Wafer dicing machine worktable

Abstract

The utility model relates to wafer processing technical field discloses a wafer dicing machine workstation, including DD motor and the vacuum chuck rotating by DD motor drive, the vacuum chuck is fixedly connected with work disc on adsorption, the outer cover of DD motor is equipped with main waterproof cover arrangement, the clearance of work disc and vacuum chuck extrusion fills and is arranged with first sealing washer, the step groove is provided on the vacuum chuck, and waterproof cover is fixedly connected on the step groove, and the clearance of waterproof cover and step groove extrusion fills and is arranged with second sealing washer, and the seal cover is fixedly arranged on main waterproof cover and is located the below of waterproof cover. The utility model, work disc is adopted sealing washer in many places, ensure that the water vapor will not penetrate into DD motor, simultaneously, through the rotary cylinder drive compression plate auxiliary fixation, realize the further fixation of wafer workpiece's steel ring, reduce the condition that adsorbs and fixes unsteadily when the foreign matter or water vapor exists in work disc, guarantee the precision of workpiece processing.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing technology, specifically to a wafer dicing machine worktable. Background Technology

[0002] DD motors are high-precision, high-rigidity direct-drive motors primarily used in the semiconductor industry, precision testing and machining, medical device manufacturing, aerospace, photovoltaic and lithium battery manufacturing, CNC machine tools, and automotive manufacturing. In traditional DD motor worktables, during the cutting process, water is sprayed for cooling and cleaning, resulting in a small amount of moisture flowing into the DD motor, affecting transmission efficiency and subsequent positioning accuracy. Utility Model Content

[0003] To address the shortcomings of existing technologies, this utility model provides a wafer dicing machine worktable that solves the problem that moisture can easily penetrate the DD motor during the cutting process of existing DD motor worktables, affecting transmission efficiency and subsequent positioning accuracy.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A wafer dicing machine worktable includes a DD motor and a vacuum chuck driven by the DD motor to rotate. A work plate is fixedly connected to the vacuum chuck. A main waterproof cover is arranged around the DD motor. A first sealing ring is squeezed and filled in the gap between the work plate and the vacuum chuck. A stepped groove is provided on the vacuum chuck. A waterproof cover is fixedly connected to the stepped groove. A second sealing ring is squeezed and filled in the gap between the waterproof cover and the stepped groove. A sealing sleeve is fixedly arranged on the main waterproof cover and below the waterproof cover. A self-adhesive strip is provided on the outer circumference of the sealing sleeve. The self-adhesive strip is squeezed by the waterproof cover and tightly adheres to its inner sidewall.

[0006] Preferably, an insulating pad is fixedly connected to the DD motor, the insulating pad is fixedly connected to the working disc, an mounting ring is fixedly connected to the insulating pad, and a secondary waterproof cover is fixedly installed on the mounting ring. The diameter of the waterproof cover is larger than the diameter of the DD motor.

[0007] Preferably, the working disc and the insulating block, as well as the insulating block and the DD motor, are fixedly connected by bolts. A sealing ring is fitted on the bolt. After the bolt is installed and fixed, the sealing ring is compressed to seal the gap between the bolt hole and the bolt head.

[0008] Preferably, a plurality of rotary clamping assemblies are arranged radially on the working disc. Each rotary clamping assembly includes a clamping plate and a driving mechanism. Under the drive of the driving mechanism, the clamping plate rotates and clamps the steel ring magnetically fixed on the working disc.

[0009] Preferably, the driving mechanism includes a rotary cylinder or a drive motor, and the driving mechanism is fixedly mounted on the side of the vacuum suction cup by a mounting bracket, with a clamping plate fixedly disposed at the movable end of the rotary cylinder or the drive motor.

[0010] Preferably, the mounting bracket is provided with a receiving part for receiving the steel ring, and during operation, the clamping plate presses the steel ring located on the receiving part.

[0011] Preferably, a sliding platform is installed at the lower part of the DD motor, and the main waterproof cover is suspended and fixedly installed directly above the sliding platform.

[0012] This utility model has the following beneficial effects:

[0013] The wafer dicing machine's worktable, through its first sealing ring, ensures the stability of the vacuum chuck's adhesion to the worktable and guarantees a tight seal between them, preventing moisture from seeping into the vacuum chuck from its upper surface. The waterproof cover, second sealing ring, sealing sleeve, and self-adhesive strip ensure a tight seal between the vacuum chuck and the main waterproof cover, preventing escaping moisture from seeping into the DD motor's internal cavity through the gap between the main waterproof cover and the waterproof cover. Throughout its operation, the DD motor, with its multiple sealing measures, effectively prevents moisture intrusion, improving long-term operational stability, transmission accuracy, and efficiency. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the layout structure of the rotary clamping assembly of this utility model;

[0016] Figure 3 This is a side view of the structure of this utility model;

[0017] Figure 4 This utility model Figure 3 Schematic diagram of the cross-section along the AA direction;

[0018] Figure 5 This is a schematic diagram showing the disassembled structure of the main components of this utility model;

[0019] Figure 6 This utility model Figure 4 A magnified structural diagram of region A in the middle.

