Replaceable probe structure

Abstract

The utility model discloses a replaceable probe structure, including shielding casing and insulating sleeve, shielding casing and insulating sleeve whole compression integrated, insulating sleeve is located in shielding casing is inclined, and probe is detachably installed in insulating sleeve through limiting device. Probe and limiting device cooperation detachably install in insulating sleeve, can according to test demand, quickly replace the damaged or different specification's probe, need not to make probe card again or carry out the dismounting positioning again, reduce maintenance cost and improve use flexibility, and simultaneously insulating sleeve can adopt the form of single -hole or double -hole, can be adapted to single -hole single -probe test or double -hole double -probe test.

Description

Technical Field

[0001] This invention belongs to the field of probe development technology, and in particular relates to a replaceable probe structure. Background Technology

[0002] As a key piece of equipment in semiconductor testing, probe cards consist primarily of probes. The core function of a probe card is to transmit and provide feedback test signals through direct contact between the probes and chip pads or bumps, thus confirming product qualification. In practical applications, different chip pins have varying requirements for probe performance: ordinary signal pins (such as VDD, EN, etc.) typically use cost-effective beryllium copper probes, while special function pins (including RF ports and CPU-based PADs) must be equipped with dedicated probes possessing anti-interference or anti-puncture properties. Probe cards often lack reusability due to the non-removable nature of the probes, leading to significant wasted card manufacturing time and increased R&D costs. For example, in multi-project wafer (MPW) testing, multiple dedicated probe cards are required for different chip designs on the same wafer, resulting in severe resource waste. Furthermore, when probes become deformed or burnt out, the replacement and recalibration process is time-consuming and costly, severely impacting testing efficiency.

[0003] To address the aforementioned issues, a replaceable probe structure is needed to facilitate probe replacement and improve testing efficiency. Utility Model Content

[0004] The purpose of this invention is to solve all or part of the above-mentioned problems by providing a replaceable probe structure. The probe and the limiting device are detachably installed in the insulating sleeve, which can quickly replace damaged or different specifications of probes according to test requirements without the need to remake the probe card or re-disassemble and reposition it, thus saving costs and improving test efficiency. At the same time, the insulating sleeve can be in the form of a single hole or a double hole, which can be adapted to single-hole single-probe test or double-hole double-probe test.

[0005] This invention provides a replaceable probe structure, including a shielding shell and an insulating sleeve. The shielding shell and the insulating sleeve are integrally pressed together, and the insulating sleeve is inclinedly disposed within the shielding shell. The probe is detachably installed within the insulating sleeve via a limiting device. The probe and the limiting device cooperate to detachably install within the insulating sleeve, enabling quick replacement of damaged or different-sized probes according to testing needs. This eliminates the need to remake probe cards or re-disassemble and reposition them, reducing maintenance costs and improving operational flexibility.

[0006] The shielding shell has a "┐" shaped structure, including a first pressing part and a second pressing part, with the second pressing part located below the end of the first pressing part. This, combined with the preparation of probe cards, enhances the overall resistance to deformation and ensures the stability of probe installation.

[0007] The insulating sleeve extends from the upper part of the first pressing part and passes through the first pressing part to the lower part of the second pressing part. The insulating sleeve acts as a guide groove limiter, allowing the probe to be inserted and replaced individually, simplifying the replacement process and facilitating observation of the probe's working status.

[0008] It also includes a support block, which is disposed within the first pressing part and located below the insulating sleeve, for supporting and positioning the insulating sleeve. The support block provides bottom support for the insulating sleeve, preventing the sleeve from shifting due to force or vibration.

[0009] The support block is a right-angled triangle, and its hypotenuse supports and positions the insulating sleeve. The hypotenuse of the right-angled triangular support block fits against the inclined insulating sleeve, providing a more stable support surface and ensuring precise fixation of the probe angle.

[0010] The limiting device is a check block that is detachably installed at the end of the insulating sleeve. It facilitates disassembly and replacement while effectively preventing the probe from falling or shifting during testing.

[0011] The insulating sleeve can be either a single-hole or double-hole structure. It can be adapted to single-hole single-probe testing and double-hole double-probe testing, respectively. The double-probe testing is a high-precision test that uses the KELVIN test principle to compensate for the resistance of the probe and lead wires.

[0012] The probe is longer than the insulating sleeve and extends out of the insulating sleeve. The fixed section of the probe inside the insulating sleeve maintains sufficient length to ensure stable installation, while the extended section meets the functional requirements of the test, ensuring that the probe can fully contact the product under test.

[0013] The insulating sleeve is made of polyetheretherketone (PEEK). PEEK combines high rigidity and wear resistance, extending the service life of the insulating sleeve.

[0014] The shielding shell is made of metal or ceramic materials, which effectively blocks external electromagnetic interference.

[0015] Compared with the prior art, the advantages of this utility model are: it provides a replaceable probe structure in which the probe and the limiting device are detachably installed in the insulating sleeve, which can quickly replace damaged or different specifications of probes according to the test requirements without remaking the probe card or re-disassembling and repositioning, reducing maintenance costs and improving the flexibility of use; at the same time, the insulating sleeve can be in the form of a single hole or a double hole, which can be adapted to single-hole single probe testing or double-hole double probe testing. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A schematic diagram of the replaceable probe structure provided by this utility model.

[0018] Figure 2 This is a partial structural diagram of the replaceable probe structure provided by this utility model.

[0019] Figure 3 This is a schematic diagram of the anti-reverse block structure provided by this utility model.

[0020] Figure 4 A schematic diagram of the single-hole insulating sleeve provided by this utility model.

