Hydrostatic air bearing with kingston groove

Abstract

The utility model provides a kind of static pressure air bearing with king character shape pressure equalizing groove, comprising: rotor consisting of upper and lower rotary table flange and shaft core;Stator consisting of rotary table outer sleeve, upper and lower throttle plate, throttle shaft sleeve;Micron level gas film layer exists between upper and lower rotary table flange and upper and lower throttle plate;Rotary table outer sleeve end face has two concentric annular air passages, corresponding with the air inlet hole of upper and lower throttle plate;King character shape pressure equalizing groove is connected with air inlet hole by throttle hole, its centroid, air inlet hole axis and throttle hole axis are on same axis;King character shape pressure equalizing groove is divided into two layers of inside and outside, outer layer is longer in horizontal close to outer diameter, and shorter in horizontal close to inner diameter;Inside layer is contrary, and short horizontal of inside and outside layers is in same diameter position.The design of the utility model can effectively guide gas film shaping, expand the influence range of pressure gas, improve the load capacity and radial stiffness of air bearing.

Description

Technical Field

[0001] This utility model relates to the field of air bearing technology, specifically to a static pressure air bearing with a king-shaped equalizing groove. Background Technology

[0002] As a type of non-contact bearing, the core working principle of an air bearing is to throttle the high-pressure airflow so that the high-speed, low-pressure airflow formed after throttling continuously fills the micron-level gap between the bearing stator and rotor (this gap is the air film layer). The air film supports and completely separates the two relatively moving surfaces of the stator and rotor, thereby achieving frictionless, non-contact operation.

[0003] Insufficiency of existing technology: 1. Limited guiding effect of air film formation: The structural design of traditional pressure equalization grooves (cavities) has weak airflow guidance and cannot effectively guide high-speed low-pressure airflow to form a uniform and widespread pressure distribution in the air film layer. This results in uneven pressure distribution of the air film, with local areas having excessively high or low pressure, which affects the stability of bearing operation.

[0004] 2. Small effective influence area of ​​pressurized gas: Due to the limited structural form (such as the distribution of the annular shape only along the annular area, and the diamond / cylindrical shape only as a local chamber), the pressurized gas released by the traditional equalizing tank (cavity) is difficult to achieve large-scale diffusion within the micron-level gas film layer. The effective pressure coverage area is small, and the support potential of the gas film gap cannot be fully utilized.

[0005] 3. Insufficient bearing load capacity and stiffness: Due to poor air film formation effect and small effective pressure area, the overall support force of the air film corresponding to the traditional equalizing groove (cavity) is limited, resulting in low load capacity (i.e., load that can be borne per unit area) of the air bearing and insufficient radial stiffness (ability to resist radial deformation). It is difficult to meet the performance requirements of "high load and high stability" of bearings in precision equipment in fields such as semiconductors and optics, and problems such as slight rotor misalignment and running vibration are prone to occur, affecting the processing or production accuracy.

[0006] Therefore, existing technologies have shortcomings and need further improvement. Utility Model Content

[0007] To address the problems existing in the prior art, this utility model provides a hydrostatic air bearing with a king-shaped equalizing groove.

[0008] To achieve the above objectives, the specific solution of this utility model is as follows: This utility model provides a hydrostatic air bearing with a king-shaped equalizing groove, comprising: The rotor and stator are the two main parts; The rotor is composed of an upper flange, a lower flange and a shaft core, and the stator is composed of an upper throttling plate, a lower throttling plate, a throttling shaft sleeve and a turntable outer sleeve; The turntable outer sleeve end face is provided with two concentric annular air passages, and the upper throttle plate and the lower throttle plate are provided with a first air inlet at one end facing the annular air passages, and the annular air passages are connected to the first air inlet. The upper and lower throttling plates are provided with a king-shaped pressure equalization groove at the other end. The king-shaped pressure equalization groove is connected to the first air inlet through a throttling hole. The centroid of the king-shaped pressure equalization groove, the axis of the first air inlet, and the axis of the throttling hole are on the same axis. The king-shaped equalizing groove is directly opposite the end faces of the upper and lower flanges, and the groove depth ranges from 5µm to 25µm. There are micron-level gaps between the upper and lower throttling plates and the upper and lower flanges, which form an air film layer; there are micron-level gaps between the throttling bushing and the shaft core, which form an air film layer.

[0009] Furthermore, the king-shaped equalizing groove is divided into an inner layer and an outer layer, and is evenly distributed alternately along the circumferential direction of the upper and lower throttling plates.

