Valves and vacuum equipment

Abstract

The utility model belongs to the field of semiconductor processing technology discloses valve and vacuum equipment, the drive assembly of valve includes: transverse drive mechanism and longitudinal drive mechanism are connected in main shaft, longitudinal drive mechanism drives main shaft to lift along first direction, transverse drive mechanism drives main shaft to reciprocate along second direction, driving piece is drivenly connected in longitudinal drive mechanism and transverse drive mechanism through limiting mechanism, limiting mechanism is configured as the same time as the vertical height of valve plate and the height of export restricts longitudinal drive mechanism, to make longitudinal drive mechanism and transverse drive mechanism act in turn;Main shaft and transverse drive mechanism between setting up there is restraint mechanism, and the restraint mechanism includes installation groove and restraint piece, and restraint piece is restrictively connected in installation groove along first direction, and restraint piece can reciprocate along second direction.The utility model discloses valve can keep the cleanliness of reaction chamber, improves the running stability, is favorable for reducing the production cost and assembly difficulty of vacuum equipment, and promotes the technological performance.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to valves and vacuum equipment. Background Technology

[0002] Wafer coating refers to the technique of covering the surface of a wafer with one or more thin films to improve its electrical, optical, or mechanical properties. Wafer coating needs to be completed within a vacuum chamber. To ensure the process effect, a valve is installed at the opening of the chamber to isolate the vacuum chamber from the atmospheric environment. The valve must operate smoothly without generating contaminants during its operation. The valve achieves the closing and opening of the chamber opening through an L-shaped running trajectory, formed by lateral translation and longitudinal lifting, with the lateral translation and longitudinal lifting moving in different directions. Existing technology provides a valve with a lateral cylinder and a longitudinal cylinder. The lateral cylinder achieves lateral translation of the valve, and the longitudinal cylinder achieves longitudinal lifting. The lateral cylinder is located on one side of the back of the valve plate, and the lateral movement of the valve plate is achieved by the action of the piston rod of the lateral cylinder. The lateral cylinder is close to the chamber opening, and oil vapors volatilized during operation can easily enter the chamber, causing wafer contamination. Another type of valve has a horizontal cylinder located at the bottom of the valve stem. The horizontal cylinder moves up and down with the valve stem. The piston rod of the horizontal cylinder pushes the valve stem to drive the valve plate to move laterally and abut against the cavity to close the opening. This type of valve has a complex structure, higher processing cost, and slightly poorer movement stability. Utility Model Content

[0003] One objective of this invention is to provide a valve that can solve the problems of existing valves being prone to chip contamination due to oil and gas volatilization from the transverse cylinder, or the complex equipment structure, high processing cost, and slightly poor motion stability caused by unreasonable transverse cylinder arrangement.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] A valve is provided, including a valve plate and a main shaft. The valve plate is used to close the outlet of a reaction chamber, and one end of the main shaft is connected to the valve plate. The valve further includes:

[0006] A drive assembly includes a drive component, a transverse drive mechanism, and a longitudinal drive mechanism. Both the transverse drive mechanism and the longitudinal drive mechanism are connected to the main shaft. The longitudinal drive mechanism drives the main shaft to move up and down in a first direction, and the transverse drive mechanism drives the main shaft to reciprocate in a second direction. The output end of the drive component is connected to the longitudinal drive mechanism and the transverse drive mechanism via a limiting mechanism. The limiting mechanism is configured to constrain the longitudinal drive mechanism when the vertical height of the valve plate is the same as the outlet, so that the longitudinal drive mechanism and the transverse drive mechanism operate sequentially.

[0007] Wherein, the first direction and the second direction are set at an angle, and a constraint mechanism is provided between the main shaft and the longitudinal drive mechanism. The constraint mechanism includes a mounting groove and a constraint member. The constraint member is constrained and connected in the mounting groove along the first direction, and the constraint member can reciprocate along the second direction. One of the mounting groove and the constraint member is provided in the main shaft, and the other is provided in the longitudinal drive mechanism.

[0008] In one embodiment, the valve further includes a mounting base, the driving component is a cylinder, the cylinder is disposed on the mounting base, the limiting mechanism includes a limiting member and an elastic member, the limiting member is disposed on the mounting base, the piston rod of the cylinder is axially movable through the longitudinal driving mechanism and connected to the transverse driving mechanism, one end of the elastic member is connected to the piston rod, and the other end is connected to the longitudinal driving mechanism, the elastic member has a supported state and a compressed state, the elastic member in the supported state is configured to drive the longitudinal driving mechanism to move up and down synchronously, and the limiting member is configured to abut against and limit the longitudinal driving mechanism so that the elastic member switches between the supported state and the compressed state.

