Chemical liquid heating device
By using a linear heating strip and PFA material connecting pipes in the chemical liquid heating device, combined with nitrogen pipes and solenoid valve control, the problems of low heating efficiency, uneven temperature and poor safety of chemical liquids are solved, and rapid, uniform heating and safe liquid level monitoring are achieved.
Patent Information
- Application Number
- CN202521560662.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-25
- Publication Date
- 2026-08-25
- Estimated Expiration
- 2035-07-25
AI Technical Summary
Existing chemical liquid heating methods are inefficient, have uneven temperatures, poor safety, and lack good applicability. They also cannot monitor the liquid level in real time, posing a risk of burns.
A linear heating strip is used to wrap a PFA material connecting pipe, which is combined with a nitrogen pipe and a solenoid valve to achieve the circulation and heating of chemical liquid between two chemical bottles. Temperature and liquid level sensors are equipped for real-time monitoring.
It enables rapid and uniform heating of chemical liquids, reduces energy consumption, improves safety and applicability, and allows for real-time monitoring of liquid levels to prevent scalding and environmental impact.
Smart Images
Figure CN224680959U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the semiconductor field, specifically to a chemical liquid heating device. Background Technology
[0002] In semiconductor manufacturing plants, various types of chemical liquids need to be heated to specified temperatures. The traditional heating method involves adding the chemical liquid to a chemical bottle, heating the bottle with a heating mantle, and then transferring heat from the bottle to the liquid. This method has drawbacks, including slow heating, low efficiency, large temperature differences between the inside and outside, the need for a high-power heating mantle, and a relatively low safety factor. Specifically:
[0003] First, taking a target heating temperature of 60℃ for a chemical liquid and a heating time of 5 minutes as an example, when the volume of the chemical bottle containing the chemical liquid is large (5L and above), a heating jacket with a particularly high power (500W or above) is required to heat the chemical bottle to the target temperature. Furthermore, due to the large volume, slow heat conduction, and rapid heat dissipation of the chemical bottle, the temperature of the chemical liquid will be uneven, resulting in high power consumption and failure to ensure that the liquid temperature inside the bottle reaches the target temperature uniformly.
[0004] Secondly, when heating a chemical liquid using a chemical bottle, the bottle needs to be heated to a temperature far exceeding the target temperature of the liquid, resulting in an even higher temperature for the heating jacket itself (far exceeding 80°C). However, there are very few non-metallic liquid level detectors on the market that can reach temperatures above 80°C (acidic and alkaline environments corrode metal liquid level detectors), making it impossible to monitor the liquid level inside the chemical bottle in real time. Furthermore, touching the heating jacket can cause burns, and prolonged exposure to high temperatures can radiate into the environment and affect other components.
[0005] Third, sheet-shaped heating mantles for chemical bottles are generally customized according to the size of the chemical bottle. When the size of the chemical bottle changes, the previous heating mantle is no longer applicable and needs to be re-customized. In addition, when the target temperature requires a shorter heating time, a heating mantle with higher power needs to be selected.
[0006] Therefore, it is necessary to provide a new technical solution. Utility Model Content
[0007] To address the technical problems existing in the prior art, this utility model discloses a chemical liquid heating device, the specific technical solution of which is as follows:
[0008] This utility model provides a chemical liquid heating device, including a first chemical bottle, a second chemical bottle, a connecting pipe, a heating device, an inlet / outlet pipe, and a first nitrogen gas pipe.
[0009] The two ends of the connecting pipe extend into the bottom of the first chemical bottle and the second chemical bottle, respectively.
[0010] The heating device is fitted onto the connecting pipe, and the heating device heats the chemical liquid inside the connecting pipe.
[0011] The first end of the inlet / outlet pipe extends into the bottom of the first chemical bottle, and the second end of the inlet / outlet pipe is connected to an external liquid storage device via a pneumatic valve.
