A slit coater gap adjustment device

Abstract

A kind of slit coating head coating pitch adjusting device, comprising: the reciprocating motion of coating support in horizontal direction on pedestal;Pedestal is equipped with column, column is set to the side of coating support;Column is equipped with coating head fixing plate, coating head fixing plate is set to the above of coating support;Coating head fixing plate is connected with column by lifting unit;Coating head fixing plate is fixed with slit coating head;Column is equipped with grating ruler, grating ruler is movably equipped with grating reading head;Grating reading head is fixed on coating head fixing plate;Grating reading head is matched with grating ruler;The length size of grating ruler is matched with the lifting height size of lifting unit;Coating head fixing plate is also equipped with thickness gauge, and thickness gauge is used to measure the thickness size information of coating substrate to be coated on coating support;Grating ruler is used to obtain the height information of slit coating head;According to thickness size information and height information, adjust the slit coating head and coating substrate pitch.

Description

Technical Field

[0001] This invention relates to the field of coating technology, and more particularly to a device for adjusting the coating spacing of a slit coating head. Background Technology

[0002] Slit coating heads have been widely used in various thin-film forming fields, especially in panel displays and perovskite solar cells. For coating large-size perovskite solar cells, thickness variations between different large-size glass substrates can affect the coating spacing during perovskite functional coating application. This results in inconsistent coating thickness, affecting the uniformity of the perovskite functional coating thickness or the thickness differences between different substrates, ultimately impacting the performance and consistency of the finished product.

[0003] How to solve the above-mentioned technical problems has become an urgent technical challenge for the industry. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the present invention aims to provide a slit coating head spacing adjustment device that avoids the occurrence of different coating thicknesses between different substrate surfaces.

[0005] To achieve the above objectives, this application provides a slit coating head coating spacing adjustment device, comprising: A base, on which a coating stage is mounted, and the coating stage reciprocates horizontally on the base; The base is also equipped with columns, which are located on the side of the coating platform and on the non-traveling side of the coating platform. The column is equipped with a coating head fixing plate, which is located above the coating platform; The coating head fixing plate is connected to the column via a lifting unit; A slit spray nozzle is fixed on the spray nozzle fixing plate; The surface of the coating platform facing the slit nozzle is flat. The column is equipped with a grating ruler, and the grating ruler is equipped with a movable grating reading head; The grating reader is fixed on the coating head fixing plate; The grating reader is matched with the grating ruler; The length of the grating ruler is matched with the lifting height of the lifting unit; The coating head fixing plate is also equipped with a thickness gauge, which is used to measure the thickness of the coating substrate to be coated on the coating platform. A grating ruler is used to obtain the height information of the slit spray nozzle; Adjust the distance between the slit nozzle and the substrate based on the thickness and height information.

[0006] Furthermore, the pillars include a first pillar and a second pillar; The first and second pillars are positioned on either side of the coating platform; The coating head fixing plate is set between the first column and the second column.

[0007] Furthermore, each of the first and second columns is equipped with a lifting unit; The lifting unit includes a first lifting unit and a second lifting unit; The first lifting unit includes a first lifting motor and a first lifting module; The second lifting unit includes a second lifting motor and a second lifting module; The first lifting motor is fixed on the first column, the first lifting module is connected to the first lifting motor, and the first lifting module is movably mounted on the first column. The second lifting motor is fixed on the second column, the second lifting module is connected to the second lifting motor, and the second lifting module is movably mounted on the second column.

[0008] Furthermore, the grating ruler includes a first grating ruler and a second grating ruler; The grating reader includes a first grating reader and a second grating reader; The first grating ruler is fixed on the first column, and the second grating ruler is fixed on the second column.

[0009] Furthermore, a first rangefinder is provided on the outer front end of the coating stage, which can be raised and lowered. The first rangefinder corresponds to the non-coated area of ​​the slit spray nozzle; The first rangefinder is used to calibrate the lower limit point when the slit nozzle descends; The lower limit point is at the same level as the upper surface of the coating stage.

[0010] Furthermore, there are at least two first rangefinders, each corresponding to the non-coated area at the lower end of the slit coating head.

[0011] Furthermore, each of the two first rangefinders is matched with a grating reader.

[0012] Furthermore, the first and second pillars are symmetrically arranged on both sides of the coating platform.

[0013] Furthermore, the slit applicator is fixed below the applicator fixing plate.

