Ozone and plasma combined cleaning machine

Abstract

The utility model discloses an ozone and plasma compound cleaning machine, including casing, door body I, door body II, gas flowmeter, pressure gauge, ozone cleaning cavity, UV lamp assembly, cleaning platform subassembly, vacuum cavity, vacuum pump and air inlet subassembly. The casing is installed with door body I and door body II, is communicated with the ozone cleaning cavity and vacuum cavity that sets up respectively in the casing inside. The ozone cleaning cavity is provided with UV lamp assembly and cleaning platform subassembly. Vacuum cavity is provided with anode plate assembly. In the working condition, the article to be cleaned is placed on the bottom surface of the cleaning platform or vacuum cavity, and the article to be cleaned is cleaned through UV lamp or ion body. The utility model will be through the integration of ozone generation module and plasma generation module, adopt integrated cavity design, and the cleaning efficiency is high, effectively shortens technological process, avoids secondary pollution caused by intermediate transfer.

Description

Technical Field

[0001] This utility model relates to the field of cleaning machine technology, specifically an ozone and plasma composite cleaning machine. Background Technology

[0002] In modern industrial production and scientific research, surface cleaning technology is widely used in many fields such as semiconductor manufacturing, electronic component packaging, optical device processing, and biomedical devices. With the development of materials science and precision manufacturing technology, the requirements for surface cleanliness, surface activity, and microstructure modification are becoming increasingly stringent, and single-function cleaning technologies can no longer meet the diversified needs under complex working conditions.

[0003] Currently, ozone cleaning technology, with its strong oxidizing properties, has certain advantages in removing surface organic pollutants and decomposing residual organic matter. However, its ability to remove high-hardness pollutants is limited, and it suffers from insufficient cleaning uniformity when dealing with surfaces with complex geometries. Plasma cleaning technology, through the bombardment of high-energy plasma particles, can effectively achieve surface activation, etching, and fine processing, and is particularly suitable for surface modification and nanoscale cleaning. However, this technology is less efficient when dealing with large areas of organic pollutants, and the equipment operating costs are relatively high.

[0004] Most existing cleaning machines only have single ozone cleaning or plasma cleaning functions. When faced with scenarios that require the simultaneous removal of organic pollutants and surface activation treatment, multiple machines are often needed for step-by-step processing. This not only leads to a complicated process, large equipment footprint, and increased energy costs, but may also introduce secondary pollution during intermediate transfer, affecting the final cleaning effect. Utility Model Content

[0005] The purpose of this utility model is to provide an ozone and plasma composite cleaning machine, including a housing, door I, door II, gas flow meter, pressure gauge, ozone cleaning chamber, UV lamp assembly, cleaning platform assembly, vacuum chamber, vacuum pump, and air inlet assembly.

[0006] Door I and door II are installed on the cover.

[0007] The enclosure is equipped with an ozone cleaning chamber and a vacuum chamber.

[0008] The ozone cleaning chamber is located above the vacuum chamber.

[0009] The ozone cleaning chamber and the vacuum chamber are connected to the outside world through door I and door II, respectively.

[0010] The ozone cleaning chamber is equipped with a UV lamp assembly and a cleaning platform assembly. The cleaning platform assembly is located below the UV lamp assembly.

[0011] The cleaning platform assembly includes a cleaning platform, a cleaning platform bracket, and a slide rail. The cleaning platform is fixedly mounted on the cleaning platform bracket, and the cleaning platform bracket is slidably mounted on the slide rail via a slider. The slide rail is fixedly mounted at the bottom of the ozone cleaning chamber.

[0012] The UV lamp assembly includes a UV lamp holder and a UV lamp. The UV lamp is mounted on the UV lamp holder and located above the cleaning platform, and the UV lamp holder is fixed to the top of the ozone cleaning chamber.

[0013] An anode plate assembly is disposed within the vacuum chamber. The anode plate assembly includes an anode plate holder and an anode plate. The anode plate is fixed to the anode plate holder, which is fixed to the bottom of the vacuum chamber. The vacuum chamber is connected to a vacuum pump via a pipeline.

[0014] The vacuum chamber is connected to the air intake assembly, and each air intake branch of the air intake assembly is equipped with a gas flow meter.

[0015] Both the gas flow meter and the pressure gauge are mounted on the casing, and the pressure gauge's measuring end is connected to the vacuum chamber via a pipe.

[0016] In operation, the items to be cleaned are placed on the bottom surface of the cleaning platform or vacuum chamber.

