Dispensing UV curing device supporting visual positioning of laser chip

Abstract

The utility model discloses a kind of point glue UV curing devices of supporting laser chip vision positioning, comprising: chip bearing module, lifting displacement control mechanism and UV and point glue combination mechanism and multidirectional limiting module;Lifting displacement control mechanism is set to the position above chip bearing module, UV and point glue combination mechanism are installed in lifting displacement control mechanism one side and the position corresponding to chip bearing module;Lifting displacement control mechanism controls the displacement of UV and point glue combination mechanism in horizontal direction and vertical direction;UV and point glue combination mechanism carry out point glue and UV curing to chip to be handled;Multidirectional limiting module controls the horizontal limiting end connected in multidirectional direction to carry out limiting to chip to be handled;The utility model uses the design of multiple electric control sliding table and fine adjustment sliding table, so that the device can be flexibly controlled under multiple angles, high-precision alignment, point glue and curing of chip target area in chip curing procedure are completed.

Description

Technical Field

[0001] This utility model relates to the field of chip curing equipment, and in particular to a dispensing UV curing device that supports visual positioning of laser chips. Background Technology

[0002] In the field of advanced semiconductor packaging, UV curing equipment is a key piece of equipment for core processes such as chip bonding, underfill curing, and microlens array fabrication. The precision and flexibility of its motion control module directly affect the curing quality and production line efficiency. With the popularization of precision manufacturing processes such as 3D stacked packaging, the integration density of chips and substrates continues to increase, which puts forward submicron level requirements for the position matching accuracy of the light source and the chip during the UV curing process.

[0003] However, due to limitations in structural design and functional integration, the optical-mechanical motion control modules of current mainstream equipment are no longer able to meet the precision and flexibility requirements of advanced packaging processes. The motion control modules of traditional UV curing equipment generally adopt a complex structure of "multi-stage mechanical transmission + sub-functional modules". Its core components (such as ball screws, synchronous belts, linear guides, servo motors and independent fine-tuning handwheels) achieve displacement control through multi-link coupling. Although this structure can meet the basic positioning requirements, its cumbersome mechanical transmission chain leads to significant cumulative errors, and the gaps in multiple links (such as gear backlash and screw pitch error) and elastic deformation (such as guide rail deformation under force) will increase with the running time, resulting in a high accuracy decay rate after long-term use.

[0004] More importantly, traditional modules lack integrated fine-tuning units: when it is necessary to compensate for the positional deviation between the chip target area and the UV spot in real time (such as μ-level displacement caused by chip placement offset or uneven adhesive layer thickness), the machine must be stopped and adjusted by external manual fine-tuning handwheels or independent guide rails. The adjustment takes a long time, seriously disrupts the continuity of the production line, and cannot meet the production requirements of "second-level cycle time" for high-density packaging. Utility Model Content

[0005] The main objective of this invention is to provide a dispensing UV curing device that supports visual positioning of laser chips, thereby addressing all or one of the aforementioned problems in the prior art.

[0006] To solve the above-mentioned technical problems, one technical solution adopted by this utility model is: to provide a dispensing UV curing device that supports visual positioning of laser chips, comprising: A workbench, and a UV curing module, a chip carrier module, and a multi-directional limiting module disposed on the workbench; The UV curing module includes: a lifting and displacement control mechanism and a UV and dispensing combination mechanism; the lifting and displacement control mechanism is positioned above the chip carrier module, and its two sides are connected to the upper surface of the worktable; the UV and dispensing combination mechanism is installed on one side of the lifting and displacement control mechanism and corresponds to the position of the chip carrier module; the lifting and displacement control mechanism is used to control the horizontal and vertical displacement of the UV and dispensing combination mechanism; the UV and dispensing combination mechanism is used to dispense adhesive and perform UV curing on the chip to be processed. The multi-directional limiting module includes: a first multi-directional displacement control mechanism, a second multi-directional displacement control mechanism, and a third multi-directional displacement control mechanism; the first and second multi-directional displacement control mechanisms are respectively positioned on opposite sides of the chip carrier module, and the third multi-directional displacement control mechanism is positioned between the first and second multi-directional displacement control mechanisms and corresponds to the front side of the chip carrier module; the tops of the first, second, and third multi-directional displacement control mechanisms facing the chip carrier module are respectively connected to horizontal limiting ends, and the three horizontal limiting ends extend to the edge of the upper surface of the chip carrier module; the upper surface of the chip carrier module is provided with a chip placement area for placing a chip to be processed; the first, second, and third multi-directional displacement control mechanisms are respectively used to control the horizontal limiting ends connected to them to move in the X-axis, Y-axis, and Z-axis directions; the three horizontal limiting ends are respectively used to limit the chip to be processed placed in the chip placement area.

[0007] As an improved solution, the chip carrier module includes: a support platform, which is vertically disposed on the upper surface of the worktable, and the chip placement area is provided on the top of the support platform.

