A throw head drive device

Abstract

The utility model relates to the technical field of polishing equipment, specifically disclose a kind of polishing head driving device, including support column, rotary seat, driving mechanism and positioning damping mechanism;Rotary seat is sleeved in support column outside;Driving mechanism is located in support column;The driving end of driving mechanism is connected rotary seat;Positioning damping mechanism includes driving adjustment assembly and positioning damping piece, driving adjustment assembly is located in support column, the driving end of driving adjustment assembly is connected positioning damping piece, for driving positioning damping piece close and abut on rotary seat or away from rotary seat.In the utility model, when need to accurately position polishing head on station, through driving adjustment assembly driving positioning damping piece abuts on rotary seat, to deadlock rotary seat, to facilitate the positioning adjustment of polishing head, positioning damping piece can also stop blocking the displacement or tremor of rotary seat, reduce the tremor amplitude of driving mechanism and polishing head, to improve the processing quality of the product to be processed, also avoid the breakage of the product to be processed.

Description

Technical Field

[0001] This utility model relates to the field of polishing equipment technology, and in particular to a polishing head driving device. Background Technology

[0002] In the wafer substrate manufacturing process, in order to further planarize the surface of the wafer substrate and facilitate the smooth progress of subsequent processes, the wafer substrate needs to undergo a chemical mechanical polishing (CMP) process. In this process, the accuracy of the polishing head's position and the stability of its operation directly affect the quality of the wafer substrate, and the drive mechanism of the polishing head, as a structure directly connected to the polishing head, is a crucial mechanism affecting the accuracy of the polishing head's position and the stability of its operation.

[0003] In existing technology, the polishing head is mounted on the base of the drive mechanism. A motor drives the base to rotate via gear transmission, thus enabling the polishing head to operate. However, when precise positioning of the polishing head at the workstation is required, a pin is used to position the base and stop its rotation. Existing drive mechanisms rely solely on their own structure for vibration resistance, lacking corresponding damping mechanisms. During polishing, the polishing head is susceptible to friction, causing displacement or vibration in the drive mechanism, which in turn affects the processing quality of the wafer substrate and may even lead to substrate breakage. Utility Model Content

[0004] The purpose of this invention is to provide a polishing head driving device to solve the problem that in the prior art, the driving mechanism relies solely on its own structure for shock resistance without a corresponding shock-absorbing mechanism. As a result, the polishing head is easily affected by friction during the polishing process, causing the driving mechanism to shift or vibrate, which in turn affects the processing quality of the wafer substrate and may even cause the wafer substrate to break.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] This utility model provides a projectile driving device, which includes a support column and:

[0007] A rotating base is fitted onto the outside of the supporting column; the rotating base is used to connect the throwing head.

[0008] A drive mechanism is provided on the support column; the drive end of the drive mechanism is connected to the rotating seat and is used to drive the rotating seat to rotate around the support column.

[0009] The positioning and damping mechanism includes a drive adjustment component and a positioning damping component. The drive adjustment component is disposed on the support column. The drive end of the drive adjustment component is connected to the positioning damping component and is used to drive the positioning damping component to approach and abut against the rotating seat or move away from the rotating seat.

[0010] As an optional embodiment of the aforementioned throwing head driving device, the aforementioned driving adjustment component includes:

[0011] A drive cylinder is mounted on the support column, and the drive end of the drive cylinder is connected to a first connector.

[0012] A fixing frame is provided on the supporting column, and the fixing frame is connected to a second connector.

[0013] The connecting rod has its two ends rotatably connected to the first joint and the second joint, respectively. The end of the connecting rod near the second joint is connected to the positioning damping member, and the second joint is located between the positioning damping member and the first joint. The driving cylinder can drive the positioning damping member to swing, so that the positioning damping member moves closer to or away from the rotating seat.

[0014] As an optional solution for the aforementioned throwing head driving device, the aforementioned driving adjustment assembly further includes a first connecting member and a second connecting member. The connecting rod is rotatably disposed on the first joint via the first connecting member, and the connecting rod is rotatably disposed on the second joint via the second connecting member. The first connecting member is clearance-fitted to the connecting rod, and the second connecting member is transition-fitted to the connecting rod.

[0015] As an alternative to the aforementioned propulsion device, the aforementioned positioning damping component includes a mounting portion and an arc-shaped abutment portion connected to the mounting portion. The mounting portion is detachably connected to the drive end of the aforementioned drive adjustment assembly. The arc-shaped abutment portion has an arc-shaped surface that can abut against the aforementioned rotating seat.

[0016] As an alternative to the aforementioned propulsion device, the curved surface is provided with a shock-absorbing pad.