[0012] The first end of the first nitrogen pipeline extends into the upper part of the first chemical bottle, and the second end of the first nitrogen pipeline is connected to the first nitrogen pressurization pipeline and the first nitrogen depressurization pipeline respectively through the first solenoid valve. The first solenoid valve controls the pressurization or depressurization of the first chemical bottle, thereby controlling the flow of the chemical liquid in the first chemical bottle to the second chemical bottle or backflow.
[0013] Furthermore, it also includes a second nitrogen pipeline, the first end of which extends into the upper part of the second chemical bottle, and the second end of which is connected to a second nitrogen pressurization pipeline and a second nitrogen depressurization pipeline respectively via a second solenoid valve. The second solenoid valve controls the pressurization or depressurization of the second chemical bottle.
[0014] Furthermore, the heating device includes one or more heating strips, which are wrapped in a linear strip around the connecting pipe, and the outer material of the heating strip is a corrosion-resistant and high-temperature resistant fabric.
[0015] Furthermore, the heating device is equipped with a first temperature sensor that detects the temperature of the connecting pipe, and a second temperature sensor is installed at the bottom of the inner cavity of the first chemical bottle that detects the temperature of the chemical liquid inside the first chemical bottle.
[0016] Furthermore, the first chemical bottle is equipped with a first upper liquid level sensor and a first lower liquid level sensor. The first upper liquid level sensor is located at the upper part of the inner cavity of the first chemical bottle to detect the highest point of the chemical liquid inside the bottle, and the first lower liquid level sensor is located at the lower part of the inner cavity of the first chemical bottle to detect the lowest point of the chemical liquid inside the bottle.
[0017] Furthermore, the second chemical bottle is equipped with a second upper liquid level sensor and a second lower liquid level sensor.
[0018] The second upper liquid level sensor is located at the upper part of the inner cavity of the second chemical bottle to detect the highest point of the chemical liquid inside the bottle, and the second lower liquid level sensor is located at the lower part of the inner cavity of the second chemical bottle to detect the lowest point of the chemical liquid inside the bottle.
[0019] Furthermore, the heating device is made of PFA material.
[0020] This utility model has the following beneficial effects:
[0021] 1. The chemical liquid heating device provided by this utility model heats the chemical liquid inside the connecting pipe by wrapping one or more linear strip heating strips around the outside of the connecting pipe, which reduces the power requirement of the heating strip, greatly saves power consumption and heating time, and can quickly and evenly heat the chemical liquid to the target temperature.
[0022] 2. The chemical liquid heating device provided by this utility model has a connecting pipe made of PFA material. When the target temperature is 60℃, the connecting pipe only needs to be about 10℃ higher than the target temperature. Moreover, the temperature of the chemical bottle will be slightly lower than the target temperature of the chemical liquid, so as not to affect the installation and use of the non-metallic liquid level detector, and will not cause burns if accidentally touched by human.
[0023] 3. The chemical liquid heating device provided by this utility model has good applicability. It uses a linear heating tape wrapped around a PFA material connecting pipe, which is not affected by changes in the size of the connecting pipe or the size of the chemical bottle. When the target temperature is constant and the heating time needs to be shortened, it can be achieved simply by extending the PFA pipe and adding a section of PFA pipe wrapped with a linear heating tape. It is also easy to install.
[0024] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0026] Figure 1 This is a schematic diagram of the structure of the chemical liquid heating device provided in this embodiment of the utility model.
[0027] The attached diagram is labeled as follows: 1-First chemical bottle, 2-Second chemical bottle, 3-Connecting pipe, 4-Heating device, 5-Inlet / outlet pipe, 6-First nitrogen pipe, 7-Second nitrogen pipe, 51-Pneumatic valve, 61-First solenoid valve, 62-First nitrogen pressurization pipe, 63-First nitrogen depressurization pipe, 71-Second solenoid valve, 72-Second nitrogen pressurization pipe, 73-Second nitrogen depressurization pipe, 41-First temperature sensor, 11-Second temperature sensor, 12-First upper liquid level sensor and 13-First lower liquid level sensor, 21-Second upper liquid level sensor and 22-Second lower liquid level sensor. Detailed Implementation
[0028] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.
[0029] In the description of this utility model, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.