[0008] As an improved solution, the lifting displacement control mechanism includes: a gantry frame vertically arranged on one side of the support platform and higher than the support platform; a first linear module horizontally arranged on the top of the gantry frame; a second linear module vertically mounted on the slider of the first linear module; an equipment integration frame vertically mounted on the slider of the second linear module; and a high-precision UV module and a high-precision dispensing module respectively mounted on both sides of the equipment integration frame. The first linear module is arranged along the X-axis direction, and the second linear module is arranged along the Z-axis direction; The first linear module is used to control the horizontal displacement of the equipment integration rack, and the second linear module is used to control the vertical displacement of the equipment integration rack.

[0009] As an improved solution, the high-precision UV module includes: a first electrically controlled slide, a second electrically controlled slide, a first vision camera, and a pair of UV modules; The first electrically controlled slide is horizontally connected to one side of the equipment integration frame along the Y-axis direction, the second electrically controlled slide is vertically connected to the slider of the first electrically controlled slide along the Z-axis direction, the first vision camera is vertically connected to the bottom of the slider of the second electrically controlled slide, and a pair of UV modules are symmetrically installed on both sides of the slider of the second electrically controlled slide and corresponding to the positions on both sides of the first vision camera. Each of the UV modules has a gap with the first vision camera, and both UV modules are tilted from top to bottom. The two UV modules are located above the support platform and facing the chip placement area. The first electrically controlled slide is used to drive the first vision camera and the two UV modules to move in the Y-axis direction; the second electrically controlled slide is used to drive the first vision camera and the two UV modules to move in the Z-axis direction; the first vision camera is used for visual positioning during the UV curing process, and the UV modules are used for UV curing of the chip in the chip placement area.

[0010] As an improved solution, the high-precision dispensing module includes: a third electrically controlled slide, a fourth electrically controlled slide, and a first electric dispensing gun; Relative to the first electrically controlled slide, the third electrically controlled slide is horizontally connected to the other side of the equipment integration frame along the Y-axis; the fourth electrically controlled slide is vertically connected to the slider of the third electrically controlled slide along the Z-axis, and the first electric dispensing gun is vertically connected to the bottom of the slider of the fourth electrically controlled slide. The third electrically controlled slide is used to drive the first electric dispensing gun to move in the Y-axis direction; the fourth electrically controlled slide is used to drive the first electric dispensing gun to move in the Z-axis direction; the first electric dispensing gun is used to dispense glue to the corresponding position on the chip.

[0011] As an improved solution, the first multi-directional displacement control mechanism includes: a fifth electrically controlled slide table disposed on the upper surface of the worktable and located on one side of the support table and disposed along the Y-axis direction; a sixth electrically controlled slide table disposed on the slider of the fifth electrically controlled slide table and disposed along the X-axis direction; a first electrically controlled arc-shaped slide table disposed on the slider of the sixth electrically controlled slide table and disposed along the X-axis direction; a seventh electrically controlled slide table disposed on the slider of the first electrically controlled arc-shaped slide table and disposed along the Z-axis direction; a second electrically controlled arc-shaped slide table disposed on the slider of the seventh electrically controlled slide table and disposed along the Z-axis direction; and a third electrically controlled arc-shaped slide table disposed on the slider of the second electrically controlled arc-shaped slide table and disposed along the Y-axis direction. The fifth electrically controlled slide is used to control the sixth electrically controlled slide to move along the Y-axis; the first electrically controlled arc-shaped slide is used to control the seventh electrically controlled slide to move in an arc shape in the horizontal direction along the Y-axis; the seventh electrically controlled slide is used to control the second electrically controlled arc-shaped slide to move along the Z-axis; the second electrically controlled arc-shaped slide is used to control the third electrically controlled arc-shaped slide to move in an arc shape in the horizontal direction along the Y-axis.

[0012] As an improved solution, the second multi-directional displacement control mechanism includes: an eighth electrically controlled slide, disposed on the upper surface of the worktable and located on the other side of the support platform and disposed along the X-axis direction relative to the fifth electrically controlled slide; a ninth electrically controlled slide, disposed on the slider of the eighth electrically controlled slide and disposed along the Y-axis direction; a fourth electrically controlled arc-shaped slide, disposed on the slider of the ninth electrically controlled slide and disposed along the Y-axis direction; a tenth electrically controlled slide, disposed on the slider of the fourth electrically controlled arc-shaped slide and disposed along the Z-axis direction; a fifth electrically controlled arc-shaped slide, disposed on the slider of the tenth electrically controlled slide and disposed along the Z-axis direction; and a sixth electrically controlled arc-shaped slide, disposed on the slider of the fifth electrically controlled arc-shaped slide and disposed along the Y-axis direction. The eighth electrically controlled slide is used to control the displacement of the ninth electrically controlled slide along the X-axis; the ninth electrically controlled slide is used to control the position of the fourth electrically controlled arc-shaped slide along the Y-axis; the fourth electrically controlled arc-shaped slide is used to control the arc-shaped displacement of the tenth electrically controlled slide along the X-axis in a horizontal direction; the tenth electrically controlled slide is used to control the displacement of the fifth electrically controlled arc-shaped slide along the Z-axis; and the fifth electrically controlled arc-shaped slide is used to control the arc-shaped displacement of the sixth electrically controlled arc-shaped slide along the Y-axis in a horizontal direction.