[0009] In one embodiment, the elastic element is a compression spring, which is sleeved around the piston rod; and / or,

[0010] The limiting mechanism further includes a limiting protrusion ring, which is disposed at one end of the piston rod and spaced apart from the limiting member along the first direction. The end of the elastic member away from the longitudinal driving mechanism is connected to the limiting protrusion ring; and / or,

[0011] The drive unit also includes an extension rod, the length of which extends along the first direction, and the extension rod is detachably connected to the end of the piston rod.

[0012] In one embodiment, the longitudinal drive mechanism includes a longitudinal mounting plate and a longitudinal connecting plate, one end of the longitudinal connecting plate is connected to the longitudinal mounting plate, the mounting groove is formed in the longitudinal connecting plate, and the constraint member is connected to the spindle;

[0013] The longitudinal connecting plate is also provided with a first mounting hole, which is connected to the mounting groove. The main shaft is reciprocally inserted into the first mounting hole along the second direction. The longitudinal mounting plate is provided with a second mounting hole, and the piston rod is axially movable and connected to the second mounting hole. The longitudinal mounting plate is connected to one end of the elastic member, and the longitudinal mounting plate can abut against the limiting member.

[0014] In one embodiment, the longitudinal drive mechanism is provided with two longitudinal mounting plates, which are respectively connected to both sides of the longitudinal connecting plate. The drive assembly is provided with two cylinders and two sets of limiting mechanisms, with each set of limiting mechanisms corresponding to one of the two cylinders. The two cylinders are respectively located on both sides of the main shaft, and each cylinder drives one of the two longitudinal mounting plates; and / or,

[0015] The constraint member is a roller rod, the axis of which is perpendicular to the main shaft, and the roller rod is rotatably connected to the main shaft about its own axis.

[0016] In one embodiment, the lateral drive mechanism includes a first guide member, and the main shaft is provided with a second guide member. One of the first guide member and the second guide member has a guide groove, and the other has a guide slider. The guide groove extends along a third direction, and the guide slider is slidably connected to the guide groove. The angle between the third direction and the first direction, and the angle between the third direction and the second direction are both acute angles. The first guide member is connected to the piston rod, and the second guide member is connected to the main shaft.

[0017] In one embodiment, the drive component further includes an extension rod extending along the first direction and detachably connected to the end of the piston rod; the drive assembly further includes a mounting bushing detachably connected to the extension rod, the mounting bushing having limit bosses at both ends, the first guide having a third mounting hole through which the mounting bushing passes, and the first guide being engaged between the two limit bosses, the mounting bushing being configured to abut against the longitudinal drive mechanism to simultaneously raise and lower the longitudinal drive mechanism and the transverse drive mechanism.

[0018] In one embodiment, the lateral drive mechanism includes two first guide members, the main shaft is provided with two second guide members, the two first guide members and the two second guide members correspond one-to-one, the drive assembly is provided with two cylinders, the two cylinders are respectively located on both sides of the main shaft, and the two cylinders respectively drive the two first guide members.

[0019] In one embodiment, the valve further includes a spindle fixing component, which is fitted onto the spindle, and two second guide components are respectively fixedly connected to both sides of the spindle fixing component.

[0020] Another objective of this invention is to provide a vacuum device with a valve that can solve the problems of existing valves being prone to wafer contamination due to oil and gas volatilization from the transverse cylinder, or the complex structure, high processing cost, and slightly poor motion stability caused by unreasonable transverse cylinder placement. This improves the process performance of the vacuum device and reduces production costs.

[0021] To achieve this objective, the present invention employs the following technical solution in another aspect:

[0022] A vacuum device is provided, including the valves described above, and a reaction chamber, the valves being used to close the outlet of the reaction chamber.

