A reciprocating movement mechanism

Abstract

The utility model relates to the technical field of semiconductor carrying equipment, especially a reciprocating moving mechanism, including base body and at least two installation in the front and back two ends of base body base drive assembly, the base drive assembly includes the base drive unit of installation in base body and by the first walking wheel and second walking wheel of base drive unit drive and synchronous control, the base drive unit is used for driving and keeping the synchronous same direction rotation of first walking wheel and second walking wheel, the base drive unit and first walking wheel and second walking wheel drive connection, the base drive unit can produce brake force to make first walking wheel and second walking wheel stop, the utility model can avoid the body body torsional swing when the emergency stop, realize the high accuracy emergency stop of base body, avoid the deterioration of the repeated positioning accuracy of crown block, improve the carrying accuracy.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor handling equipment technology, and in particular to a reciprocating moving mechanism. Background Technology

[0002] In the semiconductor industry, automated material handling systems are crucial for improving semiconductor manufacturing productivity, yield, and equipment utilization. A safe and efficient automated material handling system can significantly reduce work-in-process waiting time, thereby shortening the wafer production cycle. Tracks are an important component of automated material handling systems. Wafer fabs have hundreds or even thousands of processing steps that rely on multiple overhead material handling cranes within the automated material handling system. These cranes use tracks to safely and accurately transport materials between different pieces of equipment.

[0003] Material handling overhead cranes are supported on tracks by traveling wheels and travel along the tracks. In order to stop the traveling wheels at a designated position, the traveling wheels need to be braked urgently to meet the positioning requirements of the material handling overhead crane.

[0004] The existing overhead crane uses a dual braking system to control the rotation of two sets of traveling wheels separately. In reality, when the traveling wheels are braked in an emergency using the dual braking system, the position signals of the two traveling wheels will deviate. The position deviation will create torque resistance during the emergency stop of the overhead crane, resulting in control delay differences. Due to the inconsistent response time of the two brakes, the emergency stop of the overhead crane will cause swaying, vibration, positioning offset or jamming, which will degrade the repeatability of the overhead crane and affect the handling accuracy. Utility Model Content

[0005] This invention addresses the shortcomings of existing technologies by providing a reciprocating moving mechanism that can physically eliminate the difference in response delay between the two braking sources, prevent the vehicle body from swaying during emergency stops, achieve high-precision emergency stops for the base body, avoid the degradation of the crane's repeated positioning accuracy, and improve handling accuracy.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] This utility model provides a reciprocating moving mechanism, including a base body and at least two base drive components installed at the front and rear ends of the base body;

[0008] The base drive assembly includes a base drive unit installed on the base body and a first traveling wheel and a second traveling wheel driven and synchronously controlled by the base drive unit. The base drive unit is used to drive and keep the first traveling wheel and the second traveling wheel rotating synchronously in the same direction.

[0009] The base drive unit is driven by the first and second wheels, and the base drive unit can generate braking force to stop the first and second wheels.

[0010] When the base body needs to stop moving, only one of the base drive units applies synchronous braking force to its first and second drive wheels to achieve braking, while the other base drive unit does not apply braking force to its first and second drive wheels, so that the base body stops.

[0011] The base body is equipped with a first limiting wheel and a second limiting wheel located at the bottom of the first traveling wheel and the second traveling wheel, respectively. The first limiting wheel and the second limiting wheel are arranged along the moving direction of the base body, and the first limiting wheel and the second limiting wheel are located below the first traveling wheel and the second traveling wheel, respectively.

[0012] The base body has a first detection switch and a second detection switch installed on its top, and the first detection switch and the second detection switch are respectively installed at both ends of the base body in the conveying direction.

[0013] The base drive unit includes a base drive motor and a reducer installed on the base body, as well as a first coupling and a second coupling that are respectively driven and connected to the two output ends of the reducer. The base drive motor is driven and connected to the reducer, the first traveling wheel is connected to the first coupling, and the second traveling wheel is connected to the second coupling.

[0014] The first traveling wheel includes a rotating component and a protective sleeve. The rotating component is detachably connected to the first coupling, and the protective sleeve is fitted on the outside of the rotating component.

[0015] When the first coupling rotates, it drives the rotating component to rotate, so that the sheath rotates along the axis of the first coupling.

[0016] The rotating component includes a wheel body and a locking member. The wheel body is provided with a mounting hole, the first coupling is provided with a connecting shaft, the connecting shaft passes through the mounting hole, and the locking member is used to lock the wheel body and the connecting shaft together.