[0014] The slit head coating spacing adjustment device provided in this application obtains the thickness of each coating substrate in real time using a thickness gauge, and then controls the slit head to descend to the corresponding coating height based on the obtained coating substrate thickness. This avoids the slit head colliding with the coating substrate while ensuring that the coating thickness on the surface of coating substrates with different thicknesses is the same. It also avoids the phenomenon of different coating thicknesses between different coating substrates due to different coating substrate thicknesses, and improves the stability and consistency of the finished product performance.

[0015] Other features and advantages of this application will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing this application. Attached Figure Description

[0016] The accompanying drawings are provided to further illustrate the present application and form part of the specification. Together with the embodiments of the present application, they serve to explain the present application but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the slit coating head spacing adjustment device according to an embodiment of this application; Figure 2 This is a schematic diagram of the slit coating head coating spacing adjustment device from another perspective according to an embodiment of this application; Figure 3 This is a schematic diagram of the slit coating head spacing adjustment device during planar calibration according to an embodiment of this application; Figure 4 This is a flowchart illustrating the control method of the slit coating head spacing adjustment device according to an embodiment of this application.

[0017] Figure label: 101-Base; 102-Rail; 103-Coating platform; 104-Coating substrate; 105-First column; 106-Second column; 107-First lifting motor; 108-First lifting module; 109-First grating ruler; 110-First grating reader; 111-Second lifting motor; 112-Second lifting module; 113-Second grating ruler; 114-Second grating reader; 115-Coating head fixing plate; 116-Slit coating head; 117-Thickness gauge; 118-First rangefinder; 119-Plane calibration block. Detailed Implementation

[0018] The preferred embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit this application.

[0019] Embodiments of this application will now be described in more detail with reference to the accompanying drawings. While some embodiments of this application are shown in the drawings, it should be understood that this application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this application. It should be understood that the drawings and embodiments of this application are for illustrative purposes only and are not intended to limit the scope of protection of this application.

[0020] The term "comprising" and its variations as used herein are open-ended inclusions, meaning "including but not limited to". The term "based on" means "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". Definitions of other terms will be given in the description below.

[0021] It should be noted that the terms "first" and "second" may be used in this application only to distinguish different devices, components or parts, and are not used to define the order of functions performed by these devices, components or parts or their interdependence.

[0022] It should be noted that the terms "one" and "more" used in this application are illustrative rather than restrictive, and those skilled in the art should understand that, unless explicitly stated otherwise in the context, they should be understood as "one or more". "More" should be understood as two or more.

[0023] The slit coating head coating spacing adjustment device of this application includes: The base 101 has a coating stage 103 on it, and the coating stage 103 reciprocates in the horizontal direction on the base 101. The base 101 is also provided with a column, which is located on the side of the coating platform 103 and is located on the non-traveling side of the coating platform 103. The column is equipped with a coating head fixing plate 115, which is located above the coating platform 103. The coating head fixing plate 115 is connected to the column via a lifting unit; A slit spray nozzle 116 is fixed on the spray nozzle fixing plate 115; The surface of the coating stage 103 facing the slit coating head 116 is a flat surface; The column is equipped with a grating ruler, and the grating ruler is equipped with a movable grating reading head; The grating reader is fixed on the coating head fixing plate 115; The grating reader is matched with the grating ruler; The length of the grating ruler is matched with the lifting height of the lifting unit; The coating head fixing plate 115 is also equipped with a thickness gauge 117, which is used to measure the thickness dimension information of the coating substrate 104 to be coated on the coating stage 103. The grating ruler is used to obtain the height information of the slit applicator 116; Adjust the distance between the slit nozzle 116 and the coating substrate 104 based on the thickness and height information.

[0024] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0025] Example 1 Figure 1 This is a schematic diagram of the slit coating head spacing adjustment device according to an embodiment of this application. Figure 2 This is a schematic diagram of the slit coating head spacing adjustment device from another perspective according to an embodiment of this application. Figure 3 This is a schematic diagram of the slit coating head spacing adjustment device during planar calibration according to an embodiment of this application. Figure 1-3 As shown, the slit sprayer coating spacing adjustment device of this application embodiment includes: a base 101, a column, a sprayer fixing plate 115, and a slit sprayer 116.

[0026] The slit coating head coating spacing adjustment device of this application embodiment has a base 101 whose material and bearing capacity are based on being able to support the coating substrate 104 to complete the coating, and a coating platform 103 is provided on the base 101.