[0013] As an improved solution, the third multi-directional displacement control mechanism includes: an eleventh electrically controlled slide table disposed on the upper surface of the worktable and located in front of the support table and disposed along the Y-axis direction; a twelfth electrically controlled slide table disposed on the slider of the eleventh electrically controlled slide table and disposed along the X-axis direction; a seventh electrically controlled arc-shaped slide table disposed on the slider of the twelfth electrically controlled slide table and disposed along the X-axis direction; a thirteenth electrically controlled slide table disposed on the slider of the seventh electrically controlled arc-shaped slide table and disposed along the Z-axis direction; an eighth electrically controlled arc-shaped slide table disposed on the slider of the thirteenth electrically controlled slide table and disposed along the Z-axis direction; and a ninth electrically controlled arc-shaped slide table disposed on the slider of the eighth electrically controlled arc-shaped slide table and disposed along the X-axis direction. The eleventh electrically controlled slide is used to control the displacement of the twelfth electrically controlled slide along the Y-axis; the twelfth electrically controlled slide is used to control the displacement of the seventh electrically controlled arc-shaped slide along the X-axis; the seventh electrically controlled arc-shaped slide is used to control the thirteenth electrically controlled slide to perform arc-shaped displacement in the horizontal direction along the Y-axis; the thirteenth electrically controlled slide is used to control the displacement of the eighth electrically controlled arc-shaped slide along the Z-axis; and the eighth electrically controlled arc-shaped slide is used to control the arc-shaped displacement of the ninth electrically controlled arc-shaped slide along the horizontal direction along the X-axis.

[0014] As an improved solution, the concave surface of the first electrically controlled arc-shaped slide faces upward, while the concave surfaces of the second and third electrically controlled arc-shaped slides both face the chip placement area. The concave surface of the fourth electrically controlled arc-shaped slide faces upward, while the concave surfaces of the fifth and sixth electrically controlled arc-shaped slides both face the chip placement area. The concave surface of the seventh electrically controlled arc-shaped slide faces upward, while the concave surfaces of the eighth and ninth electrically controlled arc-shaped slides both face the chip placement area.

[0015] As an improved solution, the three horizontal limiting ends are respectively a first horizontal limiting end, a second horizontal limiting end, and a third horizontal limiting end; The first horizontal limiting end is disposed on one side of the slider of the third electrically controlled arc-shaped slide along the X-axis direction; the third electrically controlled arc-shaped slide is used to control the first horizontal limiting end to make arc-shaped displacement in the vertical direction along the Z-axis direction; The second horizontal limiting end is disposed on one side of the slider of the sixth electrically controlled arc-shaped slide along the X-axis direction; the sixth electrically controlled arc-shaped slide is used to control the second horizontal limiting end to make arc-shaped displacement in the vertical direction along the Z-axis direction; The third horizontal limiting end is disposed on one side of the slider of the ninth electrically controlled arc-shaped slide along the X-axis direction; the ninth electrically controlled arc-shaped slide is used to control the third horizontal limiting end to make arc-shaped displacement in the vertical direction along the Z-axis direction.

[0016] The beneficial effects of this utility model are as follows: This utility model adopts the design of multiple electrically controlled slides and fine-tuning slides, which enables the device to be flexibly controlled at multiple angles. In the chip curing process, it can complete high-precision dispensing of the chip target area and high-precision alignment and curing of the chip target area. At the same time, it supports high-precision positioning of the chip, which improves the quality, effectiveness and work efficiency of chip curing, reduces certain labor costs, makes up for the defects of the prior art, and has high application value. Attached Figure Description

[0017] Figure 1This is a three-dimensional structural diagram of a dispensing UV curing device that supports visual positioning of laser chips in an embodiment of this utility model. Figure 2 yes Figure 1 Enlarged structural diagram at point A; Figure 3 This is a three-dimensional structural diagram of a dispensing UV curing device that supports visual positioning of laser chips in an embodiment of this utility model, viewed from another perspective. Figure 4 yes Figure 3 Enlarged structural diagram at point B; Figure 5 This is a three-dimensional structural diagram of a dispensing UV curing device that supports visual positioning of laser chips in an embodiment of this utility model, viewed from another perspective. Figure 6 yes Figure 5 Enlarged structural diagram at point C; The components in the attached diagram are labeled as follows: 1. Workbench; 2. Lifting and displacement control mechanism; 3. UV and dispensing combination mechanism; 4. First multi-directional displacement control mechanism; 5. Second multi-directional displacement control mechanism; 6. Third multi-directional displacement control mechanism; 7. Support platform; 8. Chip placement area; 9. Gantry frame; 10. First linear module; 11. Second linear module; 12. Equipment integration rack; 13. First electrically controlled slide table; 14. Second electrically controlled slide table; 15. First vision camera; 16. UV module; 17. Connecting plate; 18. Vision camera field of view trajectory; 19. Third electrically controlled slide table; 20. Fourth electrically controlled slide table; 21. First electric dispensing gun; 401. Fifth electrically controlled slide table; 402. Sixth electrically controlled slide table; 403. First electrically controlled arc-shaped slide table; 404. Seventh electrically controlled slide table; 405. Second electrically controlled arc-shaped slide table; 406. Third electrically controlled arc-shaped slide table; 407. First horizontal limit end; 501. Eighth electrically controlled slide table; 502. Ninth electrically controlled slide table; 503. Fourth electrically controlled arc-shaped slide table; 504. Tenth electrically controlled slide table; 505. Fifth electrically controlled arc-shaped slide table; 506. Sixth electrically controlled arc-shaped slide table; 507. Second horizontal limit end; 601. Eleventh electrically controlled slide table; 602. Twelfth electrically controlled slide table; 603. Seventh electrically controlled arc-shaped slide table; 604. Thirteenth electrically controlled slide table; 605. Eighth electrically controlled arc-shaped slide table; 606. Ninth electrically controlled arc-shaped slide table; 607. Third horizontal limit end. Detailed Implementation