[0017] Furthermore, the composite cleaning machine includes two operating modes.

[0018] Mode 1 is UV light cleaning, where the items to be cleaned are placed on the cleaning platform.

[0019] Mode 2 is plasma cleaning, where the items to be cleaned are placed on the bottom surface of the vacuum chamber.

[0020] Furthermore, the UV lamp assembly also includes a mirror cover plate, which is laid on the top surface of the oxygen cleaning chamber and located above the UV lamp.

[0021] Furthermore, one end of the UV lamp is fixed to the UV lamp bracket, while the other end is suspended in the air and located above the cleaning platform.

[0022] Furthermore, the anode plate is located inside the vacuum chamber, with one end fixed to the anode plate holder and the other end suspended in the air.

[0023] Furthermore, the air intake assembly is located inside the housing and includes air intake branch I, air intake branch II, a three-way valve, and a common pipe.

[0024] The two air inlets of the three-way valve are connected to air inlet branch I and air inlet branch II, respectively, and the air outlet is connected to a common pipeline. The common pipeline is connected to the vacuum chamber.

[0025] The gas flow meter is installed on inlet branch I and inlet branch II.

[0026] Furthermore, the composite cleaning machine also includes a negative pressure pump. The negative pressure pump is connected to the ozone cleaning chamber via a pipeline.

[0027] Furthermore, the cover is a box structure made of metal plate. The box includes a bottom plate, a front plate, a rear plate, side plate I and side plate II, and side plate I and side plate II are integrally formed with the front plate.

[0028] Furthermore, the front plate of the cover has several through holes, and the door body I, door body II, gas flow meter and pressure gauge are respectively installed at different through hole positions.

[0029] Furthermore, the composite cleaning machine also includes indicator lights, a control panel, a power switch, a 24V switching power supply, an independent power supply, and a PLC.

[0030] The 24V switching power supply, independent power supply, and PLC are all housed inside the enclosure.

[0031] The indicator lights, control panel, and power switch are all embedded in the housing and located on the same side panel as door I and door II.

[0032] The power switch is electrically connected to a 24V switching power supply.

[0033] The 24V switching power supply is electrically connected to the PLC.

[0034] The PLC is electrically connected to the indicator lights.

[0035] The PLC is connected to the control panel.

[0036] The control panel is electrically connected to an independent power supply.

[0037] The technical effects of this utility model are undeniable, and its beneficial effects are as follows:

[0038] 1. Functional integration: By integrating the ozone generation module and the plasma generation module, the advantages of the two cleaning technologies are complemented, resulting in a significant improvement in cleaning efficiency compared to a single technology.

[0039] 2. Compact structure and simplified process: The equipment adopts an integrated cavity design, eliminating the need for multiple devices to process in steps, reducing the equipment footprint by about 50%, shortening the process flow, and avoiding secondary pollution caused by intermediate transfer. Attached Figure Description

[0040] Figure 1 This is a schematic diagram of the overall structure of the ozone and plasma composite cleaning machine of this utility model;

[0041] Figure 2 This is a schematic diagram of the internal structure of the ozone cleaning chamber and vacuum chamber of this utility model;

[0042] Figure 3 This is a cross-sectional view of the ozone and plasma composite cleaning machine of this utility model;

[0043] Figure 4 This is a schematic diagram of the ozone and plasma composite cleaning machine when the door is open.

[0044] In the diagram: 1. Cover 1, 2. Door I, 3. Door II, 4. Indicator light, 5. Control panel, 6. Gas flow meter, 7. Pressure gauge, 8. Power switch, 9. Ozone cleaning chamber, 10. UV lamp assembly, 11. UV lamp bracket, 12. UV lamp, 13. Cleaning platform assembly, 14. Cleaning platform bracket, 15. Slide rail, 16. Vacuum chamber, 17. Anode plate assembly, 18. Anode plate holder, 19. Anode plate, 20. Vacuum pump, 21. Detailed Implementation

[0045] The present invention will be further described below with reference to embodiments, but it should not be construed as the scope of the present invention being limited to the following embodiments. Various substitutions and modifications made based on ordinary technical knowledge and conventional methods in the art without departing from the above-described technical concept of the present invention should be included within the protection scope of the present invention.

[0046] Example 1:

[0047] An ozone and plasma composite cleaning machine includes a housing 1, a door I2, a door II3, a gas flow meter 6, a pressure gauge 7, an ozone cleaning chamber 9, a UV lamp assembly 10, a cleaning platform assembly 13, a vacuum chamber 17, a vacuum pump 21, and an air inlet assembly.

