A chemical liquid heater

Abstract

The utility model discloses a kind of chemical liquid heaters, it is related to semiconductor chemical liquid heating equipment technical field, including base and two mutually parallelly arranged heating boxes, two outer sides of each heating box are symmetrically provided with aluminum plate, the aluminum plate of two sides of heating box is mutually connected fixed, and heating box is fixed on base;Two inner walls of each heating box are provided with heat conduction sheet, and each aluminum plate is provided with refrigeration and heating sheet, refrigeration and heating sheet heat or cool the chemical liquid in heating box by electricity, and switch heating or cooling state by switching current direction;The scheme uses the refrigeration and heating sheet of switchable current direction, can heat and can also actively cool, solve the problem that traditional device needs natural cooling after excessive heating, time-consuming and interrupt production, cooperate with the real-time monitoring and closed-loop control of temperature sensor, can quickly respond temperature adjustment demand, significantly improve production efficiency, meet the stringent requirements of semiconductor field to chemical liquid temperature.

Description

Technical Field

[0001] This utility model relates to a liquid medicine heater, belonging to the technical field of semiconductor liquid medicine heating equipment. Background Technology

[0002] In semiconductor manufacturing, hydrofluoric acid is a key chemical solution for silicon wafer etching and oxide layer removal. Its temperature stability directly determines the etching accuracy, pattern transfer effect and chip yield. Therefore, hydrofluoric acid heating devices have become core auxiliary equipment.

[0003] Existing technologies mostly use a single-tank heating structure. The lack of zoned design makes it easy for hydrofluoric acid to form local temperature differences due to convection, resulting in fluctuations in the etching rate, causing uneven wafer etching depth and defects at the edge of the pattern. The heating elements are directly exposed and are easily corroded by the acidic vapors volatilized from hydrofluoric acid. They may also shed impurities and contaminate the solution, further reducing the yield. At the same time, traditional equipment lacks effective temperature control. Overheating requires natural cooling, which is time-consuming and interrupts production, seriously affecting production efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a liquid medicine heater to overcome the shortcomings of the existing technology.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is: a liquid medicine heater, comprising a base and two heating boxes arranged in parallel to each other, each heating box having heat-conducting plates on its two inner walls, and aluminum plates symmetrically arranged on its two outer sides, the aluminum plates on both sides of the heating box being connected and fixed to each other, thereby fixing the heating box to the base; Each aluminum plate is equipped with a cooling and heating element. The cooling and heating element heats or cools the liquid medicine in the heating box by being connected to electricity, and the heating or cooling state is switched by switching the direction of the current. The cooling and heating element is equipped with a water cooling element, and a water cooling pipe for circulating cooling water is installed inside the water cooling element. The water cooling element removes the heat of the cooling and heating element through the water cooling pipe. When the cooling and heating element is in a heating state, the heat generated by the cooling and heating element is transferred to the heating box through the aluminum plate and the heat-conducting plate in sequence to heat the medicine liquid. When the cooling and heating element is in a cooling state, the heat of the medicine liquid in the heating box is transferred to the cooling and heating element through the heat-conducting fins and aluminum plate. The cooling and heating element absorbs heat to cool the medicine liquid. The heat absorbed by the cooling and heating element is carried away by the cooling water in the water-cooling fins.

[0006] Preferably, it also includes a sealing cover, which is connected and fixed to the base and forms a rectangular sealed cavity with the base. The sealed cavity is filled with nitrogen gas, and both heating boxes are located in the sealed cavity.

[0007] Preferably, each of the heating boxes has multiple horizontally arranged partitions, which divide the interior of the heating box into multiple cavities.

[0008] Preferably, an inlet pipe, an outlet pipe, and a medicine circulation pipe are provided through one side wall of the sealing cover. The inlet pipe is connected to the bottom of one of the heating boxes to supply medicine to the heating box, and the outlet pipe is connected to the top of the other heating box to discharge the heated medicine in the heating box. The two ends of the medicine circulation pipe are respectively connected to the two heating boxes to form a medicine circulation pipeline.

[0009] Preferably, the inlet pipe, outlet pipe, and drug circulation pipe are all made of PFA material.