[0010] Furthermore, in the outer layer of the king-shaped equalizing groove, the horizontal section near the outer circle of the upper and lower throttling plates is longer, while the horizontal section near the inner hole of the upper and lower throttling plates is shorter; in the inner layer of the king-shaped equalizing groove, the horizontal section near the outer circle of the upper and lower throttling plates is shorter, while the horizontal section near the inner hole of the upper and lower throttling plates is longer.

[0011] Furthermore, the short horizontal center line of the outer king-shaped equalizing groove and the short horizontal center line of the inner king-shaped equalizing groove are at the same diameter position.

[0012] Furthermore, the air bearing is provided with an air passage 1, the path of which is: clean compressed air → second air inlet → annular air passage of upper throttling plate and lower throttling plate → first air inlet → throttling hole → king-shaped equalizing groove → air film layer → air collecting ring groove → exhaust port → outdoor atmosphere.

[0013] Furthermore, the air bearing is provided with an air passage 2, the path of which is: clean compressed air → second air inlet → annular air passage of upper and lower throttling plates → first air inlet → throttling orifice → king-shaped equalizing groove → air film layer → outdoor atmosphere.

[0014] Furthermore, the air bearing is provided with an air passage 3, the path of which is: clean compressed air → second air inlet → throttling shaft sleeve air supply groove → air film layer between throttling shaft sleeve and shaft core → air collecting ring groove → exhaust hole → outdoor atmosphere.

[0015] Further, on one end face of the upper throttle plate and the lower throttle plate facing the outer sleeve of the turntable, there are first air inlet holes arranged in a ring-shaped and staggered manner with an inner layer and an outer layer.

[0016] Further, the throttle holes are respectively and correspondingly connected to the first air inlet holes and the king-shaped pressure equalizing grooves.

[0017] Further, the high-speed and low-pressure gas released by the king-shaped pressure equalizing grooves diffuses continuously and distributively towards the air film layer with the pressure equalizing grooves as the release source.

[0018] Adopting the technical solution of the present utility model has the following beneficial effects: I. Optimize air film formation and pressure distribution, and expand the effective influence area of the pressurized gas 1. Precise guidance of air flow diffusion: The special structure of the king-shaped pressure equalizing grooves (staggered arrangement of inner and outer layers, different design of the transverse segment lengths), combined with the layout of "the centroid of the air inlet hole, throttle hole, and pressure equalizing groove being coaxial", enables the high-pressure air flow to first fill the middle short transverse of the pressure equalizing groove after passing through the throttle hole, and then orderly diffuse to the upper and lower long transverses, forming an air flow diffusion path combined with "radial + directional" centered on the pressure equalizing groove, effectively guiding the uniform formation of the air film and avoiding the problems of disordered air flow diffusion and local accumulation in traditional pressure equalizing grooves (such as circular rings and rhombuses).

[0019] 2. Expand the effective pressure coverage range: Compared with traditional pressure equalizing grooves that can only form effective pressure in local areas, the transverse segment extension structure of the king-shaped pressure equalizing grooves (the outer long transverse covers the outer diameter side, and the inner long transverse covers the inner diameter side), combined with the staggered distribution of the inner and outer layers, can achieve full-range coverage of pressurized gas in the "inner diameter - middle - outer diameter" range within the micron-level air film layer, significantly expanding the effective pressure influence area and making full use of the support potential of the air film gap.

[0020] II. Significantly improve the core performance of the bearing: load-carrying capacity and radial stiffness The uniformity and effective pressure coverage range of the air film directly determine the bearing capacity and stiffness of the bearing - through the above-mentioned air film optimization of the present utility model, the supporting force of the air film on the rotor is more uniform and stable: 1. Improve the load-carrying capacity: The expanded effective pressure area can disperse the rotor load, avoid local air film pressure overload, significantly increase the load that the bearing can withstand per unit area, and can be adapted to heavier rotors or precision equipment with higher loads (such as semiconductor wafer carriers, optical element processing spindles).

[0021] 2. Enhance the radial stiffness: The uniform and extensive air film pressure distribution can effectively resist the radial offset trend during the operation of the rotor, reduce vibration or displacement caused by insufficient stiffness, enable the bearing to still maintain excellent stability during high-speed operation, and meet the requirements of ultra-precision machining for "zero vibration and micro displacement".