[0048] Door I2 and door II3 are installed on the cover 1.

[0049] The housing 1 is equipped with an ozone cleaning chamber 9 and a vacuum chamber 17.

[0050] The ozone cleaning chamber 9 is located above the vacuum chamber 17.

[0051] The ozone cleaning chamber 9 and the vacuum chamber 17 are connected to the outside world through door I2 and door II3, respectively.

[0052] The ozone cleaning chamber 9 is equipped with a UV lamp assembly 10 and a cleaning platform assembly 13. The cleaning platform assembly 13 is located below the UV lamp assembly 10.

[0053] The cleaning platform assembly 13 includes a cleaning platform 14, a cleaning platform bracket 15, and a slide rail 16. The cleaning platform 14 is fixedly mounted on the cleaning platform bracket 15, and the cleaning platform bracket 15 is slidably mounted on the slide rail 16 via a slider. The slide rail 16 is fixedly mounted at the bottom of the ozone cleaning chamber 9.

[0054] The UV lamp assembly 10 includes a UV lamp bracket 11 and a UV lamp 12. The UV lamp 12 is mounted on the UV lamp bracket 11 and located above the cleaning platform 14. The UV lamp bracket 11 is fixed to the top of the ozone cleaning chamber 9.

[0055] An anode plate assembly 18 is disposed within the vacuum chamber 17. The anode plate assembly 18 includes an anode plate holder 19 and an anode plate 20. The anode plate 20 is fixed on the anode plate holder 19, and the anode plate holder 19 is fixed to the bottom of the vacuum chamber 17. The vacuum chamber 17 is connected to the vacuum pump 21 via a pipeline.

[0056] The vacuum chamber 17 is connected to the air intake assembly, and each air intake branch of the air intake assembly is equipped with a gas flow meter 6.

[0057] The gas flow meter 6 and the pressure gauge 7 are both mounted on the housing 1. The pressure gauge 7 is connected to the vacuum chamber 17 via a pipe.

[0058] In operation, the items to be cleaned are placed on the bottom surface of the cleaning platform 14 or the vacuum chamber 17.

[0059] Example 2:

[0060] The main structure of this embodiment is the same as that of Embodiment 1. Furthermore, the composite cleaning machine includes two working modes.

[0061] Mode 1 is UV light cleaning, where the items to be cleaned are placed on the cleaning platform 14.

[0062] Mode 2 is plasma cleaning, where the items to be cleaned are placed on the bottom surface of the vacuum chamber 17.

[0063] Example 3:

[0064] The main structure of this embodiment is the same as any one of embodiments 1 to 2. Furthermore, the UV lamp assembly 10 also includes a mirror cover plate, which is laid on the top surface of the oxygen cleaning chamber 9 and located above the UV lamp 12.

[0065] Example 4:

[0066] The main structure of this embodiment is the same as any one of embodiments 1 to 3. Furthermore, one end of the UV lamp 12 is fixed on the UV lamp bracket 11, and the other end is suspended and located above the cleaning platform 14.

[0067] The UV lamp 12 is electrically connected to the ballast, and the ballast is electrically connected to the power supply.

[0068] The power supply is used to power the UV lamp. It transmits electrical energy to the ballast, which then converts the electrical energy into a stable voltage required by the UV lamp, ultimately driving the UV lamp to start and work continuously.

[0069] Example 5:

[0070] The main structure of this embodiment is the same as any one of embodiments 1 to 4. Furthermore, the anode plate 20 is located inside the vacuum cavity 17, with one end fixed on the anode plate fixing frame 19 and the other end suspended in the air.

[0071] A unipolar pulse power supply is used to provide high-voltage electrical energy at a specific frequency to the anode plate 20 and is electrically connected to the anode plate 20.

[0072] Example 6:

[0073] The main structure of this embodiment is the same as any one of embodiments 1 to 5. Furthermore, the air intake assembly is located inside the housing 1 and includes air intake branch I, air intake branch II, a three-way valve and a common pipe.

[0074] The two air inlets of the three-way valve are connected to air inlet branch I and air inlet branch II, respectively, and the air outlet is connected to a common pipeline. The common pipeline is connected to the vacuum chamber 17.

[0075] The gas flow meter 6 is installed on the inlet branch I and the inlet branch II to measure the flow rate of the gas introduced, and the flow rate of the gas introduced is manually controlled according to the measured flow rate.

