A processing chamber

Abstract

The application relates to a processing cabin, which is internally provided with a work area, externally provided with a blocking mechanism, and surrounded by a gas filling space, wherein the gas filling space covers at least part of the work area, and the processing cabin is further provided with an air inlet channel and an air outlet channel, both of which are communicated with the gas filling space. The application improves the space utilization efficiency inside the processing cabin, sets the blocking mechanism inside the processing cabin, surrounds the gas filling space covering at least part of the work area, accurately defines the gas action range compared with the traditional gas filling mode of the whole processing cabin, greatly reduces the idle space, and improves the unreasonable situation of the space utilization of the processing cabin. With the help of the gas filling space formed by the blocking mechanism, most of the inert gas is filled into the work-related area, the consumption of a large amount of gas is avoided, and the use amount of the inert gas is significantly reduced.

Description

Technical Field

[0001] This application relates to the technical field of gas-protected processing, and in particular to a processing chamber. Background Technology

[0002] In the field of metal processing, global gas protection technology effectively prevents oxidation of processed products by isolating them from oxygen, playing a crucial role in ensuring product quality and performance. However, this technology has encountered many challenges in practical applications.

[0003] Metalworking operations are typically carried out in large processing chambers, with most of the space remaining unused. The work area occupies only 10%-50% of the processing chamber volume, and this inefficient use of space directly leads to serious gas waste.

[0004] Because the entire processing chamber needs to be filled with gas to achieve global gas protection, a large amount of gas is wasted in unnecessary idle space. This not only increases the amount of inert gas used, leading to a significant increase in procurement and supply costs, but also negatively impacts the company's economic efficiency. Simultaneously, when filling with protective gas, the air inside the chamber must be vented. If the filling speed is too fast, the protective gas and air will mix, reducing the protective effect. Therefore, in practice, only low-speed filling and venting can be used. However, due to the large size of the processing chamber, this method further prolongs the gas filling time, resulting in extremely low filling efficiency.

[0005] In summary, existing global gas protection technologies suffer from problems such as gas waste, high costs, and low filling efficiency due to the unreasonable utilization of processing chamber space. Summary of the Invention

[0006] In view of the shortcomings of the existing technology, the purpose of this application is to provide a processing chamber that can reduce the consumption of target gas and improve filling efficiency.

[0007] The above-mentioned objective of this application is achieved through the following technical solution:

[0008] A processing chamber has an internal working area and an external barrier mechanism that encloses a gas-filled space that covers at least a portion of the working area. The processing chamber also has an air intake channel and an exhaust channel that are connected to the gas-filled space.

[0009] As a preferred embodiment of the processing chamber, the barrier mechanism includes a plurality of partitions, which are movable to the edge of the work area and surround the outside of the work area.

[0010] As a preferred embodiment of this processing chamber, a plurality of spacer gas bags are installed inside the partition plate, and the plurality of spacer gas bags are located in the working area, with each spacer gas bag being independently inflated / deflated.

[0011] As a preferred embodiment of the processing chamber, the barrier mechanism includes a plurality of filling blocks, which are movable to the edge of the working area and surround the outside of the working area.

[0012] As a preferred embodiment of this processing chamber, a plurality of spacer air bags are installed inside the filling block, and the plurality of spacer air bags are located in the working area, with each spacer air bag being independently inflated / deflated.

[0013] As a preferred embodiment of the processing chamber, the barrier mechanism includes a plurality of air bags, which are inflatable to the edge of the working area, and the plurality of dry air bags surround the outer side of the working area.

[0014] As a preferred embodiment of the processing chamber, the barrier mechanism includes several air bags, which can be inflated into the working area, and each air bag is independently inflated / deflated.

[0015] As a preferred embodiment of this processing chamber, the air intake passage and the exhaust passage are located on opposite sides of the processing chamber.

[0016] As a preferred embodiment of the processing chamber, the bottom of the processing chamber is provided with a gas storage bag, which is connected to the gas filling space, and a shut-off valve is provided between the gas storage bag and the gas filling space.

[0017] In summary, the beneficial technical effects of this application are as follows:

[0018] 1. This application improves the space utilization efficiency inside the processing chamber by setting up a barrier mechanism inside the processing chamber to enclose a gas-filled space that covers at least a part of the work area. Compared with the traditional method of filling the entire processing chamber with gas, this method accurately defines the range of gas action, significantly reduces idle space, and improves the current situation of unreasonable space utilization in the processing chamber.