[0020] In the diagram: 1. Sliding table; 2. DD motor; 3. Insulating pad; 4. Vacuum suction cup; 41. First sealing ring; 5. Working plate; 6. Mounting bracket; 61. Rotary cylinder; 62. Pressing plate; 7. Waterproof cover; 8. Second sealing ring; 9. Sealing sleeve; 10. Self-adhesive strip; 11. Main waterproof cover; 12. Mounting ring; 13. Secondary waterproof cover. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Example 1

[0023] A wafer dicing machine worktable includes a DD motor 2 and a vacuum chuck 4 driven by the DD motor 2 to rotate. A work plate 5 is fixedly connected to the vacuum chuck 4. A main waterproof cover 11 is arranged around the DD motor 2. A first sealing ring 41 is squeezed and filled in the gap between the work plate 5 and the vacuum chuck 4. A stepped groove is provided on the vacuum chuck 4. A waterproof cover 7 is fixedly connected to the stepped groove. A second sealing ring 8 is squeezed and filled in the gap between the waterproof cover 7 and the stepped groove. A sealing sleeve 9 is fixedly provided on the main waterproof cover 11 and below the waterproof cover 7. A self-adhesive strip 10 is provided on the outer circumference of the sealing sleeve 9. The self-adhesive strip 10 is squeezed by the waterproof cover 7 and tightly adheres to its inner sidewall.

[0024] Specifically, such as Figure 3 , Figure 4 and Figure 6 As shown, in this technical solution, the first sealing ring 41 ensures the stability of the vacuum suction cup 4 and the working plate 5 during adsorption and installation, as well as the sealing effect between them, preventing water vapor from seeping into the interior of the vacuum suction cup 4 from the upper surface. The waterproof cover 7, the second sealing ring 8, the sealing sleeve 9, and the self-adhesive strip 10 ensure the sealing performance between the vacuum suction cup 4 and the main waterproof cover 11, preventing the escaped water vapor from seeping into the inner cavity of the DD motor 2 from the gap between the main waterproof cover 11 and the waterproof cover 7.

[0025] Specifically, the second sealing ring 8 installed at the stepped groove ensures the sealing effect between the waterproof cover 7 and the vacuum suction cup 4; the sealing sleeve 9 and the self-adhesive strip 10 ensure the sealing performance between the waterproof cover 7 and the main waterproof cover 11. The self-adhesive strip 10 (also known as a self-adhesive sealing strip or door and window windproof strip) is a functional sealing material widely used in doors, windows, furniture, and transportation vehicles. Its core function is to reduce gaps and block external environmental interference through flexible sealing. Throughout the application of the DD motor 2, the multiple sealing measures effectively prevent water vapor infiltration, improve the stability of long-term operation, and enhance transmission accuracy and efficiency.

[0026] like Figure 3 and Figure 6As shown in the diagram, in this technical solution, an insulating pad 3 is fixedly connected to the DD motor 2. The insulating pad 3 is fixedly connected to the working disc 5. A mounting ring 12 is fixedly connected to the insulating pad 3, and a secondary waterproof cover 13 is fixedly installed on the mounting ring 12. The diameter of the waterproof cover is larger than the diameter of the DD motor 2. After the main waterproof cover 11 covers the main body of the DD motor 2, the secondary waterproof cover 13 can further prevent cutting water from splashing onto the DD motor 2, effectively preventing water droplets from seeping into the interior of the DD motor 2.

[0027] The working disc 5 and the insulating block, as well as the insulating block and the DD motor 2, are all fixedly connected by bolts. Sealing rings are fitted onto the bolts. After the bolts are installed and fixed, the sealing rings are compressed to seal the gap between the bolt hole and the bolt head. Specifically, as shown... Figure 5 As shown.

[0028] In this technical solution, by filling the mounting holes between the bolts and various components with sealing rings, the sealing performance of the mounting connection of the working disc 5, the insulating block and the DD motor 2 can be guaranteed, and water vapor can be prevented from seeping in due to the installation gap.

[0029] Example 2

[0030] Multiple rotary clamping assemblies are arranged radially on the working disc 5. Each rotary clamping assembly includes a clamping plate 62 and a drive mechanism. Under the drive mechanism, the clamping plate 62 rotates and clamps the steel ring magnetically fixed on the working disc 5.