[0027] In one exemplary embodiment, the coating platform 103 may be made of marble material as needed, and the upper surface of the coating platform 103 is a smooth plane.

[0028] In one exemplary embodiment, the coating substrate 104 to be coated is placed on the coating stage 103.

[0029] In one exemplary embodiment, the material of the coating substrate 104 is, for example, glass.

[0030] In one exemplary embodiment, the coating stage 103 reciprocates on the base 101 along a first direction, such as moving back and forth, i.e., performing reciprocating motion in the horizontal direction. Figure 1 As shown, the arrow points in the direction of movement of the coating substrate 104 during coating.

[0031] In one exemplary embodiment, a track 102 is provided on the base 101, and the coating stage 103 reciprocates along the track 102 in the horizontal direction, for example, moves back and forth.

[0032] In one exemplary embodiment, track 102 can be Figure 1 and Figure 2 The diagram shows two tracks 102, which can be in the shape of raised rails.

[0033] In one exemplary embodiment, when the track 102 is in the shape of a raised rail, the bottom of the coating platform 103 is provided with a groove that matches the track 102, that is, the groove at the bottom of the coating platform 103 covers the track 102 and slides along the track 102.

[0034] In one exemplary embodiment, the base 101 is further provided with a column, which is disposed on the side of the coating stage 103 and is located on the non-traveling side of the coating stage 103; for example, when the coating stage 103 moves in the front-back direction, the column is located on the base 101 on the left and / or right side of the coating stage 103. In this embodiment, the example of having columns on both the left and right sides of the coating stage 103 is used for explanation. Figure 1 and Figure 2 As shown.

[0035] In one exemplary implementation, such as Figure 1 , Figure 2 as well as Figure 3 As shown, a recessed area is provided on the base 101 between the two tracks 102. The recessed area is used to accommodate the drive mechanism that drives the coating stage 103 to move on the tracks 102. The driving force of the drive mechanism is sufficient to drive the coating substrate 104 on the coating stage 103 to complete the coating operation.

[0036] In one exemplary embodiment, the column includes a first column 105 and a second column 106, which are arranged on both sides of the coating stage 103. The first column 105 and the second column 106 are arranged symmetrically on both sides of the coating stage 103 as needed. Figure 1 and Figure 2 As shown.

[0037] In one exemplary embodiment, a coating head fixing plate 115 is provided on the column, and the coating head fixing plate 115 is disposed above the coating platform 103; when the column includes a first column 105 and a second column 106, the coating head fixing plate 115 is disposed between the first column 105 and the second column 106, for example, fixed to the upper ends of the first column 105 and the second column 106. At this time, the first column 105 and the second column 106 are connected by the coating head fixing plate 115 to form a gantry structure, such as... Figure 1 and Figure 2 As shown.

[0038] In one exemplary embodiment, the coating head fixing plate 115 is connected to the column via a lifting unit.

[0039] In one exemplary embodiment, a slit applicator 116 is fixed to the applicator fixing plate 115, for example, the slit applicator 116 is fixed directly below the applicator fixing plate 115, such as... Figure 1 and Figure 2 As shown.

[0040] In one exemplary embodiment, the surface of the coating stage 103 facing the slit head 116 is a flat surface, that is, the upper surface of the coating stage 103 is a flat surface.

[0041] In one exemplary embodiment, a grating ruler is provided on the column.

[0042] In one exemplary embodiment, a grating read head is movably provided on the grating ruler.

[0043] In one exemplary embodiment, the grating reader is fixed to the coating head fixing plate 115.

[0044] In one exemplary embodiment, the grating reader is matched with a grating ruler.

[0045] In one exemplary embodiment, the length of the grating ruler is matched with the lifting height of the lifting unit; this can be understood as the distance the grating reader moves on the grating ruler being matched with the distance the coating head fixing plate 115 moves up and down relative to the lifting unit.

[0046] In one exemplary embodiment, a grating ruler, also known as a grating ruler displacement sensor or grating ruler sensor, is a measurement feedback device that operates using the optical principle of a grating.

[0047] In one exemplary embodiment, the grating reader is, for example, a reflective reader.

[0048] In one exemplary embodiment, a grating ruler is used to obtain height information of the slit applicator.

[0049] In one exemplary embodiment, the first column 105 and the second column 106 are each matched with a lifting unit.

[0050] In one exemplary embodiment, the lifting unit includes a first lifting unit and a second lifting unit.

