tubular furnace

Abstract

The application provides a tubular furnace, and relates to the technical field of nanometer material preparation. The tubular furnace comprises a furnace body, a furnace pipe, a heating assembly and a temperature adjusting assembly. The furnace body is provided with a heating furnace cavity, the furnace pipe is arranged in the heating furnace cavity, the heating assembly is arranged in the heating furnace cavity and is configured to heat the furnace pipe, and the temperature adjusting assembly is arranged in the heating furnace cavity and is configured to regulate and control the heat distribution of the heating furnace cavity. The tubular furnace of the application embodiment regulates and controls the heat distribution of the heating furnace cavity through the temperature adjusting assembly, so that the temperature in the heating furnace cavity is relatively uniformly distributed, and the production efficiency of the tubular furnace is improved.

Description

Technical Field

[0001] This application relates to the field of nanomaterial preparation technology, and in particular to a tube furnace. Background Technology

[0002] A tube furnace is a horizontal or vertical heating device with multiple temperature zones and precise temperature control. Its core is a high-temperature resistant quartz or corundum furnace tube, surrounded by resistance wire or silicon molybdenum rod heating elements. It is equipped with water-cooled rubber ring sealed end caps and flanges. It can grow single-walled or multi-walled carbon nanotubes with uniform diameter and length on the catalyst surface by chemical vapor deposition under inert or reducing atmosphere. At the same time, the process conditions can be precisely controlled by mass flow meter, vacuum pump and exhaust gas treatment system.

[0003] According to relevant technologies, uneven heat distribution within the furnace body leads to uneven heating of the furnace tubes, affecting the production efficiency of the tubular furnace. Utility Model Content

[0004] In view of the above problems, this application provides a tube furnace that can regulate the heat distribution in the heating chamber, so that the temperature in the heating chamber is relatively uniformly distributed, thereby improving the production efficiency of the tube furnace.

[0005] In a first aspect, according to an embodiment of the present application, the tubular furnace includes a furnace body, a furnace tube, a heating assembly, and a temperature regulating assembly. The furnace body has a heating furnace cavity, the furnace tube is disposed in the heating furnace cavity, the heating assembly is disposed in the heating furnace cavity and configured to heat the furnace tube, and the temperature regulating assembly is disposed in the heating furnace cavity and configured to regulate the heat distribution of the heating furnace cavity by means of airflow drive.

[0006] According to the tubular furnace of this application embodiment, during heating, the upper part of the furnace tube has a higher temperature and the lower part has a lower temperature, resulting in uneven heating of the furnace tube and uneven temperature field of carbon nanotubes, leading to a decrease in yield. Therefore, this application provides a temperature regulating component, which can regulate the heat distribution in the heating furnace cavity by airflow drive. That is, the temperature regulating component can drive the airflow in the heating furnace cavity, allowing the airflow to flow within the heating furnace cavity, thereby enabling the heat to be evenly distributed within the heating furnace cavity. In this way, the furnace tubes in the heating furnace cavity can be evenly heated, improving the uniformity of carbon nanotube growth and increasing the yield.

[0007] In some embodiments, the temperature regulating component includes a gas supply pipe, one end of which is connected to the heating furnace cavity, and the other end is used to connect to a gas source.

[0008] In the above embodiments, it can be ensured that the temperature inside the furnace cavity is uniform during the operation of the tubular furnace, thereby improving the production efficiency of the tubular furnace.

[0009] In some embodiments, the heating assembly is configured to generate heat when energized and has a plurality of air holes and an airflow channel connecting the plurality of air holes, the plurality of air holes connecting to the heating furnace cavity, and one end of the gas supply pipe connecting to the airflow channel.

[0010] In the above embodiments, high temperature and constant temperature can be ensured during the operation of the tubular furnace, thereby improving the production efficiency of the tubular furnace.

[0011] In some embodiments, the heating assembly includes a first heating element and a second heating element having the air blowing hole, and the heating furnace cavity includes an upper temperature zone and a lower temperature zone, wherein the first heating element is disposed in the upper temperature zone and the second heating element is disposed in the lower temperature zone.

[0012] In the above embodiments, high temperature and constant temperature can be ensured during the operation of the tubular furnace, thereby improving the production efficiency of the tubular furnace.