[0076] Example 7:

[0077] The main structure of this embodiment is the same as any one of embodiments 1 to 6. Furthermore, the composite cleaning machine also includes a negative pressure pump. The negative pressure pump is connected to the ozone cleaning chamber 9 via a pipeline.

[0078] Example 8:

[0079] The main structure of this embodiment is the same as any one of embodiments 1 to 7. Furthermore, the cover 1 is a box structure made of metal plate. The box includes a bottom plate, a front plate, a rear plate, a side plate I, and a side plate II, and the side plate I and the side plate II are integrally formed with the front plate.

[0080] Example 9:

[0081] The main structure of this embodiment is the same as that of embodiment 8. Furthermore, the front plate of the cover 1 is provided with several through holes, and the door body I2, door body II3, gas flow meter 6 and pressure gauge 7 are respectively installed at different through hole positions.

[0082] Example 10:

[0083] The main structure of this embodiment is the same as any one of embodiments 1 to 9. Furthermore, the composite cleaning machine also includes an indicator light 4, a control panel 5, a power switch 8, a 24V switching power supply, an independent power supply, a power supply, a ballast, a single-pole pulse power supply, relay I and relay II, and a PLC.

[0084] The 24V switching power supply, independent power supply, power supply, ballast, single-pole pulse power supply, relay I and relay II, and PLC are all housed inside the casing 1.

[0085] The indicator light 4, control panel 5, and power switch 8 are all embedded in the housing 1 and are located on the same side panel as door body I2 and door body II3.

[0086] The power switch 8 is electrically connected to a 24V switching power supply, and the power switch 8 controls the on / off state of the equipment circuit.

[0087] The 24V switching power supply is electrically connected to the PLC and is used to supply power to the PLC.

[0088] The PLC is connected to relay I and relay II respectively. By connecting or disconnecting the circuit through relay I and relay II, the two working modes can be controlled.

[0089] Relay I and relay II are respectively connected to the ballast and the unipolar pulse power supply.

[0090] The PLC is electrically connected to indicator light 4, and is used to supply power to indicator light 4 and transmit signals. Indicator light 4 is used to determine the operating status of the equipment, including three states: preheating, running, and stopped.

[0091] The control panel 5 is connected to the PLC via a pair of signal lines using the RS485 communication protocol, and is electrically connected to an independent power supply, which powers the control panel 5. The control panel 5 is used to control the operating status of the equipment, including setting operating parameters and cleaning time.

[0092] Example 11:

[0093] The main structure of this embodiment is the same as any one of embodiments 1 to 10. Furthermore, the composite cleaning machine includes two working modes.

[0094] Mode 1 is UV light cleaning:

[0095] When in use, open the door I2, place the items to be cleaned on the cleaning platform 14, and close the door I2.

[0096] During cleaning, the active oxygen generated by the UV lamp 12 irradiation oxidizes the organic matter on the surface of the item being cleaned, generating volatile gases that escape from the surface, thereby achieving the cleaning purpose.

[0097] Mode 2 is plasma cleaning:

[0098] When using, open door II3, place the item to be cleaned into vacuum chamber 17, and close door II3.

[0099] During cleaning, the vacuum chamber 17 is evacuated by an external vacuum pump 21. Then, process gas is introduced into the vacuum chamber 17 through a gas flow meter 6. A high-frequency high-voltage electric field is applied between the electrodes in the chamber through the anode plate assembly 18. Sufficient energy is applied to the process gas in the vacuum chamber 17 to ionize it into plasma. The generated plasma decomposes and carries away the contaminants on the sample surface, thereby achieving the purpose of cleaning.

[0100] The process gas is determined based on the customer's requirements for cleaning the objects, and is mainly an inert gas, such as argon, helium, neon, krypton, etc. If there are no special requirements, atmospheric gas can be introduced under normal circumstances.

[0101] During operation, the unipolar pulse power supply outputs a negative voltage to the anode plate assembly, resulting in a negative high voltage on the anode plate. This voltage is lower than the reference point (the reference point is ground, with a ground potential of 0). The composite cleaning machine casing is grounded and at equipotential. During operation, the vacuum chamber 17 generates a negative high-voltage electric field, ionizing the gas inside the chamber.