[0010] Preferably, an inlet pipe and an outlet pipe are also provided through the side wall of the sealing cover. The inlet pipe is connected to the bottom of the water-cooling plate on the outside of one of the heating boxes and is connected to the water-cooling pipe inside the water-cooling plate to provide cooling water to the water-cooling pipe. The outlet pipe is connected to the top of the water-cooling plate on the outside of the other heating box and is connected to the water-cooling pipe inside the water-cooling plate to discharge the cooling water inside the water-cooling pipe.

[0011] Preferably, a first pipe is provided between the water-cooling plates on both sides of each heating box, and the first pipe connects the water-cooling pipes in the water-cooling plates on both sides of the heating box; a second pipe is provided between the two heating boxes, and the second pipe is used to connect the water-cooling plates on the side of the two heating boxes that are close to each other, and connect the water-cooling pipes in the water-cooling plates on the side of the two heating boxes that are close to each other.

[0012] Preferably, at least one of the heating boxes is equipped with a temperature sensor to monitor the temperature of the liquid medicine inside the heating box in real time.

[0013] Preferably, the aluminum plates on both sides of the heating box are fixed to each other by a plurality of bolt groups that are equally spaced along the circumference, the bottom surface of the aluminum plates is fixed to the base by L-shaped corner brackets, and equal-height columns are provided between the two aluminum plates.

[0014] Preferably, the water-cooling tubes inside the water-cooling plate are arranged in a continuous S-shape, the heat-conducting plate is circular, and the heat-conducting plate is made of glassy carbon material.

[0015] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art: This utility model discloses a liquid medicine heater that uses a cooling and heating element with switchable current direction, which can both heat and actively cool down. This solves the problem of traditional devices requiring natural cooling after overheating, which is time-consuming and interrupts production. With real-time monitoring and closed-loop control by a temperature sensor, it can quickly respond to temperature adjustment needs, significantly improve production efficiency, and meet the stringent requirements of the semiconductor industry for liquid medicine temperature. In addition, the cooling and heating element indirectly exchanges heat with the liquid medicine through an aluminum plate and a heat-conducting plate, without direct contact with the liquid medicine, which can effectively avoid corrosion by the acidic vapors volatilized from hydrofluoric acid. Attached Figure Description

[0016] The technical solution of this utility model will be further described below with reference to the accompanying drawings: Appendix Figure 1 This is a schematic diagram of the structure of a medicine liquid heater according to the present invention; Appendix Figure 2 This is a schematic diagram of the structure of a liquid medicine heater with part of the sealing cap removed, as described in this utility model; Appendix Figure 3 This is a top view of a liquid medicine heater according to the present invention, showing the removal of the sealing cap; Appendix Figure 4 This is a schematic diagram of the structure of the heating box described in this utility model; Appendix Figure 5 For the appendix Figure 4 A sectional view; Appendix Figure 6 For the appendix Figure 4 A schematic diagram of the structure of the heating chamber for heat removal; Appendix Figure 7 For the appendix Figure 4 A schematic diagram of the structure for removing the water-cooling plate.

[0017] In the diagram: 1. Base; 2. Sealing cover; 3. Heating box; 4. Heat-conducting plate; 5. Aluminum plate; 6. Cooling and heating plate; 7. Water-cooling pipe; 8. Water-cooling plate; 9. First pipe; 10. Second pipe; 11. Water inlet pipe; 12. Water outlet pipe; 14. Partition plate; 15. Cavity; 16. Liquid inlet pipe; 17. Liquid outlet pipe; 18. Medicine circulation pipe; 19. Bolt assembly; 20. Elevation column; 21. L-shaped corner bracket; 22. Temperature sensor. Detailed Implementation

[0018] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0019] As attached Figure 1-6 As shown, the present invention provides a liquid heater, which includes a base 1 and two parallel heating boxes 3. The heating boxes 3 are used to contain the liquid to be heated (hydrofluoric acid liquid). The heating boxes 3 are made of corrosion-resistant materials, such as PTFE.

[0020] It also includes a sealing cap 2, which is fixed to the base 1 by bolts and forms a rectangular sealed cavity with the base 1. Both heating boxes 3 are located in the sealed cavity. The sealed cavity is filled with nitrogen, which is an inert gas that can effectively isolate air and prevent the medicine from reacting with components in the air after evaporation, while reducing the loss of medicine due to evaporation.