[0051] In one exemplary embodiment, the first lifting unit includes a first lifting motor 107 and a first lifting module 108; the first lifting motor 107 is fixed on the first column 105, the first lifting module 108 is connected to the first lifting motor 107, and the first lifting module 108 is movably disposed on the first column 105.

[0052] In one exemplary embodiment, the second lifting unit includes a second lifting motor 111 and a second lifting module 112; the second lifting motor 111 is fixed on the second column 106, the second lifting module 112 is connected to the second lifting motor 111, and the second lifting module 112 is movably disposed on the second column 106.

[0053] In one exemplary embodiment, the coating head fixing plate 115 is disposed between the first column 105 and the second column 106.

[0054] In one exemplary embodiment, the grating ruler includes a first grating ruler 109 and a second grating ruler 113.

[0055] In one exemplary embodiment, the grating reader includes a first grating reader 110 and a second grating reader 114.

[0056] In one exemplary embodiment, the first grating reader 110 and the second grating reader 114 are both disposed on the side facing the coating substrate 104 to be coated, i.e. the side facing the incoming material, which is the side facing the coating head fixing plate.

[0057] In one exemplary embodiment, the vertical distance between the first grating reader 110 and the second grating reader 114 and the coating stage 103 may be the same or different, depending on the need.

[0058] In one exemplary embodiment, the first grating ruler 109 is fixed to the first column 105, and the second grating ruler 113 is fixed to the second column 106, as shown below. Figure 1 As shown.

[0059] In one exemplary embodiment, the first grating reader 110 is electrically connected to the first lifting motor, and the second grating reader 114 is electrically connected to the second lifting motor.

[0060] In one exemplary embodiment, a first rangefinder 118 is provided on the outer front end of the coating stage 103 and is movable.

[0061] In one exemplary embodiment, there is not less than one first rangefinder 118, and typically there are at least two first rangefinders 118, such as... Figure 2 As shown.

[0062] In one exemplary embodiment, the first rangefinder 118 corresponds to the non-coating area of ​​the slit applicator 116. Typically, the two ends of the lower surface of the slit applicator 116 are non-coating areas, that is, the first rangefinder 118 corresponds to the ends of the lower surface of the slit applicator 116. Figure 2 As shown.

[0063] In one exemplary embodiment, the first rangefinder 118 is used to calibrate the lower limit position when the slit applicator 116 descends.

[0064] In one exemplary embodiment, the lower limit point is at the same level as the upper surface of the coating stage 103, which can be understood as the slit head 116 not being able to directly contact the upper surface of the coating stage 103 when it descends.

[0065] In one exemplary embodiment, when there are two first rangefinders 118, the two first rangefinders 118 respectively correspond to the non-coating area at the lower end of the slit coating head 116.

[0066] In one exemplary embodiment, each of the two first rangefinders 118 is matched with a grating read head.

[0067] In one exemplary embodiment, the coating head fixing plate 115 is further provided with a thickness gauge 117, which is used to measure the thickness dimensional information of the coating substrate 104 to be coated on the coating stage 103, such as... Figure 1 As shown.

[0068] In one exemplary embodiment, the thickness gauge 117 is disposed on the side of the coating head fixing plate 115 facing the coating substrate 104 to be coated, i.e., the side where the material is supplied, as needed.

[0069] In one exemplary embodiment, the thickness gauge 117 may be a laser thickness gauge, which can obtain the thickness dimension information of the coating substrate 104 by measuring the different distances when there is no coating substrate 104 on the coating stage 103 and when the coating substrate 104 is placed.

[0070] In an exemplary embodiment, after obtaining the thickness information of the coating substrate 104, when there is no coating substrate on the coating stage 103, the lower limit point of the slit head's descent is obtained. The lower limit point is the position of the upper surface of the coating stage 103. The lower limit point is recorded by a grating ruler. The distance between the slit head 116 and the coating substrate 104 is adjusted by the thickness information and height information. This distance can be understood as the threshold size of the gap between the slit head 116 and the upper surface of the coating substrate 104, which is the height of the thickness at the lower limit point and then the height of the gap. For example, if the thickness of the coating substrate 104 is 3 mm, the threshold size of the gap between the slit head and the upper surface of the coating substrate is 0.1 mm, and the lower limit point is recorded as zero by the grating ruler, then when facing the current coating substrate 104, the slit head 116 descends to a position 3.1 mm above the zero point to perform coating operations on the current coating substrate 104.

