 is fixedly installed at the output end of the cylinder 18. The top of the push rod 19 is fixedly connected to the chassis 5.

[0027] After the probe card is calibrated, since the probe card is located inside the base 2, forcibly removing it may cause pressure on the edge, which may damage the parts. At this time, the cylinder 18 is activated, which drives the push rod 19 to push upward, so that the base 5 moves upward through the sliding connection between the slider 4 and the slide groove 3, thereby making the height of the probe card exceed the height of the base 2, so as to make it easy to pick up.

[0028] There are two clamping blocks 7, both of which are located inside the base 2. The base 5 is circular, and the diameter of the base 5 is slightly larger than the diameter of the probe card.

[0029] The two clamps 7 are made of a relatively soft material, which can effectively protect the probe card when they come into contact with the bottom of the probe card, thus improving the protection efficiency.

[0030] There are two slides 3 and two sliders 4. The two slides 3 and the two sliders 4 are distributed in opposite directions, and both sliders 4 are fixedly connected to the base 5.

[0031] When the chassis 5 needs to move the probe card up and down, the sliding action between the slider 4 and the groove 3 ensures the overall stability during displacement.

[0032] Working principle and usage process of this utility model:

[0033] First, a positioning groove 6 and an installation groove 8 are provided on the inner side of the workbench 1. A clamping block 7 is provided inside the positioning groove 6, and a telescopic rod 9 is fixedly installed inside the installation groove 8. A spring 10 is sleeved on the outside of the telescopic rod 9, and both the telescopic rod 9 and the spring 10 are fixedly connected to the clamping block 7. When it is necessary to clamp the probe card, the probe card is first placed above the base 5. At this time, the base 5 will move downward through the sliding connection between the slider 4 and the slide groove 3, so that the probe card enters the interior of the base 2 and the height is flush with the top of the base 2.

[0034] Secondly, spring 10 will provide elastic force to push clamp 7 towards the probe card, so that clamp 7 can clamp the probe card, thereby keeping the probe card stable and preventing it from shaking.

[0035] When it is not necessary to clamp the probe card, first pull the locking rod 13 away from the lock buckle 11. Then, after resetting the clamping block 7, release the locking rod 13 so that the spring 15 pushes the first mounting block 12 toward the limiting ring 14 through its elastic force, thereby inserting the locking rod 13 into the lock buckle 11 to facilitate locking the clamping block 7.

[0036] Finally, since a cylinder 18 is fixedly installed at the bottom of the workbench 1, and a push rod 19 is fixedly installed at the output end of the cylinder 18, and the top of the push rod 19 is fixedly connected to the base 5, when the probe card is calibrated, since the probe card is located inside the base 2, forcibly removing it may cause squeezing at the edge, which may damage the parts. At this time, the cylinder 18 is activated, and the cylinder 18 drives the push rod 19 to push upward, so that the base 5 moves upward through the sliding connection between the slider 4 and the slide groove 3, so that the height of the probe card exceeds the height of the base 2, achieving the effect of easy picking.

[0037] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A probe card calibration device, comprising a worktable (1), characterized in that: A base (2) is fixedly installed above the workbench (1). A sliding groove (3) is slidably connected inside the base (2). A slider (4) is slidably connected inside the sliding groove (3). A base plate (5) is fixedly installed inside the slider (4). A positioning groove (6) and an installation groove (8) are provided on the inner side of the workbench (1). A clamping block (7) is provided inside the positioning groove (6). A telescopic rod (9) is fixedly installed inside the installation groove (8). A spring (10) is sleeved on the outer side of the telescopic rod (9). The telescopic rod (9) and the spring (10) are both fixedly connected to the clamping block (7).

2. The probe card calibration device according to claim 1, characterized in that: A latch (11) is fixedly installed above the clamping block (7), and a first mounting block (12) is fixedly installed above the workbench (1). A locking rod (13) is slidably connected inside the first mounting block (12). A limiting ring (14) is fixedly installed on the outside of the first mounting block (12). The limiting ring (14) is located on the side of the first mounting block (12) away from the workbench (1). A spring (15) is sleeved on the outside of the first mounting block (12).

3. The probe card calibration device according to claim 2, characterized in that: A second mounting block (16) is fixedly installed above the workbench (1). The locking rod (13) passes through the inside of the second mounting block (16). A second limiting ring (17) is fixedly installed on the outside of the locking rod (13). The second limiting ring (17) is located on the side of the second mounting block (16) away from the first mounting block (12).

4. The probe card calibration device according to claim 1, characterized in that: A cylinder (18) is fixedly installed at the bottom of the workbench (1), and a push rod (19) is fixedly installed at the output end of the cylinder (18). The top of the push rod (19) is fixedly connected to the chassis (5).

5. The probe card calibration device according to claim 1, characterized in that: There are two clamping blocks (7), both of which are located inside the base (2). The base (5) is circular, and the diameter of the base (5) is slightly larger than the diameter of the probe card.

6. The probe card calibration device according to claim 1, characterized in that: There are two slides (3) and two sliders (4). The two slides (3) and two sliders (4) are distributed in opposite directions, and both sliders (4) are fixedly connected to the chassis (5).

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