[0021] Aluminum plates 5 are symmetrically arranged on both sides of each heating box 3. The aluminum plates 5 on both sides of the heating box 3 are connected and fixed to each other, and the heating box 3 is fixed to the base 1, which serves both as structural support and heat conduction function. Specifically, the aluminum plates 5 on both sides of the heating box 3 are fixed to each other by multiple bolt groups 19 arranged at equal intervals along the circumference, forming a clamping and fixing structure for the heating box 3. Equal height columns 20 are set between the two aluminum plates 5 to ensure that the distance between the aluminum plates 5 and the heating box 3 is uniform and to avoid deformation of the heating box 3 under stress. The bottom surface of the aluminum plates 5 is fixed to the base 1 by L-shaped corner brackets 21.

[0022] Furthermore, each heating chamber 3 is horizontally equipped with multiple partitions 14, which divide the interior of the heating chamber 3 into multiple cavities 15. When the liquid medicine flows in the heating chamber 3, it needs to pass through each cavity 15 in sequence, which can slow down the convection speed of the liquid medicine and avoid the formation of local temperature differences due to convection.

[0023] Furthermore, an inlet pipe 16, an outlet pipe 17, and a drug circulation pipe 18 are provided through one side wall of the sealing cap 2. In this embodiment, the inlet pipe 16, the outlet pipe 17, and the drug circulation pipe 18 are all made of PFA material, which has excellent corrosion resistance and chemical stability and can withstand strong corrosive drugs such as hydrofluoric acid.

[0024] The inlet pipe 16 is connected to the bottom of one of the heating boxes 3 to supply the medicine to the heating box 3, realizing bottom inlet and avoiding impact on the medicine in the heating box 3. The outlet pipe 17 is connected to the top of the other heating box 3 to discharge the heated medicine in the heating box 3, realizing top outlet and ensuring complete discharge of the medicine. The two ends of the medicine circulation pipe 18 are respectively connected to the two heating boxes 3 to form a medicine circulation pipeline, so that the medicine in the two heating boxes 3 can circulate with each other, further ensuring uniform temperature of the medicine.

[0025] As attached Figure 7As shown, each heating chamber 3 has heat-conducting plates 4 on both inner walls. In this embodiment, the heat-conducting plates 4 are circular and made of glassy carbon material, which has good thermal conductivity and can withstand the corrosion of hydrofluoric acid solution. The heat-conducting plates 4 are tightly attached to the inner wall of the heating chamber 3 to ensure efficient heat exchange between the solution and the heat-conducting plates 4. Each aluminum plate 5 is equipped with a cooling and heating plate 6. The cooling and heating plate 6 is connected to an external power source through wires. The cooling and heating plate 6 heats or cools the solution in the heating chamber 3 by connecting to electricity, and the heating or cooling state can be flexibly switched by switching the direction of the current.

[0026] In this embodiment, the heating and cooling element 6 can switch its current direction by connecting to an external control system to change the heating and cooling (cooling) states of the heating and cooling element 6.

[0027] As attached Figure 4 As shown, at least one heating box 3 is equipped with a temperature sensor 22 to monitor the temperature of the liquid medicine in the heating box 3 in real time and transmit the temperature signal to an external control system so as to adjust the working state of the cooling and heating element 6 according to the monitoring results.

[0028] The cooling and heating element 6, which can switch the current direction, can both heat and actively cool down, solving the problem that traditional devices require natural cooling after overheating, which is time-consuming and interrupts production. With the real-time monitoring and closed-loop control of the temperature sensor 22, it can quickly respond to temperature adjustment needs and significantly improve production efficiency. In addition, the cooling and heating element 6 exchanges heat with the liquid medicine indirectly through the aluminum plate 5 and the heat-conducting plate 4, without directly contacting the liquid medicine, which can effectively avoid corrosion by the acidic vapors volatilized from hydrofluoric acid.