[0022] III. Enhance the operation stability and reduce the risk of air film disturbance 1. Structural design to suppress pressure fluctuations: The short horizontal center lines of the inner and outer layers of the king-shaped pressure equalization grooves are at the same diameter position, which can form a "cross-complementary" pressure field to offset the pressure fluctuations caused by local airflow disturbances.

[0023] 2. Enhanced non-contact operation characteristics: The optimized air film layer can more reliably and completely separate the stator and rotor, further reducing the risk of mechanical friction (originally there was no friction, here it refers to avoiding "instantaneous contact" caused by air film instability), extending the service life of bearings, while reducing the impact of frictional heat on equipment precision, and maintaining long-term thermal stability.

[0024] IV. Adapting to demanding application scenarios and expanding the scope of technology application. The performance improvement of this invention precisely matches the core needs of ultra-precision and high-cleanliness fields: For the semiconductor industry (such as wafer lithography machines), high load-bearing capacity and high rigidity can ensure the precise positioning of the wafer stage; For optical processing (such as lens grinding equipment), low vibration and high air film stability can avoid processing errors; For the pharmaceutical industry (such as cleanroom conveying equipment), the frictionless and wear-free characteristics can avoid dust pollution and meet clean production standards.

[0025] Compared to traditional air bearings that can only meet the "basic non-contact" requirement, this invention can support equipment operation with higher precision and more complex working conditions, thus expanding the technical application boundaries of air bearings.

[0026] V. The structure is practical and easy to implement, balancing performance and manufacturing feasibility. The depth of the Wang-shaped equalizing groove is designed to be 5µm-25µm, which falls within the micron-level conventional machining accuracy range and can be achieved without special ultra-precision manufacturing equipment. At the same time, the coaxial layout and air passage design of the air inlet, throttling orifice, and equalizing groove are all based on the existing manufacturing process framework of air bearings, without introducing complex structures or special materials. While ensuring high performance, it reduces the difficulty of technology transfer and mass production, and has good prospects for industrial application. Attached Figure Description

[0027] Figure 1 This is an overall sectional view of the present invention; Figure 2 This is a cross-sectional view of the upper and lower throttling plates of this utility model at the position of the throttling orifice; Figure 3 This is a front view of the end of the upper and lower throttling plates of this utility model with the king-shaped pressure equalization groove; Figure 4 This is an overall sectional view of the present invention (depicting the overall gas path setup and gas flow). Figure 5This is a simulation diagram of the present invention; Attached image captions: 101. Upper flange; 102. Lower flange; 2. Turntable outer sleeve; 3. Shaft core; 401. Upper throttle plate; 402. Lower throttle plate; 5. Throttling bushing; 6. Annular air passage; 7. First air inlet; 8. Throttling orifice; 9. King-shaped pressure equalization groove; 10. Second air inlet; 11. Exhaust port; 12. Throttling bushing air supply groove; 13. Air collecting ring groove. Detailed Implementation

[0028] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for explaining the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention are shown in the drawings, not the entire structure.

[0029] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected", "linked", and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0030] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them; moreover, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature; "below," "under," and "below" of the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0031] In the description of this embodiment, the terms "upper," "lower," "front," "rear," "left," and "right," etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used to distinguish them in the description and have no special meaning.

[0032] Combination Figures 1-5As shown, this utility model provides a hydrostatic air bearing with a king-shaped equalizing groove, comprising two main parts: a rotor and a stator. The rotor is composed of an upper flange 101, a lower flange 102 and a shaft core 3, and the stator is composed of an upper throttling plate 401, a lower throttling plate 402, a throttling shaft sleeve 5 and a turntable outer sleeve 2. The turntable outer sleeve 2 has two concentric annular air passages 6 on its end face. The upper throttle plate 401 and the lower throttle plate 402 have a first air inlet 7 at one end facing the annular air passages 6. The annular air passages 6 are connected to the first air inlet 7. The other end of the upper throttling plate 401 and the lower throttling plate 402 is provided with a king-shaped pressure equalization groove 9, which is connected to the first air inlet 7 through a throttling hole 8; the centroid of the king-shaped pressure equalization groove 9, the axis of the first air inlet 7 and the axis of the throttling hole 8 are on the same axis. The king-shaped equalizing groove 9 is directly opposite the end faces of the upper flange 101 and the lower flange 102, and the groove depth ranges from 5µm to 25µm. There are micron-level gaps between the upper throttling plate 401, the lower throttling plate 402 and the upper flange 101, the lower flange 102, which form an air film layer; there are micron-level gaps between the throttling bushing 5 and the shaft core 3, which form an air film layer.