[0030] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0031] This utility model provides a chemical liquid heating device, see reference. Figure 1 It includes a first chemical bottle 1, a second chemical bottle 2, a connecting pipe 3, a heating device 4, an inlet / outlet liquid pipe 5, a first nitrogen pipe 6, and a second nitrogen pipe 7.
[0032] The two ends of the connecting pipe 3 extend into the bottom of the first chemical bottle 1 and the second chemical bottle 2, respectively. The heating device 4 is fitted onto the connecting pipe 3 and heats the chemical liquid inside the connecting pipe 3. The first end of the inlet / outlet pipe 5 extends into the bottom of the first chemical bottle 1, and the second end of the inlet / outlet pipe 5 is connected to an external liquid storage device via a pneumatic valve 51. The first end of the first nitrogen pipe 6 extends into the upper part of the first chemical bottle 1, and the second end of the first nitrogen pipe 6 is connected to a first nitrogen pressurization pipe 62 and a first nitrogen depressurization pipe 63 via a first solenoid valve 61. The first solenoid valve 61 controls the pressurization or depressurization of the first chemical bottle 1, thereby controlling the flow of the chemical liquid in the first chemical bottle 1 to the second chemical bottle 2 or backflow.
[0033] Furthermore, the first end of the second nitrogen pipe 7 extends into the upper part of the second chemical bottle 2, and the second end of the second nitrogen pipe 7 is connected to the second nitrogen pressurization pipe 72 and the second nitrogen depressurization pipe 73 respectively through the second solenoid valve 71. The second solenoid valve 71 controls the pressurization or depressurization of the second chemical bottle 2.
[0034] Furthermore, the heating device 4 includes one or more heating strips, which are wrapped in a linear strip shape on the connecting pipe 3, and the outer material of the heating strip is a corrosion-resistant and high-temperature resistant fabric.
[0035] Furthermore, the heating device 4 is equipped with a first temperature sensor 41, which detects the temperature of the connecting pipe 3, and a second temperature sensor 11 is provided at the bottom of the inner cavity of the first chemical bottle 1, which detects the temperature of the chemical liquid inside the first chemical bottle 1.
[0036] Furthermore, the first chemical bottle 1 is provided with a first upper liquid level sensor 12 and a first lower liquid level sensor 13. The first upper liquid level sensor 12 is located at the upper part of the inner cavity of the first chemical bottle 1 to detect the highest point of the chemical liquid in the bottle, and the first lower liquid level sensor 13 is located at the lower part of the inner cavity of the first chemical bottle 1 to detect the lowest point of the chemical liquid in the bottle.
[0037] Furthermore, the second chemical bottle 2 is provided with a second upper liquid level sensor 21 and a second lower liquid level sensor 22. The second upper liquid level sensor 21 is located in the upper part of the inner cavity of the second chemical bottle 2 to detect the highest point of the chemical liquid in the bottle, and the second lower liquid level sensor 22 is located in the lower part of the inner cavity of the second chemical bottle 2 to detect the lowest point of the chemical liquid in the bottle.
[0038] Furthermore, the heating device 4 is made of PFA material.
[0039] In one embodiment, the pneumatic valve 51 is opened, and a metered amount of chemical liquid is delivered into the first chemical bottle 1 through the inlet / outlet liquid pipe 5. Simultaneously, the heating device 4 on the connecting pipe 3 is activated, and the temperature of the connecting pipe 3 is controlled at 70°C (target temperature of the chemical liquid is 60°C) by the first temperature sensor 41. After the liquid delivery is stopped, the pneumatic valve 51 is closed. The first solenoid valve 61 is opened, and the second solenoid valve 71 is closed. By applying a low nitrogen pressure, the chemical liquid is slowly forced into the second chemical bottle 2 through the connecting pipe 3, allowing the chemical liquid to be fully heated in the connecting pipe 3. When the first liquid level sensor 13 does not detect liquid, the first solenoid valve 61 is closed and the second solenoid valve 71 is opened. The second solenoid valve 71 applies a low nitrogen pressure to slowly press the chemical liquid into the first chemical bottle 1 through the connecting pipe 3 until the second lower liquid level sensor 22 no longer detects the liquid. Then, the first solenoid valve 61 is opened and the second solenoid valve 712 is closed. This cycle is repeated until the second temperature sensor measures the liquid temperature to the target temperature (60°C). At this point, the heating device 4 on the connecting pipe 3 is turned off, the first solenoid valve 61 is closed, and the pneumatic valve 51 and the second solenoid valve 71 are opened. The target chemical liquid is discharged through the inlet and outlet pipes 5 by nitrogen pressure until the first lower liquid level sensor 13 no longer detects the liquid. Then, all valves are closed.