[0017] The locking component is an expansion sleeve, the wheel body is provided with a mating hole, the mating hole is connected to the mounting hole, and one end of the expansion sleeve extends into the mating hole;

[0018] When the wheel body is locked to the connecting shaft, the expansion sleeve expands the inner wall of the connecting shaft and the mating hole, so that the first coupling and the rotating component can smoothly transmit torque and radial force.

[0019] The base body is equipped with a slide rail arranged along the axial direction of the first traveling wheel. The slide rail is slidably fitted with a mounting bracket. The base body is rotatably connected to a lead screw, which is threadedly connected to the mounting bracket. The lead screw is parallel to the slide rail. The base body is equipped with a transverse motor, which drives a first sprocket. The lead screw is connected to a second sprocket. A transmission chain connects the first sprocket and the second sprocket.

[0020] It also includes a locking component. The base body is provided with an adjustment groove. The horizontal motor is equipped with an adjustment plate. The adjustment plate slides along the extension direction of the adjustment groove. The locking component passes through the adjustment groove. After the adjustment plate moves along the adjustment groove to the desired position, the locking component locks the adjustment plate to the base body.

[0021] The base body is equipped with a support block, and the support block is threadedly connected to a limit rod. The limit rod is parallel to the adjustment groove, and one end of the limit rod abuts against the side of the adjustment plate.

[0022] The beneficial effects of this utility model are:

[0023] When the base body needs to stop moving, only one of the base drive units applies synchronous braking force to its first and second driving wheels to achieve braking. At the same time, the base drive unit of the other base drive assembly does not apply braking force to its first and second driving wheels, so that the base body stops. This physically eliminates the response delay difference between the two braking sources, allowing the other drive unit to completely release the braking force, and its driving wheels are in a free rolling or driven state, avoiding the generation of counteracting torque. By applying single-point braking force to one side of the base body without counteracting reverse torque, the body swaying during emergency stops is avoided. While ensuring emergency stopping capability, redundancy is sacrificed for dynamic stability, achieving high-precision emergency stops for the base body, avoiding the degradation of the crane's repetitive positioning accuracy, and improving handling accuracy. Attached Figure Description

[0024] Figure 1 This is a bottom view of the reciprocating moving mechanism.

[0025] Figure 2 This is a three-dimensional structural diagram of a reciprocating moving mechanism.

[0026] Figure 3 An exploded three-dimensional view of the structure including the first coupling, connecting shaft, and first traveling wheel.

[0027] Figure 4 This is a sectional view showing the installation structure of the wheel body and the locking mechanism.

[0028] Figure 5 This is a schematic diagram of another three-dimensional structure of a reciprocating moving mechanism.

[0029] Figure 6 This is an exploded view of the 3D structure at the connection between the horizontal motor and the base body.

[0030] 1. Base body; 101. First limiting wheel; 102. Second limiting wheel; 103. Adjustment groove;

[0031] 2. Base drive assembly;

[0032] 21. Base drive unit;

[0033] 211. Base drive motor; 212. Reducer; 213. First coupling; 214. Second coupling; 200. Connecting shaft;

[0034] 22. First traveling wheel;

[0035] 221. Rotating component; 2211. Wheel body; 22111. Mounting hole; 22112. Connecting hole; 2212. Locking component;

[0036] 222. Sheath;

[0037] 23. Second traveling wheel;

[0038] 31. First detection switch; 32. Second detection switch;

[0039] 4. Slide rail; 5. Mounting bracket; 51. Horizontal motor; 52. First sprocket;

[0040] 6. Lead screw; 61. Second sprocket; 62. Conveyor chain;

[0041] 7. Locking component; 71. Adjusting plate;

[0042] 8. Support block; 81. Limiting rod; Detailed Implementation

[0043] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0044] refer to Figures 1 to 6As shown, this utility model provides a reciprocating moving mechanism, including a base body 1 and at least two base drive assemblies 2 installed at the front and rear ends of the base body 1; the base drive assembly 2 includes a base drive unit 21 installed on the base body 1 and a first traveling wheel 22 and a second traveling wheel 23 driven and synchronously controlled by the base drive unit 21. The base drive unit 21 is used to drive and keep the first traveling wheel 22 and the second traveling wheel 23 rotating synchronously in the same direction; the base drive unit 21 is drivenly connected to the first traveling wheel 22 and the second traveling wheel 23, and the base drive unit 21 can generate braking force to stop the first traveling wheel 22 and the second traveling wheel 23.