[0018] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0019] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0020] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0021] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0022] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0023] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0024] In this utility model, it should be noted that the non-arc-shaped electrically controlled slides are all micro electric fine-tuning slides driven by motors, and the arc-shaped electrically controlled slides are all two-dimensional electric arc swing tables driven by motors.

[0025] Please see Figures 1-6 The embodiments of this utility model include: A dispensing UV curing device that supports visual positioning of laser chips includes: a worktable 1, and a UV curing module, a chip carrier module and a multi-directional limiting module disposed on the worktable 1, wherein the chip carrier module is disposed at the center position of the worktable 1. The UV curing module includes: a lifting and displacement control mechanism 2 and a UV and dispensing combination mechanism 3; the lifting and displacement control mechanism 2 is positioned above the chip carrier module, and its two sides are connected to the upper surface of the worktable 1; the UV and dispensing combination mechanism 3 is installed on one side of the lifting and displacement control mechanism 2 and corresponds to the position of the chip carrier module; the lifting and displacement control mechanism 2 can control the UV and dispensing combination mechanism 3 to move horizontally left and right, or to move vertically up and down; the UV and dispensing combination mechanism 3 is used to dispense adhesive and perform UV curing on the chip to be processed. The multi-directional limiting module includes: a first multi-directional displacement control mechanism 4, a second multi-directional displacement control mechanism 5, and a third multi-directional displacement control mechanism 6; the first multi-directional displacement control mechanism 4 and the second multi-directional displacement control mechanism 5 are respectively disposed on both sides of the chip carrier module, and the third multi-directional displacement control mechanism 6 is disposed between the first multi-directional displacement control mechanism 4 and the second multi-directional displacement control mechanism 5 and corresponds to the front side of the chip carrier module; the tops of the first multi-directional displacement control mechanism 4, the second multi-directional displacement control mechanism 5, and the third multi-directional displacement control mechanism 6 face... One side of the chip carrier module is connected to a horizontal limiting end, and the three horizontal limiting ends extend to the edge of the upper surface of the chip carrier module. The upper surface of the chip carrier module is provided with a chip placement area 8. When a chip is placed in the chip placement area 8, the three horizontal limiting ends press against the chip to limit its position. The first multi-directional displacement control mechanism 4, the second multi-directional displacement control mechanism 5, and the third multi-directional displacement control mechanism 6 are used to control the horizontal limiting ends connected to them to move and fine-tune in the X, Y, and Z axes, respectively. Through the cooperation of the above mechanisms, the UV curing operation of the chip element is realized.

[0026] As one embodiment of this utility model, the chip carrier module adopts a support platform 7. The support platform 7 has a certain height and is vertically set on the upper surface of the workbench 1. The chip placement area 8 is provided on the top of the support platform 7.

[0027] As one embodiment of this utility model, the lifting displacement control mechanism 2 includes: a gantry frame 9 vertically arranged on one side of the support platform 7 and higher than the support platform 7; a first linear module 10 horizontally arranged on the top of the gantry frame 9; a second linear module 11 vertically mounted on the slider of the first linear module 10; an equipment integration frame 12 vertically mounted on the slider of the second linear module 11; and a high-precision UV module 16 and a high-precision dispensing module mounted on both sides of the equipment integration frame 12. The first linear module 10 can control the high-precision UV module 16 and the high-precision dispensing module on the equipment integration frame 12 to move horizontally, and the second linear module 11 can control the high-precision UV module 16 and the high-precision dispensing module on the equipment integration frame 12 to move vertically.

[0028] Optionally, the high-precision UV module 16 includes: a first electrically controlled slide 13, a second electrically controlled slide 14, a first vision camera 15, and a pair of UV modules 16; the first electrically controlled slide 13 is horizontally connected to one side of the equipment integration frame 12 along the Y-axis direction, the second electrically controlled slide 14 is vertically connected to the slider of the first electrically controlled slide 13 along the Z-axis direction, the first vision camera 15 is vertically connected downwards to the bottom of the slider of the second electrically controlled slide 14, and the pair of UV modules 16 are symmetrically mounted on both sides of the slider of the second electrically controlled slide 14 via a connecting plate 17, corresponding to the positions on both sides of the first vision camera 15. There is a gap between module 16 and the first vision camera 15, and both UV modules 16 are tilted from top to bottom. The two UV modules 16 are located above the support platform 7 and facing the chip placement area 8. The first electrically controlled slide 13 can drive the first vision camera 15 and the two UV modules 16 to make fine adjustments in the horizontal direction of the Y-axis, and the second electrically controlled slide 14 can drive the first vision camera 15 and the two UV modules 16 to make fine adjustments in the vertical direction of the Z-axis. The first vision camera 15 is used for visual positioning during the UV curing process, and the UV modules 16 are used to UV cure the chip after dispensing.