[0023] The beneficial effects of this utility model are:

[0024] The valve provided by this utility model includes a drive assembly. Both the transverse drive mechanism and the longitudinal drive mechanism of the drive assembly are connected to a main shaft. The longitudinal drive mechanism drives the main shaft to move up and down in a first direction, and the transverse drive mechanism drives the main shaft to reciprocate in a second direction. The output end of the drive assembly is connected to the longitudinal drive mechanism and the transverse drive mechanism via a limiting mechanism. The limiting mechanism is configured to constrain the longitudinal drive mechanism when the vertical height of the valve plate is the same as the outlet, so that the longitudinal drive mechanism and the transverse drive mechanism operate sequentially. The first direction and the second direction are set at an angle, with the first direction being vertical and the second direction being horizontal. Under the limiting constraint of the limiting mechanism, the lateral drive mechanism and the longitudinal drive mechanism act sequentially. The lateral drive mechanism drives the main shaft to move the valve plate horizontally, closing or opening the outlet of the reaction chamber. The longitudinal drive mechanism drives the main shaft to move the valve plate vertically, moving it closer to or away from the reaction chamber. The L-shaped movement trajectory of the valve plate is achieved through a single drive component, avoiding the problem of volatile oil and gas contaminating the wafer when the drive component is close to the reaction chamber. Furthermore, it simplifies the overall structure of the drive assembly, reducing valve manufacturing costs. A constraint mechanism is provided between the main shaft and the longitudinal drive mechanism. This constraint mechanism includes a mounting groove and a constraint member. The constraint member is constrained and connected to the mounting groove along a first direction and can reciprocate along a second direction. One of the mounting groove and the constraint member is located on the main shaft, and the other is located on the lateral drive mechanism. Under the constraint of the constraint mechanism, the longitudinal drive mechanism drives the main shaft to move up and down synchronously through the constraint member constrained in the mounting groove in the vertical direction; moreover, when the transverse drive mechanism drives the main shaft to move in the horizontal direction, the mounting groove does not constrain the constraint member and can provide a certain guidance, increasing the smoothness of the operation of the drive assembly, thereby improving the overall sealing performance of the valve.

[0025] The vacuum equipment provided by this utility model includes the aforementioned valve, which can avoid the problem of volatile oil and gas contaminating the wafer when the drive component and the reaction chamber are close together, maintain the cleanliness of the reaction chamber, and simplify the overall structure of the drive component, thereby reducing the production cost and assembly difficulty of the vacuum equipment and improving the process performance of the vacuum equipment. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the valve structure provided in an embodiment of the present utility model;

[0027] Figure 2 This is a front structural view of the valve provided in this embodiment of the utility model;

[0028] Figure 3 This is a cross-sectional view of the valve structure provided in this embodiment of the utility model. Figure 1 ;

[0029] Figure 4 yes Figure 3 A magnified view of part A in the middle;

[0030] Figure 5 This is a cross-sectional view of the valve structure provided in this embodiment of the utility model. Figure 2 .

[0031] In the picture:

[0032] 11. Valve plate; 12. Main shaft; 121. Second guide member; 1211. Guide slider; 13. Main shaft fixing member; 2. Drive assembly; 21. Drive member; 212. Piston rod; 213. Extension rod; 22. Lateral drive mechanism; 221. First guide member; 2211. Guide groove; 23. Longitudinal drive mechanism; 231. Longitudinal mounting plate; 2311. Second mounting hole; 232. Longitudinal connecting plate; 2321. First mounting hole; 24. Limiting mechanism; 241. Limiting member; 242. Elastic member; 243. Limiting protrusion ring; 25. Constraint mechanism; 251. Mounting groove; 252. Constraint member; 26. Mounting bushing; 261. Limiting boss; 3. Mounting seat. Detailed Implementation

[0033] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0034] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0036] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0037] like Figures 1 to 4 As shown, this embodiment first provides a valve, which includes a valve plate 11 and a spindle 12. The valve plate 11 is used to close the outlet of the reaction chamber, and one end of the spindle 12 is connected to the valve plate 11. The movement of the spindle 12 drives the valve plate 11 to move. The reaction chamber is used to process the wafer. This embodiment does not limit the type of process.

[0038] The valve also includes a drive assembly 2, which comprises a drive element 21, a transverse drive mechanism 22, and a longitudinal drive mechanism 23. Both the transverse drive mechanism 22 and the longitudinal drive mechanism 23 are connected to the main shaft 12. The longitudinal drive mechanism 23 drives the main shaft 12 to move up and down in a first direction, while the transverse drive mechanism 22 drives the main shaft 12 to reciprocate in a second direction. The output end of the drive element 21 is connected to the longitudinal drive mechanism 23 and the transverse drive mechanism 22 via a limiting mechanism 24. The limiting mechanism 24 is configured to constrain the longitudinal drive mechanism 23 when the vertical height of the valve plate 11 and the height of the outlet are the same, so that the longitudinal drive mechanism 23 and the transverse drive mechanism 22 operate sequentially. The first and second directions are set at an angle, with the first direction being vertical and the second direction being transverse in the horizontal plane. Under the limiting constraint of the limiting mechanism 24, the transverse driving mechanism 22 and the longitudinal driving mechanism 23 act sequentially. The transverse driving mechanism 22 drives the main shaft 12 to move the valve plate 11 in the transverse direction, closing or opening the outlet of the reaction chamber. The longitudinal driving mechanism 23 drives the main shaft 12 to move the valve plate 11 in the vertical direction, moving it closer to or away from the reaction chamber. The L-shaped movement trajectory of the valve plate 11 is achieved through a driving component 21, avoiding the problem of volatile oil and gas contaminating the wafer when the driving component 21 is close to the reaction chamber. Moreover, it simplifies the overall structure of the driving component 2 and helps to reduce the processing cost of the valve.