[0045] refer to Figure 1 , 2 As shown, in practical applications, the base body 1 is placed on the crane track. The first traveling wheel 22 and the second traveling wheel 23 contact the crane track. The base drive unit 21 drives the first traveling wheel 22 and the second traveling wheel 23 to rotate synchronously in the same direction, achieving smooth movement along the crane track. The base drive unit 21 uses a bidirectional drive motor, which can drive the base body 1 to slide bidirectionally along the crane track, achieving reciprocating movement of the base body 1. When the base body 1 needs to stop moving, only one of the base drive units 21 applies synchronous braking force to its connected first traveling wheel 22 and second traveling wheel 23 to achieve braking. Specifically, the base drive unit 21 uses a servo control system; when deceleration is required, servo electric braking generates an electromagnetic force that resists rotor rotation. Electromagnetic force reduces the motor speed until it stops, thereby braking the first traveling wheel 22 and the second traveling wheel 23. Simultaneously, the base drive unit 21 of the other base drive assembly 2 does not apply braking force to the first traveling wheel 22 and the second traveling wheel 23 connected to it, so that the base body 1 stops, physically eliminating the response delay difference between the two braking sources, allowing the other drive unit to completely release the braking force, and its traveling wheels to be in a free rolling or driven state, avoiding the generation of opposing torque. By applying single-point braking force to one side of the base body 1, there is no opposing reverse torque, avoiding body swaying during emergency stops. Under the premise of ensuring emergency stopping capability, redundancy is sacrificed for dynamic stability, achieving high-precision emergency stops for the base body 1, avoiding the degradation of the crane's repetitive positioning accuracy, and improving handling accuracy.

[0046] refer to Figure 2 , 3As shown, in this embodiment, the base body 1 is equipped with a first limiting wheel 101 and a second limiting wheel 102 located at the bottom of the first traveling wheel 22 and the second traveling wheel 23, respectively. The first limiting wheel 101 and the second limiting wheel 102 are arranged along the moving direction of the base body 1, and the first limiting wheel 101 and the second limiting wheel 102 are located below the first traveling wheel 22 and the second traveling wheel 23, respectively. In actual application, the crane track is provided with at least two parallel crossbeams. The base body 1 slides along the upper surface of the corresponding crossbeams through the first traveling wheel 22 and the second traveling wheel 23, which smoothly drives the base body 1 to move along the crane track. The first limiting wheel 101 and the second limiting wheel 102 abut against the inner sidewall of the corresponding crossbeam, thereby limiting the left and right sides of the base body 1 and accurately limiting the left and right sides of the base body 1 to prevent the crane from deviating.

[0047] refer to Figure 1 , 2 As shown, in this embodiment, a first detection switch 31 and a second detection switch 32 are installed on the top of the base body 1. The first detection switch 31 and the second detection switch 32 are respectively installed at both ends of the base body 1 in the conveying direction. In actual application, a first detection plate and a second detection plate are respectively installed at both ends of the overhead crane track. When the base body 1 moves to one end of the overhead crane track, the first detection switch 31 corresponds to the first detection plate, or the second detection switch 32 corresponds to the second detection plate, to ensure that the base body 1 moves to one end of its stroke, so as to facilitate the determination of the stroke range of the base body 1.

[0048] refer to Figure 1 As shown, in this embodiment, the base drive unit 21 includes a base drive motor 211 and a reducer 212 mounted on the base body 1, and a first coupling 213 and a second coupling 214 respectively driven and connected to the two output ends of the reducer 212. The base drive motor 211 is driven and connected to the reducer 212. The first traveling wheel 22 is connected to the first coupling 213, and the second traveling wheel 23 is connected to the second coupling 214. The first traveling wheel 22 includes a rotating component 221 and a protective sleeve 222. The rotating component 221 is detachably connected to the first coupling 213, and the protective sleeve 222 is sleeved on the outside of the rotating component 221.

[0049] In practical applications, the base drive motor 211 drives the reducer 212, the first coupling 213, and the second coupling 214 to rotate. The reducer 212 smoothly transmits the output torque. When the first coupling 213 rotates, it drives the rotating component 221 to rotate, so that the sheath 222 rotates along the axis of the first coupling 213. The sheath 222 contacts the crane track, which facilitates the protection of the first traveling wheel 22. When the sheath 222 on the first traveling wheel 22 wears, it can be separated from the corresponding coupling, which facilitates the quick installation or removal of the traveling wheel and supports the quick replacement of worn parts. Specifically, the first traveling wheel 22 and the second traveling wheel 23 have the same structure. When the sheath 222 on the second traveling wheel 23 wears, it can be replaced, which helps protect the second traveling wheel 23 and facilitates the smooth replacement of worn parts.

