Detection device of a pressure sensor

Abstract

The utility model discloses a detection equipment of pressure sensor, including main part, first cover and second cover, force assembly and pressure delivery subassembly. First cover and second cover are arranged on the main part, and the force assembly is arranged between first cover and second cover, and with first cover and forms a gap of the encapsulated pressure sensor of detection, and the force assembly includes pressure piece and the mounting piece formed in the outer periphery of pressure piece, and the pressure delivery subassembly is linked with the force assembly, and is used for filling pressure in the pressure piece, and makes it expand and contacts the encapsulated pressure sensor of detection and generates the even distribution pressure to the encapsulated pressure sensor of detection, or releases pressure after detecting. The utility model discloses a detection equipment of pressure sensor can replace the encapsulated pressure sensor of detection easily, and can detect simultaneously the multiple pressure detection position of the encapsulated pressure sensor of detection.

Description

Technical Field

[0001] This utility model belongs to the field of sensor detection technology, specifically relating to a detection device for a pressure sensor. Background Technology

[0002] Pressure sensors are indispensable key components in modern industrial automation, automotive electronics, medical equipment, consumer electronics, aerospace, and other fields. Their function is to accurately convert physical pressure signals into measurable electrical signals. The core of a pressure sensor is extremely fragile and susceptible to failure due to external environmental influences. Packaging technology is crucial for protecting the sensor core, providing mechanical support, enabling electrical interconnection, ensuring media isolation, and maintaining long-term stability and reliability. The quality of the packaging directly determines the sensor's performance, lifespan, and application range.

[0003] Currently, the industry commonly uses discrete equipment for testing packaged sensors. For example, pressure is applied using a separate pressure source, the electrical signal response is measured using a separate electrical parameter tester, aging or environmental adaptability tests are conducted using an environmental test chamber, and finally, manual visual inspection may be required. This approach results in a lengthy testing process, requiring multiple clamping and transportation operations, leading to low efficiency and making it difficult to meet the needs of large-scale mass production.

[0004] Therefore, in order to address the aforementioned technical problems, it is necessary to provide a detection device for a pressure sensor.

[0005] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0006] The purpose of this invention is to provide a pressure sensor testing device that can solve the problem of a lengthy testing process and facilitate the replacement of the packaged pressure sensor to be tested.

[0007] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:

[0008] A pressure sensor testing device includes: a main body, a first cover and a second cover, a force application component, and a pressure delivery component. The first cover and the second cover are alternately disposed on the main body; the force application component is disposed between the first cover and the second cover, forming a gap with the first cover to accommodate a packaged pressure sensor to be tested; the force application component includes a pressure element and a mounting element formed on the outer periphery of the pressure element; the pressure delivery component is connected to the force application component and is used to pressurize the pressure element, causing it to expand and contact the packaged pressure sensor to be tested, generating a uniformly distributed pressure on the packaged pressure sensor, or to release the pressure after testing.

[0009] In one or more embodiments of this utility model, the pressure element is a hollow structure.

[0010] In one or more embodiments of the present invention, the pressure delivery assembly includes a pump body, a pipeline, and a pressure gauge. The pipeline is connected to the pressure component. The pump body is used to pump gas or liquid into the pressure component to generate pressure. The pressure gauge is installed on the pipeline to detect the pressure value in the pipeline.

[0011] In one or more embodiments of the present invention, the pressure member includes a connecting portion and an intermediate portion recessed from the connecting portion, wherein the connecting portion is fixedly connected to the mounting member.

[0012] In one or more embodiments of this utility model, the middle part has an upper surface and a lower surface, the second cover has a lower end face, the upper surface of the middle part is in contact with the lower end face of the second cover, and the lower surface of the middle part contacts the packaging pressure sensor to be tested after being pressurized and expanded.

[0013] In one or more embodiments of the present invention, the first cover, the second cover, and the mounting component are provided with a plurality of mounting holes, and the detection device further includes a plurality of fixing components that penetrate the mounting holes.