[0031] See Figure 1 and Figure 2 As shown, in this technical solution, after the steel ring containing the wafer workpiece is magnetically attracted to the working plate 5, the clamping plate 62 can rotate under the drive mechanism to clamp the edge of the steel ring, further ensuring the stability of the steel ring and the wafer inside, ensuring the flatness of the wafer workpiece after clamping and fixing, and ensuring cutting accuracy. Here, the clamping plate 62 is driven by rotational motion to clamp the steel ring, ensuring that the clamping plate will not interfere with the feeding of the steel ring containing the wafer to the working plate 5 when not in operation. At the same time, this driving method has fewer driving and actuating components, resulting in lower manufacturing costs.

[0032] The drive mechanism includes a rotary cylinder 61 or a drive motor. The drive mechanism is fixedly mounted on the side of the vacuum suction cup 4 via a mounting bracket 6, and a clamping plate 62 is fixedly disposed at the movable end of the rotary cylinder 61 or the drive motor. In this technical solution, by applying a standard rotary cylinder 61 and a drive motor (usually a servo motor), it is convenient to purchase and maintain the parts after they are damaged, avoiding the situation in conventional designs where a non-standard drive mechanism requires the manufacturer to dispatch a specialist for maintenance after damage.

[0033] To ensure the stability of the steel ring clamping, this technical solution includes a receiving part on the mounting bracket 6 to support the steel ring. During operation, the clamping plate 62 presses the steel ring located on the receiving part. See details below. Figure 2 As shown, this ensures the stability of the steel ring clamping and also prevents the pressure plate 62 from squeezing the working disc 5, which would cause the working disc 5 to deform easily after long-term use.

[0034] A sliding platform 1 is mounted on the lower part of the DD motor 2, and the main waterproof cover 11 is suspended and fixedly mounted directly above the sliding platform 1. Figure 5 As shown, the sliding table 1 can be used in conjunction with the corresponding linear drive module to enable the sliding table 1 and the vacuum suction cup 4 and working plate 5 on it to move linearly, so as to reasonably arrange the cutting station and the feeding station and make efficient use of the space inside the entire dicing machine.

[0035] Existing air-float DD motor workpiece clamping devices typically utilize a magnetic worktable to attract and hold a steel ring, thereby securing the wafer workpiece adhered to the steel ring. However, the presence of magnetic powder and moisture on the worktable surface can affect the fixation effect on the steel ring containing the wafer workpiece. In this embodiment,

[0036] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, the phrase "comprising an element defined as..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wafer dicing machine stage, comprising a DD motor and a vacuum chuck rotated by the DD motor, characterized in that, A working disc is fixedly connected to the vacuum suction cup. A main waterproof cover is arranged around the DD motor. A first sealing ring is squeezed and filled in the gap between the working disc and the vacuum suction cup. A stepped groove is provided on the vacuum suction cup. A waterproof cover is fixedly connected to the stepped groove. A second sealing ring is squeezed and filled in the gap between the waterproof cover and the stepped groove. A sealing sleeve is fixedly provided on the main waterproof cover and below the waterproof cover. A self-adhesive strip is provided on the outer circumference of the sealing sleeve. The self-adhesive strip is squeezed by the waterproof cover and tightly adheres to its inner sidewall.

2. The wafer dicing machine worktable according to claim 1, characterized in that: An insulating pad is fixedly connected to the DD motor. The insulating pad is fixedly connected to the working disc. A mounting ring is fixedly connected to the insulating pad. An auxiliary waterproof cover is fixedly installed on the mounting ring. The diameter of the waterproof cover is larger than the diameter of the DD motor.

3. The wafer dicing machine worktable according to claim 2, characterized in that: The working disc and the insulating block, as well as the insulating block and the DD motor, are all fixedly connected by bolts. A sealing ring is fitted on the bolt. After the bolt is installed and fixed, the sealing ring is compressed to seal the gap between the bolt hole and the bolt head.

4. The wafer dicing machine worktable according to any one of claims 1-3, characterized in that: Multiple rotary clamping assemblies are arranged radially on the working disc. Each rotary clamping assembly includes a clamping plate and a driving mechanism. Under the drive of the driving mechanism, the clamping plate rotates and clamps the steel ring magnetically fixed on the working disc.

5. The wafer dicing machine worktable according to claim 4, characterized in that: The drive mechanism includes a rotary cylinder or a drive motor. The drive mechanism is fixedly mounted on the side of the vacuum suction cup by a mounting bracket, and the clamping plate is fixedly mounted on the movable end of the rotary cylinder or the drive motor.

6. The wafer dicing machine worktable according to claim 5, characterized in that: The mounting frame is provided with a receiving part for receiving the steel ring. During operation, the clamping plate presses the steel ring located on the receiving part.

7. The wafer dicing machine worktable according to claim 4, characterized in that: A sliding platform is installed at the lower part of the DD motor, and the main waterproof cover is suspended and fixedly installed directly above the sliding platform.

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