[0071] Example 2 Example 2 is a control method for the slit spray nozzle coating spacing adjustment device, which uses the above-mentioned slit spray nozzle coating spacing adjustment device.

[0072] Figure 4 This is a schematic flowchart illustrating the control method of the slit coating head spacing adjustment device according to an embodiment of this application. The following will be combined with... Figure 4 The control method of the slit coating head coating spacing adjustment device according to the embodiments of this application will be described in detail.

[0073] First, in step 201, the upper surface of the first rangefinder 118 and the upper surface of the coating stage are adjusted to be on the same plane and recorded as the lower limit point of the slit coating head.

[0074] In one exemplary embodiment, the first rangefinder 118 can extend and retract in the vertical direction so that the upper surface of the first rangefinder 118 and the upper surface of the coating stage 103 are on the same plane, for example, controlled to be on the same horizontal plane.

[0075] In one exemplary embodiment, adjusting the upper surface of the first rangefinder 118 and the upper surface of the coating stage 103 to be on the same plane can be achieved by setting a plane calibration block 119 on the coating stage 103. That is, the plane calibration block 119 is placed flat on the upper surface of the coating stage 103, and the upper surface of the first rangefinder 118 is in contact with the plane calibration block 119 without lifting the plane calibration block 119. At this time, it is considered that the upper surface of the first rangefinder 118 and the upper surface of the coating stage 103 are on the same plane, and the position of the upper surface of the first rangefinder 118 at this time is recorded as the lower limit point of the slit coating head 116.

[0076] In one exemplary embodiment, when using the planar calibration block 119 to correct the lower limit of the descent point, the slit applicator 116 is raised until the gap between the slit applicator 116 and the coating stage 103 is sufficient to place the planar calibration block 119 to correct the lower limit of the descent point.

[0077] In one exemplary embodiment, the planar calibration block 119 is only used to correct the lower limit point. It can be understood that after obtaining the lower limit point, it is not necessary to correct it again before coating each coating substrate 104 during the coating process. That is, the lower limit point is corrected by using the planar calibration block 119 during the first coating operation.

[0078] In one exemplary embodiment, the lower limit of the descent point can be understood as the lowest position of the descent of the slit applicator 116 not being lower than the upper surface of the coating stage 103.

[0079] Step 202: Match the lower surface of the slit applicator to the lower limit point and record the reading of the grating reader as the zero point height.

[0080] In one exemplary embodiment, when the first rangefinder 118 moves directly below the slit spray nozzle, the first rangefinder 118 rises and comes into contact with the non-coated area at the lower end of the slit spray nozzle. Of course, in this process, the first rangefinder 118 can rise and the slit spray nozzle can descend simultaneously.

[0081] In an exemplary embodiment, after the first rangefinder 118 contacts the uncoated area at the lower surface end of the slit applicator 116, the first rangefinder 118 stops moving when it synchronously descends to the lower limit point of the descent, that is, the upper surface of the first rangefinder 118 stops moving at the lower limit point of the descent. When the gap between the uncoated area at the lower surface end of the slit applicator 116 and the corresponding first rangefinder 118 is within ±2 micrometers, the slit applicator 116 stops descending and records the reading of the grating reader as the zero point height.

[0082] In an exemplary embodiment, when the gaps between the uncoated areas at the lower end of the slit applicator 116 and their corresponding first rangefinder 118 are all within ±2 micrometers, the slit applicator 116 stops descending. This can be understood as the slit applicator 116 continuing to descend or performing a reciprocating motion of descending, rising, and descending after the first rangefinder 118 stops moving, until the gaps between the uncoated areas at both ends of the lower surface of the slit applicator 116 and their corresponding first rangefinder 118 are all within ±2 micrometers, the slit applicator 116 stops descending, and the reading of the grating reader is recorded as the zero point height, that is, the lower surface of the slit applicator 116 is at the height of the lower limit point of descent.

[0083] Step 203: Obtain the thickness and dimension information of the coating substrate.

[0084] In one exemplary embodiment, the thickness dimension information of the coating substrate 104 to be coated on the coating stage 103 is obtained.

[0085] In one exemplary embodiment, a laser thickness gauge can be used to obtain the thickness dimension information of the coating substrate 104 by measuring the different distances when there is no coating substrate 104 on the coating stage 103 and when the coating substrate 104 is placed, that is, the actual thickness dimension of the coating substrate 104.

[0086] Step 204: Based on the thickness and dimensions of the substrate, control the slit nozzle to descend to the coating height.