[0014] In one or more embodiments of this utility model, the mounting hole array is distributed on the first cover, the second cover, and the mounting member, and the fixing member passes through the second cover, the mounting member, and the first cover sequentially from top to bottom.

[0015] In one or more embodiments of this invention, when the detection state is being tested, the gap is approximately equal to the thickness of the packaged pressure sensor to be tested.

[0016] In one or more embodiments of the present invention, the packaged pressure sensor to be tested includes a plurality of pressure detection positions, each pressure detection position is provided with a pressure sensor, and each pressure sensor is used to detect the pressure value of the pressure detection position.

[0017] In one or more embodiments of this utility model, if the pressure value detected by the pressure detection unit is the same as the pressure value in the pipeline detected by the pressure gauge or is within a preset error range, then the pressure detection unit is qualified.

[0018] Compared with existing technologies, the pressure sensor testing device of this invention places a force-applying component between a first cover and a second cover, forming a gap between the component and the first cover, and then places the packaged pressure sensor to be tested within this gap. The force-applying component expands after being pressurized by the pressure delivery component, compressing the packaged pressure sensor and providing uniformly distributed pressure. This allows for simultaneous detection of all pressure detection points on the packaged pressure sensor to check for failure and to verify if the detection accuracy meets requirements. The testing process of this invention is streamlined and rapid, capable of simultaneously detecting multiple detection points on the packaged pressure sensor. Furthermore, the pressure sensor testing device has a simple structure and allows for easy replacement of the packaged pressure sensor, saving significant manpower and resources. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of a pressure sensor detection device according to one embodiment of the present invention;

[0021] Figure 2 This is a schematic diagram of the detection state of the pressure sensor detection device in one embodiment of the present invention;

[0022] Figure 3 This is a front view of the force-applying component in one embodiment of the present invention;

[0023] Figure 4 This is a top view of the force-applying component in one embodiment of the present invention;

[0024] Figure 5 This is a schematic diagram of the packaged pressure sensor to be tested in one embodiment of the present invention.

[0025] Explanation of key figure labels:

[0026] 1-Main body, 2-First cover, 3-Second cover, 4-Force application component, 41-Pressure component, 411-Connecting part, 412-Intermediate part, 42-Mounting component, 5-Mounting hole, 6-Fixing component, 7-Encapsulated pressure sensor to be tested, 71-Pressure detection position, 8-Pressure delivery component, 81-Pump body, 82-Pipeline, 83-Pressure gauge, 9-Gap. Detailed Implementation

[0027] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.

[0028] like Figure 1 and Figure 2 As shown, a pressure sensor detection device according to one embodiment of the present invention is used to detect the pressure value of a packaged pressure sensor 7 to be tested. The device includes: a main body 1, a first cover 2 and a second cover 3, a force application component 4, and a pressure delivery component 8. The first cover 2 and the second cover 3 are alternately disposed on the main body 1. The force application component 4 is disposed between the first cover 2 and the second cover 3, forming a gap 9 with the first cover 2 to accommodate the packaged pressure sensor 7 to be tested. The pressure delivery component 8 is connected to the force application component 4 and is used to fill the pressure component 41 with pressure, causing it to expand and contact the packaged pressure sensor 7 to be tested, generating a uniformly distributed pressure on the packaged pressure sensor 7, or to release the pressure after testing.

[0029] Combination Figure 3 and Figure 4As shown, the force-applying component 4 includes a pressure member 41 and a mounting member 42. The pressure member 41 has a hollow structure and deforms and expands after being filled with gas or liquid. The mounting member 42 is formed on the outer periphery of the pressure member 41. The pressure member 4 includes a connecting portion 411 and a middle portion 412 recessed from the connecting portion 411 towards the center. The middle portion 412 is connected to the pressure conveying component 8. Gas or liquid is input into the middle portion 412 through the pressure conveying component 8, thereby expanding and generating pressure, or the middle portion 412 contracts after releasing pressure through the pressure conveying component 8. The middle part 412 has an upper surface and a lower surface, and the second cover 3 has a lower end face. The upper surface of the middle part 412 is in contact with the lower end face of the second cover 3. When the lower surface of the middle part 412 is not pressurized, there is a gap between it and the packaging pressure sensor 7 to be tested. After being pressurized and expanded, it contacts and squeezes the packaging pressure sensor 7 to be tested, so that the gap 9 is basically equal to the thickness of the packaging pressure sensor 7 to be tested. That is to say, the gap 9 is equivalent to the thickness of the packaging pressure sensor 7 to be tested. After the pressure is released, it returns to the state where there is a gap with the packaging pressure sensor 7 to be tested.