[0033] The king-shaped equalizing groove 9 is divided into an inner layer and an outer layer, and is evenly distributed alternately along the circumferential direction of the upper throttling plate 401 and the lower throttling plate 402.

[0034] In the outer layer of the king-shaped equalizing groove 9, the horizontal section near the outer circle of the upper throttling plate 401 and the lower throttling plate 402 is longer, while the horizontal section near the inner hole of the upper throttling plate 401 and the lower throttling plate 402 is shorter; in the inner layer of the king-shaped equalizing groove 9, the horizontal section near the outer circle of the upper throttling plate 401 and the lower throttling plate 402 is shorter, while the horizontal section near the inner hole of the upper throttling plate 401 and the lower throttling plate 402 is longer.

[0035] The short horizontal center line of the outer king-shaped equalizing groove 9 and the short horizontal center line of the inner king-shaped equalizing groove 9 are at the same diameter position.

[0036] The air bearing is provided with an air passage 1, the path of which is: clean compressed air → second air inlet 10 → annular air passage 6 of upper throttling plate 401 and lower throttling plate 402 → first air inlet 7 → throttling orifice 8 → king-shaped pressure equalization groove 9 → air film layer → air collecting ring groove 13 → exhaust port 11 → outdoor atmosphere.

[0037] The air bearing is provided with an air passage 2, the path of which is: clean compressed air → second air inlet 10 → annular air passage 6 of upper throttling plate 401 and lower throttling plate 402 → first air inlet 7 → throttling hole 8 → king-shaped equalizing groove 9 → air film layer → outdoor atmosphere.

[0038] The air bearing is provided with an air passage 3, the path of which is: clean compressed air → second air inlet 10 → throttling shaft sleeve air supply groove 12 → air film layer between throttling shaft sleeve 5 and shaft core 3 → air collecting ring groove 13 → exhaust hole 11 → outdoor atmosphere.

[0039] The upper throttle plate 401 and the lower throttle plate 402 have a first air inlet 7 arranged in annular staggered pattern on one end face of the turntable outer sleeve 2.

[0040] The throttling orifice 8 is connected one-to-one with the first air inlet 7 and the king-shaped pressure equalization groove 9.

[0041] The high-speed, low-pressure gas released from the king-shaped equalizing trough 9 uses the equalizing trough as the release source and continues to diffuse and distribute into the gas film layer.

[0042] The principle of this utility model is as follows: This invention is based on the core logic of "precise airflow control + stable air film support". Through a complete process of clean compressed air input, diversion, throttling, pressure equalization, air film formation, and exhaust balance, it achieves non-contact stable operation of static pressure air bearings. The specific working principle is divided into four stages, and each stage is deeply coupled with the core structure of the bearing (King-shaped pressure equalization groove, air passage, stator / rotor, etc.): I. First Stage: Introduction and Distribution of Clean Compressed Air 1. Gas input starting point: Externally supplied clean compressed air first enters the bearing through the second main air inlet 10 of the bearing stator. This step requires ensuring air cleanliness (to avoid impurities clogging the micron-level channels) to lay the foundation for subsequent gas film stability.

[0043] 2. Two-way traffic splitting path: Path 1 (flow to throttle plate): Part of the compressed air enters the two concentric annular air passages 6 on the end face of the turntable outer sleeve 2. The concentric design of the annular air passages ensures that the airflow is evenly distributed to the end face of the upper throttle plate 401 and the lower throttle plate 402 facing the turntable outer sleeve. This end face is provided with "the first air inlet 7 arranged in annular staggered pattern of inner and outer layers". The annular air passages 6 are precisely connected to the first air inlet 7 to achieve uniform airflow distribution to the throttle plate.

[0044] Path 2 (flow to throttling sleeve): Another portion of compressed air directly enters the throttling sleeve air supply groove 12, providing an airflow source for radial pressure supplementation and auxiliary exhaust, forming a coordinated air supply system with Path 1.

[0045] II. Second Stage: Airflow Throttling and Pressure Reduction and Directional Guidance of the King-Shaped Equalizing Groove 1. Pressure reduction function of throttling orifice: The airflow through the first air inlet 7 needs to pass through the throttling orifice 8 corresponding to it. The small hole structure of the throttling orifice is used to "throttle and reduce pressure" the high-pressure airflow, and convert the high-pressure airflow into a high-speed low-pressure airflow that meets the requirements of air film support (key: throttling is the core step to achieve the low pressure and high velocity characteristics of air film).

