A positioning auxiliary tool for mechanical arm chuck to pick and place wafer position on wafer boat box stage

Abstract

The application discloses a positioning auxiliary tool for a mechanical arm suction cup to take and place a wafer position of a crystal boat box object table, which comprises a base and a mechanical arm body, a supporting table is fixedly connected to the rear side of the upper end of the base, a supporting column is fixedly connected to the upper end of the supporting table, and a crystal boat box object table is fixedly connected to the upper end of the supporting column. In the application, the suction cup on the plugboard fixedly connected to the output end of the mechanical arm body is adjusted to the taking and placing position of the crystal boat box object table through the device, so that the accurate wafer taking and placing position can be quickly and effectively adjusted, the height of the leveling assembly can be adjusted through the driving assembly, different wafer sizes can be matched with different heights on the crystal boat box object table, the length of the clamping assembly can be adjusted, the height of the clamping assembly can be adjusted through the lifting assembly, so that the thickness of different crystal boat box object tables can be adjusted, the reinforcing ribs are arranged at the bending positions, the strength of the mounting frame is ensured, and deformation is not prone to occurring.

Description

Technical Field

[0001] This invention relates to the field of positioning assistance tools, and in particular to a positioning assistance tool for a robotic arm suction cup to pick up and place wafers on a wafer carrier stage. Background Technology

[0002] In the semiconductor industry, after replacing a robotic arm, engineers need to confirm the position of the robotic arm's suction cup for picking up and placing wafers. By using the robotic arm's calibration software and the debugging interface on the device, and by observing the process, engineers repeatedly confirm the position of the robotic arm's suction cup for picking up and placing wafers when the wafer carrier is placed on the wafer stage, ensuring that the position of the robotic arm's suction cup can meet the requirements for safe wafer picking and placing.

[0003] In open-type wafer metrology equipment, the wafer cassette is typically placed on a wafer cassette stage. When calibrating the position of the robotic arm's suction cup, engineers need to spend considerable time repeatedly confirming the safety of the placement, relying on their calibration skills and experience. For closed-type wafer metrology equipment, the wafer cassette is placed inside a sealed stage. During calibration, it's inconvenient to observe the position of the robotic arm's suction cup. If the placement is not properly calibrated, the suction cup may scrape against the wafer inside the wafer cassette, causing scratches, detachment, or breakage. There is even a risk of the suction cup colliding with a wafer in the wafer cassette, causing the entire wafer cassette to tip over. To overcome these disadvantages, this invention provides a positioning aid for the robotic arm's suction cup on the wafer placement position within the wafer cassette stage. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a positioning aid for a robotic arm suction cup to pick up and place wafers on a wafer carrier stage.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a positioning auxiliary tool for a robotic arm suction cup to pick up and place wafers on a wafer carrier stage, comprising a base and a robotic arm body. A support platform is fixedly connected to the rear upper end of the base, a support column is fixedly connected to the upper end of the support platform, and a wafer carrier stage is fixedly connected to the upper end of the support column. The robotic arm body is fixedly connected to the front upper end of the base. An insertion plate is fixedly connected to the output end of the robotic arm body, and a vacuum suction cup is fixedly connected to the rear upper end of the insertion plate. A mounting frame is provided on the upper end of the wafer carrier stage. A through hole is opened on the front side of the mounting frame. Scale plates are fixedly connected to both the left and right ends of the front side of the mounting frame. Several reinforcing ribs are fixedly connected between adjacent side plates on the rear side of the mounting frame. The tool also includes:

[0006] The leveling component is located on the front side of the through hole, between the scale plates, and is used to adjust the level of the insert plate;

[0007] A drive component is disposed on the front side of the mounting frame, behind the leveling component, and is used to adjust the height of the leveling component.

[0008] The locking components are disposed on the left and right sides of the mounting frame and are used to fix the mounting frame and the crystal boat box stage.

[0009] The lifting assembly is located on the left and right sides of the mounting frame, inside the locking assembly, and is used to adjust the height of the locking assembly.

[0010] Furthermore, both the leveling components and the mounting frame are made of transparent acrylic material.

