A reverse osmosis device of a semiconductor pure water treatment system

Abstract

The utility model relates to water treatment technical field especially is a kind of semiconductor pure water treatment system's reverse osmosis device, including processing system, the processing system is provided with reverse osmosis mechanism and is used to handle raw water, and reverse osmosis mechanism includes: external component, including several membrane shells in processing system, four installation notches of circumferential arrangement are opened in membrane shell rear end inner wall;Internal component, including the center tube of being installed in the inside of membrane shell, the outer wall of center tube is fixed with membrane, the rear end of membrane is fixed with rear end cover, and the front end of membrane is fixed with front end cover;Mounting assembly, including the installation cylinder of being installed in the inside of membrane shell rear end, screw rod is rotatably installed between the inside front and rear ends of installation cylinder, and the outer wall of screw rod is screw-mounted with guide disc;Through simple rotation operation, the quick centering of membrane element, locking and disassembly can be realized, effectively avoid sealing eccentric wear, improve the maintenance efficiency and reliability in narrow space.

Description

Technical Field

[0001] This utility model relates to the field of water treatment technology, specifically to a reverse osmosis device for a semiconductor pure water treatment system. Background Technology

[0002] In the semiconductor manufacturing industry, ultrapure water is an indispensable key material in the production process. Core processes such as chip cleaning, etching, and polishing all require ultrapure water, and its purity directly affects the yield, performance, and reliability of integrated circuits. According to CN213012095U, a reverse osmosis device for a semiconductor pure water treatment system is disclosed. This technology discloses a technical solution that includes "several inner tubes with water inlet holes evenly distributed on their surfaces, one end open and the other closed; the outer side near the open end perpendicularly passes through a B-side plate and is fixed; the outer side near the closed end passes through a corresponding hole on a A-side plate and extends outward; a cylindrical threaded fixing part coaxial with the inner tube is provided at the connection between the inner side of the B-side plate and the inner tube; several reverse osmosis mechanisms are correspondingly sleeved on the outer side of the inner tube, pass through the holes on the A-side plate and are then connected to the threaded fixing part; a main water pipe is provided in the middle of the bottom plate; the top and bottom of the main water pipe are respectively provided with an outlet and an inlet; several branch pipes are provided on the side of the main water pipe; the branch pipes include rigid pipe sections and flexible pipe sections; valves are provided on the rigid pipe sections; and the ends of the flexible pipe sections are connected to the middle of the outer side of the reverse osmosis mechanism through a water pipe quick interface." This technology has the technical effects of "reasonable structural design, replacement of one reverse osmosis mechanism does not affect the operation of other reverse osmosis mechanisms, and effectively improves production efficiency and production stability." During the process of installing internal components into the membrane housing, the above solution lacks an effective radial positioning and centering guidance mechanism. Relying solely on manual adjustments by operators, the central tube is prone to axial misalignment. This misalignment leads to uneven contact between the sealing ring fixed on the central tube and the inner wall of the membrane housing, preventing the formation of a complete sealing ring. When high-pressure raw water is introduced into the system, the high-pressure fluid will leak through the poorly sealed local gaps, causing not only a loss of inlet water pressure and a decrease in recovery rate, but more seriously, the unfiltered raw water will directly contaminate the product water quality. Utility Model Content

[0003] To address the shortcomings of existing technologies, this invention provides a reverse osmosis device for a semiconductor pure water treatment system. The device enables rapid alignment, locking, and disassembly of membrane elements through a simple rotation operation, effectively preventing uneven seal wear and improving maintenance efficiency and reliability in confined spaces.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a reverse osmosis device for a semiconductor pure water treatment system, comprising a treatment system, wherein the treatment system is equipped with a reverse osmosis mechanism for treating raw water, the reverse osmosis mechanism comprising: External components include several membrane housings installed in the processing system, with four circumferentially arranged mounting recesses on the inner wall of the rear end of each membrane housing. The internal components include a central tube installed inside the membrane housing, a diaphragm fixed to the outer wall of the central tube, a rear end cover fixed to the rear end of the diaphragm, and a front end cover fixed to the front end of the diaphragm. The mounting assembly includes a mounting cylinder installed inside the rear end of the membrane housing. A threaded rod is rotatably mounted between the front and rear ends inside the mounting cylinder. A guide plate is threaded onto the outer wall of the threaded rod. Four guide blocks arranged in a circle are fixed at the front end of the guide plate. Mounting protrusions are slidably mounted on the guide blocks and are slidably mounted through the mounting cylinder. An internal hexagonal hole is opened inside the rear end of the threaded rod.