[0019] 2. The gas-filling space constructed by the barrier mechanism in this application requires inert gas to be filled only into the relevant work area, avoiding the consumption of a large amount of gas in unnecessary idle space, thereby significantly reducing the amount of inert gas used, reducing procurement and supply costs, and improving the economic benefits of enterprises.

[0020] 3. The air intake and exhaust channels of this application are both connected to the gas filling space. Compared with the traditional filling of the entire processing chamber, the reduced gas filling space can complete the filling and replacement of gas in a shorter time. Due to the reduced volume of the gas filling space, even with low-speed inflation and deflation, the overall gas filling time can be effectively shortened and the filling efficiency can be improved. Attached Figure Description

[0021] Figure 1 This is a structural schematic diagram of the processing cabin in this application.

[0022] Figure 2 This is a schematic diagram of an embodiment of the barrier mechanism for the processing chamber of this application, which uses rigid partition plates.

[0023] Figure 3 This is a schematic diagram of an embodiment of the barrier mechanism for the processing chamber of this application, which uses a flexible partition.

[0024] Figure 4 A schematic diagram of the structure of the barrier mechanism for the processing chamber of this application using a filling block.

[0025] Figure 5 A schematic diagram of the air bag structure used for the barrier mechanism of the processing chamber in this application.

[0026] Figure 6 This is a schematic diagram of the barrier mechanism of this application, which uses a rigid partition and has a spacer air bag inside the rigid partition.

[0027] Figure 7 This is a schematic diagram of the barrier mechanism of this application, which uses a flexible partition and has a spacer air bag inside the flexible partition.

[0028] Figure 8 This is a schematic diagram of the barrier mechanism of this application, which uses an air bag and extends into the work area.

[0029] Figure 9 This is a schematic diagram of the barrier mechanism of this application, which uses rigid partitions, an uninflated spacer, and a compressed air storage bag.

[0030] Figure 10 This is a schematic diagram of the barrier mechanism of this application, which uses an air bag, with the air bag not extending into the work area and the air storage bag in a compressed state.

[0031] Figure 11 This is a schematic diagram of the barrier mechanism of this application, which uses rigid partitions, an inflatable spacer, and an inflatable storage bag.

[0032] Figure 12 This is a schematic diagram of the barrier mechanism of this application, which uses an air bag, extends into the work area, and has an inflated air storage bag.

[0033] The following are the reference numerals: 1. Working area; 11. Gas filling space; 2. Barrier mechanism; 21. Spacer gas bag; 2a. Divider; 2b. Filling block; 2c. Gas bag; 3. Inlet channel; 4. Exhaust channel; 5. Gas storage bag; 51. Shut-off valve. Detailed Implementation

[0034] The present application will be further described in detail below with reference to the accompanying drawings.

[0035] like Figure 1 As shown, the processing chamber has a working area 1 inside, and a barrier mechanism 2 is provided outside the working area 1. The barrier mechanism 2 can move to the edge or near the edge of the working area 1. When the barrier mechanism 2 closes, a gas filling space 11 is formed inside. An air inlet channel 3 and an exhaust channel 4 are provided to communicate with the gas filling space 11 to fill and discharge gas.

[0036] Work area 1 typically requires filling with target gas for processing operations, such as welding and additive manufacturing, which require filling with inert protective gases such as argon. The procurement and supply costs of inert gases are high, while the internal space of the processing chamber is large. Filling the entire chamber would take a lot of time and the economic cost of protective gas would also be high. Generally speaking, the volume of work area 1 only accounts for 10%-50% of the volume of the processing chamber. If the entire processing chamber is filled with gas, a large amount of target gas will be wasted, and the filling time will increase exponentially.

[0037] The barrier mechanism 2 forms a gas-filling space 11 inside the processing chamber, and the gas-filling space 11 covers at least a portion of the working area 1, meaning that there is at least an overlap between the gas-filling space 11 and the working area 1. The space required by the processing equipment during actual processing is within the overlapping portion of the gas-filling space 11 and the working area 1. By filling the gas-filling space 11 with the target gas from a gas source such as a compressed gas cylinder through the air inlet channel 3, and discharging the air originally present in the gas-filling space 11 through the exhaust channel 4, the target gas is completely filled into the working area 1. Since the volume of the gas-filling space 11 is smaller than the internal volume of the processing chamber, the amount of target gas filled is greatly reduced, thus improving the gas filling efficiency.