[0011] Furthermore, the leveling component includes a vertical baffle, with connecting blocks fixedly connected to both the left and right sides of the rear bottom end of the vertical baffle, a horizontal baffle fixedly connected to the middle position of the front bottom end of the vertical baffle, and pointers fixedly connected to the bottom ends of both the left and right sides of the vertical baffle.

[0012] Furthermore, the drive assembly includes a fixed frame and a mounting plate. The fixed frame is fixedly connected to the left and right ends of the front side of the mounting frame. A second screw is rotatably connected between the fixed frames. A sprocket is fixedly connected to the bottom end of each second screw. The sprockets are driven by a chain.

[0013] The mounting plate is fixedly connected to the front right end of the mounting frame. A rotating shaft is rotatably connected to the mounting plate. A second bevel gear is fixedly connected to the left end of the rotating shaft. An adjustment knob is fixedly connected to the right end of the rotating shaft. A first bevel gear is fixedly connected to the upper end of the second screw located on the right side. The first bevel gear and the second bevel gear are meshed together.

[0014] The connecting blocks located on both sides are respectively threadedly connected to the corresponding second screw.

[0015] Furthermore, the locking assembly includes a slider and a C-shaped locking plate. A connecting plate is fixedly connected to one side of the slider. Slots are opened on both sides of the upper end of the C-shaped locking plate. Locking bolts are threaded to both sides of the upper end of the connecting plate, and the locking bolts pass through the corresponding slots.

[0016] Furthermore, the lifting assembly includes a slide rail, which is fixedly connected to the side of the mounting frame. Each slide rail is rotatably connected to a first screw, and each first screw is fixedly connected to an adjusting bolt at its upper end.

[0017] The sliders are slidably connected to the corresponding slide rails, and the sliders are threadedly connected to the corresponding first screws.

[0018] The beneficial effects of this invention are:

[0019] 1. This positioning auxiliary tool is used for the position of the suction cup of the robotic arm picking up and placing wafers on the crystal boat stage. By using this device to assist in adjusting the position of the suction cup on the plug plate fixed at the output end of the robotic arm body and the crystal boat stage, the precise position of wafer picking up and placing can be quickly and effectively adjusted. In addition, the height of the leveling component can be adjusted by the set drive component, which is convenient to match the different heights of different wafer sizes on the crystal boat stage.

[0020] 2. This positioning auxiliary tool is used for the robotic arm suction cup to pick up and place wafers on the crystal boat box stage. The length of the clamping component is adjustable, and the height of the clamping component can be adjusted by the lifting component, so as to adjust according to the thickness of different crystal boat box stages. Reinforcing ribs are added at the bends to ensure the strength of the mounting frame and prevent deformation.

[0021] 3. This positioning auxiliary tool for the robotic arm suction cup to pick up and place wafers on the crystal boat stage. The leveling components and mounting frame are made of transparent acrylic sheet material, which makes it easy to observe the position of the vacuum suction cup on the insertion plate, so as to facilitate its positioning and adjustment. Attached Figure Description

[0022] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 : Front view of the present invention;

[0024] Figure 2 : Rear view of the present invention;

[0025] Figure 3 Top view of the present invention;

[0026] Figure 4 : Schematic diagram of the crystal boat stage structure of the present invention;

[0027] Figure 5 : Schematic diagram of the installation frame structure of the present invention.

[0028] Figure 6 : A schematic diagram of the driving component structure of the present invention;

[0029] Figure 7 : A schematic diagram of the lifting component structure of the present invention;

[0030] Figure 8 : A schematic diagram of the leveling component structure of the present invention;

[0031] Figure 9: Schematic diagram of the card assembly structure of the present invention.

[0032] The attached figures are labeled as follows:

[0033] 1. Base; 2. Support platform; 3. Main body of robotic arm; 4. Insert plate; 5. Support column; 6. Crystal boat box stage; 7. Mounting frame; 8. Vacuum suction cup;

[0034] 9. Leveling component; 901. Vertical baffle; 902. Connecting block; 903. Horizontal baffle; 904. Pointer;

[0035] 10. Lifting assembly; 1001. Slide rail; 1002. First screw; 1003. Adjusting bolt;

[0036] 11. Mounting assembly; 1101. Slider; 1102. Connecting plate; 1103. C-shaped clamping plate; 1104. Slot; 1105. Locking bolt;

[0037] 12. Drive assembly; 1201. Fixing frame; 1202. Second screw; 1203. Sprocket; 1204. Chain; 1205. First bevel gear; 1206. Mounting plate; 1207. Shaft; 1208. Second bevel gear; 1209. Adjustment knob;

[0038] 13. Scale plate; 14. Through hole; 15. Reinforcing rib. Detailed Implementation

[0039] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0040] like Figure 1-9 As shown, the present invention has the following specific embodiments.