[0029] A water-cooled plate 8 is provided on the cooling and heating plate 6, and a water-cooled pipe 7 for circulating cooling water is provided inside the water-cooled plate 8. The water-cooled plate 8 removes the heat of the cooling and heating plate 6 through the water-cooled pipe 7. In this embodiment, the water-cooled pipe 7 inside the water-cooled plate 8 is arranged in a continuous S-shape to increase the contact area with the cooling and heating plate 6 and improve the heat dissipation efficiency.

[0030] During operation, when the cooling and heating element 6 is in the heating state, the heat generated by the cooling and heating element 6 is transferred to the heating box 3 through the aluminum plate 5 and the heat-conducting plate 4 to heat the medicine liquid; when the cooling and heating element 6 is in the cooling (i.e., cooling) state, the heat of the medicine liquid in the heating box 3 is transferred to the cooling and heating element 6 through the heat-conducting plate 4 and the aluminum plate 5, and the cooling and heating element 6 absorbs heat to cool the medicine liquid. The heat absorbed by the cooling and heating element 6 is carried away by the cooling water in the water-cooling plate 8.

[0031] A water inlet pipe 11 and a water outlet pipe 12 are also provided through the side wall of the sealing cover 2. The water inlet pipe 11 is connected to the bottom of the water-cooled plate 8 on the outside of one of the heating boxes 3 and is connected to the water-cooled pipe 7 inside the water-cooled plate 8 to provide cooling water to the water-cooled pipe 7. The water outlet pipe 12 is connected to the top of the water-cooled plate 8 on the outside of the other heating box 3 and is connected to the water-cooled pipe 7 inside the water-cooled plate 8 to discharge the cooling water inside the water-cooled pipe 7.

[0032] Furthermore, a first pipe 9 is provided between the water-cooled fins 8 on both sides of each heating box 3. The first pipe 9 connects the water-cooled pipes 7 in the water-cooled fins 8 on both sides of the heating box 3, so as to realize the series connection of the water-cooled pipes 7 in the water-cooled fins 8 on both sides of the same heating box 3. A second pipe 10 is provided between the two heating boxes 3. The second pipe 10 is used to connect the water-cooled fins 8 on the side of the two heating boxes 3 that are close to each other, and connects the water-cooled pipes 7 in the water-cooled fins 8 on the side of the two heating boxes 3 that are close to each other, so as to form a cooling water circulation path that runs through all the water-cooled fins 8 of the two heating boxes 3, so as to ensure continuous cooling effect.

[0033] The working process and principle of this application are as follows: When the medicine needs to be heated, a positive current is passed through the cooling and heating element 6 to put it into the heating state. The heat generated by the cooling and heating element 6 is transferred to the medicine in the heating chamber through the aluminum plate 5 and the heat-conducting plate 4 in sequence to achieve the heating of the medicine. At the same time, the cooling water in the water-cooling plate 8 circulates and carries away the redundant heat on the non-working side of the cooling and heating element 6 to avoid local overheating.

[0034] When it is necessary to cool the liquid medicine, a reverse current is passed through the cooling and heating element 6 to put it into a cooling state; the heat of the liquid medicine in the heating box 3 is transferred to the cooling and heating element 6 through the heat-conducting element 4 and the aluminum plate 5 in sequence, and the cooling and heating element 6 absorbs the heat to cool the liquid medicine; at this time, the heat absorbed by the cooling and heating element 6 is quickly carried away by the cooling water circulating in the water-cooling element 8 to achieve rapid cooling.

[0035] Among them, the temperature sensor 22 monitors the temperature of the medicine liquid in real time and feeds the data back to the external control system. The control system automatically adjusts the working state of the cooling and heating element 6 according to the preset temperature to achieve accurate and stable control of the medicine liquid temperature.

[0036] The above are merely specific application examples of this utility model and do not constitute any limitation on the scope of protection of this utility model; all technical solutions formed by equivalent transformation or equivalent substitution fall within the scope of protection of this utility model.

