A semiconductor growth furnace quartz tube mounting structure

Abstract

The utility model relates to technical field of semiconductor growth furnace, and disclose a kind of semiconductor growth furnace quartz tube mounting structure, including the first quartz tube for constituting semiconductor growth furnace, first quartz tube side is equipped with second quartz tube;First quartz tube bottom is connected with furnace chamber;Connecting assembly is equipped between first quartz tube and second quartz tube, and connecting assembly is used to provide orientation when first quartz tube and second quartz tube are installed;In installation process, due to the cooperation of guide rod and sliding slot, second quartz tube can be accurately sleeved outside first quartz tube, so that first quartz tube and second quartz tube can be in concentric state, and installation personnel need not additionally adjust concentric position, greatly facilitate the installation work of first quartz tube and second quartz tube, first quartz tube and second quartz tube only need one operator when installing, and can be efficiently completed, greatly save manpower cost.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor growth furnace technology, specifically to a quartz tube mounting structure for a semiconductor growth furnace. Background Technology

[0002] In semiconductor growth furnaces, the quartz tube is one of the key components, providing the necessary reaction space and thermal environment for the growth of semiconductor materials. Typically, semiconductor growth furnaces use two quartz tubes, namely the first quartz tube and the second quartz tube. The second quartz tube needs to be fitted over the first quartz tube to form a specific reaction chamber structure.

[0003] The existing installation process for quartz tubes in semiconductor growth furnaces presents numerous inconveniences and problems. Traditional installation methods lack effective guiding devices. When fitting the second quartz tube onto the outside of the first quartz tube, installers find it difficult to ensure the two tubes are concentric. Due to the lack of guidance, installers must rely on experience and visual observation to continuously adjust the position of the second quartz tube to ensure concentricity with the first tube. This requires a high level of skill from the installers and is a cumbersome process. Therefore, a new quartz tube installation structure for semiconductor growth furnaces is proposed. Utility Model Content

[0004] The purpose of this invention is to provide a quartz tube mounting structure for a semiconductor growth furnace to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a quartz tube mounting structure for a semiconductor growth furnace, comprising a first quartz tube for forming a semiconductor growth furnace, wherein a second quartz tube is provided on one side of the first quartz tube; The bottom of the first quartz tube is connected to a furnace chamber; A connecting component is provided between the first quartz tube and the second quartz tube, the connecting component being used to provide guidance during the installation of the first quartz tube and the second quartz tube; The second quartz tube is fitted with a first limiting ring and a second limiting ring on its outer side, and a silicone layer is fixed on the inner wall of the first limiting ring and the second limiting ring. The connecting assembly includes two connecting plates and a base plate. A connecting seat is fixed to the top of the base plate by bolts, and a guide rod is fixed to the top of the connecting seat by threads. A groove is provided on one side of the connecting plate.

[0006] Preferably, one side of the silicone layer is attached to the outside of the second quartz tube.

[0007] Preferably, the first limiting ring and the second limiting ring are C-shaped, and ear plates are fixed on both sides of the first limiting ring and the second limiting ring.

[0008] Preferably, the ear plates are connected by bolts and nuts, and a lifting ring is installed on one side of each ear plate for lifting the second quartz tube.

[0009] Preferably, the guide rod is adapted to the inner side of the groove, and the guide rod is cylindrical in shape.

[0010] Preferably, as described above, when the two connecting plates slide downward along the guide rod, the second quartz tube is sleeved on the outside of the first quartz tube.

[0011] Preferably, the two connecting plates are fixed to the bottom of the first limiting ring and the second limiting ring respectively, and the two connecting plates are arranged opposite to each other, and the two bottom plates are fixed to the bottom sides of the furnace chamber.

[0012] Compared with the prior art, the present invention, by adopting the above technical solution, has the following technical effects: First, during installation, the guide rod and the sliding groove work together to guide the second quartz tube to be accurately fitted onto the outside of the first quartz tube, so that the first and second quartz tubes are in a concentric state. No additional adjustment of the concentric position is required by the installer, which greatly facilitates the installation of the first and second quartz tubes. Only one operator is needed to complete the installation of the first and second quartz tubes efficiently, which greatly saves labor costs.

[0013] Second, by designing the first and second limiting rings as C-shaped, they can be easily and conveniently fitted onto the outside of the second quartz tube, reducing the difficulty of installation. The silicone layer increases the friction between the first and second limiting rings and the second quartz tube. The silicone layer forms a stable friction interface between the limiting rings and the quartz tube, effectively resisting interference from external factors and preventing the limiting rings from loosening during use. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the main structure of this utility model; Figure 2 This is a schematic diagram of the furnace chamber structure of this utility model; Figure 3 This is a schematic diagram of the connecting seat structure of this utility model; Figure 4This is a schematic diagram of the connecting plate structure of this utility model; Figure 5 This is a schematic diagram of the structure of the silicone layer in this utility model; Figure 6 This is a schematic diagram of the lifting ring structure of this utility model.

