Quick-release positioning screen plate and cleaning tank

Abstract

The utility model belongs to the technical field of silicon wafer cleaning, especially relates to silicon wafer cleaning tank, the utility model provides a kind of quick-release positioning screen plate and cleaning tank, it includes: screen plate, its surface is provided with a plurality of threaded holes, the side of threaded hole is provided with dismounting through-hole;Dismounting bolt is connected in the dismounting threaded groove of tank body by being adapted to pass through dismounting through-hole;Quick-release gasket, its surface is provided with fixed through-hole, fixed bolt passes through fixed through-hole and engages with threaded hole, to connect screen plate and quick-release gasket;The arc-shaped through-hole is provided on the quick-release gasket;The utility model is engaged by fixed bolt and threaded hole, ensure that screen plate and quick-release gasket are closely connected;After dismounting bolt and tank threaded groove engagement, firm fixation is formed, avoid loose in use, by the cooperation of dismounting bolt and arc-shaped through-hole, the function that screen plate and tank can be separated by rotating dismounting bolt is realized, realize the effect of efficient installation and disassembly screen plate, without completely removing bolt, simplify operation process.

Description

Technical Field

[0001] This utility model belongs to the field of silicon wafer cleaning technology, specifically relating to silicon wafer cleaning tanks, and more particularly to a quick-release positioning mesh plate and a cleaning tank. Background Technology

[0002] In the manufacturing process of solar cells, silicon wafers need to undergo processes such as cleaning, diffusion, annealing, coating, and screen printing. Currently, the most common cleaning equipment is the tank-type equipment and the chain-type equipment. Among them, the cleaning and processing of silicon wafers are mainly carried out in the silicon wafer cleaning tank of the tank-type equipment.

[0003] In existing technologies, a flow equalization plate is installed at the bottom of the cleaning tank to evenly distribute the cleaning solution. This plate needs to be replaced depending on the size of the basket and when damaged. Related technologies improve replacement efficiency by folding the flow equalization plate (e.g., using a flexible material). However, folding the plate can easily cause deformation during actual use, affecting the flow equalization effect and thus reducing cleaning quality.

[0004] Therefore, how to avoid deformation of the flow equalizer plate during rapid replacement is a technical problem that urgently needs to be solved in this field.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0006] This disclosure provides at least one quick-release positioning mesh plate to solve the technical problem of plate deformation when quickly replacing the flow equalizer.

[0007] In a first aspect, embodiments of this disclosure provide a quick-release positioning mesh plate, comprising: a mesh plate having a plurality of threaded holes on its surface, one side of which has a disassembly / assembly through hole; a disassembly / assembly bolt adapted to pass through the disassembly / assembly through hole and connect to the disassembly / assembly threaded groove of a groove body; a quick-release washer having a fixing through hole on its surface, wherein a fixing bolt passes through the fixing through hole and engages with the threaded hole to connect the mesh plate and the quick-release washer; the quick-release washer having an arc-shaped through hole.

[0008] In one optional embodiment, the arc-shaped through hole has a large end and a small end, the diameter of the large end being larger than the diameter of the mounting bolt, and the diameter of the small end being smaller than the diameter of the mounting bolt; wherein, during installation, the mounting bolt is configured to pass through the large end, and the quick-release washer is configured to move the mounting bolt from the same center as the large end to the same center as the small end; during disassembly, the quick-release washer is configured to rotate clockwise around the fixing bolt, moving the mounting bolt from the same center as the small end to the same center as the large end.

[0009] In one alternative embodiment, the diameter of the disassembly / reassembly through hole is larger than the diameter of the disassembly / reassembly bolt.

[0010] In one alternative embodiment, the mesh plate is provided with uniformly distributed flow holes to mix the medicine solution.

[0011] Secondly, this disclosure also provides a cleaning tank, comprising: a tank body, the interior of which is suitable for storing medicinal liquid; the tank body having an inner tank and an outer tank, the outer tank being arranged around the inner side, and an overflow plate being arranged inside the outer tank; a mesh plate, within the tank body, suitable for mixing medicinal liquid; and a flower basket support strip, which is arranged on the surface of the mesh plate to support the flower basket.

[0012] In one optional embodiment, the surface of the mesh plate is provided with a plurality of threaded holes; the cleaning tank further includes a quick-release gasket, the surface of which is provided with a fixing through hole, and a fixing bolt passes through the fixing through hole and engages with the threaded hole to connect the mesh plate and the quick-release gasket.