[0039] A constraint mechanism 25 is provided between the spindle 12 and the longitudinal drive mechanism 23. The constraint mechanism 25 includes a mounting groove 251 and a constraint member 252. The constraint member 252 is constrainedly connected to the mounting groove 251 along a first direction, and the constraint member 252 can reciprocate along a second direction. One of the mounting groove 251 and the constraint member 252 is provided on the spindle 12, and the other is provided on the longitudinal drive mechanism 23. Figure 5 As shown. Under the constraint of the constraint mechanism 25, the longitudinal drive mechanism 23 drives the main shaft 12 to move up and down synchronously through the constraint member 252 constrained in the mounting groove 251 in the vertical direction; moreover, when the transverse drive mechanism 22 drives the main shaft 12 to move in the horizontal direction, the mounting groove 251 does not constrain the constraint member 252 and can provide a certain guidance, increasing the smoothness of the operation of the drive assembly 2, thereby improving the overall sealing performance of the valve.

[0040] It should be noted that when the driving component 21 raises or lowers the valve plate 11 to the same vertical height as the outlet, the transverse driving mechanism 22 can drive the main shaft 12 to move the valve plate 11 horizontally, closing or opening the outlet of the reaction chamber. Specifically, for a valve in the closed state, when it is necessary to open the reaction chamber, the transverse driving mechanism 22 acts first, followed by the longitudinal driving mechanism 23; for a valve in the open state, when it is necessary to close the reaction chamber, the longitudinal driving mechanism 23 acts first, followed by the transverse driving mechanism 22. This avoids friction between the valve plate 11 and the reaction chamber.

[0041] The valve also includes a mounting base 3, and the driving component 21 is a cylinder mounted on the mounting base 3. The limiting mechanism 24 includes a limiting element 241 and an elastic element 242. The limiting element 241 is mounted on the mounting base 3. The piston rod 212 of the cylinder is axially movable through the longitudinal driving mechanism 23 and connected to the transverse driving mechanism 22, so as to drive the longitudinal driving mechanism 23 and the transverse driving mechanism 22 to rise and fall synchronously, or, when the longitudinal driving mechanism 23 is constrained by the constraint mechanism 25, the transverse driving mechanism 22 rises and falls independently. One end of the elastic element 242 is connected to the piston rod 212, and the other end is connected to the longitudinal driving mechanism 23. The elastic element 242 has a supported state and a compressed state. The elastic element 242 in the supported state is configured to drive the longitudinal driving mechanism 23 to rise and fall synchronously. The limiting element 241 is configured to abut against and limit the longitudinal driving mechanism 23 so that the elastic element 242 switches between the supported state and the compressed state. During the simultaneous upward movement of the longitudinal drive mechanism 23 and the lateral drive mechanism 22 driven by the cylinder, when the longitudinal drive mechanism 23 abuts against the limiting member 241, the longitudinal drive mechanism 23 is constrained and cannot continue to rise, while the lateral drive mechanism 22 continues to rise, converting the longitudinal motion output by the cylinder into lateral motion to drive the main shaft 12 to move the valve plate 11. Because the elastic member 242 is elastic, during the operation of the lateral drive mechanism 22, the cylinder continues to drive, and the elastic member 242 is compressed into a compressed state.

[0042] In one embodiment, the output end includes a piston rod 212 and an extension rod 213. The length of the extension rod 213 extends along a first direction. The extension rod 213 is detachably connected to the piston rod 212 to increase the total length of the output end and meet the installation requirements of the transverse drive mechanism 22 and the longitudinal drive mechanism 23.