Claims

1. A liquid medicine heater, characterized in that: It includes a base (1) and two parallel heating boxes (3). Each heating box (3) has heat-conducting plates (4) on its two inner walls and aluminum plates (5) symmetrically arranged on its two outer sides. The aluminum plates (5) on both sides of the heating box (3) are connected and fixed to each other, and the heating box (3) is fixed on the base (1). Each aluminum plate (5) is provided with a cooling and heating element (6). The cooling and heating element (6) heats or cools the liquid medicine in the heating box (3) by connecting to electricity, and switches the heating or cooling state by switching the direction of the current. The cooling and heating element (6) is provided with a water cooling element (8). The water cooling element (8) is provided with a water cooling pipe (7) for circulating cooling water. The water cooling element (8) carries away the heat of the cooling and heating element (6) through the water cooling pipe (7). When the cooling and heating element (6) is in a heating state, the heat generated by the cooling and heating element (6) is transferred to the heating box (3) through the aluminum plate (5) and the heat-conducting plate (4) to heat the medicine liquid; when the cooling and heating element (6) is in a cooling state, the heat of the medicine liquid in the heating box (3) is transferred to the cooling and heating element (6) through the heat-conducting plate (4) and the aluminum plate (5), and the cooling and heating element (6) absorbs heat to cool the medicine liquid. The heat absorbed by the cooling and heating element (6) is carried away by the cooling water in the water-cooling plate (8).

2. A liquid medicine heater according to claim 1, characterized in that: It also includes a sealing cover (2), which is connected and fixed to the base (1) and forms a rectangular sealed cavity with the base (1). The sealed cavity is filled with nitrogen gas, and both heating boxes (3) are located in the sealed cavity.

3. A liquid medicine heater according to claim 1 or 2, characterized in that: Each of the heating boxes (3) is horizontally provided with multiple partitions (14), which divide the interior of the heating box (3) into multiple cavities (15).

4. A liquid medicine heater according to claim 2, characterized in that: An inlet pipe (16), an outlet pipe (17), and a medicine circulation pipe (18) are provided through one side wall of the sealing cover (2). The inlet pipe (16) is connected to the bottom of one of the heating boxes (3) to provide medicine to the heating box (3). The outlet pipe (17) is connected to the top of the other heating box (3) to discharge the heated medicine in the heating box (3). The two ends of the medicine circulation pipe (18) are connected to the two heating boxes (3) respectively to form a medicine circulation pipeline.

5. A liquid medicine heater according to claim 4, characterized in that: The inlet pipe (16), outlet pipe (17), and medicine circulation pipe (18) are all made of PFA material.

6. A liquid medicine heater according to claim 4, characterized in that: The sealing cover (2) is also provided with an inlet pipe (11) and an outlet pipe (12) through the side wall. The inlet pipe (11) is connected to the bottom of the water-cooling plate (8) on the outside of one of the heating boxes (3) and is connected to the water-cooling pipe (7) inside the water-cooling plate (8) to provide cooling water to the water-cooling pipe (7). The outlet pipe (12) is connected to the top of the water-cooling plate (8) on the outside of the other heating box (3) and is connected to the water-cooling pipe (7) inside the water-cooling plate (8) to discharge the cooling water inside the water-cooling pipe (7).

7. A liquid medicine heater according to claim 6, characterized in that: A first pipe (9) is provided between the water-cooled plates (8) on both sides of each heating box (3), and the first pipe (9) connects the water-cooled pipes (7) in the water-cooled plates (8) on both sides of the heating box (3); a second pipe (10) is provided between the two heating boxes (3), and the second pipe (10) is used to connect the water-cooled plates (8) on the side of the two heating boxes (3) that are close to each other, and connect the water-cooled pipes (7) in the water-cooled plates (8) on the side of the two heating boxes (3) that are close to each other.

8. A liquid medicine heater according to claim 1, characterized in that: At least one of the heating boxes (3) is equipped with a temperature sensor (22) to monitor the temperature of the liquid medicine in the heating box (3) in real time.

9. A liquid medicine heater according to claim 8, characterized in that: The aluminum plates (5) on both sides of the heating box (3) are fixed to each other by a plurality of bolt groups (19) arranged at equal intervals along the circumference. The bottom surface of the aluminum plate (5) is fixed to the base (1) by L-shaped corner brackets (21), and equal height columns (20) are provided between the two aluminum plates (5).

10. A liquid medicine heater according to claim 1, characterized in that: The water-cooling tubes (7) inside the water-cooling plate (8) are arranged in a continuous S-shape, and the heat-conducting plate (4) is circular and made of glass carbon material.

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