An ebsd sample vibration polishing jig
By designing an EBSD sample vibration polishing fixture with a clamp sleeve, clamp column, and double-sided adhesive, the problems of sample shape limitations and complex embedding in the existing technology are solved. This achieves efficient fixation and stable polishing of samples of different shapes, simplifies the operation process, and reduces costs.
Patent Information
- Application Number
- CN202521901958.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-04
- Publication Date
- 2026-08-25
- Estimated Expiration
- 2035-09-04
AI Technical Summary
Existing vibratory polishing fixtures have a simple structure and limited application range. They cannot handle samples smaller than 10 mm, and the mounting operation is complex, increasing costs and time, thus limiting the efficiency and flexibility of sample preparation.
An EBSD sample vibration polishing fixture, comprising a clamp sleeve, clamp pillars, and double-sided adhesive, was designed. It can fix sheet-like and flat samples, and the polishing force can be adjusted by the load block, simplifying the operation steps and expanding the sample processing range.
It enables efficient fixation and stable polishing of samples of different shapes, simplifies the operation process, reduces costs, and improves sample preparation efficiency.
Smart Images

Figure CN224674623U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of EBSD sample preparation technology, specifically relating to an EBSD sample vibration polishing fixture. Background Technology
[0002] EBSD (Electron Backscatter Diffraction), an advanced crystallographic analysis technique based on scanning electron microscopy (SEM), plays an indispensable role in many fields such as materials science, geology, and metallurgy. Its working principle is mainly to detect the backscattered electron diffraction pattern generated by the interaction between the electron beam and the crystalline material, thereby obtaining crystallographic characteristic information of the material, such as crystal orientation, grain size, and phase composition, providing crucial information for material performance research and quality control. EBSD analysis places extremely stringent requirements on the sample surface quality, as the backscattered electron diffraction signal is highly sensitive to the smoothness and defects (such as scratches, oxidation) of the sample surface. EBSD samples are extremely sensitive to surface defects (such as those in the diffraction layer). Even the smallest surface imperfections can distort the diffraction signal, thus affecting the accuracy and reliability of the analytical results. Therefore, the core objective of sample preparation is to obtain a stress-free, oxidation-free, highly flat surface with an intact crystal structure to ensure that EBSD analysis can proceed smoothly and yield accurate results. Currently, common EBSD sample preparation processes mainly include electropolishing, mechanical polishing, and ion beam technology. Among them, vibration polishing, a chemical-mechanical polishing technique, can effectively remove the small amount of deformation left by mechanical polishing and prepare high-quality polished surfaces for various materials, giving it a unique advantage in EBSD sample preparation.
[0003] However, existing vibration polishing fixtures have many limitations: On the one hand, its structure is simple and its application range is extremely limited. It can only be used to hold cylindrical inlay samples with a height greater than 10mm, which greatly limits the types and shapes of samples that can be processed and cannot meet the diverse sample needs in actual research. On the other hand, before each EBSD sample is prepared using vibration polishing, the sample must be mounted. This step is not only tedious and complicated, increasing the difficulty and time cost of operation, but also limiting the improvement of sample preparation efficiency. Moreover, the mounting process requires additional materials and equipment, which further increases the experimental cost and brings many inconveniences to scientific research. Therefore, this utility model proposes an EBSD sample vibration polishing fixture. Utility Model Content
[0004] The purpose of this invention is to provide an EBSD sample vibration polishing fixture to solve the problems mentioned in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution: an EBSD sample vibration polishing fixture, comprising... The fixture sleeve has a sample through slot on its top surface; The fixture column is located at the top of the fixture sleeve and can be placed into the sample through slot. The bottom of the fixture column is provided with double-sided adhesive for attaching and fixing the sample. The top and bottom of the fixture column are respectively provided with a column top surface and a column bottom surface.
[0006] Preferably, it also includes multiple load blocks that can be selectively placed on top of the clamp column.
[0007] Preferably, it also includes an auxiliary positioning structure, which includes a positioning groove and a positioning protrusion.
[0008] Preferably, each load block has a positioning protrusion fixed on its top surface and column top surface, and each load block has a positioning groove on its bottom surface for the positioning protrusion to engage.
[0009] Preferably, it also includes an auxiliary picking structure, which includes side clamping grooves, and side clamping grooves are provided on both sides of each load block and both sides of the clamping column.
[0010] Preferably, the cross-section of the side buckle groove is a right trapezoid with the inclined surface facing downwards.
[0011] Preferably, the four corners of the load block and the four corners of the clamping column are all designed with rounded chamfers.