[0013] In some embodiments, the temperature regulating assembly further includes an exhaust pipe, one end of which is connected to the heating furnace cavity and the other end of which is connected to the external space of the furnace body.

[0014] In the above embodiments, the combination of the exhaust pipe and the gas supply pipe can achieve a uniform distribution of heat in the heating furnace cavity and maintain the gas pressure balance in the heating furnace cavity.

[0015] In some embodiments, the temperature regulating assembly further includes an airflow drive and a temperature detection element, the temperature detection element being disposed within the heating furnace cavity, the airflow drive being connected to the gas supply pipe and communicating with the temperature detection element.

[0016] In the above embodiments, the heat distribution in the heating furnace cavity can be adjusted according to the actual situation to improve the adjustment efficiency.

[0017] In some embodiments, the temperature sensing element includes a plurality of elements, with a portion of the plurality of temperature sensing elements disposed in the upper part of the heating furnace cavity and another portion disposed in the lower part of the heating furnace cavity.

[0018] In the above embodiments, the heat distribution in the heating furnace cavity can be adjusted according to the actual situation to improve the adjustment efficiency.

[0019] In some embodiments, the tubular furnace further includes a heat insulation component disposed on the inner surface of the heating furnace cavity.

[0020] In the above embodiments, heat loss of the tubular furnace can be reduced, and the risk of burns to technicians can be avoided.

[0021] In some embodiments, the heat insulation assembly includes a first heat insulation layer, a second heat insulation layer, and a third heat insulation layer, which are arranged sequentially in the direction from the edge of the heating furnace cavity to the center; wherein the first heat insulation layer includes a vacuum heat insulation plate, the second heat insulation layer includes a cotton board, and the third heat insulation layer includes refractory bricks and / or cotton blocks.

[0022] In the above embodiments, heat loss of the tubular furnace can be reduced, and the risk of burns to technicians can be avoided.

[0023] In some embodiments, the tubular furnace further includes a sealing assembly, wherein the end of the furnace tube extends out of the furnace body, the sealing assembly is disposed at the end of the furnace tube and configured to seal the gap between the furnace tube and the furnace body.

[0024] In the above embodiments, the heating furnace cavity can be sealed to prevent gas leakage and affect the normal operation of the tubular furnace.

[0025] In some embodiments, the sealing assembly includes a first seal, a second seal, and a mounting flange. The mounting flange is disposed at the end of the furnace tube. The first seal is disposed on the mounting flange and abuts against the furnace tube and the furnace body. The mounting flange has a mounting cavity, in which a heat insulation element and an airtight layer are disposed. The second seal is disposed on the mounting flange and is configured as a water-cooled rubber ring seal.

[0026] In the above embodiments, the sealing assembly has a multi-seal structure, achieving zero leakage in the tubular furnace and improving the operational stability of the tubular furnace.

[0027] In some embodiments, the furnace tubes comprise a plurality of tubes arranged side by side.

[0028] In the above embodiments, the tubular furnace has multiple furnace tubes arranged side by side along the height direction. Multiple furnace tubes can increase the output of the tubular furnace and reduce production costs. Moreover, multiple furnace tubes are concentrated in the same furnace body and perform heating and cooling operations at the same time, which is beneficial to the simplification and management of the entire production system.

[0029] Other features and advantages disclosed in this application will be set forth in the following description, or some features and advantages may be inferred from the description or determined without doubt, or may be learned by practicing the above-described technology disclosed in this application.

[0030] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0031] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings: Figure 1 This is a schematic diagram of a tubular furnace in some embodiments of this application.

[0032] Figure 2 This is a side view of a tubular furnace in some embodiments of this application.

[0033] Figure 3 This is a top view of a tubular furnace in some embodiments of this application.

[0034] Figure 4 This is a schematic diagram of the heating element in some embodiments of this application.

[0035] Figure 5 This is a side sectional view of a tubular furnace in some embodiments of this application.

[0036] Figure 6 yes Figure 5 A partial enlarged view of the embodiment.