[0017] As an alternative to the aforementioned propulsion device, a spherical washer is provided between the mounting portion and the drive end of the drive adjustment assembly. The spherical washer is used to adjust the angle of the arc-shaped contact portion relative to the rotating seat.

[0018] As an optional solution for the aforementioned throwing head driving device, the driving mechanism includes a mounting base, a drive motor, a first gear, and a second gear. The mounting base is located on the support column, and the drive motor is located on the mounting base. The first gear is connected to the drive end of the drive motor, and the second gear is sleeved on the support column and connected to the rotating seat. The first gear is meshed with the second gear.

[0019] As an optional embodiment of the aforementioned throwing head driving device, the rotating base includes an indexing plate and a rotating sleeve shaft connected to the indexing plate, both of which are sleeved on the outside of the aforementioned support column; the driving end of the aforementioned driving mechanism is connected to the indexing plate, and the aforementioned throwing head is detachably connected to the indexing plate; the aforementioned positioning and shock-absorbing component can abut against the aforementioned rotating sleeve shaft.

[0020] As an alternative to the aforementioned propulsion device, multiple positioning and damping mechanisms are provided, and these multiple positioning and damping mechanisms are arranged around the aforementioned support column.

[0021] As an alternative to the aforementioned throwing head drive device, the aforementioned drive mechanism and the aforementioned positioning and damping mechanism are respectively located on opposite sides of the aforementioned rotating seat.

[0022] The beneficial effects of this utility model are as follows:

[0023] The slinger drive device includes a support column, a rotating seat, a drive mechanism, and a positioning and damping mechanism. The rotating seat is fitted over the support column and connects to the slinger. The drive mechanism is located on the support column, with its drive end connected to the rotating seat, driving the rotating seat to rotate around the support column. The positioning and damping mechanism includes a drive adjustment component and a positioning damping element. The drive adjustment component is located on the support column, with its drive end connected to the positioning damping element, driving it to approach and abut against or move away from the rotating seat. When precise positioning of the slinger is required, the drive adjustment component drives the positioning damping element to abut against the rotating seat, locking the rotating seat in place. This facilitates the positioning adjustment of the slinger. The noise generated during this process is minimal and unlikely to disturb workers. Simultaneously, the positioning damping element can stop the displacement or vibration of the rotating seat, reducing the vibration amplitude of the drive mechanism and the slinger, thereby improving the processing quality of the product and preventing breakage. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of the throwing head driving device provided in an embodiment of the present utility model;

[0025] Figure 2 This is a cross-sectional view of the throwing head driving device provided in an embodiment of the present utility model;

[0026] Figure 3 for Figure 2 A magnified view of a portion of point A in the middle.

[0027] In the picture:

[0028] 1. Support column; 2. Rotary seat; 21. Indexing plate; 22. Rotary sleeve shaft; 3. Drive mechanism; 31. Mounting base; 32. Drive motor; 33. First gear; 34. Second gear; 4. Positioning and shock absorption mechanism; 41. Drive adjustment assembly; 411. Drive cylinder; 412. First connector; 413. Fixing frame; 414. Second connector; 415. Connecting rod; 416. First connecting piece; 417. Second connecting piece; 42. Positioning and shock absorption component; 421. Mounting part; 422. Arc-shaped abutment part; 43. Spherical washer. Detailed Implementation

[0029] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0030] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0031] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0033] This embodiment provides a projectile driving device for driving the projectile to rotate.

[0034] like Figures 1-3 As shown, the throwing head driving device includes a support column 1, a rotating seat 2, a driving mechanism 3, and a positioning and shock absorption mechanism 4. The rotating seat 2 is sleeved on the support column 1 and is used to connect the throwing head. Meanwhile, the driving mechanism 3 is located on the support column 1, and the driving end of the driving mechanism 3 is connected to the rotating seat 2 to drive the rotating seat 2 to rotate around the support column 1, so that the rotating seat 2 can drive the throwing head to rotate.

[0035] The positioning and damping mechanism 4 includes a drive adjustment component 41 and a positioning damping component 42. The drive adjustment component 41 is located on the support column 1, and the drive end of the drive adjustment component 41 is connected to the positioning damping component 42. It is used to drive the positioning damping component 42 to approach and abut against the rotating seat 2 or move away from the rotating seat 2. Thus, when it is necessary to accurately position the throwing head on the work station, the drive adjustment component 41 drives the positioning damping component 42 to abut against the rotating seat 2 to lock the rotating seat 2, thereby facilitating the positioning adjustment of the throwing head. The noise generated in this process is relatively small and will not easily affect the workers. At the same time, the positioning damping component 42 can stop the displacement or vibration of the rotating seat 2, reduce the vibration amplitude of the drive mechanism 3 and the throwing head, thereby improving the processing quality of the product to be processed and preventing the product to be processed from breaking. Optionally, multiple positioning and damping mechanisms 4 are provided, and multiple positioning and damping mechanisms 4 are arranged around the support column 1, so that the rotating seat 2 is abutted from different directions by multiple positioning and damping components 42, which can enhance the positioning ability of the rotating seat 2, improve the positioning accuracy, and also improve the damping effect.