[0029] Optionally, the high-precision dispensing module includes: a third electrically controlled slide 19, a fourth electrically controlled slide 20, and a first electrically driven dispensing gun 21; the third electrically controlled slide 19 is horizontally connected to the other side of the device integration frame 12 along the Y-axis, the fourth electrically controlled slide 20 is vertically connected to the slider of the third electrically controlled slide 19 along the Z-axis, and the first electrically driven dispensing gun 21 is vertically connected to the bottom of the slider of the fourth electrically controlled slide 20; the third electrically controlled slide 19 can drive the first electrically driven dispensing gun 21 to make fine adjustments in the horizontal direction of the Y-axis, and the fourth electrically controlled slide 20 can drive the first electrically driven dispensing gun 21 to make fine adjustments in the vertical direction of the Z-axis; the first electrically driven dispensing gun 21 is used to dispense glue to the corresponding position on the chip.

[0030] As one embodiment of this utility model, the first multi-directional displacement control mechanism 4 includes: a fifth electrically controlled slide 401 disposed on the worktable 1 to the left of the support platform 7 and disposed along the Y-axis direction; a sixth electrically controlled slide 402 disposed on the slider of the fifth electrically controlled slide 401 and disposed along the X-axis direction; a first electrically controlled arc-shaped slide 403 disposed on the slider of the sixth electrically controlled slide 402 and disposed along the X-axis direction; a seventh electrically controlled slide 404 disposed on the slider of the first electrically controlled arc-shaped slide 403 and disposed along the Z-axis direction; a second electrically controlled arc-shaped slide 405 disposed on the slider of the seventh electrically controlled slide 404 and disposed along the Z-axis direction; a third electrically controlled arc-shaped slide 406 disposed on the slider of the second electrically controlled arc-shaped slide 405 and disposed along the Y-axis direction; and a first horizontal limiting end 407 disposed along the X-axis direction on one side of the slider of the third electrically controlled arc-shaped slide 406. The fifth electrically controlled slide 401 is used to control the sixth electrically controlled slide 402 to move along the Y-axis direction; the first electrically controlled arc-shaped slide 403 is used to control the seventh electrically controlled slide 404 to move in an arc-shaped manner in the horizontal direction along the Y-axis direction; the seventh electrically controlled slide 404 is used to control the second electrically controlled arc-shaped slide 405 to move along the Z-axis direction; the second electrically controlled arc-shaped slide 405 is used to control the third electrically controlled arc-shaped slide 406 to move in an arc-shaped manner in the horizontal direction along the Y-axis direction; the concave surface of the first electrically controlled arc-shaped slide 403 faces upward, and the concave surfaces of the second electrically controlled arc-shaped slide 405 and the third electrically controlled arc-shaped slide 406 both face the chip placement area 8; the third electrically controlled arc-shaped slide 406 is used to control the first horizontal limiting end 407 to move in an arc-shaped manner in the vertical direction along the Z-axis direction; As one embodiment of this utility model, the second multi-directional displacement control mechanism 5 includes: an eighth electrically controlled slide 501 disposed on the worktable 1 to the right of the support platform 7, corresponding to the fifth electrically controlled slide 401 and disposed along the X-axis direction; a ninth electrically controlled slide 502 disposed on the slider of the eighth electrically controlled slide 501 and disposed along the Y-axis direction; a fourth electrically controlled arc-shaped slide 503 disposed on the slider of the ninth electrically controlled slide 502 and disposed along the Y-axis direction; and a slider of the fourth electrically controlled arc-shaped slide 503. The system comprises a tenth electrically controlled slide 504 positioned along the Z-axis, a fifth electrically controlled arc-shaped slide 505 positioned on the slider of the tenth electrically controlled slide 504 and along the Z-axis, and a sixth electrically controlled arc-shaped slide 506 positioned on the slider of the fifth electrically controlled arc-shaped slide 505 and along the Y-axis. A second horizontal limiting end 507 is positioned along the X-axis on one side of the slider of the sixth electrically controlled arc-shaped slide 506. The eighth electrically controlled slide 501 is used to control the ninth electrically controlled slide 502 along the X-axis. Displacement; the ninth electrically controlled slide 502 is used to control the position of the fourth electrically controlled arc-shaped slide 503 along the Y-axis; the fourth electrically controlled arc-shaped slide 503 is used to control the tenth electrically controlled slide 504 to perform arc-shaped displacement in the horizontal direction along the X-axis; the tenth electrically controlled slide 504 is used to control the displacement of the fifth electrically controlled arc-shaped slide 505 along the Z-axis; the fifth electrically controlled arc-shaped slide 505 is used to control the displacement of the sixth electrically controlled arc-shaped slide 506 along the Y-axis. The fourth electrically controlled arc-shaped slide 503 has its concave surface facing upwards, while the concave surfaces of the fifth electrically controlled arc-shaped slide 505 and the sixth electrically controlled arc-shaped slide 506 both face the chip placement area 8. The second horizontal limiting end 507 is disposed along the X-axis on one side of the slider of the sixth electrically controlled arc-shaped slide 506. The sixth electrically controlled arc-shaped slide 506 is used to control the second horizontal limiting end 507 to perform arc-shaped displacement in the vertical direction along the Z-axis. As one embodiment of this utility model, the third multi-directional displacement control mechanism 6 includes: an eleventh electrically controlled slide 601 disposed on the worktable 1 in front of the support platform 7 and disposed along the Y-axis; a twelfth electrically controlled slide 602 disposed on the slider of the eleventh electrically controlled slide 601 and disposed along the X-axis; a seventh electrically controlled arc-shaped slide 603 disposed on the slider of the twelfth electrically controlled slide 602 and disposed along the X-axis; and a seventh electrically controlled arc-shaped slide 603 disposed on the slider of the seventh electrically controlled arc-shaped slide 603 and disposed along the Z-axis. The system includes a thirteenth electrically controlled slide 604, an eighth electrically controlled arc-shaped slide 605 mounted on the slider of the thirteenth electrically controlled slide 604 and positioned along the Z-axis, and a ninth electrically controlled arc-shaped slide 606 mounted on the slider of the eighth electrically controlled arc-shaped slide 605 and positioned along the X-axis. A third horizontal limiting end 607 is positioned along the X-axis on one side of the slider of the ninth electrically controlled arc-shaped slide 606. The eleventh electrically controlled slide 601 is used to control the displacement of the twelfth electrically controlled slide 602 along the Y-axis. The twelfth electrically controlled slide 602 is used to control the seventh electrically controlled arc-shaped slide 603 to move along the X-axis; the seventh electrically controlled arc-shaped slide 603 is used to control the thirteenth electrically controlled slide 604 to move in an arc shape in the horizontal direction along the Y-axis; the thirteenth electrically controlled slide 604 is used to control the eighth electrically controlled arc-shaped slide 605 to move along the Z-axis; the eighth electrically controlled arc-shaped slide 605 is used to control the ninth electrically controlled arc-shaped slide 606 to move along the X-axis. The seventh electrically controlled arc-shaped slide 603 has its concave surface facing upwards, while the concave surfaces of the eighth electrically controlled arc-shaped slide 605 and the ninth electrically controlled arc-shaped slide 606 both face the chip placement area 8. The third horizontal limiting end 607 is disposed along the X-axis on one side of the slider of the ninth electrically controlled arc-shaped slide 606. The ninth electrically controlled arc-shaped slide 606 is used to control the third horizontal limiting end 607 to perform arc-shaped displacement in the vertical direction along the Z-axis.