[0013] In one optional embodiment, the bottom of the groove is provided with a plurality of disassembly threaded grooves, and disassembly bolts are provided in the disassembly threaded grooves; a disassembly through hole is provided on one side of the threaded hole; and an arc-shaped through hole is provided on the quick-release washer.

[0014] In one optional embodiment, the arc-shaped through hole has a large end and a small end, wherein the diameter of the large end is larger than the diameter of the mounting bolt, and the diameter of the small end is smaller than the diameter of the mounting bolt.

[0015] In one alternative embodiment, the diameter of the disassembly / reassembly through hole is larger than the diameter of the disassembly / reassembly bolt.

[0016] In one optional embodiment, a bubble tube is provided at the center of the bottom of the tank, and the mesh plate is positioned directly above the bubble tube. The surface of the bubble tube is provided with air outlets for introducing nitrogen or compressed air, so that the liquid medicine forms a uniform bubble flow below the mesh plate.

[0017] The beneficial effects of this utility model are that it provides a quick-release positioning mesh plate, which ensures a tight connection between the mesh plate and the quick-release gasket by engaging the fixing bolts with the threaded holes; the disassembly bolts engage with the threaded grooves of the groove body to form a firm fixation, preventing loosening during use; and by cooperating with the disassembly bolts and the arc-shaped through holes, combined with rotation operation (counterclockwise installation, clockwise disassembly), the mesh plate can be separated from the groove body simply by rotating the disassembly bolts, achieving efficient installation and disassembly of the mesh plate without completely removing the bolts, thus simplifying the operation process.

[0018] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0019] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0020] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0021] Figure 1 This is a front view of the cleaning tank provided in an embodiment of the present disclosure; Figure 2 A top view of the cleaning tank provided in an embodiment of this disclosure; Figure 3 A partial top view of the stencil structure provided in an embodiment of this disclosure; Figure 4 A perspective view of the quick-release pad, groove, and mesh plate provided in the embodiments of this disclosure; Figure 5 This is a diagram showing the relationship between the quick-release gasket and the disassembly / removal through-hole position before installation, as provided in the embodiments of this disclosure. Figure 6 This diagram shows the relationship between the quick-release gasket and the disassembly / removal through-hole position after installation, as provided in the embodiments of this disclosure.

[0022] In the picture: 1. Tank body; 11. Outer tank; 12. Inner tank; 13. Overflow plate; 14. Disassembly threaded groove; 2. Mesh plate; 21. Threaded hole; 22. Disassembly and assembly through hole; 23. Uniform flow hole; 3. Bubble tube; 31. Air outlet; 4. Quick-release washer; 41. Fixing through hole; 42. Arc-shaped through hole; 421. Small end; 422. Large end; 5. Flower basket support strips; 6. Disassemble and assemble bolts; 7. Fixing bolts. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0024] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0025] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0026] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0027] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0028] Research has revealed the following drawbacks of existing technologies: The bottom of the cleaning tank is equipped with a flow equalizer plate for uniformly distributing the cleaning solution. This plate needs to be replaced depending on the size of the basket and when damaged. Related technologies improve replacement efficiency by folding the flow equalizer plate (e.g., using a flexible material), but this folding operation is prone to deformation during actual use, affecting the flow equalization effect and thus reducing cleaning quality.

[0029] Therefore, how to avoid deformation of the flow equalizer plate during rapid replacement is a technical problem that urgently needs to be solved in this field.

[0030] The shortcomings of the above solutions are the result of the utility model inventor's practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as contributions made by the utility model inventor to this disclosure.

[0031] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0032] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0033] like Figures 1 to 6 As shown, some embodiments provide a cleaning tank, including: a tank body 1, the interior of which is suitable for storing liquid medicine; the tank body 1 has an inner tank 12 and an outer tank 11, the outer tank 11 is arranged around the inner side, and an overflow plate 13 is arranged inside the outer tank 11; the tank body 1 is the main container of the entire cleaning tank, used to contain the liquid medicine, and is the place for liquid storage and reaction during the cleaning process; the tank body 1 has an inner tank 12 and an outer tank 11, the inner tank 12 is the area where the actual cleaning operation is carried out, and the outer tank 11 surrounds the outer perimeter of the inner tank 12 to form an annular space, which is usually used to collect the overflowing liquid medicine or as a return / buffer area.