[0016] Explanation of reference numerals in the attached drawings: 1. First quartz tube; 2. Second quartz tube; 3. Connecting assembly; 31. Guide rod; 32. Connecting plate; 33. Connecting seat; 34. Base plate; 4. First limiting ring; 5. Second limiting ring; 6. Furnace chamber; 7. Lifting ring; 8. Silicone layer. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] It should be noted that the structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

[0019] Example Please see Figure 1-6 This utility model provides a technical solution: a quartz tube installation structure for a semiconductor growth furnace, including a first quartz tube 1 for forming the semiconductor growth furnace, and a second quartz tube 2 on one side of the first quartz tube 1; when the second quartz tube 2 moves to the bottom, it moves down slowly to avoid breakage; the bottom of the first quartz tube 1 is connected to a furnace chamber 6, and the bottom of the first quartz tube 1 is fixed to the top interface of the furnace chamber 6 to ensure a sealed connection between the furnace chamber 6 and the first quartz tube 1. The second quartz tube 2 is suspended on an external hoisting device by a lifting ring 7, ready to be sleeved onto the outside of the first quartz tube 1; A connecting component 3 is provided between the first quartz tube 1 and the second quartz tube 2. The connecting component 3 is used to provide guidance during the installation of the first quartz tube 1 and the second quartz tube 2. A first limiting ring 4 and a second limiting ring 5 are sleeved on the outside of the second quartz tube 2. A silicone layer 8 is fixed on the inner wall of the first limiting ring 4 and the second limiting ring 5. The connecting assembly 3 includes two connecting plates 32 and a base plate 34. A connecting seat 33 is fixed to the top of the base plate 34 by bolts, and a guide rod 31 is fixed to the top of the connecting seat 33 by threads. The height of the guide rod 31 is higher than the top of the first quartz tube 1. A sliding groove is opened on one side of the connecting plate 32. The cooperation between the guide rod 31 and the sliding groove forcibly constrains the movement trajectory of the second quartz tube 2, ensuring that it remains concentric with the first quartz tube 1 without the need for manual adjustment. When the connecting plate 32 slides to the bottom of the sliding groove, the second quartz tube 2 is completely sleeved on the outside of the first quartz tube 1.

[0020] One side of the silicone layer 8 is attached to the outside of the second quartz tube 2. The first limiting ring 4 and the second limiting ring 5 are C-shaped. Ear plates are fixed on both sides of the first limiting ring 4 and the second limiting ring 5. The ear plates are connected by bolts and nuts. The nuts are anti-loosening nuts. A lifting ring 7 is installed on one side of the ear plate. The lifting ring 7 is used to lift the second quartz tube 2. The first limiting ring 4 and the second limiting ring 5 are C-shaped and are tightly clamped to the outside of the second quartz tube 2 by the ear plates, bolts and nuts. The silicone layer 8 is attached to the inner wall of the limiting ring and contacts the outer surface of the second quartz tube 2 to provide a buffer seal and prevent slippage. The second quartz tube 2 is lifted by the lifting ring 7, so that the two connecting plates 32 slide downward along the guide rod 31.

[0021] The guide rod 31 is fitted into the inner side of the chute. The guide rod 31 is cylindrical. Two connecting plates 32 are fixed to the bottom of the first limiting ring 4 and the second limiting ring 5 respectively, and are arranged opposite to each other. The base plate 34 is fixed to both sides of the bottom of the furnace chamber 6 by bolts. The connecting seat 33 vertically fixes the guide rod 31 to the top of the base plate 34. The guide rod 31 is cylindrical and fits into the chute of the connecting plate 32.

[0022] When the two connecting plates 32 slide down along the guide rod 31, the second quartz tube 2 is sleeved on the outside of the first quartz tube 1. With the cooperation of the guide rod 31 and the sliding groove of the connecting plate 32, the first quartz tube 1 and the second quartz tube 2 are in a concentric state. There is no need to adjust the concentric position during this period, which facilitates the installation of the first quartz tube 1 and the second quartz tube 2. The two connecting plates 32 are respectively fixed to the bottom of the first limiting ring 4 and the second limiting ring 5, and the two connecting plates 32 are arranged opposite to each other. The two bottom plates 34 are fixed to the bottom sides of the furnace chamber 6.