[0046] 2. Airflow guidance and pressure equalization in a king-shaped pressure equalization groove: Coaxial precision docking: Since the "first air inlet 7 axis → throttle hole 8 axis → king-shaped pressure equalizing groove 9 axis" are on the same axis, the airflow after pressure reduction through the throttle hole can directly and without loss enter the king-shaped pressure equalizing groove.

[0047] The airflow first fills the short horizontal section in the middle of the equalizing groove (the center lines of the short horizontal sections of the inner and outer equalizing grooves are on the same diameter, forming a "radially aligned" pressure base point), and then diffuses along both sides of the short horizontal section to the long horizontal section. The design of the outer equalizing groove being "long on the outside and short on the inside" and the inner equalizing groove being "short on the outside and long on the inside" allows the airflow to extend directionally to the "outer diameter side" and "inner diameter side" respectively, avoiding the problem of airflow only accumulating along the ring in traditional equalizing grooves (such as annular grooves).

[0048] Pressure homogenization: The "cross-segmented + length-differentiated" structure of the king-shaped pressure equalization groove can form a uniform pressure field in the groove, ensuring that the pressure of the airflow entering the air film layer is stable and there are no local high / low pressure fluctuations.

[0049] III. Third Stage: Air Film Formation and Non-Contact Rotor Support 1. Formation of the air film layer: After being pressure-equalized by the king-shaped pressure equalization groove 9, the high-speed low-pressure airflow uses the pressure equalization groove as the "release source" to continuously diffuse and fill the micron-level gap (i.e., the air film layer) between the stator (upper throttle plate 401 / lower throttle plate 402) and the rotor (upper flange 101 / lower flange 102). Due to the continuous supply of airflow, a stable "pressure cushion" will be formed in the air film layer. The pressure value of this cushion is greater than the external atmospheric pressure, which can generate upward / downward support force.

[0050] 2. Non-contact support and performance enhancement: Isolation function: The supporting force of the air film layer can completely lift the rotor (upper flange 101 / lower flange 102 + shaft core 3), so that the rotor has no mechanical contact with the stator surface, realizing "zero friction" operation and avoiding wear and friction heat generation problems.

[0051] Achieving high load-bearing capacity and high rigidity: The king-shaped equalizing groove 9 expands the "effective influence area of ​​pressurized gas" (covering the entire range of the inner diameter, middle diameter, and outer diameter of the gas film layer), making the gas film support force on the rotor more uniform and the coverage area wider. Compared with the traditional equalizing groove that only provides local support, this structure can distribute the rotor load and resist radial offset, thereby significantly improving the bearing's load-bearing capacity (able to withstand heavier rotors / external loads) and radial rigidity (reducing operating vibration and displacement).

[0052] IV. Fourth Stage: Airflow Exhaust and Pressure Equilibrium To prevent excessively high pressure within the air film layer from causing rupture, or excessively low pressure from causing support failure, this invention utilizes three coordinated air passages to achieve exhaust balance, ensuring that the air film pressure remains stable within a reasonable range. 1. Air passage 1 (exhaust via the air collecting ring groove): The airflow partially filled with the air film layer first flows into the air collecting ring groove 13 (which plays the role of "airflow buffering and gathering"), and then is discharged to the outdoor atmosphere through the exhaust hole 11.

[0053] 2. Air Path 2 (Direct Exhaust): The airflow in another part of the air film layer is directly discharged from the outside of the air film layer to the outdoor atmosphere because the edge of the air film is connected to the atmosphere. This path can quickly release excess airflow and avoid local pressure accumulation.

[0054] The working principle of this utility model is essentially as follows: uniform airflow is achieved through "annular air passage 6 + staggered air inlet 7", airflow pressure is reduced through "small hole throttling 8", and airflow directional diffusion and pressure equalization are achieved through "king-shaped pressure equalization groove 9", ultimately forming a stable air film in the micron-level gap to support the rotor; at the same time, pressure balance is maintained through multi-path exhaust, thus taking into account the four core advantages of "non-contact operation", "high load-bearing capacity", "high rigidity" and "long life", and adapting to the needs of ultra-precision and clean fields.

[0055] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the protection scope of the present utility model.