[0031] As one embodiment of this utility model, before operation, each displacement control component controls the horizontal limiting ends around the chip placement area 8 to move away from the chip placement area 8. Then, the chip to be processed is placed in the chip placement area 8. Each displacement control component controls its respective horizontal limiting end to press against the chip to be processed in the chip placement area 8. Then, based on the corresponding displacement and fine-tuning control components, the first electric dispensing gun 21 is controlled to align and dispense the chip on the chip placement area 8. After that, the first vision camera 15 is controlled to align the chip on the chip placement area 8, and then the two UV modules 16 are used to cure the dispensed chip.

[0032] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structure made using the contents of this utility model specification and drawings, or directly or indirectly applied to other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A dispensing UV curing device supporting visual positioning of laser chips, characterized in that, include: Workbench (1), and UV curing module, chip carrier module and multi-directional limiting module disposed on the workbench (1); The UV curing module includes: a lifting displacement control mechanism (2) and a UV and dispensing combination mechanism (3); the lifting displacement control mechanism (2) is positioned above the chip carrier module, and both sides of the lifting displacement control mechanism (2) are connected to the upper surface of the worktable (1); the UV and dispensing combination mechanism (3) is installed on one side of the lifting displacement control mechanism (2) and corresponds to the position of the chip carrier module; the lifting displacement control mechanism (2) is used to control the displacement of the UV and dispensing combination mechanism (3) in the horizontal and vertical directions; the UV and dispensing combination mechanism (3) is used to dispense and UV cure the chip to be processed. The multi-directional limiting module includes: a first multi-directional displacement control mechanism (4), a second multi-directional displacement control mechanism (5), and a third multi-directional displacement control mechanism (6); the first multi-directional displacement control mechanism (4) and the second multi-directional displacement control mechanism (5) are respectively positioned on both sides of the chip carrier module, and the third multi-directional displacement control mechanism (6) is positioned between the first multi-directional displacement control mechanism (4) and the second multi-directional displacement control mechanism (5) and corresponds to the front side of the chip carrier module; the first multi-directional displacement control mechanism (4), the second multi-directional displacement control mechanism (5), and the third multi-directional displacement control mechanism (6) are positioned on both sides of the chip carrier module. The top of the mechanism (6) is connected to a horizontal limiting end on the side facing the chip carrier module. The three horizontal limiting ends extend to the edge of the upper surface of the chip carrier module. The upper surface of the chip carrier module is provided with a chip placement area (8) for placing the chip to be processed. The first multi-directional displacement control mechanism (4), the second multi-directional displacement control mechanism (5) and the third multi-directional displacement control mechanism (6) are respectively used to control the horizontal limiting ends connected to them to move in the X-axis, Y-axis and Z-axis directions. The three horizontal limiting ends are respectively used to limit the chip to be processed placed in the chip placement area (8).