[0021] Figure 5 A schematic diagram of the double-hole insulating sleeve provided by this utility model.

[0022] Reference numerals: 1-Shielding shell, 11-First pressing part, 12-Second pressing part, 2-Insulating sleeve, 3-Support block, 4-Limiting device. Detailed Implementation

[0023] The following description and accompanying drawings fully illustrate specific embodiments of the present invention to enable those skilled in the art to practice them. Other embodiments may include structural, logical, electrical, procedural, and other changes. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the order of operation may vary. Some portions and features of some embodiments may be included in or replace portions and features of other embodiments.

[0024] Example This embodiment provides a replaceable probe structure, such as Figure 1 As shown, the device includes a shielding housing 1 and an insulating sleeve 2, which are integrally pressed together. The insulating sleeve 2 is inclinedly disposed within the shielding housing 1, and the probe is detachably installed within the insulating sleeve 2 via a limiting device 4. The probe and the limiting device cooperate to detachably install in the insulating sleeve. The metal sheet, insulating sleeve 2, and support block 3 are positioned and then manufactured using sheet metal stamping technology. This allows for quick replacement of damaged or different sized probes according to testing needs, without the need to remake probe cards or re-disassemble and reposition them, reducing maintenance costs and improving operational flexibility.

[0025] The shielding housing 1 has a "┐" shaped structure, including a first pressing part 11 and a second pressing part 12, with the second pressing part 12 located below the end of the first pressing part 11. The insulating sleeve 2 extends from the upper part of the first pressing part 11, passes through the first pressing part 11, and extends out from the lower part of the second pressing part 12. The insulating sleeve 2 serves as a guide groove limiter, allowing the probe to be inserted and replaced individually, simplifying the replacement process and facilitating observation of the probe's working status. The shielding housing 1 is made of metal or ceramic material, effectively blocking external electromagnetic interference. In this embodiment, an aluminum housing is used as the shielding housing 1, serving as the grounding terminal connected to the probe card to prevent high-frequency electromagnetic waves from contacting the conductor of the cable, thereby generating induced current and increasing crosstalk.

[0026] The support block 3 is a right-angled triangle, and its hypotenuse supports and positions the insulating sleeve 2. The hypotenuse of the right-angled triangle support block 3 fits against the inclined insulating sleeve 2, providing positioning and support for the insulating sleeve 2, offering a more stable support surface, and ensuring precise fixation of the probe angle.

[0027] like Figure 2-3 As shown, the limiting device 4 is a check block detachably installed at the end of the insulating sleeve 2, which facilitates disassembly and replacement while effectively preventing the probe from falling or shifting during testing. The probe length is greater than the length of the insulating sleeve 2 and extends out of the insulating sleeve 2. The fixed section of the probe inside the insulating sleeve 2 maintains a sufficient length to ensure stable installation, while the extended section meets the functional requirements of the test.

[0028] like Figure 4-5 As shown, the insulating sleeve 2 can adopt a single-hole structure or a double-hole structure, which can be adapted to single-hole single-probe testing or double-hole double-probe testing, respectively. The double-probe testing utilizes the KELVIN testing principle to compensate for the resistance of the probe and leads for high-precision testing. The insulating sleeve 2 is made of polyetheretherketone (PEEK) material. In this embodiment, the insulating sleeve 2 uses a PEEK capillary tube, which has high rigidity and wear resistance, extending the service life of the insulating sleeve.

[0029] This invention allows the probe and the limiting device 4 to be detachably installed in the insulating sleeve. When the probe is damaged or the probe specification needs to be changed, there is no need to remake the probe card or disassemble and reposition it. Simply remove the limiting device 4, take out the probe from the insulating sleeve 2, replace it with a new probe, and then install the limiting device 4 to fix the probe. This reduces maintenance costs and improves the flexibility of use.

[0030] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A replaceable probe structure, characterized in that, It includes a shielding shell (1) and an insulating sleeve (2), the shielding shell (1) and the insulating sleeve (2) are integrally pressed together, the insulating sleeve (2) is inclinedly disposed inside the shielding shell (1), and the probe is detachably installed inside the insulating sleeve (2) through a limiting device (4).

2. The replaceable probe structure according to claim 1, characterized in that, The shielding shell (1) has a "┐" shaped structure, including a first pressing part (11) and a second pressing part (12), with the second pressing part (12) located below the end of the first pressing part (11).

3. The replaceable probe structure according to claim 2, characterized in that, The insulating sleeve (2) extends from the upper part of the first pressing part (11) and passes through the first pressing part (11) to the lower part of the second pressing part (12).

4. The replaceable probe structure according to claim 2, characterized in that, It also includes a support block (3), which is disposed inside the first pressing part (11) and located below the insulating sleeve (2) for supporting and positioning the insulating sleeve (2).

5. The replaceable probe structure according to claim 4, characterized in that, The support block (3) is a right triangle, and the hypotenuse of the support block (3) supports and positions the insulating sleeve (2).

6. The replaceable probe structure according to claim 1, characterized in that, The limiting device (4) is a check block that is detachably installed at the end of the insulating sleeve (2).

7. The replaceable probe structure according to claim 1, characterized in that, The insulating sleeve (2) can be a single-hole structure or a double-hole structure.

8. The replaceable probe structure according to claim 1, characterized in that, The probe is longer than the insulating sleeve (2) and extends out from the insulating sleeve (2).

9. The replaceable probe structure according to claim 1, characterized in that, The insulating sleeve (2) is made of polyetheretherketone material.

10. The replaceable probe structure according to claim 1, characterized in that, The shielding shell (1) is made of metal or ceramic material.

Images