[0041] Example 1

[0042] A positioning aid for a robotic arm suction cup to pick up and place wafers on a wafer carrier stage includes a base 1 and a robotic arm body 3. A support platform 2 is fixedly connected to the upper rear side of the base 1, a support column 5 is fixedly connected to the upper end of the support platform 2, and a wafer carrier stage 6 is fixedly connected to the upper end of the support column 5. The robotic arm body 3 is fixedly connected to the upper front side of the base 1. An insertion plate 4 is fixedly connected to the output end of the robotic arm body 3, and a vacuum suction cup 8 is fixedly connected to the upper rear side of the insertion plate 4. A mounting frame 7 is provided on the upper end of the wafer carrier stage 6. A through hole 14 is opened on the front side of the mounting frame 7. Scale plates 13 are fixedly connected to both the left and right ends of the front side of the mounting frame 7. Several reinforcing ribs 15 are fixedly connected between adjacent side plates on the rear side of the mounting frame 7. The tool also includes:

[0043] The leveling component 9 is located on the front side of the through hole 14 between the scale plates 13, and is used to adjust the level of the insert plate 4;

[0044] Drive component 12 is located on the front side of the mounting frame 7 and behind the leveling component 9, and is used to adjust the height of the leveling component 9.

[0045] The locking component 11 is set on the left and right sides of the mounting frame 7 and is used to fix the mounting frame 7 and the crystal boat box stage 6.

[0046] The lifting component 10 is located on the left and right sides of the mounting frame 7, inside the locking component 11, and is used to adjust the height of the locking component 11.

[0047] In this embodiment, the height of the leveling component 9 can be adjusted by the driving component 12, which is convenient to match the different heights of different wafer sizes on the crystal boat stage 6. The length of the clamping component 11 can be adjusted, and the height of the clamping component 11 can be adjusted by the lifting component 10, so as to adjust according to the thickness of different crystal boat stage 6. The bending point is reinforced with a reinforcing rib 15 to ensure the strength of the mounting frame 7 and prevent deformation.

[0048] Example 2

[0049] The leveling component 9 and the mounting frame 7 are both made of transparent acrylic.

[0050] In this embodiment, the leveling component 9 and the mounting frame 7 are made of transparent acrylic sheet material, which makes it easy to observe the position of the vacuum suction cup 8 on the insert plate 4, and thus makes it easy to position and adjust it.

[0051] Example 3

[0052] The leveling component 9 includes a vertical baffle 901, with connecting blocks 902 fixedly connected to both the left and right sides of the rear bottom end of the vertical baffle 901, a horizontal baffle 903 fixedly connected to the middle position of the front bottom end of the vertical baffle 901, and pointers 904 fixedly connected to the bottom ends of both the left and right sides of the vertical baffle 901.

[0053] The drive assembly 12 includes a fixed frame 1201 and a mounting plate 1206. The fixed frame 1201 is fixedly connected to the left and right ends of the front side of the mounting frame 7. A second screw 1202 is rotatably connected between the fixed frames 1201. A sprocket 1203 is fixedly connected to the bottom end of each second screw 1202. The sprockets 1203 are driven by a chain 1204.

[0054] Mounting plate 1206 is fixedly connected to the front right end of mounting frame 7. A rotating shaft 1207 is rotatably connected to mounting plate 1206. A second bevel gear 1208 is fixedly connected to the left end of rotating shaft 1207. An adjustment knob 1209 is fixedly connected to the right end of rotating shaft 1207. A first bevel gear 1205 is fixedly connected to the upper end of second screw 1202 located on the right side. The first bevel gear 1205 meshes with the second bevel gear 1208.

[0055] The connecting blocks 902 located on both sides are threadedly connected to the corresponding second screws 1202.