[0037] The reference numerals in the detailed embodiments are as follows: Tubular furnace 100, furnace body 10, heating furnace cavity 11, upper heating zone 111, lower heating zone 112, furnace tube 20, heating assembly 30, heating element 31, air blowing hole 311, air flow channel 312, temperature regulating assembly 40, gas supply pipe 41, first gas pipe 411, second gas pipe 412, third gas pipe 413, exhaust pipe 42, heat insulation assembly 50, sealing assembly 60, first seal 61, second seal 62, mounting flange 63, mounting cavity 631, first gas collection box 70, second gas collection box 80. Detailed Implementation

[0038] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0039] A tube furnace is a horizontal or vertical heating device with multiple temperature zones and precise temperature control. Its core is a high-temperature resistant quartz or corundum furnace tube, surrounded by resistance wire or silicon molybdenum rod heating elements. It is equipped with water-cooled rubber ring sealed end caps and flanges. It can grow single-walled or multi-walled carbon nanotubes with uniform diameter and length on the catalyst surface by chemical vapor deposition under inert or reducing atmosphere. At the same time, the process conditions can be precisely controlled by mass flow meter, vacuum pump and exhaust gas treatment system.

[0040] According to relevant technologies, uneven heat distribution within the furnace body leads to uneven heating of the furnace tubes, affecting the production efficiency of the tubular furnace.

[0041] Therefore, this application provides a tube furnace 100 that can regulate the heat distribution of the heating furnace cavity 11, so that the temperature inside the heating furnace cavity 11 is relatively uniformly distributed, thereby improving the production efficiency of the tube furnace 100.

[0042] like Figures 1 to 6 According to the embodiments of this application, the tubular furnace 100 includes a furnace body 10, a furnace tube 20, a heating component 30, and a temperature regulating component 40.

[0043] The furnace body 10 has a heating furnace cavity 11, a furnace tube 20 is disposed in the heating furnace cavity 11, a heating component 30 is disposed in the heating furnace cavity 11 and is configured to heat the furnace tube 20, and a temperature regulating component 40 is disposed in the heating furnace cavity 11 and is configured to regulate the heat distribution of the heating furnace cavity 11 by means of airflow drive; in this way, the high temperature constant temperature during the operation of the tubular furnace 100 can be ensured, and the production efficiency of the tubular furnace 100 can be improved.

[0044] Specifically, the tube furnace 100 of this application is mainly used for the production of carbon nanotubes. The tube furnace 100 adopts the chemical vapor deposition method. Its working principle is as follows: First, the catalyst is placed in the furnace tube 20 and an inert atmosphere is introduced. The temperature is raised under the heating of the heating component 30, and then hydrogen is introduced. Subsequently, the carbon source gas is introduced, so that carbon atoms are cracked on the high-temperature catalytic surface and self-assembled into carbon nanotubes. After the reaction is completed, the carbon source is cut off and the inert gas is used for protective cooling to obtain carbon nanotubes.

[0045] During the aforementioned process, when the heating component 30 heats the furnace tube 20, the upper part has a higher temperature and the lower part has a lower temperature, resulting in uneven heating of the furnace tube 20, uneven temperature field of carbon nanotubes, and decreased yield. Therefore, this application provides a temperature regulating component 40, which can regulate the heat distribution in the heating furnace cavity 11 by airflow drive. That is, the temperature regulating component 40 can drive the airflow in the heating furnace cavity 11, so that the airflow can flow in the heating furnace cavity 11, thereby making the heat evenly distributed in the heating furnace cavity 11. In this way, the furnace tube 20 in the heating furnace cavity 11 can be heated evenly, improving the uniformity of carbon nanotube growth and increasing the yield.

[0046] In summary, according to the embodiment of the present application, the temperature regulating component 40 drives the airflow in the heating furnace cavity 11 to regulate the heat distribution in the heating furnace cavity 11, so that the temperature in the heating furnace cavity 11 is relatively uniformly distributed, which facilitates uniform heating of the furnace tube 20 during reaction and improves the production efficiency of the tube furnace 100.

[0047] Of course, depending on the actual situation, the temperature regulating component of this application has a variety of regulating methods to regulate the heat distribution in the heating furnace cavity; in the first example, the temperature regulating component includes a gas supply pipe 41, which can supply gas into the heating furnace cavity 11, and regulate the heat distribution in the heating furnace cavity 11 by means of gas flow; in the second example, the temperature regulating component can achieve the regulation of heat distribution by not supplying additional gas, but only disturbing the airflow in the heating furnace cavity 11.