[0034] The overflow plate 13 is located inside the outer tank 11 to control the liquid level. When the liquid in the inner tank exceeds a certain height, the excess liquid flows into the outer tank through the overflow plate, preventing the liquid from overflowing outside the equipment and playing a role in safety and liquid level stability. Specifically, the inner tank 12 is used to place the mesh plate 2 and the basket for cleaning. The combination of the outer tank 11 and the overflow plate 13 can stabilize the liquid level, prevent liquid splashing or excessive contact of the operator with the liquid, and improve safety and ease of operation.

[0035] The structure consisting of the inner tank 12, the outer tank 11, and the overflow plate 13 improves operational safety and prevents the medicine from overflowing; it also facilitates liquid level control and medicine circulation if a circulation system is designed.

[0036] The mesh plate 2, inside the tank 1, is suitable for mixing the chemical solution. The mesh plate 2 is horizontally set inside the tank 1 and is located in the chemical solution. It is a platform for placing the object to be cleaned, such as a wafer basket, and also plays a certain role in stirring or mixing. It supports the basket, immersing the object to be cleaned in the chemical solution, and achieves cleaning through liquid flow or additional means such as bubbling.

[0037] Specifically, the mesh plate 2 works in conjunction with the flower basket support strip 5 to support the object to be cleaned; air bubbles act on the surface of the object from below through the holes of the mesh plate 2, improving the cleaning effect and achieving uniform immersion of the object to be cleaned; the mesh plate 2 is porous and hollow, which can promote the flow of the medicine and enhance the cleaning effect, and its surface is smooth, making it difficult for particulate pollutants to remain.

[0038] The flower basket support strip 5 is set on the surface of the mesh plate 2 to support the flower basket. The flower basket support strip 5 is set on the mesh plate 2 to directly support the cleaning flower basket, such as the wafer carrier flower basket, to ensure that the flower basket is placed stably, without tilting or sinking into the holes of the mesh plate. As a positioning and load-bearing structure, it can ensure that the flower basket is in the correct position during the cleaning process, so that all the items to be cleaned can fully contact the liquid and air bubbles.

[0039] Specifically, the flower basket support strip 5 and the mesh plate 2 together form a load-bearing system; in conjunction with the bubble tube 3, the items in the flower basket are uniformly flushed by bubbles and soaked in the solution, preventing the flower basket from sinking into the mesh plate holes and affecting the uniformity of cleaning; improving the stability and repeatability of the cleaning process; simplifying operation and improving efficiency.

[0040] The surface of the mesh plate 2 is provided with several threaded holes 21, and a disassembly and assembly through hole 22 is provided on one side of the threaded hole 21; the mesh plate 2 is evenly distributed with uniform flow holes 23 to ensure that the fluid is evenly distributed when passing through, avoid local turbulence or blockage, and improve mixing efficiency and service life.

[0041] The mesh plate 2 has a threaded hole 21 and a disassembly through hole 22. Specifically, the threaded hole 21 is used to connect the fixing bolt 7 and provide a fixing point for the quick-release washer 4. The threaded design ensures a firm connection and resists vibration and loosening. The diameter of the disassembly through hole 22 is larger than that of the disassembly bolt 6, allowing the disassembly bolt 6 to pass through directly, which facilitates the disassembly of the quick-release washer 4 and its direct separation from the groove 1.

[0042] The cleaning tank also includes a quick-release gasket 4, which has a fixing through hole 41 on its surface. A fixing bolt 7 passes through the fixing through hole 41 and engages with a threaded hole 21 to connect the mesh plate 2 and the quick-release gasket 4. The fixing bolt 7 passes through the fixing through hole 41 of the quick-release gasket 4 and is screwed into the threaded hole 21 of the mesh plate 2 to anchor the quick-release gasket 4 on the mesh plate 2, while also serving as a fulcrum for the rotation of the gasket. The fixing bolt 7 provides a center of rotation to ensure that the arc-shaped through hole 42 is accurately positioned when rotating around the fixing bolt 7. This maintains the stability of the quick-release mechanism and prevents the gasket from shifting or falling off.

[0043] The bottom of the trough 1 is provided with several disassembly threaded grooves 14, and disassembly bolts 6 are provided in the disassembly threaded grooves 14; the quick-release washer 4 is provided with an arc-shaped through hole 42. The disassembly threaded grooves 14 of the trough 1 provide a fixing base for the disassembly bolts 6, ensuring that the mesh plate 2 is firmly connected to the trough 1. The threaded connection can withstand a large load and is suitable for vibration environments.