[0043] The elastic element 242 is a compression spring, which is sleeved outside the extension rod 213, such as... Figure 3As shown. The extension rod 213 provides guiding support for the elastic element 242, preventing deformation and twisting of the elastic element 242 and ensuring the reliability of the elastic element 242 driving the longitudinal drive mechanism 23. It can be understood that the elastic element 242 in the supported state has already been pre-compressed, and when the cylinder is actuated, the synchronous lifting and lowering of the longitudinal drive mechanism 23 and the lateral drive mechanism 22 will not cause further compression of the elastic element 242.

[0044] In one embodiment, the limiting mechanism 24 further includes a limiting protrusion 243, which is disposed at one end of the extension rod 213 and spaced apart from the limiting member 241 along a first direction. The end of the elastic member 242 away from the longitudinal drive mechanism 23 is connected to the limiting protrusion 243.

[0045] During the upward movement of the cylinder-driven longitudinal drive mechanism 23, before the longitudinal drive mechanism 23 abuts the limiting member 241, the elastic member 242 is in a supported state, and its length remains unchanged. When the longitudinal drive mechanism 23 rises to abut the limiting member 241, the longitudinal drive mechanism 23 is constrained and cannot continue to rise. The limiting protrusion 243 continues to rise with the extension rod 213, and the distance between the limiting protrusion 243 and the longitudinal drive mechanism 23 gradually decreases, causing the elastic member 242 to be compressed and converted to a compressed state. Similarly, during the downward movement of the cylinder-driven transverse drive mechanism 22, the limiting protrusion 243 continues to descend with the extension rod 213, and the compression of the elastic member 242 gradually decreases until the elastic member 242 returns to a supported state. The longitudinal drive mechanism 23 then disengages from the limiting member 241, at which point the elastic member 242 returns to a supported state, and the longitudinal drive mechanism 23 begins to drive the main shaft 12 downward.

[0046] In one embodiment, the longitudinal drive mechanism 23 includes a longitudinal mounting plate 231 and a longitudinal connecting plate 232. One end of the longitudinal connecting plate 232 is connected to the longitudinal mounting plate 231, a mounting groove 251 is formed in the longitudinal connecting plate 232, and a constraint member 252 is connected to the spindle 12. The longitudinal connecting plate 232 has a first mounting hole 2321, which communicates with the mounting groove 251. The spindle 12 is reciprocatingly inserted into the first mounting hole 2321 in a second direction. Through the mutual constraint of the constraint member 252 and the mounting groove 251, the spindle 12 can vertically rise and fall with the longitudinal drive mechanism 23, and the spindle 12 can move laterally relative to the longitudinal drive mechanism 23.

[0047] The longitudinal mounting plate 231 has a second mounting hole 2311. The piston rod 212 and the extension rod 213 are axially movable and connected to the second mounting hole 2311. The longitudinal mounting plate 231 is connected to one end of the elastic member 242. The piston rod 212 or the extension rod 213 can drive the longitudinal mounting plate 231 to rise and fall through the elastic member 242. Even when the longitudinal mounting plate 231 is constrained by the limiting member 241, the extension rod 213 can still pass through the second mounting hole 2311 to drive the transverse drive mechanism 22 to rise and fall.

[0048] In one embodiment, the longitudinal drive mechanism 23 is provided with two longitudinal mounting plates 231, which are respectively connected to both sides of the longitudinal connecting plate 232. The drive assembly 2 is provided with two cylinders and two sets of limiting mechanisms 24, with each set of limiting mechanisms 24 corresponding to one of the two cylinders. The two cylinders are respectively located on both sides of the main shaft 12, and each cylinder drives one of the two longitudinal mounting plates 231. The two cylinders operate simultaneously to provide driving force from both sides of the main shaft 12, thereby improving the smoothness of the operation of the longitudinal drive mechanism 23 and the transverse drive mechanism 22 and avoiding skewing.

[0049] In one embodiment, the constraint member 252 is a roller, the axis of which is perpendicular to the main shaft 12, and the roller is rotatably connected to the main shaft 12 about its own axis. In this way, when the main shaft 12 moves in the horizontal direction, the constraint member 252 rotates about its own axis, thereby rolling within the mounting groove 251 and reducing motion friction.