[0048] like Figure 1 In some embodiments of this application, the temperature regulating component 40 includes a gas supply pipe 41, one end of which is connected to the heating furnace cavity 11 and the other end is used to connect to a gas source. It is configured to regulate the heat distribution of the heating furnace cavity 11 by means of airflow drive. In this way, the temperature inside the furnace cavity can be made uniform during the operation of the tubular furnace 100, thereby improving the production efficiency of the tubular furnace 100.

[0049] For example, the furnace body 10 is provided with a gas supply pipe 41. One end of the gas supply pipe 41 can be connected to the heating furnace chamber 11, and the other end can be connected to a gas source. The gas source mainly uses the same gas that is introduced into the furnace tube 20 for reaction, so as to avoid affecting the reaction of the furnace tube 20. In this way, the gas is introduced into the heating furnace chamber 11 through the gas supply pipe 41, thereby disturbing the gas distribution in the heating furnace chamber 11, making the gas flow distribution in the heating furnace chamber 11 uniform, so that the heat carried by the gas is also uniformly distributed in the heating furnace chamber 11, improving the heating uniformity of the furnace tube 20, thereby improving the growth uniformity of carbon nanotubes and the yield.

[0050] like Figure 4 In some embodiments of this application, the heating component 30 is configured to generate heat when energized and has multiple air holes 311 and an airflow channel 312 connecting the multiple air holes 311. The multiple air holes 311 are connected to the heating furnace chamber 11, and one end of the gas supply pipe 41 is connected to the airflow channel 312. In this way, the high temperature and constant temperature of the tubular furnace 100 can be ensured during operation, thereby improving the production efficiency of the tubular furnace 100.

[0051] For example, the heating assembly 30 includes multiple heating elements 31, which are silicon carbide rods. The silicon carbide rods generate heat when energized to heat the furnace tube 20. Each silicon carbide rod has multiple air holes 311 and an internal airflow channel 312 communicating with the air holes 311. One end of a gas supply pipe 41 is connected to the airflow channel 312 of the silicon carbide rod, and the other end is connected to a gas source. The gas source outputs gas, which flows sequentially through the gas supply pipe 41 and the airflow channel 312, and is finally blown out through the air holes 311. This disturbs the gas distribution within the heating furnace cavity 11, making the gas flow distribution within the heating furnace cavity 11 more uniform. This ensures that the heat carried by the gas is also evenly distributed within the heating furnace cavity 11, improving the heating uniformity of the furnace tube 20, thereby improving the growth uniformity and yield of carbon nanotubes.

[0052] Furthermore, in some specific examples, the gas supply pipe 41 includes a first gas pipe 411, a second gas pipe 412, and a third gas pipe 413. The furnace body 10 is also provided with a first gas collection box 70 and a second gas collection box 80. The first gas collection box 70 and the second gas collection box 80 are respectively located on opposite sides of the furnace body 10. One end of the first gas pipe 411 is connected to the second gas pipe 412 and the third gas pipe 413, and the other end of the first gas pipe 411 is used to connect to the gas source. The second gas pipe 412 is connected to the first gas collection box 70, and the third gas pipe 413 is connected to the second gas collection box 80. One end of the silicon carbide rod is connected to the first gas collection box 70, and the other end is connected to the second gas collection box 80. In this way, the uniformity of the gas output from the silicon carbide rod can be ensured when gas is supplied, and the gas can be made to flow evenly in the heating furnace cavity 11, which is conducive to the uniform heating of the furnace tube 20 during the reaction.

[0053] The gas delivery process is as follows: the gas source outputs gas, which is then divided into two parts after passing through the first gas pipe 411. One part flows sequentially through the second gas pipe 412, the first gas collection box 70, the silicon carbide rod, and the air blowing hole 311, while the other part flows sequentially through the third gas pipe 413, the second gas collection box 80, the silicon carbide rod, and the air blowing hole 311.

[0054] It should be explained that during the aforementioned gas supply process, the first gas collecting box 70 and the second gas collecting box 80 are respectively filled with inert gas or reducing gas, which can inhibit the oxidation, corrosion, and aging of the silicon carbide rod, thus protecting it. Furthermore, the gas collecting boxes can retain these gases, creating localized high pressure within them to achieve a sealing effect, thereby improving the sealing performance of the tube furnace 100. Of course, depending on the actual situation, the gas can also be directly supplied to the silicon carbide rod via the temperature regulating component 40.