2. The dispensing UV curing device supporting visual positioning of laser chips according to claim 1, characterized in that: The chip carrier module includes: a support platform (7), which is vertically arranged on the upper surface of the workbench (1), and the chip placement area (8) is provided on the top of the support platform (7).

3. The dispensing UV curing device for supporting visual positioning of laser chips according to claim 2, characterized in that: The lifting displacement control mechanism (2) includes: a gantry frame (9) vertically arranged on one side of the support platform (7) and higher than the support platform (7); a first linear module (10) horizontally arranged on the top of the gantry frame (9); a second linear module (11) vertically installed on the slider of the first linear module (10); an equipment integration frame (12) vertically installed on the slider of the second linear module (11); and a high-precision UV module (16) and a high-precision dispensing module respectively installed on both sides of the equipment integration frame (12); The first linear module (10) is arranged along the X-axis direction, and the second linear module (11) is arranged along the Z-axis direction; The first linear module (10) is used to control the horizontal displacement of the equipment integration rack (12), and the second linear module (11) is used to control the vertical displacement of the equipment integration rack (12).

4. The dispensing UV curing device for supporting visual positioning of laser chips according to claim 3, characterized in that: The high-precision UV module (16) includes: a first electrically controlled slide (13), a second electrically controlled slide (14), a first vision camera (15), and a pair of UV modules (16). The first electrically controlled slide (13) is horizontally connected to one side of the equipment integration frame (12) along the Y-axis direction, and the second electrically controlled slide (14) is vertically connected to the slider of the first electrically controlled slide (13) along the Z-axis direction. The first vision camera (15) is vertically connected to the bottom of the slider of the second electrically controlled slide (14) and a pair of UV modules (16) are symmetrically installed on both sides of the slider of the second electrically controlled slide (14) and corresponding to the positions on both sides of the first vision camera (15). Each of the UV modules (16) has a gap with the first vision camera (15), and both UV modules (16) are tilted from top to bottom. The two UV modules (16) are located above the support platform (7) and facing the chip placement area (8). The first electrically controlled slide (13) is used to drive the first vision camera (15) and the two UV modules (16) to move in the Y-axis direction; the second electrically controlled slide (14) is used to drive the first vision camera (15) and the two UV modules (16) to move in the Z-axis direction; the first vision camera (15) is used for visual positioning during the UV curing process, and the UV modules (16) are used for UV curing of the chips in the chip placement area (8).

5. The dispensing UV curing device for supporting visual positioning of laser chips according to claim 4, characterized in that: The high-precision dispensing module includes: a third electrically controlled slide (19), a fourth electrically controlled slide (20), and a first electric dispensing gun (21). Relative to the first electrically controlled slide (13), the third electrically controlled slide (19) is horizontally connected to the other side of the equipment integration frame (12) along the Y-axis direction; the fourth electrically controlled slide (20) is vertically connected to the slider of the third electrically controlled slide (19) along the Z-axis direction, and the first electric dispensing gun (21) is vertically connected to the bottom of the slider of the fourth electrically controlled slide (20); The third electrically controlled slide (19) is used to drive the first electric dispensing gun (21) to move in the Y-axis direction; the fourth electrically controlled slide (20) is used to drive the first electric dispensing gun (21) to move in the Z-axis direction; the first electric dispensing gun (21) is used to dispense glue to the corresponding position on the chip.

6. The dispensing UV curing device for supporting visual positioning of laser chips according to claim 5, characterized in that: The first multi-directional displacement control mechanism (4) includes: a fifth electrically controlled slide (401) disposed on the upper surface of the worktable (1) and located on one side of the support platform (7) and disposed along the Y-axis direction; a sixth electrically controlled slide (402) disposed on the slider of the fifth electrically controlled slide (401) and disposed along the X-axis direction; a first electrically controlled arc-shaped slide (403) disposed on the slider of the sixth electrically controlled slide (402) and disposed along the X-axis direction; a seventh electrically controlled slide (404) disposed on the slider of the first electrically controlled arc-shaped slide (403) and disposed along the Z-axis direction; a second electrically controlled arc-shaped slide (405) disposed on the slider of the seventh electrically controlled slide (404) and disposed along the Z-axis direction; and a third electrically controlled arc-shaped slide (406) disposed on the slider of the second electrically controlled arc-shaped slide (405) and disposed along the Y-axis direction. The fifth electrically controlled slide (401) is used to control the sixth electrically controlled slide (402) to move along the Y-axis direction; the first electrically controlled arc-shaped slide (403) is used to control the seventh electrically controlled slide (404) to move in an arc shape in the horizontal direction along the Y-axis direction; the seventh electrically controlled slide (404) is used to control the second electrically controlled arc-shaped slide (405) to move along the Z-axis direction; the second electrically controlled arc-shaped slide (405) is used to control the third electrically controlled arc-shaped slide (406) to move in an arc shape in the horizontal direction along the Y-axis direction.