[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: The fixture of this application, through its unique design and innovative structure, uses double-sided adhesive to fix the large surface of the sample to the bottom surface of the fixture column, and then places the fixture column into the fixture sleeve. The four metal walls of the inner wall of the fixture sleeve restrict the movement of the sample in the sample through groove, thereby achieving effective fixation of sheet-like samples and flat samples with different cross-sectional shapes. In addition, according to the force required for sample vibration polishing, different numbers of load blocks can be placed on the top surface of the fixture column to meet the polishing requirements of different samples. The operation steps are simplified, the sample preparation efficiency is significantly improved, and the range of samples that can be processed is expanded, providing a more efficient, convenient, and economical solution for EBSD sample preparation. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a structural schematic diagram from another perspective of the present invention; Figure 3 This utility model Figure 1 A magnified view of a portion of region A in the middle; Figure 4 This utility model Figure 1 A magnified view of a portion of region B in the middle; In the figure: 1. Fixture sleeve; 2. Fixture column; 3. Loading block; 4. Double-sided adhesive; 5. Sample through groove; 6. Top surface of column; 7. Bottom surface of column; 8. Side fastening groove; 91. Positioning groove; 92. Positioning protrusion. Detailed Implementation
[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example
[0015] Please see Figures 1 to 4 This is an embodiment of the present invention, which provides the following technical solution: an EBSD sample vibration polishing fixture, comprising... The fixture sleeve 1 has a sample through groove 5 on its top surface; And a clamping column 2 is set on the top of the clamping sleeve 1 so that the sample can be placed in the through slot 5. The bottom of the clamping column 2 is provided with double-sided adhesive 4 for the sample to be pasted and fixed. The top and bottom of the clamping column 2 are respectively provided with a column top surface 6 and a column bottom surface 7. The double-sided adhesive 4 is a double-sided adhesive that is not easy to leave residue or is easy to stretch. For double-sided adhesive that is less prone to residue, PET-based double-sided adhesive can be selected. It uses polyester film (PET) as the base material and is coated with acrylic pressure-sensitive adhesive. The thickness is thin (0.048-0.2mm). For easy-stretch double-sided tape, you can choose easy-stretch mesh double-sided tape, which uses mesh cloth as the base material and is coated with high-adhesion pressure-sensitive adhesive. It has tensile strength and easy-peel properties, and leaves no residue when it is torn off.
[0016] In this embodiment, preferably, it also includes a plurality of load blocks 3 that can be selectively placed on the top of the clamping column 2. The selective placement here specifically means that different numbers of load blocks 3 can be placed on the top of the clamping column 2 (such as placing 1, 2 or 3) according to the required force for sample vibration polishing. The clamping sleeve 1, the clamping column 2 and the load blocks 3 are all made of stainless steel or aluminum alloy with good corrosion resistance.
[0017] In this embodiment, preferably, an auxiliary positioning structure is also included, which includes a positioning groove 91 and a positioning protrusion 92.
[0018] In this embodiment, preferably, each load block 3 has a positioning protrusion 92 fixed on its top surface and column top surface 6, and each load block 3 has a positioning groove 91 on its bottom surface for the positioning protrusion 92 to be inserted into. This allows the positioning protrusion 92 to be embedded in the positioning groove 91 when the operator places multiple load blocks 3 on the top of the clamp column 2, thereby preventing the load blocks 3 from unnecessary horizontal slippage or falling off.
[0019] In this embodiment, preferably, an auxiliary picking structure is also included. The auxiliary picking structure includes a side buckle groove 8. The two sides of each load block 3 and the two sides of each clamp column 2 are provided with side buckle grooves 8. The design of the side buckle groove 8 makes it convenient for the operator to put their fingers into the side buckle groove 8 to lift the load block 3 and the clamp column 2.
[0020] In this embodiment, preferably, the cross-section of the side buckle groove 8 is a right trapezoid with the inclined surface facing downward. This design makes it convenient for operators to insert their fingers into the side buckle groove 8 and to easily take it out.
[0021] In this embodiment, preferably, the four corners of the load block 3 and the four corners of the clamp column 2 are all designed with rounded chamfers, so that the clamp column 2 and the load block 3 are easier to put into the sample through slot 5.
[0022] In summary, when using this fixture, the large surface of the sample is first fixed to the bottom surface 7 of the column using double-sided tape 4. Then, the fixture column 2 is placed into the fixture sleeve 1 from top to bottom, so that the fixture column 2, along with the double-sided tape 4 and the sample, enters the sample through groove 5. The inner wall of the sample through groove 5 restricts the movement of the sample within the sample through groove 5, thereby achieving the fixation of sheet-like samples and flat samples with different cross-sectional shapes. In addition, depending on the force required for sample vibration polishing, different numbers of load blocks 3 can be placed on the top surface 6 of the fixture column 2 to ensure stability. When the load block 3 is placed on the top surface 6 of the fixture column 2, the positioning protrusion 92 will enter the positioning groove 91, further ensuring the placement stability of the load block 3.
[0023] Although embodiments of the present invention have been shown and described (see the detailed description above), it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A vibration polishing fixture for EBSD samples, characterized in that: include The fixture sleeve (1) has a sample through groove (5) on its top surface. And a clamping column (2) is provided on the top of the clamping sleeve (1) and can be placed in the sample through slot (5) thereafter. The bottom of the clamping column (2) is provided with double-sided adhesive (4) for attaching and fixing the sample thereafter. The top and bottom of the clamping column (2) are respectively provided with a column top surface (6) and a column bottom surface (7).
2. The EBSD sample vibration polishing fixture according to claim 1, characterized in that: It also includes multiple load blocks (3) that can be selectively placed on top of the clamp column (2).
3. The EBSD sample vibration polishing fixture according to claim 2, characterized in that: It also includes an auxiliary positioning structure, which includes a positioning groove (91) and a positioning protrusion (92).
4. The EBSD sample vibration polishing fixture according to claim 3, characterized in that: Each load block (3) has a positioning protrusion (92) fixed on its top surface and column top surface (6), and each load block (3) has a positioning groove (91) on its bottom surface for the positioning protrusion (92) to be inserted.
5. The EBSD sample vibration polishing fixture according to claim 2, characterized in that: It also includes an auxiliary picking structure, which includes a side clamping groove (8). The two sides of each load block (3) and the two sides of the clamping column (2) are provided with side clamping grooves (8).
6. The EBSD sample vibration polishing fixture according to claim 5, characterized in that: The cross-section of the side buckle groove (8) is a right trapezoid with the inclined surface facing downward.
7. The EBSD sample vibration polishing fixture according to claim 2, characterized in that: The four corners of the load block (3) and the four corners of the clamp column (2) are all designed with rounded chamfers.