[0102] Example 12:

[0103] The main structure of this embodiment is the same as any one of embodiments 1 to 11. Furthermore, this utility model provides an ozone and plasma composite cleaning machine to solve the problems of existing single ozone or plasma cleaning machines having limited functions, low cleaning efficiency, complicated procedures, and poor equipment integration. It provides a composite cleaning device that can integrate ozone cleaning and plasma cleaning functions, achieve synergistic effect, and optimize equipment structure to meet the demand for efficient and multifunctional cleaning in complex surface treatment scenarios.

[0104] This utility model provides the following technical solution:

[0105] An ozone and plasma composite cleaning machine includes a cleaning machine housing and a vacuum chamber and an ozone cleaning chamber disposed within the housing.

[0106] The ozone cleaning chamber is located at the top of the vacuum chamber.

[0107] The vacuum chamber is equipped with an anode plate assembly, which includes an anode plate holder and an anode plate.

[0108] The rear of the vacuum chamber is connected to an external vacuum pump via a bellows. During operation, the vacuum pump evacuates the vacuum chamber.

[0109] The ozone cleaning chamber is equipped with a mirror cover at the top, and a UV lamp assembly is located under the mirror cover. The assembly includes a UV lamp and a UV lamp bracket.

[0110] The UV lamp assembly is provided with a cleaning platform assembly, which includes a cleaning platform and a support. The cleaning platform assembly is connected to the ozone cleaning chamber via a slider rail.

[0111] A negative pressure pump is connected to the outside of the ozone cleaning chamber. The negative pressure pump extracts the ozone generated by the ozone cleaning chamber when the equipment is working.

[0112] The outer shell has a door at the top and bottom of the left side of the front.

[0113] An indicator light and control panel are located on the upper right side of the front of the casing.

[0114] A gas flow meter, a pressure gauge, and a power switch are located on the lower right side of the front of the housing.

[0115] Example 13:

[0116] The main structure of this embodiment is the same as any one of embodiments 1 to 12. Further, see [link to embodiment 1]. Figure 1 Doors 2 and 3 are respectively provided at the top and bottom of the left side of the front of the cover 1. An indicator light 4 and a control panel 5 are provided at the top right side of the front of the cover 1. A gas flow meter 6, a pressure gauge 7 and a power switch 8 are provided at the bottom right side of the cover 1.

[0117] See Figure 2 The housing 1 contains an ozone cleaning chamber 9, and a UV lamp assembly 10 consisting of a UV lamp bracket 11 and a UV lamp 12 is installed inside the ozone cleaning chamber 9. The UV lamp 12 is fixed to the upper part of the ozone cleaning chamber 9 through the UV lamp bracket 11. Below the UV lamp assembly 10 is a cleaning platform assembly 13 consisting of a cleaning platform 14 and a cleaning platform bracket 15. The cleaning platform assembly 13 is connected to the ozone cleaning chamber 9 through a slider rail 16.

[0118] See Figure 2 The housing 1 has a vacuum chamber 17 inside, and the vacuum chamber 17 has an anode plate assembly 18, which consists of an anode plate fixing frame 19 and an anode plate 20.

[0119] The working principle and usage process of this utility model are as follows: When using UV light cleaning, open the door 2, place the items to be cleaned on the cleaning platform 14, and close the door 2. During cleaning, the active oxygen generated by the UV lamp 12 irradiates the organic matter on the surface of the items to be cleaned, causing volatile gases to escape from the surface, thereby achieving the cleaning purpose.

[0120] If plasma cleaning is used, open door 3, place the items to be cleaned inside vacuum chamber 17, and then close door 3. During cleaning, the vacuum chamber is evacuated using an external vacuum pump 21. Then, process gas is introduced into the chamber through gas flow meter 6. A high-frequency, high-voltage electric field is applied between the electrodes inside the chamber through anode plate assembly 18, applying sufficient energy to the gas inside vacuum chamber 17 to ionize it into plasma. The generated plasma decomposes and carries away contaminants on the sample surface, thereby achieving the cleaning purpose.