[0023] Working principle: During installation, the second quartz tube 2 is lifted using the lifting ring 7, and then the two connecting plates 32 slide downwards along the guide rod 31. During this process, due to the cooperation between the guide rod 31 and the sliding groove, the second quartz tube 2 can be accurately fitted onto the outside of the first quartz tube 1, and the first quartz tube 1 and the second quartz tube 2 are in a concentric state. No additional adjustment of the concentric position is required by the installer, which greatly facilitates the installation of the first quartz tube 1 and the second quartz tube 2. The installation of the first quartz tube 1 and the second quartz tube 2 can be completed efficiently by only one operator, which greatly saves labor and time costs.

[0024] The first limiting ring 4 and the second limiting ring 5 are C-shaped, which facilitates their fitting onto the outside of the second quartz tube 2. Both sides of the first limiting ring 4 and the second limiting ring 5 are fixed with ear plates, which are connected by bolts and nuts. The nuts are anti-loosening nuts, and the friction with the second quartz tube 2 is increased by the silicone layer 8, ensuring that the first limiting ring 4 and the second limiting ring 5 are firmly fixed on the second quartz tube 2, preventing loosening or falling off during use.

[0025] In summary, during the installation process, the guide rod 31, in cooperation with the sliding groove, can guide the second quartz tube 2 to be accurately fitted onto the outside of the first quartz tube 1, ensuring that the first quartz tube 1 and the second quartz tube 2 are in a concentric state. This eliminates the need for additional adjustments to the concentric position by the installer, greatly facilitating the installation of the first quartz tube 1 and the second quartz tube 2. The installation of the first quartz tube 1 and the second quartz tube 2 can be completed efficiently by only one operator, significantly saving labor costs.

[0026] The C-shaped design of the first limiting ring 4 and the second limiting ring 5 allows them to be easily and conveniently fitted onto the outside of the second quartz tube 2, reducing the difficulty of installation. The silicone layer 8 increases the friction between the first limiting ring 4, the second limiting ring 5 and the second quartz tube 2. The silicone layer 8 forms a stable friction interface between the limiting ring and the quartz tube, effectively resisting interference from external factors and preventing the limiting ring from loosening during use.

[0027] Those skilled in the art will understand that the features described in the various embodiments and / or claims of this utility model can be combined or combined in various ways, even if such combinations or combinations are not explicitly described in this utility model. In particular, the features described in the various embodiments and / or claims of this utility model can be combined or combined in various ways without departing from the spirit and teachings of this utility model. All such combinations and / or combinations fall within the scope of this utility model.

Claims

1. A quartz tube mounting structure for a semiconductor growth furnace, comprising a first quartz tube (1) for assembling the semiconductor growth furnace, characterized in that, A second quartz tube (2) is provided on one side of the first quartz tube (1); The bottom of the first quartz tube (1) is connected to a furnace chamber (6); A connecting component (3) is provided between the first quartz tube (1) and the second quartz tube (2), the connecting component (3) being used to provide guidance during the installation of the first quartz tube (1) and the second quartz tube (2); The second quartz tube (2) is fitted with a first limiting ring (4) and a second limiting ring (5) on the outside, and a silicone layer (8) is fixed on the inner wall of the first limiting ring (4) and the second limiting ring (5); The connecting assembly (3) includes two connecting plates (32) and a base plate (34). A connecting seat (33) is fixed to the top of the base plate (34) by bolts, and a guide rod (31) is fixed to the top of the connecting seat (33) by threads. A groove is provided on one side of the connecting plate (32).

2. The quartz tube mounting structure for a semiconductor growth furnace according to claim 1, characterized in that, One side of the silicone layer (8) is attached to the outside of the second quartz tube (2).

3. The quartz tube mounting structure for a semiconductor growth furnace according to claim 1, characterized in that, The first limiting ring (4) and the second limiting ring (5) are C-shaped, and ear plates are fixed on both sides of the first limiting ring (4) and the second limiting ring (5).

4. The quartz tube mounting structure for a semiconductor growth furnace according to claim 3, characterized in that, The ear plates are connected by bolts and nuts, and a lifting ring (7) is installed on one side of the ear plate. The lifting ring (7) is used to lift the second quartz tube (2).

5. The quartz tube mounting structure for a semiconductor growth furnace according to claim 4, characterized in that, The guide rod (31) is adapted to the inner side of the groove, and the guide rod (31) is cylindrical in shape.

6. The quartz tube mounting structure for a semiconductor growth furnace according to claim 1, characterized in that, When the two connecting plates (32) slide down along the guide rod (31), the second quartz tube (2) is sleeved on the outside of the first quartz tube (1).

7. The quartz tube mounting structure for a semiconductor growth furnace according to claim 1, characterized in that, The two connecting plates (32) are respectively fixed to the bottom of the first limiting ring (4) and the second limiting ring (5), and the two connecting plates (32) are arranged opposite to each other. The two bottom plates (34) are fixed to the bottom sides of the furnace chamber (6).

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