[0005] Preferably, the mounting assembly further includes a circular hole formed at the lower end of the mounting cylinder.

[0006] Preferably, the external component further includes a water inlet connected to and fixed at the rear end of the outer wall of the membrane housing, a wastewater inlet connected to and fixed at the front end of the outer wall of the membrane housing, and a pure water inlet connected to and fixed at the front end of the membrane housing.

[0007] Preferably, the mounting assembly further includes a second sealing ring fixed to the outer wall of the mounting cylinder.

[0008] Preferably, the internal component further includes a first sealing ring fixed to the front end of the outer wall of the central tube.

[0009] Preferably, the guide block has an oblique slot, and the guide disc is slidably installed with the mounting protrusion through the oblique slot, and the angle between the oblique slot and the threaded rod is 45 degrees.

[0010] Beneficial effects This invention provides a reverse osmosis device for a semiconductor pure water treatment system. Compared with the prior art, it has the following advantages: 1. After the internal components are installed inside the external components, the front end of the central tube is inserted into the front end of the membrane housing. Then, the installation component is installed into the rear end of the membrane housing. When the tool is inserted into the internal hexagonal hole at the rear end of the threaded rod and rotated, the guide disc that is threaded with it moves axially, thereby pushing the four guide blocks at its front end to move synchronously. Since the installation protrusion and the guide block are slidably installed, the axial movement of the guide block is converted into the radial movement of the installation protrusion, which can accurately extend out of the installation cylinder and lock into the installation recesses arranged circumferentially on the inner wall of the rear end of the membrane housing, thus completing the locking. The cooperation of multiple circumferentially distributed installation protrusions and installation recesses ensures that the central tube of the internal components and the membrane housing are automatically aligned, avoiding wear of the sealing ring due to eccentric force and ensuring sealing reliability. Moreover, the entire locking process can be completed by a simple rotation operation, simplifying the installation and disassembly process of reverse osmosis membrane elements. It is particularly convenient for maintenance and replacement in space-constrained semiconductor pure water treatment systems, improving operating efficiency and equipment maintainability.

[0011] 2. Once the internal components are finally locked inside the membrane housing by the installation components, the position of the circular hole is precisely aligned with the water inlet on the membrane housing, thus forming an unobstructed water inlet path, allowing the high-pressure raw water entering from the water inlet to flow directly into the inlet on the rear end cover through this circular hole. Attached Figure Description

[0012] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is an exploded view of the reverse osmosis mechanism in this utility model; Figure 3 This is a cross-sectional view of the reverse osmosis mechanism in this utility model; Figure 4 This utility model Figure 3 A schematic diagram of the structure of part A in the middle; Figure 5 This utility model Figure 3 A schematic diagram of the structure of part B in the middle.

[0013] In the diagram: 1. Treatment system; 2. Reverse osmosis mechanism; 21. External component; 211. Membrane housing; 212. Mounting notch; 213. Inlet; 214. Wastewater outlet; 215. Pure water outlet; 22. Internal component; 221. Central tube; 222. Membrane sheet; 223. Rear end cap; 224. Front end cap; 225. First sealing ring; 23. Mounting component; 231. Mounting cylinder; 232. Threaded rod; 233. Guide plate; 234. Guide block; 235. Mounting protrusion; 236. Internal hexagonal hole; 237. Second sealing ring; 238. Round hole. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] Please see Figure 1 - Figure 5 This utility model provides a technical solution: a reverse osmosis device for a semiconductor pure water treatment system, including a treatment system 1, wherein the treatment system 1 is equipped with a reverse osmosis mechanism 2 for treating raw water, and the reverse osmosis mechanism 2 includes: The external component 21 includes several membrane housings 211 installed in the processing system 1, and the inner wall of the rear end of the membrane housing 211 has four circumferentially arranged mounting recesses 212. The internal component 22 includes a central tube 221 installed inside the membrane housing 211, a diaphragm 222 fixed to the outer wall of the central tube 221, a rear end cover 223 fixed to the rear end of the diaphragm 222, and a front end cover 224 fixed to the front end of the diaphragm 222. The mounting assembly 23 includes a mounting cylinder 231 installed inside the rear end of the membrane housing 211. A threaded rod 232 is rotatably mounted between the front and rear ends inside the mounting cylinder 231. A guide plate 233 is threaded onto the outer wall of the threaded rod 232. Four circumferentially arranged guide blocks 234 are fixed at the front end of the guide plate 233. A mounting protrusion 235 is slidably mounted on the guide block 234 and is slidably mounted through the mounting cylinder 231. An internal hexagonal hole 236 is opened inside the rear end of the threaded rod 232.