[0044] The mounting bolt 6 is used to quickly fix the mesh plate 2 into the mounting threaded groove 14 of the groove 1. Through the arc-shaped through hole 42 design of the quick-release washer 4, the mesh plate 2 can be removed without completely unscrewing the mounting bolt 6.

[0045] During installation, the bolt 6 is inserted from the large end 422, and after rotating the washer, it is locked into the small end 421. During disassembly, it can be released by loosening and then rotating in the opposite direction, which greatly reduces disassembly time and facilitates frequent maintenance or cleaning. The bolt does not need to be completely removed, reducing the risk of loss or damage.

[0046] Specifically, the arc-shaped through hole 42 has a large end 422 and a small end 421. The diameter of the large end 422 is larger than the diameter of the disassembly bolt 6, and the diameter of the small end 421 is smaller than the diameter of the disassembly bolt 6. The diameter of the disassembly through hole 22 is larger than the diameter of the disassembly bolt 6.

[0047] The quick-release washer 4 features a core quick-release mechanism that engages with the mounting bolt 6 via an arc-shaped through-hole 42, enabling rapid locking and releasing. The quick-release washer 4 has a fixed through-hole 41 and an arc-shaped through-hole 42. Specifically, the fixed through-hole 41 allows the mounting bolt 7 to pass through, enabling the quick-release washer 4 to rotate around the mounting bolt 7, ensuring a stable rotation trajectory. The arc-shaped through-hole 42 (including a large end 422 and a small end 421): The large end 422 has a diameter larger than the mounting bolt 6, facilitating easy bolt insertion or removal and reducing alignment accuracy requirements. The small end 421 has a diameter smaller than the mounting bolt 6, used to clamp the bolt head, preventing loosening and providing preload during operation.

[0048] It should be further explained that by rotating the shim, the bolt transitions from the free state of the large end 422 to the locked state of the small end 421 (or vice versa), as shown below. Figure 5 As shown, counterclockwise rotation enables installation, and mechanical interlocking is achieved using the size difference; the overall operation is simple (only the rotating shim is required), and it can be quickly assembled and disassembled; the small end 421 design provides a self-locking effect and enhances vibration resistance.

[0049] A bubble tube 3 is installed in the center of the bottom of the tank 1, and a mesh plate 2 is installed directly above the bubble tube 3. The surface of the bubble tube 3 is provided with air outlets 31 for introducing nitrogen or compressed air, so that the liquid medicine forms a uniform bubble flow below the mesh plate 2.

[0050] The bubbling tube 3 introduces gas, generating a large number of microbubbles in the cleaning solution. As these bubbles rise, they physically scour the objects being cleaned on the mesh plate, aiding in the cleaning of the bubbling tube. In conjunction with the mesh plate 2, the bubbles pass through the holes in the mesh plate and act on the surface of the objects below, enhancing the cleaning effect, especially effective in removing particles and contaminants. The air outlets 31, small holes distributed on the wall of the bubbling tube 3, are the outlets for gas to enter the cleaning solution. They release gas evenly, forming a fine bubble flow, which is key to achieving the bubble cleaning function. After the gas enters the cleaning solution through the small holes, it forms rising bubbles that scrub and agitate the objects below, creating a uniform cleaning effect and preventing localized over-washing or missed washing. The microbubbles can penetrate deep into crevices, improving the cleaning effect.

[0051] Some embodiments provide a quick-release positioning mesh plate, including: a mesh plate 2, on which uniform flow holes 23 are evenly distributed for mixing liquid medicine; a plurality of threaded holes 21 are provided on the surface of the mesh plate 2, and a disassembly and assembly through hole 22 is provided on one side of the threaded holes 21; a disassembly and assembly bolt 6, which is adapted to pass through the disassembly and assembly through hole 22 and connect to the disassembly and assembly threaded groove 14 of the groove body 1; a quick-release gasket 4, on which a fixing through hole 41 is provided on the surface, and a fixing bolt 7 passes through the fixing through hole 41 and engages with the threaded hole 21 to connect the mesh plate 2 and the quick-release gasket 4; and an arc-shaped through hole 42 is provided on the quick-release gasket 4.