[0036] The drive mechanism 3 and the positioning and damping mechanism 4 are located on opposite sides of the rotating seat 2, so as to make reasonable use of the space on both sides of the rotating seat 2 and improve the space utilization rate.

[0037] like Figure 1 and Figure 3As shown, the positioning damping component 42 includes a mounting portion 421 and an arc-shaped abutment portion 422 connected to the mounting portion 421. The mounting portion 421 is detachably connected to the drive end of the drive adjustment assembly 41, allowing the positioning damping component 42 to be replaced, thereby extending the service life of the throwing head drive device. The arc-shaped abutment portion 422 has an arc-shaped surface that abuts against the rotating seat 2. By setting the arc-shaped surface, the contact area with the rotating seat 2 can be increased, thereby enhancing the positioning capability of the rotating seat 2, improving positioning accuracy, and improving the damping effect. Optionally, a spherical washer 43 is provided between the mounting portion 421 and the drive end of the drive adjustment assembly 41. The spherical washer 43 is used to adjust the angle of the arc-shaped abutment portion 422 relative to the rotating seat 2, thereby facilitating the installation of the positioning damping component 42 and ensuring that the arc-shaped surface can completely fit the rotating seat 2.

[0038] Meanwhile, the curved surface is provided with a shock-absorbing pad. The shock-absorbing pad can prevent rigid contact between the positioning shock absorber 42 and the rotating seat 2, further absorbing vibration. Furthermore, the shock-absorbing pad can increase the friction with the rotating seat 2, thereby enhancing the positioning capability of the rotating seat 2. Optionally, the shock-absorbing pad is a rubber pad. Of course, the shock-absorbing pad can also be made of other materials; this embodiment does not impose specific limitations.

[0039] Furthermore, the drive adjustment assembly 41 includes a drive cylinder 411, a fixed frame 413, and a connecting rod 415. Both the drive cylinder 411 and the fixed frame 413 are located on the support column 1. The drive end of the drive cylinder 411 is connected to a first connector 412, and the fixed frame 413 is connected to a second connector 414. The two ends of the connecting rod 415 are rotatably connected to the first connector 412 and the second connector 414, respectively. The end of the connecting rod 415 near the second connector 414 is connected to a positioning damping member 42, and the second connector 414 is located between the positioning damping member 42 and the first connector 412. The drive cylinder 411 can drive the positioning damping member 42 to swing, so that the positioning damping member 42 moves closer to or away from the rotating seat 2, thereby facilitating the displacement of the positioning damping member 42 as needed, and realizing the contact or separation of the positioning damping member 42 with the rotating seat 2.

[0040] Specifically, the drive adjustment assembly 41 further includes a first connector 416 and a second connector 417. A connecting rod 415 is rotatably mounted on a first joint 412 via the first connector 416, and rotatably mounted on a second joint 414 via the second connector 417. The first connector 416 is clearance-fitted to the connecting rod 415, and the second connector 417 is transition-fitted to the connecting rod 415. This clearance-fit between the first connector 416 and the connecting rod 415 reduces the difficulty of swinging the connecting rod 415, while the transition-fit between the second connector 417 and the connecting rod 415 enhances the displacement accuracy of the positioning damping component 42 and prevents the positioning damping component 42 from vibrating when it abuts against the rotating seat 2. Optionally, both the first joint 412 and the second joint 414 are double-eared joints, and both the first connector 416 and the second connector 417 are pins.

[0041] like Figure 1 and Figure 2 As shown, the drive mechanism 3 includes a mounting base 31, a drive motor 32, a first gear 33, and a second gear 34. The mounting base 31 is mounted on the support column 1, and the drive motor 32 is mounted on the mounting base 31. The first gear 33 is connected to the drive end of the drive motor 32. The second gear 34 is sleeved on the support column 1 and connected to the rotating seat 2. The first gear 33 is meshed with the second gear 34, so that the drive motor 32 can drive the second gear 34 to rotate through the first gear 33, thereby causing the second gear 34 to drive the rotating seat 2 to rotate. The second gear 34 is located between the mounting base 31 and the rotating seat 2, and the mounting base 31 is detachably connected to the support column 1, thus simplifying the disassembly and installation of the drive mechanism 3.