[0050] In one embodiment, the lateral drive mechanism 22 includes a first guide member 221, and the main shaft 12 is provided with a second guide member 121. One of the first guide member 221 and the second guide member 121 has a guide groove 2211, and the other has a guide slider 1211. The guide groove 2211 extends obliquely along a third direction. The guide slider 1211 is slidably connected to the guide groove 2211. The angle between the third direction and the first direction, and the angle between the third direction and the second direction are both set to acute angles. The first guide member 221 is connected to the extension rod 213. It is understandable that during the process of the first guide member 221 rising and falling with the extension rod 213, when the limiting mechanism 24 does not constrain the longitudinal drive mechanism 23, the longitudinal drive mechanism 23 and the transverse drive mechanism 22 rise and fall simultaneously, and the second guide member 121 moves with the main shaft 12, so there is no relative movement between the first guide member 221 and the second guide member 121; when the longitudinal drive mechanism 23 is constrained by the limiting member 241 and cannot continue to rise, the first guide member 221 continues to rise with the extension rod 213, and at this time there is relative movement between the first guide member 221 and the second guide member 121. This relative movement is manifested as the guide slider 1211 sliding in the guide groove 2211. Since the main shaft 12 is constrained in the vertical direction, the relative movement between the first guide member 221 and the second guide member 121 is converted into the transverse movement of the main shaft 12.

[0051] Moreover, the inclined guide groove 2211 can realize the reciprocating motion of the main shaft 12 in the transverse direction, and the valve plate 11 can block or open the reaction chamber.

[0052] In one embodiment, the drive assembly 2 further includes a mounting bushing 26, which is detachably connected to the extension rod 213 and is mounted on the top end of the extension rod 213 by screws. Limiting bosses 261 are provided at both ends of the mounting bushing 26. A third mounting hole is provided on the first guide member 221, through which the mounting bushing 26 passes, and the first guide member 221 is engaged between the two limiting bosses 261, thus connecting the first guide member 221 and the extension rod 213. During the descent of the lateral drive mechanism 22, the mounting bushing 26 is configured to abut against the longitudinal drive mechanism 23 so that the longitudinal drive mechanism 23 and the lateral drive mechanism 22 rise and fall simultaneously. When the valve needs to be opened, during the initial stage of the descent of the cylinder-driven lateral drive mechanism 22, due to the elasticity of the elastic element 242, the longitudinal drive mechanism 23 is still in contact with the limiting element 241 until the lateral drive mechanism 22 descends to the point where the mounting bushing 26 contacts the longitudinal drive mechanism 23. The mounting bushing 26 then pushes the longitudinal drive mechanism 23 away from the limiting element 241. At this point, the longitudinal drive mechanism 23 and the lateral drive mechanism 22 begin to descend synchronously. The longitudinal drive mechanism 23 drives the main shaft 12 to descend, and the first guide element 221 and the second guide element 121 remain relatively stationary. The lateral drive mechanism 22 then stops moving.

[0053] In one embodiment, the lateral drive mechanism 22 includes two first guide members 221, and the main shaft 12 is provided with two second guide members 121. The two first guide members 221 and the two second guide members 121 correspond one-to-one, and two cylinders drive the two first guide members 221 respectively. The two first guide members 221 simultaneously drive the main shaft 12 to move laterally from both sides, resulting in better movement stability of the main shaft 12 and thus improving the sealing performance of the valve plate 11.

[0054] In order to install the two second guide members 121, the valve also includes a main shaft fixing member 13, which is fitted onto the main shaft 12, and the two second guide members 121 are respectively fixedly connected to both sides of the main shaft fixing member 13.

[0055] The valve operation process in this embodiment is as follows:

[0056] 1. The initial state is to open the outlet of the reaction chamber with the valve. When it is necessary to close the outlet of the reaction chamber, the cylinder starts to move. The piston rod 212 drives the longitudinal drive mechanism 23 and the transverse drive mechanism 22 to rise simultaneously. Under the constraint of the constraint mechanism 25, the main shaft 12 is driven to move the valve plate 11 in the vertical direction. During this process, there is no relative movement between the first guide member 221 and the second guide member 121, and the valve plate 11 will not move laterally.

[0057] 2. When the vertical height of the valve plate 11 is equal to the outlet height, the limiting mechanism 24 begins to limit and constrain, the longitudinal mounting plate 231 abuts against the limiting member 241 and is constrained, the piston rod 212 continues to drive the transverse drive mechanism 22 to rise, and the elastic member 242 in the support state is compressed and converted to the compressed state.

[0058] 3. Since the main shaft 12 no longer continues to rise, relative movement occurs between the first guide member 221 and the second guide member 121. The transverse drive mechanism 22 drives the main shaft 12 to move the valve plate 11 laterally, thereby closing the outlet and forming a closed valve. The constraint member 252 moves laterally in the mounting groove 251. The longitudinal drive mechanism 23 will not interfere with the transverse movement of the main shaft 12.