[0040] The working principle of this utility model is as follows: a connecting pipe connects a first chemical bottle and a second chemical bottle, and a heating device is installed on the connecting pipe to heat the chemical liquid inside the connecting pipe. The chemical liquid flows back and forth between the first chemical bottle and the second chemical bottle through the cooperation of the first nitrogen pipe and the second nitrogen pipe, thereby achieving the effect of rapid and uniform heating of the chemical liquid.
[0041] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.
[0042] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications and variations to the above embodiments within the scope of the present invention.
Claims
1. A chemical liquid heating device, characterized in that, It includes a first chemical bottle, a second chemical bottle, connecting pipes, a heating device, inlet and outlet liquid pipes, and a first nitrogen gas pipe. The two ends of the connecting pipe extend into the bottom of the first chemical bottle and the second chemical bottle, respectively. The heating device is fitted onto the connecting pipe, and the heating device heats the chemical liquid inside the connecting pipe. The first end of the inlet / outlet pipe extends into the bottom of the first chemical bottle, and the second end of the inlet / outlet pipe is connected to an external liquid storage device via a pneumatic valve. The first end of the first nitrogen pipeline extends into the upper part of the first chemical bottle, and the second end of the first nitrogen pipeline is connected to the first nitrogen pressurization pipeline and the first nitrogen depressurization pipeline respectively through the first solenoid valve. The first solenoid valve controls the pressurization or depressurization of the first chemical bottle, thereby controlling the flow of the chemical liquid in the first chemical bottle to the second chemical bottle or backflow.
2. The chemical liquid heating device according to claim 1, characterized in that, It also includes a second nitrogen pipeline, the first end of which extends into the upper part of the second chemical bottle, and the second end of which is connected to a second nitrogen pressurization pipeline and a second nitrogen depressurization pipeline respectively via a second solenoid valve. The second solenoid valve controls the pressurization or depressurization of the second chemical bottle.
3. The chemical liquid heating device according to claim 1, characterized in that, The heating device includes one or more heating strips, which are wrapped in a linear strip around the connecting pipe, and the outer material of the heating strip is a corrosion-resistant and high-temperature resistant fabric.
4. The chemical liquid heating device according to claim 1, characterized in that, The heating device is equipped with a first temperature sensor, which detects the temperature of the connecting pipe. A second temperature sensor is installed at the bottom of the inner cavity of the first chemical bottle, which detects the temperature of the chemical liquid inside the first chemical bottle.
5. The chemical liquid heating device according to claim 1, characterized in that, The first chemical bottle is equipped with a first upper liquid level sensor and a first lower liquid level sensor. The first upper liquid level sensor is located at the upper part of the inner cavity of the first chemical bottle to detect the highest point of the chemical liquid in the bottle, and the first lower liquid level sensor is located at the lower part of the inner cavity of the first chemical bottle to detect the lowest point of the chemical liquid in the bottle.
6. The chemical liquid heating device according to claim 2, characterized in that, The second chemical bottle is equipped with a second upper liquid level sensor and a second lower liquid level sensor. The second upper liquid level sensor is located at the upper part of the inner cavity of the second chemical bottle to detect the highest point of the chemical liquid inside the bottle, and the second lower liquid level sensor is located at the lower part of the inner cavity of the second chemical bottle to detect the lowest point of the chemical liquid inside the bottle.
7. The chemical liquid heating device according to claim 1, characterized in that, The heating device is made of PFA material.