[0042] Furthermore, the rotating base 2 includes an indexing plate 21 and a rotating sleeve shaft 22 connected to the indexing plate 21. Both the indexing plate 21 and the rotating sleeve shaft 22 are sleeved on the outside of the support column 1. The driving end of the driving mechanism 3 is connected to the indexing plate 21, and the throwing head is detachably connected to the indexing plate 21. Thus, by setting the indexing plate 21, the positioning accuracy of the throwing head can be improved, and the angle and position of the throwing head can be precisely controlled. At the same time, by setting the rotating sleeve shaft 22, the stability of the indexing plate 21 during rotation can be improved, and the positioning damping component 42 can abut against the rotating sleeve shaft 22, thereby avoiding interference between the indexing plate 21 and the positioning damping mechanism 4.

[0043] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A projectile driving device, characterized in that, Including the supporting column (1) and: A rotating seat (2) is sleeved on the outside of the supporting column (1); the rotating seat (2) is used to connect the throwing head; A driving mechanism (3) is provided on the support column (1); the driving end of the driving mechanism (3) is connected to the rotating seat (2) and is used to drive the rotating seat (2) to rotate around the support column (1); The positioning and damping mechanism (4) includes a drive adjustment component (41) and a positioning damping component (42). The drive adjustment component (41) is located on the support column (1). The drive end of the drive adjustment component (41) is connected to the positioning damping component (42) and is used to drive the positioning damping component (42) to approach and abut against the rotating seat (2) or move away from the rotating seat (2).

2. The throwing head driving device according to claim 1, characterized in that, The drive adjustment component (41) includes: A drive cylinder (411) is provided on the support column (1), and the drive end of the drive cylinder (411) is connected to a first connector (412). A fixing frame (413) is provided on the supporting column (1), and the fixing frame (413) is connected to a second connector (414); A connecting rod (415) is rotatably connected at both ends to the first joint (412) and the second joint (414), respectively. The end of the connecting rod (415) near the second joint (414) is connected to the positioning damping member (42), and the second joint (414) is located between the positioning damping member (42) and the first joint (412). The driving cylinder (411) can drive the positioning damping member (42) to swing so that the positioning damping member (42) moves closer to or away from the rotating seat (2).

3. The throwing head driving device according to claim 2, characterized in that, The drive adjustment assembly (41) further includes a first connector (416) and a second connector (417). The connecting rod (415) is rotatably disposed on the first joint (412) through the first connector (416), and the connecting rod (415) is rotatably disposed on the second joint (414) through the second connector (417). The first connector (416) is clearance-fitted to the connecting rod (415), and the second connector (417) is transition-fitted to the connecting rod (415).

4. The throwing head driving device according to claim 1, characterized in that, The positioning shock absorber (42) includes a mounting part (421) and an arc-shaped abutment part (422) connected to the mounting part (421). The mounting part (421) is detachably connected to the drive end of the drive adjustment assembly (41). The arc-shaped abutment part (422) has an arc-shaped surface that can abut against the rotating seat (2).

5. The throwing head driving device according to claim 4, characterized in that, The curved surface is provided with shock-absorbing pads.

6. The throwing head driving device according to claim 4, characterized in that, A spherical washer (43) is provided between the mounting part (421) and the driving end of the drive adjustment assembly (41), and the spherical washer (43) is used to adjust the angle of the arc-shaped abutment part (422) relative to the rotating seat (2).

7. The throwing head driving device according to claim 1, characterized in that, The drive mechanism (3) includes a mounting base (31), a drive motor (32), a first gear (33), and a second gear (34). The mounting base (31) is located on the support column (1), and the drive motor (32) is located on the mounting base (31). The first gear (33) is connected to the drive end of the drive motor (32), and the second gear (34) is sleeved on the support column (1) and connected to the rotating seat (2). The first gear (33) is meshed with the second gear (34).

8. The throwing head driving device according to claim 1, characterized in that, The rotating base (2) includes an indexing plate (21) and a rotating sleeve (22) connected to the indexing plate (21). Both the indexing plate (21) and the rotating sleeve (22) are sleeved on the outside of the support column (1). The driving end of the driving mechanism (3) is connected to the indexing plate (21), and the throwing head is detachably connected to the indexing plate (21). The positioning and shock-absorbing component (42) can abut against the rotating sleeve (22).

9. The throwing head driving device according to any one of claims 1 to 8, characterized in that, Multiple positioning and damping mechanisms (4) are provided, and multiple positioning and damping mechanisms (4) are arranged around the support column (1).

10. The throwing head driving device according to any one of claims 1 to 8, characterized in that, The drive mechanism (3) and the positioning and damping mechanism (4) are located on opposite sides of the rotating seat (2).

Images