[0038] The barrier mechanism 2 can be moved to the edge or near the edge of the work area 1, and can flexibly adjust the size and shape of the gas filling space 11 according to different processing tasks, the size of the work area 1, and the actual needs of the processing equipment. For example, in the processing of small precision parts, the barrier mechanism 2 can be closely attached to the work area 1 to significantly reduce the gas filling space 11; while in the processing of large workpieces, the gas filling space 11 can be appropriately enlarged to meet the processing requirements.

[0039] Because the volume of the gas-filling space 11 is much smaller than the internal volume of the processing chamber, the target gas filling amount is significantly reduced. Taking large-scale welding processing as an example, this can save a substantial amount of argon gas procurement costs annually. Simultaneously, it reduces costs associated with gas transportation and storage, greatly improving the company's economic efficiency. The reduced gas filling amount significantly shortens filling time, improving gas filling efficiency. In continuous production processes, it allows for faster preparation for the next processing cycle, reducing equipment downtime and thus improving overall production efficiency. Furthermore, a stable gas filling environment helps improve processing quality, reduce defect rates, and further save production time and costs.

[0040] Reducing the consumption of inert gases not only lowers operating costs for businesses but also contributes to the rational use of resources and environmental protection. Against the backdrop of a global push for energy conservation and emission reduction, this processing chamber technology provides strong support for the sustainable development of the metal processing industry.

[0041] Furthermore, more specifically, the air intake channel 3 is connected to the air source and is equipped with components such as a shut-off valve, a one-way valve, a throttle valve, and a proportional valve to ensure that the air supply is cut off after filling and to maintain pressure in the processing chamber or to throttle and maintain a low flow rate for continuous filling. Preferably, the exhaust channel 4 is equipped with a shut-off valve, which is closed after the target gas is filled to prevent the target gas from overflowing from the work area 1. Preferably, the exhaust channel 4 is equipped with a one-way valve, so that the air intake channel 3 maintains a low flow rate for continuous filling after the target gas in the work area 1 is filled, to avoid insufficient target gas concentration in the work area 1 due to leakage or other reasons, while the continuously flowing gas flows out from the one-way valve. More preferably, the exhaust channel 4 is equipped with at least two of the components such as a shut-off valve, a one-way valve, and an air pump for use to meet the corresponding functions. In addition, the exhaust channel 4 can be connected to an air pump, which can be turned on at the initial stage of target gas filling to quickly extract air from the work area 1 and improve filling efficiency.

[0042] Specifically, the air intake channel 3 and exhaust channel 4 are located on opposite sides of the processing chamber. This arrangement improves the efficiency and quality of gas filling, as well as the stability of the processing environment. The relative distribution of the air intake channel 3 and exhaust channel 4 allows the target gas to flow rapidly from one side of the chamber to the other, creating an efficient airflow circulation within the processing chamber. Compared to a side-by-side arrangement, this layout allows the target gas to fill the work area 1 more quickly and comprehensively. In continuous production, this effectively shortens the time for each gas filling, accelerates the production pace, and improves overall production efficiency. The relative layout also fosters a strong convection effect during the air intake and exhaust processes, rapidly expelling the existing air in the work area 1, accelerating the replacement of air with the target gas, and ensuring that the predetermined gas concentration is reached within a short time to meet processing requirements.

[0043] The layout of the two sides helps maintain stable gas pressure within the processing chamber. During inflation and pressurization, the gas pressure distribution is more even, reducing the risk of gas leakage due to excessive local pressure. This minimizes the waste of target gas and ensures a safe processing environment.

[0044] Furthermore, it is worth noting that the target gas concentration requirements are usually high during operation. Simply using the intake channel 3 for filling and the exhaust channel 4 for venting is insufficient to achieve the required concentration. To ensure the target gas concentration within the processing chamber meets the usage requirements, multiple devices are typically installed on the intake channel 3 and exhaust channel 4. These devices work together to precisely control the gas concentration, ensuring the gas environment within the processing chamber meets process requirements. Examples include a circulation purification device and a gas concentration sensor. After the intake channel 3 is filled and the exhaust channel 4 is vented, the target gas in the gas-filled space 11 reaches a certain concentration. The circulation purification device then purifies the target gas in the gas-filled space 11, increasing its concentration. Preferably, the circulation purification device is a membrane separation type or a catalytic reaction type. The gas concentration sensor monitors the target gas concentration in the exhaust gas in real time and feeds the data back to the control system, allowing for timely adjustments to the intake, exhaust, and circulation purification device operating strategies to ensure the target gas concentration within the processing chamber remains within the required range.