[0050] refer to Figure 2 , 3 As shown, in this embodiment, the rotating component 221 includes a wheel body 2211 and a locking member 2212. The wheel body 2211 is provided with a mounting hole 22111. The first coupling 213 is provided with a connecting shaft 200, which passes through the mounting hole 22111. The locking member 2212 is used to lock the wheel body 2211 and the connecting shaft 200. The first traveling wheel 22 and the second traveling wheel 23 have the same structure, which facilitates the smooth transmission of torque between the first coupling 213 and the first traveling wheel 22 or the second coupling 214 and the second traveling wheel 23, resulting in a stable structure. The locking member 2212 is an expansion sleeve. The wheel body 2211 is provided with a mating hole 22112, which communicates with the mounting hole 22111. One end of the expansion sleeve extends into the mating hole 22112.

[0051] refer to Figure 3 , 4 As shown, in practical applications, when the wheel body 2211 is locked with the connecting shaft 200, the expansion sleeve expands the inner wall of the connecting shaft 200 and the mating hole 22112. The structure and working principle of the expansion sleeve are existing technologies, based on the radial expansion effect generated by the axial force and the conical surface, so that the first coupling 213 and the rotating component 221 can smoothly transmit torque and radial force. The first traveling wheel 22 and the second traveling wheel 23 have the same structure, which facilitates the smooth transmission of torque between the first coupling 213 and the first traveling wheel 22 or the second coupling 214 and the second traveling wheel 23, and the structure is stable.

[0052] refer to Figure 1 , 5As shown in Figure 6, in this embodiment, the base body 1 is equipped with a slide rail 4 arranged axially along the first traveling wheel 22. The slide rail 4 is slidably fitted with a mounting frame 5. The base body 1 is rotatably connected to a lead screw 6, which is threadedly connected to the mounting frame 5. The lead screw 6 is parallel to the slide rail 4. The base body 1 is equipped with a horizontal motor 51, which drives a first sprocket 52. The lead screw 6 is connected to a second sprocket 61. A conveyor chain 62 connects the first sprocket 52 and the second sprocket 61. In practical applications, the lifting mechanism or gripping mechanism that needs to move the wafer cassette is connected to the mounting frame 5. The horizontal motor 51 drives the first sprocket 52 to rotate. Under the action of the first sprocket 52, the conveyor chain 62, and the second sprocket 61, the lead screw 6 and the mounting frame 5 slide along the slide rail 4, thereby changing the lateral position of the lifting mechanism or gripping mechanism to meet the lateral position compensation of the wafer cassette, which is conducive to precise gripping of the wafer cassette and convenient for precise handling of the wafer cassette.

[0053] refer to Figure 5 , 6 As shown, this embodiment also includes a locking member 7. The base body 1 is provided with an adjustment groove 103, and the horizontal motor 51 is equipped with an adjustment plate 71. The adjustment plate 71 slides along the extension direction of the adjustment groove 103. The locking member 7 passes through the adjustment groove 103. After the adjustment plate 71 moves along the adjustment groove 103 to the desired position, the locking member 7 locks the adjustment plate 71 to the base body 1. In practical applications, the horizontal motor 51 and the adjustment plate 71 are adjusted along the adjustment groove 103 to facilitate the installation and adaptation of horizontal motors 51 of different models and sizes, which is beneficial to meet the needs of various crystals. For circular handling requirements, once the position of the adjusting plate 71 is determined, it is locked by the locking member 7 to lock the horizontal motor 51. Specifically, the outer end of the locking member 7 has a head, the width of which is greater than the width of the rod body. The rod body is installed in the adjusting groove 103. The adjusting groove 103 is stepped, and the larger end of the opening of the adjusting groove 103 faces the head of the locking member 7. When the locking member 7 is tightened, the head is pressed against the end face of the adjusting groove 103, thereby locking the adjusting plate 71 with the base body 1. This makes it easy to hide the locking member 7 and the head in the adjusting groove 103, resulting in a compact structure.

[0054] refer to Figure 6 As shown, in this embodiment, the base body 1 is equipped with a support block 8, and the support block 8 is threadedly connected to a limiting rod 81. The limiting rod 81 is parallel to the adjustment groove 103, and one end of the limiting rod 81 abuts against the side of the adjustment plate 71. In actual application, after the position of the adjustment plate 71 is determined, the limiting rod 81 is rotated to limit one side of the adjustment plate 71, accurately positioning the installation position of the adjustment plate 71 and ensuring the accurate installation of the horizontal motor 51.