[0059] 4. When the valve is closed and the outlet of the reaction chamber needs to be opened, the cylinder starts to move. The piston rod 212 drives the transverse drive mechanism 22 to descend, and the first guide 221 and the second guide 121 generate relative movement. The transverse drive mechanism 22 drives the main shaft 12 to drive the valve plate 11 to move in the opposite direction in the transverse direction, thereby opening the outlet. During this process, the elastic element 242 is still in a compressed state, and the longitudinal drive mechanism 23 remains stationary.

[0060] 5. As the piston rod 212 continues to descend, until the elastic element 242 in the compressed state returns to the supported state, the piston rod 212 drives the longitudinal drive mechanism 23 and the transverse drive mechanism 22 to descend simultaneously. The transverse drive mechanism 22 stops moving, the main shaft 12 stops moving laterally, and begins to descend along with the longitudinal drive mechanism 23 until the valve plate 11 reaches the set position away from the reaction chamber.

[0061] This utility model embodiment further provides a vacuum device, which includes a valve as described in any of the above embodiments. The vacuum device also includes a reaction chamber, and the valve is used to seal the outlet of the reaction chamber. Under the limiting constraint of the limiting mechanism 24, the transverse drive mechanism 22 and the longitudinal drive mechanism 23 operate sequentially. Under the constraint of the constraint mechanism 25, the longitudinal drive mechanism 23 drives the main shaft 12 to move up and down synchronously through the constraint member 252 constrained in the mounting groove 251 in the vertical direction. Moreover, when the transverse drive mechanism 22 drives the main shaft 12 to move in the horizontal direction, the mounting groove 251 does not constrain the constraint member 252 and can provide a certain guidance, increasing the operational stability of the drive assembly 2, and ensuring that the valve always has good sealing performance. The transverse drive mechanism 22 drives the main shaft 12 to move the valve plate 11 in the horizontal direction, closing or opening the outlet of the reaction chamber. The longitudinal drive mechanism 23 drives the main shaft 12 to move the valve plate 11 in the vertical direction, moving it closer to or away from the reaction chamber. The L-shaped movement trajectory of the valve plate 11 is achieved through a drive component 21, avoiding the problem of volatile oil and gas contaminating the wafer when the drive component 21 is close to the reaction chamber, maintaining the cleanliness of the reaction chamber, and simplifying the overall structure of the drive component 2, which helps to reduce the production cost and assembly difficulty of the vacuum equipment and improve the process performance of the vacuum equipment.

[0062] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A valve, comprising a valve plate (11) and a main shaft (12), said valve plate (11) for sealing the outlet of a reaction chamber, said main shaft (12) being connected at one end to said valve plate (11), characterized in that, The valve also includes: The drive assembly (2) includes a drive member (21), a transverse drive mechanism (22), and a longitudinal drive mechanism (23). The transverse drive mechanism (22) and the longitudinal drive mechanism (23) are both connected to the main shaft (12). The longitudinal drive mechanism (23) is used to drive the main shaft (12) to move up and down in a first direction. The transverse drive mechanism (22) is used to drive the main shaft (12) to move back and forth in a second direction. The output end of the drive member (21) is connected to the longitudinal drive mechanism (23) and the transverse drive mechanism (22) through a limiting mechanism (24). The limiting mechanism (24) is configured to constrain the longitudinal drive mechanism (23) when the vertical height of the valve plate (11) is the same as that of the outlet, so that the longitudinal drive mechanism (23) and the transverse drive mechanism (22) move sequentially. The first direction and the second direction are set at an angle. A constraint mechanism (25) is provided between the main shaft (12) and the longitudinal drive mechanism (23). The constraint mechanism (25) includes a mounting groove (251) and a constraint member (252). The constraint member (252) is constrainedly connected to the mounting groove (251) along the first direction, and the constraint member (252) can reciprocate along the second direction. One of the mounting groove (251) and the constraint member (252) is provided on the main shaft (12), and the other is provided on the longitudinal drive mechanism (23).

2. The valve according to claim 1, characterized in that, The valve also includes a mounting base (3), the driving component (21) is a cylinder, the cylinder is disposed on the mounting base (3), the limiting mechanism (24) includes a limiting component (241) and an elastic component (242), the limiting component (241) is disposed on the mounting base (3), the piston rod (212) of the cylinder is axially movable through the longitudinal driving mechanism (23) and connected to the transverse driving mechanism (22), one end of the elastic component (242) is connected to the piston rod (212), and the other end is connected to the longitudinal driving mechanism (23), the elastic component (242) has a supporting state and a compressed state, the elastic component (242) in the supporting state is configured to drive the longitudinal driving mechanism (23) to rise and fall synchronously, the limiting component (241) is configured to abut against and limit the longitudinal driving mechanism (23) so that the elastic component (242) can switch between the supporting state and the compressed state.