[0045] In essence, the barrier mechanism 2 encloses the gas-filled space 11 within the processing chamber by filling or dividing the processing chamber.

[0046] Example 1:

[0047] The barrier mechanism 2 includes several partition plates 2a, which can be moved to the outside of the work area 1 and surround the outside of the work area 1. That is, the processing chamber is divided to form a gas-filled space 11. Specifically, the several partition plates 2a surround its interior to form a gas-filled space 11.

[0048] like Figure 2 As shown, in a preferred embodiment, the partition 2a is made of a rigid material and moves from the edge of the processing chamber toward the work area 1, thereby enclosing the work area 1 outside the edge of the work area 1. Specifically, the partition 2a can move in a direction perpendicular to the edge of the processing chamber or in a direction horizontal to the edge of the processing chamber, ultimately achieving enclosure outside the work area 1.

[0049] like Figure 3As shown, in another preferred embodiment, the separator 2a is also made of flexible material. The separator 2a is arc-shaped and protrudes into the processing chamber. The separator 2a is controlled by a support structure such as a bracket or spokes. Before filling with gas, the separator 2a moves towards the working area 1 or increases its curvature to get closer to the working area 1. At this time, the separator 2a forms a gas filling space 11 outside the working area 1. Preferably, the curvature of the separator 2a is controlled by controlling the two ends of the separator 2a to move closer or further away from each other. More preferably, by applying an external force to the middle of the outer side of the separator 2a, the separator 2a can be quickly ejected into the processing chamber to form a filling protrusion, which greatly improves efficiency.

[0050] In this embodiment, a barrier mechanism 2 composed of several partition plates 2a is used to enclose and form a gas-filling space 11 by dividing the processing chamber, thereby reducing gas consumption. The partition plates 2a can be moved to the outside of the work area 1 and enclose it, precisely defining the gas-filling space 11. Since the volume of the work area 1 only accounts for 10%-50% of the volume of the processing chamber, the significant reduction in the size of the gas-filling space 11 compared to filling the entire processing chamber with gas results in a significant reduction in the amount of target gas required. Taking the use of argon in large-scale welding processing as an example, a large amount of argon procurement costs can be saved annually, while also reducing costs in gas transportation and storage, greatly improving the economic benefits of the enterprise. Because the volume of the gas-filling space 11 is much smaller than the internal volume of the processing chamber, the time required to fill the target gas is significantly shortened. In continuous production processes, preparation for the next processing can be completed more quickly, reducing equipment downtime and thus improving overall production efficiency.

[0051] The separator 2a has two preferred embodiments: a rigid separator that can move vertically or horizontally along the edge of the machining chamber, and a flexible separator that can be adjusted to fit closer to the work area 1 by controlling the endpoints or applying external force to the outer center. This allows the barrier mechanism 2 to flexibly adjust the size and shape of the gas filling space 11 according to different machining tasks, the size of the work area 1, and the actual needs of the machining equipment. For example, in the machining of small precision parts, the separator can be closely fitted to the work area 1, significantly reducing the gas filling space 11 and accelerating the filling speed; while in the machining of large workpieces, the gas filling space 11 can be appropriately enlarged to meet the machining requirements. The two types of separators 2a, made of rigid and flexible materials, and the diverse movement and control methods, provide a wealth of choices for the design and application of the machining chamber, meeting the personalized needs of different users and scenarios, and enhancing the versatility and adaptability of the machining chamber.

[0052] Example 2:

[0053] like Figure 4As shown, the barrier mechanism 2 is a filling block 2b. The filling block 2b can move to the outside of the edge of the work area 1 and surround the work area 1, that is, the gas filling space 11 is formed by filling the internal space of the processing chamber.

[0054] The filler block 2b is usually made of a low-density material, such as foam board. It can be placed manually or moved to the edge of the work area 1 by equipment control for filling.