[0052] The arc-shaped through hole 42 has a large end 422 and a small end 421. The diameter of the large end 422 is larger than the diameter of the disassembly bolt 6, and the diameter of the small end 421 is smaller than the diameter of the disassembly bolt 6. The diameter of the disassembly through hole 22 is larger than the diameter of the disassembly bolt 6.

[0053] During installation, the mounting bolt 6 is configured to pass through the large end 422, and the quick-release washer 4 is configured to move the mounting bolt 6 from the same center as the large end 422 to the same center as the small end 421. During disassembly, the quick-release washer 4 is configured to rotate clockwise around the fixing bolt 7, so that the mounting bolt 6 moves from the same center as the small end 421 to the same center as the large end 422.

[0054] In the description of the embodiments of this utility model, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0055] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.

[0056] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A quick release positioning screen plate, characterized in that, include: The mesh plate (2) has several threaded holes (21) on its surface, and a disassembly through hole (22) is provided on one side of the threaded holes (21). The disassembly bolt (6) is adapted to pass through the disassembly through hole (22) and be connected in the disassembly threaded groove (14) of the groove body (1); The quick-release gasket (4) has a fixing through hole (41) on its surface. The fixing bolt (7) passes through the fixing through hole (41) and engages with the threaded hole (21) to connect the mesh plate (2) and the quick-release gasket (4). The quick-release pad (4) is provided with an arc-shaped through hole (42).

2. The quick-release positioning mesh plate as described in claim 1, characterized in that, The arc-shaped through hole (42) has a large end (422) and a small end (421). The diameter of the large end (422) is larger than the diameter of the disassembly bolt (6), and the diameter of the small end (421) is smaller than the diameter of the disassembly bolt (6). During installation, the mounting bolt (6) is configured to pass through the large end (422), and the quick-release washer (4) is configured to allow the mounting bolt (6) to move from the same center as the large end (422) to the same center as the small end (421); During disassembly, the quick-release pad (4) is configured to rotate clockwise around the fixing bolt (7) so that the disassembly bolt (6) moves from the same center as the small end (421) to the same center as the large end (422).

3. The quick-release positioning mesh plate as described in claim 1, characterized in that, The diameter of the disassembly through hole (22) is larger than the diameter of the disassembly bolt (6).

4. The quick-release positioning mesh plate as described in claim 1, characterized in that, The mesh plate (2) is evenly distributed with uniform flow holes (23) to mix the medicine solution.

5. A cleaning tank characterized by, include: The tank (1) is suitable for storing medicinal liquid; The tank (1) has an inner tank (12) and an outer tank (11). The outer tank (11) is arranged around the inner side, and an overflow plate (13) is arranged inside the outer tank (11). The mesh plate (2) and its tank (1) are suitable for mixing the medicine solution; Flower basket support strips (5) are set on the surface of the mesh plate (2) to support the flower basket.

6. A cleaning tank as described in claim 5, characterized in that, The surface of the mesh plate (2) is provided with a plurality of threaded holes (21); The cleaning tank also includes a quick-release gasket (4), which has a fixed through hole (41) on its surface. The fixing bolt (7) passes through the fixed through hole (41) and engages with the threaded hole (21) to connect the mesh plate (2) and the quick-release gasket (4).

7. A cleaning tank as described in claim 6, characterized in that, The bottom of the groove (1) is provided with several disassembly threaded grooves (14), and disassembly bolts (6) are provided in the disassembly threaded grooves (14). A disassembly through hole (22) is provided on one side of the threaded hole (21). The quick-release pad (4) is provided with an arc-shaped through hole (42).

8. A cleaning tank as described in claim 7, characterized in that, The arc-shaped through hole (42) has a large end (422) and a small end (421). The diameter of the large end (422) is greater than the diameter of the disassembly bolt (6), and the diameter of the small end (421) is smaller than the diameter of the disassembly bolt (6).

9. A cleaning tank as described in claim 8, characterized in that, The diameter of the disassembly through hole (22) is larger than the diameter of the disassembly bolt (6).

10. A cleaning tank as described in any one of claims 5-9, characterized in that, The tank (1) has a bubble tube (3) at the center of the bottom, and the mesh plate (2) is located directly above the bubble tube (3). The surface of the bubble tube (3) is provided with an air outlet (31) for introducing nitrogen or compressed air so that the liquid medicine forms a uniform bubble flow below the mesh plate (2).

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