Claims

1. A hydrostatic air bearing with a king-shaped equalizing groove, characterized in that, include: The rotor and stator are the two main parts; The rotor is composed of an upper flange (101), a lower flange (102) and a shaft core (3), and the stator is composed of an upper throttling plate (401), a lower throttling plate (402), a throttling bushing (5) and a turntable outer sleeve (2); The turntable jacket (2) has two concentric annular air passages (6) on its end face. The upper throttle plate (401) and the lower throttle plate (402) have a first air inlet (7) at one end facing the annular air passage (6). The annular air passage (6) is connected to the first air inlet (7). The other end of the upper throttle plate (401) and the lower throttle plate (402) is provided with a king-shaped pressure equalization groove (9), and the king-shaped pressure equalization groove (9) is connected to the first air inlet (7) through the throttle hole (8); the centroid of the king-shaped pressure equalization groove (9), the axis of the first air inlet (7) and the axis of the throttle hole (8) are on the same axis; The king-shaped equalizing groove (9) is directly opposite the end faces of the upper flange (101) and the lower flange (102), and the groove depth ranges from 5µm to 25µm; There are micron-level gaps between the upper throttling plate (401), the lower throttling plate (402) and the upper flange (101), the lower flange (102), which is an air film layer; There is a micron-level gap between the throttling bushing (5) and the shaft core (3), which is an air film layer.

2. The hydrostatic air bearing with a king-shaped equalizing groove according to claim 1, characterized in that, The king-shaped equalizing groove (9) is divided into an inner layer and an outer layer, and is evenly distributed along the circumferential direction of the upper throttling plate (401) and the lower throttling plate (402).

3. The hydrostatic air bearing with a king-shaped equalizing groove according to claim 2, characterized in that, In the outer layer of the king-shaped equalizing groove (9), the horizontal length of the groove near the outer circle of the upper throttling plate (401) and the lower throttling plate (402) is longer, and the horizontal length of the groove near the inner hole of the upper throttling plate (401) and the lower throttling plate (402) is shorter; in the inner layer of the king-shaped equalizing groove (9), the horizontal length of the groove near the outer circle of the upper throttling plate (401) and the lower throttling plate (402) is shorter, and the horizontal length of the groove near the inner hole of the upper throttling plate (401) and the lower throttling plate (402) is longer.

4. The hydrostatic air bearing with a king-shaped equalizing groove according to claim 3, characterized in that, The short horizontal center line of the outer king-shaped equalizing groove (9) and the short horizontal center line of the inner king-shaped equalizing groove (9) are at the same diameter position.

5. The hydrostatic air bearing with a king-shaped equalizing groove according to claim 1, characterized in that, The air bearing is provided with an air passage 1, the path of which is: clean compressed air → second air inlet (10) → annular air passage (6) of upper throttling plate (401) and lower throttling plate (402) → first air inlet (7) → throttling hole (8) → king-shaped pressure equalization groove (9) → air film layer → air collection ring groove (13) → exhaust hole (11) → outdoor atmosphere.

6. The hydrostatic air bearing with a king-shaped equalizing groove according to claim 1, characterized in that, The air bearing is provided with an air passage 2, the path of which is: clean compressed air → second air inlet (10) → annular air passage (6) of upper throttling plate (401) and lower throttling plate (402) → first air inlet (7) → throttling hole (8) → king-shaped equalizing groove (9) → air film layer → outdoor atmosphere.

7. The hydrostatic air bearing with a king-shaped equalizing groove according to claim 1, characterized in that, The air bearing is provided with an air passage 3, the path of which is: clean compressed air → second air inlet (10) → throttling shaft sleeve air supply groove (12) → air film layer between throttling shaft sleeve (5) and shaft core (3) → air collection ring groove (13) → exhaust hole (11) → outdoor atmosphere.

8. The hydrostatic air bearing with a king-shaped equalizing groove according to claim 1, characterized in that, The upper throttle plate (401) and the lower throttle plate (402) are provided with a first air inlet (7) with an inner and outer layer arranged in annular staggered pattern on one end face of the turntable outer sleeve (2).

9. The hydrostatic air bearing with a king-shaped equalizing groove according to claim 1, characterized in that, The throttling orifice (8) is connected one-to-one with the first air inlet (7) and the king-shaped pressure equalization groove (9).

10. The hydrostatic air bearing with a king-shaped equalizing groove according to claim 1, characterized in that, The high-speed, low-pressure gas released by the king-shaped equalizing groove (9) diffuses and distributes continuously into the gas film layer, with the equalizing groove as the release source.

Images