[0055] In this embodiment, the filler block 2b serves as a barrier mechanism 2. The filler block 2b can be placed manually or moved automatically by the equipment, offering versatility in its arrangement to quickly respond to different processing tasks. Whether for urgent tasks or routine production, the filler block 2b can be quickly arranged to ensure smooth production. For work areas 1 of different sizes and shapes, the filler block 2b can be arranged in various combinations to adapt to their characteristics, flexibly adjusting the size and shape of the gas filling space 11. When processing small parts, it tightly surrounds the work area 1, reducing unnecessary gas filling; when processing large workpieces, it reasonably expands the surrounding area to meet processing requirements.

[0056] Preferably, the filling block 2b is made of an economical and practical material with low density, such as foam board. It is not only lightweight and easy to move and operate, but also inexpensive, reducing the purchase and maintenance costs of the equipment and improving the cost-effectiveness of the product. This allows enterprises to enjoy the advantages of advanced gas filling technology without increasing costs too much.

[0057] Example 3:

[0058] like Figure 5 As shown, the barrier mechanism 2 is an air bag 2c. The air bag 2c can be inflated to the outside of the edge of the work area 1, surrounding the work area 1. That is, the gas filling space 11 is formed by filling the internal space of the processing chamber. Preferably, after inflation, two adjacent air bags 2c are in contact with each other, and their inner rings surround each other to form the gas filling space 11.

[0059] Specifically, the air bag 2c is made of flexible material, and a shut-off valve is installed at the air inlet. When the air is inflated to the outside of the edge of the working area 1, the inflation stops and the shut-off valve is closed to keep it in an inflated state.

[0060] In this embodiment, after the gas bag 2c is inflated, adjacent gas bags 2c come into contact with each other, and their inner rings enclose a gas filling space 11 that is closely adapted to the working area 1. The enclosed gas filling space 11 effectively isolates external interference, ensures a stable gas environment in the working area 1, reduces the mixing of impurities, ensures processing quality, reduces the defect rate, and saves production time and costs.

[0061] The air tank 2c is made of flexible material, which can freely deform according to the shape and size of the work area 1 when inflated, and fit closely to the edge of the work area 1. Whether it is a regular square work area 1 or an irregularly shaped work area 1, the air tank 2c can perfectly adapt to it, accurately construct the gas filling space 11, and improve the space utilization efficiency.

[0062] By controlling the inflation and deflation of the gas chamber 2c, the size and shape of the gas-filled space 11 can be quickly changed to flexibly meet the needs of different processing tasks. When processing small precision parts, the space enclosed by the gas chamber 2c is reduced; when processing large workpieces, the space is increased, shortening the processing preparation time and improving production efficiency.

[0063] The flexible material of the air tank 2c has a relatively simple structure, is less prone to complex failures, and is easy to disassemble and replace. If the air tank 2c is damaged, the replacement cost is low, reducing equipment maintenance costs and ensuring normal equipment operation.

[0064] The above embodiments have shown significant effectiveness in reducing gas consumption and improving filling efficiency. However, a deeper analysis of the actual situation in work area 1 reveals that, in most cases, the volume of the processing equipment in work area 1 only accounts for 5%-30% of the volume of work area 1. This means that even within the reduced gas filling space 11, there is still some unused space.

[0065] Example 4:

[0066] like Figure 6 As shown, a spacer air bag 21 is also installed inside the partition plate 2a. After the partition plate 2a moves to the outside of the work area 1, the spacer air bag 21 can be inflated and extended into the work area 1, occupying an area in the work area 1 that does not affect processing.

[0067] This embodiment cleverly solves the problem of insufficient space utilization in the work area 1 by installing a spacer air bag 21 inside the partition 2a. When the partition 2a moves to the outside of the work area 1, the spacer air bag 21 quickly inflates and extends into the work area 1, occupying the originally unused space.

[0068] Multiple sets of spacer air tanks 21 are installed in different areas inside the partition plate 2a. The spacer air tanks 21 are selectively inflated according to the working path of the equipment in the working area 1 so that the equipment will not interfere with the spacer air tanks 21 during operation.