[0055] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A reciprocating moving mechanism, characterized in that, It includes a base body (1) and at least two base drive assemblies (2) installed at the front and rear ends of the base body (1); The base drive assembly (2) includes a base drive unit (21) installed on the base body (1) and a first traveling wheel (22) and a second traveling wheel (23) driven and synchronously controlled by the base drive unit (21). The base drive unit (21) is used to drive and keep the first traveling wheel (22) and the second traveling wheel (23) rotating synchronously in the same direction. The base drive unit (21) is driven to the first traveling wheel (22) and the second traveling wheel (23). The base drive unit (21) can generate braking force to stop the first traveling wheel (22) and the second traveling wheel (23). When the base body (1) needs to stop moving, only one of the base drive units (21) applies synchronous braking force to its first traveling wheel (22) and second traveling wheel (23) to achieve braking. At the same time, the base drive unit (21) of the other base drive assembly (2) does not apply braking force to its first traveling wheel (22) and second traveling wheel (23) to stop the base body (1).

2. The reciprocating moving mechanism according to claim 1, characterized in that, The base body (1) is equipped with a first limiting wheel (101) and a second limiting wheel (102) located at the bottom of the first traveling wheel (22) and the second traveling wheel (23), respectively. The first limiting wheel (101) and the second limiting wheel (102) are arranged along the moving direction of the base body (1), and the first limiting wheel (101) and the second limiting wheel (102) are located below the first traveling wheel (22) and the second traveling wheel (23), respectively.

3. The reciprocating moving mechanism according to claim 1, characterized in that, The top of the base body (1) is equipped with a first detection switch (31) and a second detection switch (32), which are respectively installed at both ends of the base body (1) in the conveying direction.

4. The reciprocating moving mechanism according to claim 1, characterized in that, The base drive unit (21) includes a base drive motor (211) and a reducer (212) installed on the base body (1), as well as a first coupling (213) and a second coupling (214) that are respectively driven and connected to the two output ends of the reducer (212). The base drive motor (211) is driven and connected to the reducer (212), the first walking wheel (22) is connected to the first coupling (213), and the second walking wheel (23) is connected to the second coupling (214). The first traveling wheel (22) includes a rotating component (221) and a protective sleeve (222). The rotating component (221) is detachably connected to the first coupling (213), and the protective sleeve (222) is sleeved on the outside of the rotating component (221). When the first coupling (213) rotates, it drives the rotating component (221) to rotate, so that the sheath (222) rotates along the axis of the first coupling (213).

5. The reciprocating moving mechanism according to claim 4, characterized in that, The rotating component (221) includes a wheel body (2211) and a locking member (2212). The wheel body (2211) is provided with a mounting hole (22111). The first coupling (213) is provided with a connecting shaft (200). The connecting shaft (200) passes through the mounting hole (22111). The locking member (2212) is used to lock the wheel body (2211) and the connecting shaft (200). The locking element (2212) is an expansion sleeve, and the wheel body (2211) is provided with a docking hole (22112). The docking hole (22112) is connected to the mounting hole (22111), and one end of the expansion sleeve extends into the docking hole (22112). When the wheel body (2211) is locked with the connecting shaft (200), the expansion sleeve expands the inner wall of the connecting shaft (200) and the mating hole (22112) so that the first coupling (213) and the rotating component (221) can smoothly transmit torque and radial force.

6. The reciprocating moving mechanism according to claim 1, characterized in that, The base body (1) is equipped with a slide rail (4) arranged axially along the first traveling wheel (22). The slide rail (4) is slidably fitted with a mounting bracket (5). The base body (1) is rotatably connected with a lead screw (6). The lead screw (6) is threadedly connected to the mounting bracket (5). The lead screw (6) is parallel to the slide rail (4). The base body (1) is equipped with a transverse motor (51). The transverse motor (51) drives a first sprocket (52). The lead screw (6) is connected to a second sprocket (61). A transmission chain (62) is connected between the first sprocket (52) and the second sprocket (61).

7. The reciprocating moving mechanism according to claim 6, characterized in that, It also includes a locking component (7), the base body (1) is provided with an adjustment groove (103), the horizontal motor (51) is equipped with an adjustment plate (71), the adjustment plate (71) slides along the extension direction of the adjustment groove (103), the locking component (7) passes through the adjustment groove (103), and after the adjustment plate (71) moves along the adjustment groove (103) to the desired position, the locking component (7) locks the adjustment plate (71) to the base body (1).

8. The reciprocating moving mechanism according to claim 7, characterized in that, The base body (1) is equipped with a support block (8), and the support block (8) is threadedly connected to a limit rod (81). The limit rod (81) is parallel to the adjustment groove (103), and one end of the limit rod (81) abuts against the side of the adjustment plate (71).

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