7. The dispensing UV curing device for supporting visual positioning of laser chips according to claim 6, characterized in that: The second multi-directional displacement control mechanism (5) includes: an eighth electrically controlled slide (501) disposed on the upper surface of the worktable (1) and located on the other side of the support platform (7) and disposed along the X-axis direction relative to the fifth electrically controlled slide (401); a ninth electrically controlled slide (502) disposed on the slider of the eighth electrically controlled slide (501) and disposed along the Y-axis direction; a fourth electrically controlled arc-shaped slide (503) disposed on the slider of the ninth electrically controlled slide (502) and disposed along the Y-axis direction; a tenth electrically controlled slide (504) disposed on the slider of the fourth electrically controlled arc-shaped slide (503) and disposed along the Z-axis direction; a fifth electrically controlled arc-shaped slide (505) disposed on the slider of the tenth electrically controlled slide (504) and disposed along the Z-axis direction; and a sixth electrically controlled arc-shaped slide (506) disposed on the slider of the fifth electrically controlled arc-shaped slide (505) and disposed along the Y-axis direction. The eighth electrically controlled slide (501) is used to control the displacement of the ninth electrically controlled slide (502) along the X-axis; the ninth electrically controlled slide (502) is used to control the position of the fourth electrically controlled arc slide (503) along the Y-axis; the fourth electrically controlled arc slide (503) is used to control the arc displacement of the tenth electrically controlled slide (504) in the horizontal direction along the X-axis; the tenth electrically controlled slide (504) is used to control the displacement of the fifth electrically controlled arc slide (505) in the Z-axis; the fifth electrically controlled arc slide (505) is used to control the arc displacement of the sixth electrically controlled arc slide (506) in the horizontal direction along the Y-axis.

8. The dispensing UV curing device for supporting visual positioning of laser chips according to claim 7, characterized in that: The third multi-directional displacement control mechanism (6) includes: an eleventh electrically controlled slide (601) disposed on the upper surface of the worktable (1) and located in front of the support platform (7) and disposed along the Y-axis direction; a twelfth electrically controlled slide (602) disposed on the slider of the eleventh electrically controlled slide (601) and disposed along the X-axis direction; a seventh electrically controlled arc-shaped slide (603) disposed on the slider of the twelfth electrically controlled slide (602) and disposed along the X-axis direction; a thirteenth electrically controlled slide (604) disposed on the slider of the seventh electrically controlled arc-shaped slide (603) and disposed along the Z-axis direction; an eighth electrically controlled arc-shaped slide (605) disposed on the slider of the thirteenth electrically controlled slide (604) and disposed along the Z-axis direction; and a ninth electrically controlled arc-shaped slide (606) disposed on the slider of the eighth electrically controlled arc-shaped slide (605) and disposed along the X-axis direction. The eleventh electrically controlled slide (601) is used to control the twelfth electrically controlled slide (602) to move along the Y-axis; the twelfth electrically controlled slide (602) is used to control the seventh electrically controlled arc-shaped slide (603) to move along the X-axis; the seventh electrically controlled arc-shaped slide (603) is used to control the thirteenth electrically controlled slide (604) to move in an arc-shaped manner in the horizontal direction along the Y-axis; the thirteenth electrically controlled slide (604) is used to control the eighth electrically controlled arc-shaped slide (605) to move along the Z-axis; the eighth electrically controlled arc-shaped slide (605) is used to control the ninth electrically controlled arc-shaped slide (606) to move in an arc-shaped manner in the horizontal direction along the X-axis.

9. The dispensing UV curing device for supporting visual positioning of laser chips according to claim 8, characterized in that: The concave surface of the first electrically controlled arc-shaped slide (403) faces upward, and the concave surfaces of the second electrically controlled arc-shaped slide (405) and the third electrically controlled arc-shaped slide (406) both face the chip placement area (8). The concave surface of the fourth electrically controlled arc-shaped slide (503) faces upward, and the concave surfaces of the fifth electrically controlled arc-shaped slide (505) and the sixth electrically controlled arc-shaped slide (506) both face the chip placement area (8). The concave surface of the seventh electrically controlled arc-shaped slide (603) faces upward, and the concave surfaces of the eighth electrically controlled arc-shaped slide (605) and the ninth electrically controlled arc-shaped slide (606) both face the chip placement area (8).

10. The dispensing UV curing device for supporting visual positioning of laser chips according to claim 9, characterized in that: The three horizontal limiting ends are the first horizontal limiting end (407), the second horizontal limiting end (507) and the third horizontal limiting end (607). The first horizontal limiting end (407) is disposed on one side of the slider of the third electrically controlled arc-shaped slide (406) along the X-axis direction; the third electrically controlled arc-shaped slide (406) is used to control the first horizontal limiting end (407) to perform arc-shaped displacement in the vertical direction along the Z-axis direction; The second horizontal limiting end (507) is disposed on one side of the slider of the sixth electrically controlled arc-shaped slide (506) along the X-axis direction; the sixth electrically controlled arc-shaped slide (506) is used to control the second horizontal limiting end (507) to make arc-shaped displacement in the vertical direction along the Z-axis direction; The third horizontal limiting end (607) is disposed on one side of the slider of the ninth electrically controlled arc slide (606) along the X-axis direction; the ninth electrically controlled arc slide (606) is used to control the third horizontal limiting end (607) to make arc displacement in the vertical direction along the Z-axis direction.

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