[0016] In this embodiment, after the internal component 22 is installed inside the external component 21, the front end of the central tube 221 is inserted into the front end of the diaphragm housing 211. Then, the mounting component 23 is installed inside the rear end of the diaphragm housing 211. When the tool is inserted into the internal hexagonal hole 236 at the rear end of the threaded rod 232 and rotated, the guide disc 233, which is threaded to it, moves axially, thereby pushing the four guide blocks 234 at its front end to move synchronously. Since the mounting protrusion 235 and the guide blocks 234 are slidably mounted, the axial movement of the guide blocks 234 is converted into the radial movement of the mounting protrusion 235, allowing it to extend precisely from the mounting protrusion. The cylinder 231 is inserted into the mounting recess 212 arranged circumferentially on the inner wall of the rear end of the membrane housing 211, thereby completing the locking. The cooperation between the multiple mounting protrusions 235 evenly distributed around the circumference and the mounting recess 212 ensures that the central tube 221 of the internal component 22 is automatically aligned with the membrane housing 211, avoiding wear of the sealing ring due to eccentric force and ensuring sealing reliability. Furthermore, the entire locking process can be completed by a simple rotation operation, simplifying the installation and disassembly process of the reverse osmosis membrane element. It is particularly convenient for maintenance and replacement in the space-constrained semiconductor pure water treatment system 1, improving operating efficiency and equipment maintainability.

[0017] Specifically, the mounting component 23 also includes a circular hole 238 formed at the lower end of the mounting cylinder 231.

[0018] In this embodiment, after the internal component 22 is finally locked inside the membrane housing 211 by the mounting component 23, the position of the circular hole 238 is precisely aligned with the water inlet 213 on the membrane housing 211, thereby forming an unobstructed water inlet path, so that the high-pressure raw water entering from the water inlet 213 can directly flow into the inlet on the rear cover 223 through this circular hole 238.

[0019] Specifically, the external component 21 also includes a water inlet 213 connected to and fixed to the rear end of the outer wall of the membrane housing 211, a wastewater inlet 214 connected to and fixed to the front end of the outer wall of the membrane housing 211, and a pure water inlet 215 connected to and fixed to the front end of the membrane housing 211.

[0020] In this embodiment, high-pressure raw water enters the cavity at the rear end of the membrane housing 211 through the inlet 213. Under pressure, it flows parallel to the axis of the central tube 221 across the surface of the membrane 222. During this process, some water molecules pass through the separation layer of the membrane 222 to form pure water, which flows into the internal channel of the central tube 221 and is finally discharged from the pure water outlet 215 at the front end. Meanwhile, the wastewater containing high concentrations of salt that fails to pass through continues to flow along the membrane surface to the front end of the membrane housing 211 and is discharged from the wastewater outlet 214.

[0021] Specifically, the mounting assembly 23 also includes a second sealing ring 237 fixed to the outer wall of the mounting cylinder 231.

[0022] In this embodiment, when the mounting cylinder 231 is locked in place by the mounting protrusion 235 and the mounting recess 212, the second sealing ring 237 is compressed, thereby effectively blocking the path of high-pressure raw water leaking from the rear end of the membrane housing 211.

[0023] Specifically, the internal component 22 also includes a first sealing ring 225 fixed to the front end of the outer wall of the central tube 221.

[0024] In this embodiment, the first sealing ring 225 forms a crucial radial seal between the central tube 221 and the inner wall of the membrane housing 211. This seal effectively isolates the rear chamber of the membrane housing 211, i.e., the high-pressure water inlet chamber, from the flow channel of the membrane 222 outside the central tube 221. Its beneficial effect is that it forces all high-pressure raw water entering through the inlet 213 to flow through the surface of the membrane 222 for filtration, completely preventing untreated raw water from directly short-circuiting and leaking to the area where the front-end pure water outlet 215 or waste water outlet 214 is located through the gap between the central tube 221 and the membrane housing 211, thereby ensuring the separation efficiency of the reverse osmosis process.

[0025] Specifically, the guide block 234 has an oblique slot, and the guide plate 233 is slidably installed with the mounting protrusion 235 through the oblique slot. The angle between the oblique slot and the threaded rod 232 is 45 degrees.

[0026] In this embodiment, an optimal balance between axial force and radial force is achieved. Its beneficial effect is that it ensures that the mounting protrusion 235 can obtain a sufficiently large radial locking force to firmly engage with the mounting recess 212 on the membrane housing 211, preventing the reverse osmosis device from loosening during high-pressure operation. At the same time, it ensures that the operating torque of the threaded rod 232 is within a reasonable range, guaranteeing a smooth and labor-saving installation and disassembly process.