[0056] In this embodiment, as Figure 5 , 6 As shown in Figure 8, rotating the adjustment knob 1209 can drive the second bevel gear 1208 on the rotating shaft 1207 to rotate. Through the meshing transmission of the first bevel gear 1205 and the second bevel gear 1208, the corresponding second screw 1202 can be driven to rotate. Through the transmission of the sprocket 1203 and the chain 1204, another second screw 1202 can be driven to rotate, thereby driving the vertical baffle 901 to move up and down along the second screw 1202 through the connecting block 902.

[0057] Example 4

[0058] The locking assembly 11 includes a slider 1101 and a C-shaped locking plate 1103. A connecting plate 1102 is fixedly connected to one side of the slider 1101. Slots 1104 are opened on both sides of the upper end of the C-shaped locking plate 1103. Locking bolts 1105 are threadedly connected to both sides of the upper end of the connecting plate 1102. The locking bolts 1105 pass through the corresponding slots 1104 respectively.

[0059] The lifting assembly 10 includes a slide rail 1001, which is fixedly connected to the side of the mounting frame 7. Each slide rail 1001 is rotatably connected to a first screw 1002, and each first screw 1002 is fixedly connected to an adjusting bolt 1003 at its upper end.

[0060] The slider 1101 is slidably connected to the corresponding slide rail 1001, and the slider 1101 is threadedly connected to the corresponding first screw 1002.

[0061] In this embodiment, as Figure 6 , 7 As shown in Figure 9, by loosening the locking bolt 1105, the C-shaped clamping plate 1103 slides along the locking bolt 1105 through the slot 1104, which can adjust the extension length of the C-shaped clamping plate 1103. After adjustment, the locking bolt 1105 is tightened again, so that it can be used to clamp and fix crystal boat box stage 6 of different widths. By rotating the adjusting bolt 1003, the first screw 1002 is driven to rotate, which can drive the connecting plate 1102 to move up and down along the slide rail 1001 through the slider 1101, so that the height of the C-shaped clamping plate 1103 can be adjusted, which can be used to clamp and fix crystal boat box stage 6 of different widths.

[0062] The overall working principle of this invention is as follows:

[0063] Place the mounting frame 7 on the crystal boat box stage 6. If the size of the base 1 of the crystal boat box stage 6 changes, loosen the locking bolt 1105. The C-shaped clamping plate 1103 slides along the locking bolt 1105 through the slot 1104, which can adjust the extension length of the C-shaped clamping plate 1103. After adjustment, tighten the locking bolt 1105 again. This can be used to clamp and fix crystal boat box stages 6 of different widths. By rotating the adjusting bolt 1003, the first screw 1002 can be rotated, which can drive the connecting plate 1102 to move up and down along the slide rail 1001 through the slider 1101. This can adjust the height of the C-shaped clamping plate 1103, which can be used to clamp and fix crystal boat box stages 6 of different widths.

[0064] Rotating the adjustment knob 1209 can drive the second bevel gear 1208 on the rotating shaft 1207 to rotate. Through the meshing transmission of the first bevel gear 1205 and the second bevel gear 1208, the corresponding second screw 1202 can be driven to rotate. Through the transmission of the sprocket 1203 and the chain 1204, another second screw 1202 can be driven to rotate. This can drive the vertical baffle 901 and the horizontal baffle 903 to move up and down along the second screw 1202 through the connecting block 902. The height can be observed through the pointer 904 and the scale plate 13. The horizontal baffle 903 can be adjusted to the height of the vacuum chuck 8 required for the corresponding wafer size.

[0065] When the main body 3 of the robotic arm is de-energized, insert the rear end of the insert plate 4 into the through hole 14, and make the upper end of the insert plate 4 stick to the bottom end of the horizontal baffle 903, and enter the mounting frame 7 perpendicular to the vertical baffle 901, so that the position of the vacuum chuck 8 in the mounting frame 7 is consistent with the position of the wafer in the wafer carrier box. This determines the position of the vacuum chuck 8 in picking up and placing wafers in the wafer carrier box.

[0066] By using the robotic arm debugging interface on the OP series equipment (OP2000 / 3000 / 5000), the current coordinates are read and saved, thereby completing the calibration of the robotic arm body 3.