[0055] In some embodiments of this application, the heating assembly 30 includes a first heating element and a second heating element with air blowing holes 311, and the heating furnace cavity 11 includes an upper temperature zone 111 and a lower temperature zone 112. The first heating element is disposed in the upper temperature zone 111, and the second heating element is disposed in the lower temperature zone 112. In this way, the high temperature and constant temperature of the tube furnace 100 can be ensured during operation, thereby improving the production efficiency of the tube furnace 100.

[0056] It is understood that the heating furnace cavity 11 includes an upper heating zone 111 and a lower heating zone 112 located below the upper heating zone 111. Since the gas will rise when heated, the temperature of the upper heating zone 111 in the heating furnace cavity 11 is higher than that of the lower heating zone 112. In order to make the heat distribution in the heating furnace cavity 11 uniform, the air blowing hole 311 can be opened on the first heating element located in the upper heating zone 111, while the second heating element does not need to have an air blowing hole 311. In this way, while achieving uniform heat distribution, the equipment processing cost can be reduced, and the production efficiency of the tube furnace 100 can be improved.

[0057] Furthermore, the air blowing hole 311 can be opened on the upper side of the first heating element. In this way, the gas can be blown through the air blowing hole 311 to the gas gathered in the upper part of the heating furnace cavity 11, so that the gas can flow along the inner wall of the heating furnace cavity 11 to the lower part of the heating furnace cavity 11, so that the heat can be evenly distributed in the heating furnace cavity 11.

[0058] like Figure 1 In some embodiments of this application, the temperature regulating component 40 further includes an exhaust pipe 42, one end of which is connected to the heating furnace cavity 11 and the other end is connected to the external space of the furnace body 10. Thus, the uniform distribution of heat in the heating furnace cavity 11 can be achieved through the cooperation of the exhaust pipe 42 and the gas supply pipe 41, and the gas pressure balance of the heating furnace cavity 11 can be maintained.

[0059] Understandably, the gas supply pipe 41 is used to connect to a gas source, thereby introducing gas into the heating furnace chamber 11. This causes an increase in the gas pressure inside the heating furnace chamber 11, and the increased gas pressure can affect the sealing performance of the tubular furnace 100, leading to gas leakage and pollution. Therefore, an exhaust pipe 42 can be provided. The exhaust pipe 42 connects to the heating furnace chamber 11 and to an external space. For example, the exhaust pipe 42 can be connected to a gas storage container, or it can be connected to a gas source, thereby returning the gas to the gas source. In some embodiments of this application, the temperature regulation component 40 further includes an airflow drive and a temperature detection component. The temperature detection component is disposed in the heating furnace cavity 11, and the airflow drive is connected to the gas supply pipe 41 and is communicatively connected to the temperature detection component. In this way, the heat distribution in the heating furnace cavity 11 can be adjusted according to the actual situation, thereby improving the regulation efficiency.

[0060] Specifically, the airflow drive is connected to the gas supply pipe 41 and can drive the airflow within the gas supply pipe 41. The temperature detection device is installed inside the heating furnace cavity 11 and is communicatively connected to the airflow drive. When the tubular furnace 100 is working, the temperature detection device can detect the temperature inside the heating furnace cavity 11. If the temperature deviates from the preset heating temperature, the temperature detection device can transmit a signal to the airflow drive to control the start of the airflow drive or increase its operating power, so as to regulate the heat distribution inside the heating furnace cavity 11 by airflow drive, thereby effectively improving the regulation efficiency.

[0061] In some specific examples, the airflow drive can be a fan, etc.

[0062] Of course, the airflow drive in this embodiment is only a preferred option and is not necessary; for example, after the aforementioned gas pipe 41 is connected to the gas source, there is no need to set up an airflow drive. With the help of the gas pressure brought by the gas source, the gas can easily flow into the heating furnace cavity 11 to achieve heat distribution control.

[0063] In some embodiments of this application, multiple temperature sensors are included, with some located in the upper part of the heating furnace cavity 11 and others in the lower part. This allows for the control of heat distribution within the heating furnace cavity 11 based on actual conditions, thereby improving regulation efficiency.