[0027] The working principle and usage process of this utility model are as follows: First, after the internal component 22 is installed inside the external component 21, the front end of the central tube 221 is inserted into the front end of the membrane shell 211 and forms a preliminary seal with the inner wall of the membrane shell 211 through the first sealing ring 225; then the mounting cylinder 231 is placed into the rear end of the membrane shell 211, so that the second sealing ring 237 on its outer wall fits against the inner wall of the membrane shell 211. Then, a tool is inserted into the internal hexagonal hole 236 at the rear end of the threaded rod 232 and rotated, driving the guide disc 233 to move axially along the threaded rod 232, pushing the guide block 234 at its front end forward synchronously. Since the oblique slot inside the guide block 234 forms a 45-degree angle with the threaded rod 232, the axial movement of the guide block 234 is efficiently converted into the radial expansion movement of the mounting protrusion 235, so that it is precisely engaged in the mounting recess 212 arranged circumferentially on the inner wall of the diaphragm housing 211, thereby achieving rapid alignment and secure locking of the internal component 22; this locking force simultaneously compresses the first sealing ring 225 and the second sealing ring 237, forming two reliable sealing barriers; During operation, high-pressure raw water enters through the inlet 213 at the right end of the membrane housing 211, flows through the circular hole 238 at the lower end of the mounting cylinder 231 to the rear end cover 223, and fills the right cavity of the membrane housing 211. Driven by water pressure, the water flows parallel to the axis of the central tube 221 across the surface of the membrane 222; the first sealing ring 225 effectively prevents the raw water from short-circuiting at the right end of the central tube 221, forcing it to pass through the membrane 222 for separation; pure water passes through the membrane 222 under the action of osmotic pressure difference and enters the internal flow channel of the central tube 221, and is finally discharged from the front pure water outlet 215 to supply the subsequent fine treatment system. The retained concentrated water continues to flow along the membrane surface to the front end of the membrane housing 211 and is discharged from the wastewater outlet 214.

[0028] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A reverse osmosis device for a semiconductor pure water treatment system, comprising a treatment system (1), characterized in that: The treatment system (1) is equipped with a reverse osmosis unit (2) for treating raw water. The reverse osmosis unit (2) includes: The external component (21) includes several membrane housings (211) installed in the processing system (1), and the inner wall of the rear end of the membrane housing (211) has four circumferentially arranged mounting recesses (212). The internal component (22) includes a central tube (221) installed inside the membrane housing (211), a diaphragm (222) fixed to the outer wall of the central tube (221), a rear end cover (223) fixed to the rear end of the diaphragm (222), and a front end cover (224) fixed to the front end of the diaphragm (222). The mounting assembly (23) includes a mounting cylinder (231) installed inside the rear end of the membrane housing (211). A threaded rod (232) is rotatably mounted between the front and rear ends inside the mounting cylinder (231). A guide plate (233) is threaded onto the outer wall of the threaded rod (232). Four guide blocks (234) arranged in a circle are fixed at the front end of the guide plate (233). A mounting protrusion (235) is slidably mounted on the guide block (234), and the mounting protrusion (235) is slidably mounted through the mounting cylinder (231). An internal hexagonal hole (236) is opened inside the rear end of the threaded rod (232).

2. The reverse osmosis device of a semiconductor pure water treatment system according to claim 1, characterized in that: The mounting assembly (23) also includes a circular hole (238) at the lower end of the mounting cylinder (231).

3. The reverse osmosis device of a semiconductor pure water treatment system according to claim 1, characterized in that: The external component (21) also includes an inlet (213) connected to and fixed at the rear end of the outer wall of the membrane shell (211), a wastewater outlet (214) connected to and fixed at the front end of the outer wall of the membrane shell (211), and a pure water outlet (215) connected to and fixed at the front end of the membrane shell (211).

4. The reverse osmosis device of a semiconductor pure water treatment system according to claim 1, characterized in that: The mounting assembly (23) also includes a second sealing ring (237) fixed to the outer wall of the mounting cylinder (231).

5. The reverse osmosis device of a semiconductor pure water treatment system according to claim 1, characterized in that: The internal component (22) also includes a first sealing ring (225) fixed to the front end of the outer wall of the central tube (221).

6. The reverse osmosis device of a semiconductor pure water treatment system according to claim 1, characterized in that: The guide block (234) has an oblique slot, and the guide plate (233) is slidably installed with the mounting head (235) through the oblique slot. The angle between the oblique slot and the threaded rod (232) is 45 degrees.

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