[0030] The first cover 2, the second cover 3, and the mounting component 42 are provided with multiple mounting holes 5. The testing equipment also includes multiple fasteners 6 that penetrate the mounting holes 5. The mounting holes 5 are arrayed on the first cover 2, the second cover 3, and the mounting component 42. The fasteners 6 penetrate the second cover 3, the mounting component 42, and the first cover 2 from top to bottom. It can be understood that the upper end of the fastener 6 protrudes from the mounting hole of the second cover 3, and the lower end abuts against the main body 1, ensuring that the distance between the first cover 2 and the second cover 3 is a fixed value, thus maintaining the stability of the structure.

[0031] In one embodiment, during the detection state, the gap 9 is approximately equal to the thickness of the packaged pressure sensor 7 to be tested. It is understood that when the packaged pressure sensor 7 is placed in the gap 9, the gap 9 is equal to the sum of the initial gap between the pressure member 41 and the packaged pressure sensor 7, and the thickness of the packaged pressure sensor 7. During the detection state, the pressure member 41 expands and compresses the packaged pressure sensor 7 after being pressurized, and the pressure member 41 generates uniform pressure at each detection position of the packaged pressure sensor 7. At this time, the lower surface of the pressure member 41 is in contact with the packaged pressure sensor 7.

[0032] The pressure delivery assembly 8 includes a pump body 81, a pipeline 82, and a pressure gauge 83. The pipeline 82 is connected to the pressure element 41. The pump body 81 is used to pump gas or liquid into the pressure element 41 to generate pressure. The pressure gauge 83 is mounted on the pipeline 82 and is used to detect the pressure value within the pipeline 82. In one embodiment, the pump body 81 is a liquid pump or a gas pump, used to fill the pressure element 41 with liquid or gas. When the pump body 81 fills the pressure element 41 with liquid or gas through the pipeline 42, the pressure part 41 is pressurized and expands, squeezing the packaged pressure sensor 7 to be tested. Since the outer surface of the pressure part 41 is a flexible material that can deform under pressure, the pressure it provides to the surface of the packaged pressure sensor 7 to be tested in the gas / liquid filling state is the same, that is, the same as the pressure value within the pipeline 82 detected by the pressure gauge 83.

[0033] like Figure 5 As shown, in one embodiment, a packaged pressure sensor 7 is being tested. It is a sheet-like packaged pressure sensor with multiple pressure detection positions 71. Each pressure detection position 71 contains a pressure sensor, which detects the pressure value at that position. The pressure sensor can be piezoelectric, capacitive, or resistive. Each pressure sensor in each pressure detection position 71 can detect the pressure value at that location. By determining whether the detected pressure value is within a suitable error range, it is determined whether the pressure sensor has failed and whether its accuracy meets the requirements.