[0087] In an exemplary embodiment, the coating height is determined by moving the thickness of the coating substrate 104 upwards from the zero-point height, and then moving the gap threshold between the slit applicator 116 and the upper surface of the coating substrate 104 upwards. For example, if the thickness of the coating substrate 104 is 3 mm and the coating gap threshold is 0.1 mm, then the lower surface of the slit applicator 116 will drop to 3.1 mm above the zero-point height, at which point the slit applicator 116 is considered to have reached the coating height.

[0088] In one exemplary embodiment, because there are thickness differences between different coating substrates 104, the descent height of the slit head 116 can be adjusted in real time according to the thickness of the coating substrate 104, so that the coating thickness of the different coating substrates 104 is consistent, that is, the coating thickness of the different coating substrates 104 is effectively controlled.

[0089] In an exemplary embodiment, the gap threshold can be understood as the gap size between the lower surface of the slit applicator 116 and the coating substrate 104. For example, if the thickness of the coating substrate 104 is 2 mm, the gap between the lower surface of the slit applicator 116 and the coating substrate 104 is controlled between 0.1 and 0.3 mm, typically 0.2 mm.

[0090] It will be understood by those skilled in the art that the above are merely preferred embodiments of this application and are not intended to limit this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A slit coating head coating spacing adjustment device, characterized in that, include: A base, on which a coating stage is provided, the coating stage reciprocating in the horizontal direction on the base; The base is also provided with a column, which is located on the side of the coating platform and is located on the non-traveling side of the coating platform. The column is equipped with a coating head fixing plate, which is positioned above the coating platform. The coating head fixing plate is connected to the column via a lifting unit; A slit spray nozzle is fixed on the spray nozzle fixing plate; The surface of the coating platform facing the slit coating head is a flat surface; The column is equipped with a grating ruler, and the grating ruler is movably equipped with a grating reading head; The grating reader is fixed to the coating head fixing plate; The grating reader is matched with the grating ruler; The length of the grating ruler is matched with the lifting height of the lifting unit; The coating head fixing plate is also equipped with a thickness gauge, which is used to measure the thickness of the coating substrate to be coated on the coating platform. The grating ruler is used to obtain the height information of the slit coating head; The distance between the slit coating head and the coating substrate is adjusted based on the thickness and height information.

2. The slit coating head spacing adjustment device according to claim 1, characterized in that, The pillars include a first pillar and a second pillar; The first column and the second column are arranged on both sides of the coating platform; The coating head fixing plate is disposed between the first column and the second column.

3. The slit coating head spacing adjustment device according to claim 2, characterized in that, The first column and the second column are each matched with one of the lifting units.

4. The slit coating head spacing adjustment device according to claim 2, characterized in that, The lifting unit includes a first lifting unit and a second lifting unit; The first lifting unit includes a first lifting motor and a first lifting module; The second lifting unit includes a second lifting motor and a second lifting module; The first lifting motor is fixed on the first column, the first lifting module is connected to the first lifting motor, and the first lifting module is movably mounted on the first column. The second lifting motor is fixed on the second column, the second lifting module is connected to the second lifting motor, and the second lifting module is movably mounted on the second column.

5. The slit coating head spacing adjustment device according to claim 3, characterized in that, The grating ruler includes a first grating ruler and a second grating ruler; The grating reader includes a first grating reader and a second grating reader; The first grating ruler is fixed on the first column, and the second grating ruler is fixed on the second column.

6. The slit coating head spacing adjustment device according to claim 1, characterized in that, A first rangefinder is provided on the outer front end of the coating platform and can be raised and lowered. The first rangefinder corresponds to the non-coating area of ​​the slit spray nozzle; The first rangefinder is used to calibrate the lower limit position when the slit spray nozzle descends; The lower limit point is at the same horizontal plane as the upper surface of the coating stage.

7. The slit coating head spacing adjustment device according to claim 6, characterized in that, There are at least two first rangefinders, and the two first rangefinders respectively correspond to the non-coating area at the lower end of the slit coating head.

8. The slit coating head spacing adjustment device according to claim 6, characterized in that, Each of the two first rangefinders is matched with one of the aforementioned grating read heads.

9. The slit coating head spacing adjustment device according to claim 2, characterized in that, The first column and the second column are symmetrically arranged on both sides of the coating platform.

10. The slit coating head spacing adjustment device according to claim 1, characterized in that, The slit applicator is fixed below the applicator fixing plate.

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