3. The valve according to claim 2, characterized in that, The elastic element (242) is a compression spring, which is sleeved outside the piston rod (212); and / or, The limiting mechanism (24) further includes a limiting protrusion (243), which is disposed at one end of the piston rod (212) and spaced apart from the limiting member (241) along the first direction. The end of the elastic member (242) away from the longitudinal driving mechanism (23) is connected to the limiting protrusion (243); and / or, The drive unit (21) also includes an extension rod (213) whose length extends along the first direction and is detachably connected to the end of the piston rod (212).

4. The valve according to claim 2, characterized in that, The longitudinal drive mechanism (23) includes a longitudinal mounting plate (231) and a longitudinal connecting plate (232). One end of the longitudinal connecting plate (232) is connected to the longitudinal mounting plate (231). The mounting groove (251) is opened in the longitudinal connecting plate (232). The constraint member (252) is connected to the spindle (12). The longitudinal connecting plate (232) is also provided with a first mounting hole (2321), which is connected to the mounting groove (251). The main shaft (12) is reciprocally inserted into the first mounting hole (2321) along the second direction. The longitudinal mounting plate (231) is provided with a second mounting hole (2311), and the piston rod (212) is axially movable and connected to the second mounting hole (2311). The longitudinal mounting plate (231) is connected to one end of the elastic member (242), and the longitudinal mounting plate (231) can abut against the limiting member (241).

5. The valve according to claim 4, characterized in that, The longitudinal drive mechanism (23) is provided with two longitudinal mounting plates (231), which are respectively connected to both sides of the longitudinal connecting plate (232). The drive assembly (2) is provided with two cylinders and two sets of limiting mechanisms (24), which correspond one-to-one with the two cylinders. The two cylinders are respectively located on both sides of the main shaft (12), and the two cylinders drive the two longitudinal mounting plates (231) respectively; and / or, The constraint member (252) is a roller rod, the axis of which is perpendicular to the main shaft (12), and the roller rod is rotatably connected to the main shaft (12) about its own axis.

6. The valve according to claim 2, characterized in that, The transverse drive mechanism (22) includes a first guide member (221), and the main shaft (12) is provided with a second guide member (121). One of the first guide member (221) and the second guide member (121) is provided with a guide groove (2211), and the other is provided with a guide slider (1211). The guide groove (2211) extends along a third direction, and the guide slider (1211) is slidably connected to the guide groove (2211). The angle between the third direction and the first direction, and the angle between the third direction and the second direction are both set to acute angles. The first guide member (221) is connected to the piston rod (212), and the second guide member (121) is connected to the main shaft (12).

7. The valve according to claim 6, characterized in that, The drive component (21) further includes an extension rod (213), the length of which extends along the first direction, and the extension rod (213) is detachably connected to the end of the piston rod (212); the drive assembly (2) further includes a mounting bushing (26), the mounting bushing (26) is detachably connected to the extension rod (213), the mounting bushing (26) has limiting bosses (261) at both ends, the first guide component (221) has a third mounting hole, the mounting bushing (26) passes through the third mounting hole, and the first guide component (221) is engaged between the two limiting bosses (261), the mounting bushing (26) is configured to abut against the longitudinal drive mechanism (23) so that the longitudinal drive mechanism (23) and the transverse drive mechanism (22) move up and down simultaneously.

8. The valve according to claim 6, characterized in that, The transverse drive mechanism (22) includes two first guide members (221), and the main shaft (12) is provided with two second guide members (121). The two first guide members (221) and the two second guide members (121) correspond one-to-one. The drive assembly (2) is provided with two cylinders. The two cylinders are located on both sides of the main shaft (12), and the two cylinders drive the two first guide members (221) respectively.

9. The valve according to claim 8, characterized in that, The valve also includes a main shaft fixing component (13), which is fitted onto the main shaft (12), and two second guide components (121) are respectively fixedly connected to both sides of the main shaft fixing component (13).

10. A vacuum device, characterized in that, The device includes the valve as described in any one of claims 1-9, and further includes a reaction chamber, the valve being used to close the outlet of the reaction chamber.

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