Claims

1. An ozone and plasma composite cleaning machine, characterized in that: Includes a housing (1), door I (2), door II (3), gas flow meter (6), pressure gauge (7), ozone cleaning chamber (9), UV lamp assembly (10), cleaning platform assembly (13), vacuum chamber (17), vacuum pump (21) and air intake assembly; Door I (2) and door II (3) are installed on the cover (1); The housing (1) is equipped with an ozone cleaning chamber (9) and a vacuum chamber (17) inside; The ozone cleaning chamber (9) is located above the vacuum chamber (17); The ozone cleaning chamber (9) and the vacuum chamber (17) are connected to the outside world through door I (2) and door II (3), respectively; The ozone cleaning chamber (9) is equipped with a UV lamp assembly (10) and a cleaning platform assembly (13); the cleaning platform assembly (13) is located below the UV lamp assembly (10); The cleaning platform assembly (13) includes a cleaning platform (14), a cleaning platform bracket (15), and a slide rail (16); the cleaning platform (14) is fixedly installed on the cleaning platform bracket (15), the cleaning platform bracket (15) is slidably installed on the slide rail (16) by a slider, and the slide rail (16) is fixedly installed at the bottom of the ozone cleaning chamber (9); The UV lamp assembly (10) includes a UV lamp bracket (11) and a UV lamp (12); the UV lamp (12) is mounted on the UV lamp bracket (11) and located above the cleaning platform (14); the UV lamp bracket (11) is fixed to the top of the ozone cleaning chamber (9). An anode plate assembly (18) is provided inside the vacuum chamber (17); the anode plate assembly (18) includes an anode plate holder (19) and an anode plate (20); the anode plate (20) is fixed on the anode plate holder (19), and the anode plate holder (19) is fixed to the bottom of the vacuum chamber (17); the vacuum chamber (17) is connected to the vacuum pump (21) through a pipe; The vacuum chamber (17) is connected to the air intake assembly, and a gas flow meter (6) is provided on each air intake branch of the air intake assembly; the gas flow meter (6) and the pressure gauge (7) are both installed on the cover (1), and the pressure measuring end of the pressure gauge (7) is connected to the vacuum chamber (17) through a pipe; In the working state, the items to be cleaned are placed on the bottom surface of the cleaning platform (14) or vacuum chamber (17).

2. The ozone and plasma composite cleaning machine according to claim 1, characterized in that: The composite cleaning machine includes two working modes; Mode 1 is UV light cleaning, where the items to be cleaned are placed on the cleaning platform (14); Mode 2 is plasma cleaning, where the items to be cleaned are placed on the bottom surface of the vacuum chamber (17).

3. The ozone and plasma composite cleaning machine according to claim 1, characterized in that: The UV lamp assembly (10) also includes a mirror cover plate, which is laid on the top surface of the oxygen cleaning chamber (9) and located above the UV lamp (12).

4. The ozone and plasma composite cleaning machine according to claim 1, characterized in that: One end of the UV lamp (12) is fixed on the UV lamp bracket (11), and the other end is suspended in the air and located above the cleaning platform (14).

5. The ozone and plasma composite cleaning machine according to claim 1, characterized in that: The anode plate (20) is located inside the vacuum cavity (17), with one end fixed on the anode plate holder (19) and the other end suspended in the air.

6. The ozone and plasma composite cleaning machine according to claim 1, characterized in that: The air intake assembly is located inside the housing (1) and includes air intake branch I, air intake branch II, a three-way valve and a common pipe; The two air inlets of the three-way valve are connected to air inlet branch I and air inlet branch II respectively, and the air outlet is connected to the common pipeline; the common pipeline is connected to the vacuum chamber (17); The gas flow meter (6) is installed on the inlet branch I and the inlet branch II.

7. The ozone and plasma composite cleaning machine according to claim 1, characterized in that: The composite cleaning machine also includes a negative pressure pump; the negative pressure pump is connected to the ozone cleaning chamber (9) via a pipeline.

8. The ozone and plasma composite cleaning machine according to claim 1, characterized in that: The cover (1) is a box structure made of metal plate. The box includes a bottom plate, a front plate, a rear plate, a side plate I and a side plate II, and the side plate I and the side plate II are integrally formed with the front plate.

9. The ozone and plasma composite cleaning machine according to claim 8, characterized in that: The front plate of the cover (1) has several through holes, and the door body I (2), door body II (3), gas flow meter (6) and pressure gauge (7) are respectively installed at different through hole positions.

10. The ozone and plasma composite cleaning machine according to claim 1, characterized in that: The composite cleaning machine also includes indicator lights (4), control panel (5), power switch (8), 24V switching power supply, independent power supply and PLC; The 24V switching power supply, independent power supply and PLC are all located inside the casing (1); The indicator light (4), control panel (5) and power switch (8) are all embedded in the housing (1) and are located on the same side panel as door I (2) and door II (3); The power switch (8) is electrically connected to a 24V switching power supply; The 24V switching power supply is electrically connected to the PLC; The PLC is electrically connected to the indicator light (4); The PLC is connected to the control panel (5) for communication. The control panel (5) is electrically connected to an independent power supply.

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