Special gas pipe, special gas pipe furnace and battery piece production device

Abstract

The application is suitable for the technical field of solar cell production equipment, in particular to a special gas pipe, a special gas pipe furnace and a cell production device. The special gas pipe comprises a pipe head, a gas channel and a first mounting groove are arranged in the pipe head, and the first end of the gas channel is communicated with the first mounting groove; a spray pipe is provided with an air inlet end matched with the first mounting groove; and a mounting and fixing piece is matched with the pipe head, and is used for fixing and connecting the pipe head and the spray pipe when the air inlet end is embedded into the first mounting groove. The pipe head and the spray pipe are detachably mounted through the mounting and fixing piece. When the special gas pipe is replaced, only the spray pipe needs to be dismounted and replaced, so that the waste caused by replacing the whole special gas pipe is avoided, and the cost is saved.

Claims

1. A special air tube, characterized in that, include: The tube head is provided with an air passage and a first mounting groove, and the first end of the air passage is connected to the first mounting groove. A spray pipe having an air inlet end that mates with the first mounting groove; as well as The mounting fastener cooperates with the pipe head to fix the pipe head and the spray pipe together when the air inlet end is embedded in the first mounting groove.

2. The special gas pipe according to claim 1, characterized in that, It also includes a first sealing ring, and the inner sidewall of the first mounting groove is provided with an annular groove for the first sealing ring to be inserted.

3. The special gas pipe according to claim 1, characterized in that, The spray pipe is a metal pipe, a quartz pipe, or a silicon carbide material pipe.

4. The special gas pipe according to any one of claims 1 to 3, characterized in that, The mounting fasteners include either screws or pins.

5. The special gas pipe according to claim 1, characterized in that, The tube head is also provided with a second mounting groove that communicates with the second end of the air passage. The second mounting groove is used to connect with the connector of an external air source pipe.

6. The special gas pipe according to claim 5, characterized in that, The gas source pipe connectors include any one of the following: VCR connector, VCO connector, compression fitting, KF flange connector, ISO flange connector, and quick-connect connector.

7. A special gas tube furnace, characterized in that, include: Furnace tubes; A furnace tail cover installed at the tail end of the furnace tube; as well as A special gas pipe according to any one of claims 1 to 6 is provided on the tail cover of the furnace.

8. The special gas tube furnace according to claim 7, characterized in that, The tube head is provided with a protrusion, and the special gas tube furnace further includes: A tail flange is provided on the tail cover of the furnace. The tail flange has an external thread at one end outside the furnace tube. The special gas pipe passes through the tail flange, and part of the protrusion is embedded in the tail flange at the end outside the furnace tube. A clamping nut, wherein the clamping nut has a stepped first through hole and a second through hole, the diameter of the first through hole, the diameter of the protrusion, and the diameter of the second through hole increasing sequentially, and the second through hole having an internal thread that mates with the external thread; and A mounting bushing fitted onto the protrusion.

9. The special gas tube furnace according to claim 8, characterized in that, It also includes a second sealing ring, and the inner wall of the end of the furnace tail flange located outside the furnace tube is provided with an annular groove for the second sealing ring to be inserted.

10. A battery cell production apparatus, characterized in that, Including the special gas tube furnace according to any one of claims 7 to 9.

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