[0069] Each spacer air tank 21 is independently inflated / deflated, greatly enhancing the flexibility and adaptability of the device. During actual operation, operators can flexibly determine the inflation / deflation status of each spacer air tank 21 according to different usage requirements. For different work content and operating scenarios, specific spacer air tanks 21 can be selectively inflated to fill idle spaces; simultaneously, parts not requiring work can be left uninflated to avoid interfering with the processing. This feature ensures that the device can adapt to diverse production needs, further optimizing the space utilization efficiency of the work area 1.

[0070] Example 5:

[0071] like Figure 7 An inflatable spacer 21 is installed inside the filling block 2b. The inflatable spacer 21 can be inflated to the area inside the work area 1 without affecting the processing.

[0072] Multiple sets of spacer air bags 21 are installed in different areas inside the filling block 2b. The spacer air bags 21 are selectively inflated according to the working path of the equipment in the working area 1, so that the equipment will not interfere with the spacer air bags 21 during operation.

[0073] In this embodiment, the spacer airbag 21, after inflation, can extend into the working area 1. This further reduces the gas filling space 11, improves space utilization, and avoids wasting space resources. Multiple sets of spacer airbags 21 are installed in different areas inside the filling block 2b, and the spacer airbags 21 can be selectively inflated according to the working path of the equipment in the working area 1. This allows the spacer airbags 21 to cleverly avoid the actual working area of ​​the equipment, filling idle space to the maximum extent without affecting the normal operation of the equipment, thus achieving optimal space utilization.

[0074] Depending on the specific task and equipment operating path, the system can flexibly select which spacer air tanks 21 to inflate and which to deflate. This high degree of flexibility allows the structure to adapt to various complex and changing operating scenarios. Whether it's processing small precision equipment or producing large equipment, the system can meet operational requirements by reasonably adjusting the state of the spacer air tanks 21.

[0075] Since the spacer airbag 21 does not interfere with the operation of the equipment, it ensures the stability and continuity of the equipment during operation, reduces the risk of equipment collision caused by unreasonable spatial layout, improves production efficiency, and reduces equipment maintenance costs.

[0076] The design structure of installing the spacer gas bag 21 inside the filling block 2b is relatively simple, easy to implement and promote. Based on the existing layout of the processing cabin and work area 1, only simple modifications are needed to install the spacer gas bag 21, improving space utilization efficiency and gas filling effect, and it has broad application prospects.

[0077] Example 6:

[0078] like Figure 8 The air bag 2c can be inflated to the area inside the work area 1 without affecting the processing.

[0079] Multiple sets of air tank 2c are installed in different areas of the processing chamber. According to the operation path of the equipment in the operation area 1, the air tank 2c is selectively refilled to ensure that the equipment does not interfere with the air tank 2c during operation.

[0080] Example 7:

[0081] like Figure 9 , Figure 10 , Figure 11 , Figure 12 The bottom of the processing chamber is equipped with an air storage bag 5, which has a compressed state and an expanded state. The air storage bag 5 is connected to the gas filling space 11, and a shut-off valve 51 is provided between the air storage bag 5 and the gas filling space 11.

[0082] After processing, it would be wasteful to directly discharge the target gas in the work area 1. The gas storage bag 5 can be used to recover the target gas in the work area 1. During the next processing, the target gas in the gas storage bag 5 can be compressed back into the work area 1 to achieve the reuse of the target gas. The compression process of the gas storage bag 5 from the expanded state to the compressed state can be carried out by the top plate, the pull rod and other mechanisms, which are not limited here.

[0083] Traditionally, after processing, the residual target gas in work area 1 is directly discharged, resulting in significant resource waste. In this embodiment, by installing a gas storage bag 5 at the bottom of the processing chamber and establishing a connection system with the gas filling space 11, the gas storage bag 5 can recover and store the target gas that would otherwise be discharged. During the next processing cycle, it is compressed back into work area 1 for reuse, significantly reducing the amount of new gas required. Over time, this not only reduces gas procurement costs but also reduces gas transportation and storage expenses, bringing considerable economic benefits to the company. Reducing the emission of target gas avoids unnecessary waste of resources, aligns with the current global advocacy of energy conservation and emission reduction, helps companies actively fulfill their social responsibility in environmental protection, and enhances their corporate image.

[0084] Example 8:

[0085] like Figures 1-12 The air intake channel 3 is located at the bottom of the processing compartment, and the exhaust channel 4 is located at the top of the processing compartment.