[0067] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to specific implementations. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A positioning auxiliary tool for a robotic arm suction cup to pick up and place wafers on a wafer carrier stage, comprising a base (1) and a robotic arm body (3), wherein a support platform (2) is fixedly connected to the upper rear side of the base (1), a support column (5) is fixedly connected to the upper end of the support platform (2), a wafer carrier stage (6) is fixedly connected to the upper end of the support column (5), the robotic arm body (3) is fixedly connected to the upper front side of the base (1), an insertion plate (4) is fixedly connected to the output end of the robotic arm body (3), and a vacuum suction cup (8) is fixedly connected to the upper rear side of the insertion plate (4), characterized in that: The crystal boat box object table (6) upper end is provided with mounting frame (7), the mounting frame (7) front side is provided with through hole (14), the mounting frame (7) front side left and right ends are all fixedly connected with scale board (13), the mounting frame (7) rear side adjacent two sides are all fixedly connected with a plurality of reinforcing ribs (15), still include: Leveling assembly (9) is set up in the position between scale board (13) in through hole (14) front side, is used for adjusting the level of plugboard (4); Drive assembly (12), the drive assembly (12) is set up in the position of mounting frame (7) front side in leveling assembly (9) rear side, is used for adjusting the height of leveling assembly (9); Clamping assembly (11), the clamping assembly (11) is set up in mounting frame (7) left and right sides, is used for fixing mounting frame (7) and crystal boat box object table (6); Lifting assembly (10), the lifting assembly (10) is set up in the position of mounting frame (7) left and right sides in clamping assembly (11) inside, is used for adjusting the height of clamping assembly (11).

2. The positioning aid tool for a mechanical arm chuck to position a wafer on a boat cassette stage according to claim 1, wherein: The leveling assembly (9), mounting frame (7) are all transparent acrylic material.

3. The positioning aid tool for a mechanical arm chuck to position a wafer on a boat cassette stage according to claim 2, wherein: The leveling assembly (9) includes vertical baffle (901), the vertical baffle (901) rear side bottom left and right sides are all fixedly connected with connecting block (902), the vertical baffle (901) front side bottom middle position is fixedly connected with horizontal baffle (903), the vertical baffle (901) left and right sides bottom are all fixedly connected with pointer (904).

4. The positioning aid tool for a mechanical arm chuck to position a wafer on a boat cassette stage according to claim 3, wherein: The drive assembly (12) includes fixed frame (1201) and mounting plate (1206), the fixed frame (1201) is fixedly connected in mounting frame (7) front side left and right ends, the fixed frame (1201) between all are rotatably connected with second screw rod (1202), the second screw rod (1202) bottom all are fixedly connected with sprocket (1203), the sprocket (1203) is driven through chain (1204) between; The mounting plate (1206) is fixedly connected in mounting frame (7) front side right end, the mounting plate (1206) is rotatably connected with shaft (1207) on, the shaft (1207) left end is fixedly connected with second bevel gear (1208), the shaft (1207) right end is fixedly connected with adjusting knob (1209), the second screw rod (1202) upper end fixedly connected with first bevel gear (1205) in right side, the first bevel gear (1205) is engagedly connected with second bevel gear (1208); The connecting block (902) in both sides is respectively with corresponding second screw rod (1202) thread connection.

5. The positioning aid tool for a mechanical arm chuck to position a wafer on a boat cassette stage according to claim 4, wherein: The card setting assembly (11) includes a sliding block (1101) and a C-shaped card plate (1103), one side of the sliding block (1101) is fixedly connected with a connecting plate (1102), both sides of the upper end of the C-shaped card plate (1103) are provided with a slot (1104), and both sides of the upper end of the connecting plate (1102) are threadedly connected with locking bolts (1105); the locking bolts (1105) respectively pass through the corresponding slots (1104).

6. The positioning aid tool for a mechanical arm chuck to position a wafer on a boat cassette stage according to claim 5, wherein: The lifting assembly (10) includes sliding rails (1001), the sliding rails (1001) are fixedly connected with the side surfaces of the mounting frame (7), and the first screw rods (1002) are rotatably connected in the sliding rails (1001); the upper ends of the first screw rods (1002) are fixedly connected with adjusting bolts (1003). The sliding blocks (1101) are slidably connected with the corresponding sliding rails (1001), and the sliding blocks (1101) are threadedly connected with the corresponding first screw rods (1002).

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