[0034] The working principle of the pressure sensor detection device of this utility model is as follows: Figure 1 As shown, in the initial state, the pressure sensor 7 to be tested is transported to the gap between the first cover 2 and the force application component 4 by automated equipment or manual conveying, so that the pressure detection positions 71 on the pressure sensor are all below the pressure component 4. At this time, the pressure component 41 is in an unpressurized and expanded state, and there is a gap between the lower surface of the pressure component 41 and the upper surface of the pressure sensor 7 to be tested. During testing, the pump body 81 of the pressure delivery component 8 injects gas or liquid into the middle part 412 of the pressure component 41 through the pipeline 82. The pressure part 41 will be pressurized, which means that after the pressure part 41 expands, it contacts the pressure sensor 7 to be tested and squeezes the pressure sensor 7. At the same time, the pressure value is detected and fed back in real time by the pressure gauge 83. Figure 2As shown, pressure component 41 provides the same pressure to each pressure detection point 71 on the packaged pressure sensor 7 to be tested. This pressure is the same as the pressure value detected by pressure gauge 83 in the pipeline 82. If the pressure sensor in pressure detection point 71 does not display a pressure value, then that pressure detection point 71 is invalid. If the error between the pressure value displayed by the pressure sensor in pressure detection point 71 and the pressure value detected by pressure gauge 83 is greater than a preset pressure value, then the accuracy of that pressure detection point 71 does not meet the requirements. If the pressure value displayed by the pressure sensor in pressure detection point 71 is the same as the pressure value detected by pressure gauge 83 or the error is within a preset error range, then the accuracy of that pressure detection point 71 meets the requirements. It should be noted that the packaged pressure sensor 7 to be tested has been pre-assigned a pressure value, i.e., the pressure calibration of the pressure sensor.

[0035] The detection process of this utility model is simplified and fast, and it can simultaneously detect multiple detection positions on the packaged pressure sensor. The detection equipment for the pressure sensor has a simple structure and the packaged pressure sensor to be tested is easy to replace, saving a lot of manpower and resources.

[0036] It will be apparent to those skilled in the art that this disclosure is not limited to the details of the exemplary embodiments described above, and that this disclosure can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of this disclosure is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this disclosure. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0037] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A detection device for a pressure sensor, characterized in that, include: main body; The first cover and the second cover are alternately disposed on the main body; A force-applying component is disposed between the first cover and the second cover, and a gap is formed between the force-applying component and the first cover to accommodate the encapsulated pressure sensor to be detected. The force-applying component includes a pressure element and a mounting element formed on the outer periphery of the pressure element. A pressure delivery assembly, which is connected to the force application assembly, is used to fill the pressure component with pressure, causing it to expand and contact the packaged pressure sensor to be tested, and to generate a uniformly distributed pressure to the packaged pressure sensor to be tested, or to release the pressure after the test is completed.

2. The detection device for the pressure sensor according to claim 1, characterized in that, The pressure component has a hollow structure.

3. The detection device for the pressure sensor according to claim 1, characterized in that, The pressure delivery assembly includes a pump body, a pipeline, and a pressure gauge. The pipeline is connected to the pressure component. The pump body is used to pump gas or liquid into the pressure component to generate pressure. The pressure gauge is installed on the pipeline to detect the pressure value in the pipeline.

4. The detection device for the pressure sensor according to claim 1, characterized in that, The pressure component includes a connecting portion and an intermediate portion formed by a recess in the self-connecting portion, wherein the connecting portion is fixedly connected to the mounting component.

5. The detection device for the pressure sensor according to claim 4, characterized in that, The middle part has an upper surface and a lower surface, the second cover has a lower end face, the upper surface of the middle part is in contact with the lower end face of the second cover, and the lower surface of the middle part comes into contact with the packaging pressure sensor to be tested after being pressurized and expanded.

6. The detection device for the pressure sensor according to claim 1, characterized in that, The first cover, the second cover, and the mounting components are provided with multiple mounting holes, and the testing equipment also includes multiple fasteners that pass through the mounting holes.

7. The detection device for the pressure sensor according to claim 6, characterized in that, The array of mounting holes is distributed on the first cover, the second cover, and the mounting component, and the fixing component passes through the second cover, the mounting component, and the first cover sequentially from top to bottom.

8. The detection device for the pressure sensor according to claim 1, characterized in that, During the detection state, the gap is approximately equal to the thickness of the packaged pressure sensor to be tested.

9. The detection device for the pressure sensor according to claim 3, characterized in that, The pressure sensor to be tested includes multiple pressure detection positions, each pressure detection position is equipped with a pressure sensor, and each pressure sensor is used to detect the pressure value of the pressure detection position; if the pressure value detected by the pressure detection position is the same as the pressure value in the pipeline detected by the pressure gauge or within a preset error range, then the pressure detection position is qualified.

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