[0086] Inert gases are generally denser than air. By placing the intake channel 3 at the bottom of the processing chamber and the exhaust channel 4 at the top of the processing chamber, the inert gas can be separated from the air at the bottom, allowing the air to be squeezed out from the top, resulting in a more stable state.

[0087] A method for recovering and reusing target gas, used in the aforementioned processing chamber, includes the following steps:

[0088] Step S1: The barrier mechanism 2 surrounds the work area 1;

[0089] In step S2, the spacer air bag 21 or air bag 2c continues to inflate and expand to fill the area within the work area 1 that does not affect processing.

[0090] Step S3: Open the shut-off valve 51 and compress the target gas in the gas storage bag 5 into the gas filling space 11 and close the shut-off valve 51.

[0091] Step S4: Open the air intake channel 3 and fill the gas filling space 11 with the target gas until the gas filling space 11 is full, and use a circulation purification device to ensure the concentration of the target gas in the gas filling space 11.

[0092] Step S5: Processing operations are performed within the gas-filled space 11;

[0093] Step S6: After processing is completed, the shut-off valve 51 is opened, and the spacer gas bag 21 or gas bag 2c continues to be inflated to press the target gas in the gas filling space 11 into the gas storage bag 5. After the gas storage bag 5 is full, the shut-off valve 51 is closed.

[0094] Step S7: Reset all components inside the processing chamber. It is worth noting that reset means that the spacer air bag 21 in embodiments 4 and 5 retracts and the blocking mechanism 2 returns to its original position; reset means that the air bag 2c in embodiment 6 retracts to its initial state.

[0095] Steps S1-S4 are the pre-processing inflation process, step S5 is the processing process, and steps S6-S7 are the target gas recovery process after processing. The recovered target gas can be reused in the next processing process. If the filling gas is insufficient due to leakage or other reasons, it can be replenished through the air intake channel 3. The exhaust channel 4 is usually equipped with components such as a shut-off valve 51, a one-way valve, a throttle valve, and a proportional valve to ensure that the gas is cut off after inflation and to maintain the pressure of the processing chamber, or to throttle and maintain a low flow rate for continuous inflation.

[0096] The embodiments described in this specific implementation are preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A processing cabin, characterized in that, The interior is provided with a working area (1), and the outside of the working area (1) is provided with a barrier mechanism (2). The barrier mechanism (2) encloses and forms a gas filling space (11). The gas filling space (11) covers at least a part of the working area (1). The processing chamber is also provided with an air intake channel (3) and an exhaust channel (4). The air intake channel (3) and the exhaust channel (4) are both connected to the gas filling space (11).

2. The processing chamber according to claim 1, characterized in that, The barrier mechanism (2) includes a plurality of partitions (2a), which are movable to the edge of the work area (1) and surround the outside of the work area (1).

3. The processing chamber according to claim 2, characterized in that, A plurality of spacer air bags (21) are installed on the inner side of the partition plate (2a). The plurality of spacer air bags (21) are located in the working area (1). Each spacer air bag (21) is independently inflated / deflated.

4. The processing chamber according to claim 1, characterized in that, The barrier mechanism (2) includes a plurality of filling blocks (2b), which are movable to the edge of the work area (1) and surround the outside of the work area (1).

5. The processing chamber according to claim 4, characterized in that, The inner side of the filling block (2b) is equipped with a plurality of spacer air bags (21), and the plurality of spacer air bags (21) are located in the working area (1), and each spacer air bag (21) is independently inflated / deflated.

6. The processing chamber according to claim 1, characterized in that, The barrier mechanism (2) includes a plurality of air bags (2c), which are inflatable to the edge of the work area (1), and the plurality of dry air bags (2c) surround the outside of the work area (1).

7. The processing chamber according to claim 1, characterized in that, The barrier mechanism (2) includes a plurality of air bags (2c), which can be inflated into the working area (1), and each air bag (2c) is independently inflated / deflated.

8. The processing chamber according to claim 1, characterized in that, The air intake passage (3) and the exhaust passage (4) are located on opposite sides of the processing chamber.

9. The processing chamber according to any one of claims 3 or 5-7, characterized in that, The bottom of the processing chamber is provided with an air storage bag (5), which is connected to the gas filling space (11). A shut-off valve (51) is provided between the air storage bag (5) and the gas filling space (11).

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