Auxiliary manufacturing tool of wafer moving worktable
CN224698270UActive Publication Date: 2026-08-28DONGFANG JINGYUAN ELECTRON LTD
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Patent Information
- Application Number
- CN202521769303.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-19
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2035-08-19
AI Technical Summary
Technical Problem
尽管组合体在加工过程中会严格控制陶瓷板和铝盘子的相关尺寸精度，但由于组合体的制备过程是手动操作的，陶瓷板和铝盘的装配精度(例如，粘胶层的厚度尺寸以及陶瓷板和铝盘的平行度)容易出现偏差
Benefits of technology
[0039]本实用新型的晶圆移动工作台的辅助制造工装，由于其包括基板盒、上压盖和连接组件，其中基板盒内配置有压腔，该压腔可以放置晶圆移动工作台中需要通过胶体层叠粘合的多个板件；并且上压盖可以盖压在最上方的板件上；连接组件可以连接于上压盖和基板盒，连接组件用于促使上压盖压向基板盒以挤压多个板件间的胶体。进而，本实用新型的辅助制造工装可以对晶圆移动工作台的多个板件进行辅助粘合，且上压盖在盖压到基板盒的放置口处时即限定出多个板件的总厚度和各板件间的间距，可以有效地降低通过纯手工的方式对多个板件进行粘合所带来的装配偏差。因此，本实用新型的晶圆移动工作台的辅助制造工装可以有效地提升晶圆移动工作台中由多个板件进行胶体粘合的组合体的装配精度，进一步地提升芯片制造的良品率。
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Figure CN224698270U_ABST
Abstract
The utility model provides a kind of auxiliary manufacturing tool of wafer moving workstation, wafer moving workstation includes multiple board pieces by colloid laminated adhesion, auxiliary manufacturing tool includes: substrate box, with the compression cavity for placing multiple board pieces and the mouth of placing upward opening;Upper gland, detachably cover and place at the mouth of placing, for cover and compress the board piece located in the uppermost side;Connecting assembly, connected to upper gland and substrate box, for prompting upper gland to be compressed to substrate box to extrude the colloid between multiple board pieces.The auxiliary manufacturing tool of wafer moving workstation of the utility model can effectively improve the assembly accuracy of the combination of colloid adhesion by multiple board pieces in wafer moving workstation, further improve the yield of chip manufacturing.
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