[0064] For example, the temperature detection element includes a first detection element and a second detection element. The upper part of the heating furnace cavity 11 is the aforementioned upper temperature zone 111, and the lower part of the heating furnace cavity 11 is the aforementioned lower temperature zone 112. The first detection element can be disposed in the upper temperature zone 111, and the second detection element can be disposed in the lower temperature zone 112. The first detection element and the second detection element are respectively communicatively connected to the airflow drive element. By comparing the temperature signals of the first detection element and the second detection element, it can be understood that if a temperature deviation is detected between the lower temperature zone 112 and the upper temperature zone 111, the airflow drive element can be activated or its efficiency improved to regulate the heat distribution in the heating furnace cavity 11 by means of airflow drive, thereby effectively improving the regulation efficiency.

[0065] like Figure 5 In some embodiments of this application, the tubular furnace 100 further includes a heat insulation component 50, which is disposed on the inner surface of the heating furnace cavity 11 to isolate the heat of the heating furnace cavity 11 from the outside; in this way, the heat loss of the tubular furnace 100 can be reduced and the risk of burns to technicians can be avoided.

[0066] like Figure 6 In some embodiments of this application, the heat insulation component 50 includes a first heat insulation layer, a second heat insulation layer, and a third heat insulation layer, which are arranged sequentially from the edge of the heating furnace cavity 11 to the center. The first heat insulation layer includes a vacuum insulation plate, the second heat insulation layer includes a cotton board, and the third heat insulation layer includes refractory bricks and / or cotton blocks. This reduces heat loss in the tubular furnace 100 and avoids burn hazards for technicians.

[0067] For example, the heat insulation component 50 includes a first heat insulation layer, a second heat insulation layer and a third heat insulation layer. The first heat insulation layer is disposed on the inner surface of the furnace body 10, the second heat insulation layer is disposed on the inner surface of the first heat insulation layer, and the third heat insulation layer is disposed on the inner surface of the second heat insulation layer. In this way, three layers of heat insulation can be formed, thereby isolating the heating furnace cavity 11 from the outside, reducing heat loss and avoiding the risk of burns.

[0068] The heating furnace cavity 11 has an inner top surface, an inner side surface, and an inner bottom surface. Each of the inner top surface, inner side surface, and inner bottom surface is equipped with a heat insulation component 50. The heat insulation component 50 on the inner side surface is a three-layer heat insulation consisting of a vacuum heat insulation board, a cotton board, and refractory bricks. The splicing method of the refractory bricks is similar to that of building bricklaying. The refractory bricks are connected by a mixture of refractory mortar. The refractory bricks are directly exposed inside the heating furnace cavity 11, which insulates most of the heat. The cotton board serves as the second layer of heat insulation, which can insulate most of the remaining heat. Finally, the surface temperature of the tubular furnace 100 is about 70°C. Finally, the vacuum heat insulation board insulates the surface temperature, causing the surface temperature of the tubular furnace 100 to drop to 30°C. At this point, a person can directly touch the surface, avoiding burns caused by high-temperature contact with the equipment surface.

[0069] The heat insulation component 50 on the inner bottom surface is made of refractory bricks of different specifications, and multiple refractory bricks are connected by mixed refractory mortar, thereby isolating the inside and outside of the heating furnace cavity 11. Since the inner bottom surface is in contact with the ground and is difficult to be in direct contact with people, refractory bricks can be used directly, which reduces costs and improves installation efficiency.

[0070] In addition, the heat insulation component 50 on the inner top surface is a three-layer heat insulation composed of a vacuum heat insulation board, a cotton board, and a cotton block. Its heat insulation principle is the same as that of the heat insulation component 50 on the inner side surface, which will not be repeated here. It is understandable that, since the cotton block is relatively light, it is set on the inner top surface to prevent it from falling and affecting the normal operation of the tubular furnace 100.

[0071] like Figure 5 and Figure 6 In some embodiments of this application, the tubular furnace 100 further includes a sealing component 60. The end of the furnace tube 20 extends out of the furnace body 10. The sealing component 60 is disposed at the end of the furnace tube 20 and configured to seal the gap between the furnace tube 20 and the furnace body 10. In this way, the heating furnace cavity 11 can be sealed to prevent gas leakage and affect the normal operation of the tubular furnace 100.

[0072] Among them, the sealing component 60 has a multi-seal structure, which realizes zero leakage of the tubular furnace 100 and improves the operational stability of the tubular furnace 100.

[0073] like Figure 6In some embodiments of this application, the sealing assembly 60 includes a first sealing element 61 and a mounting flange 63. The mounting flange 63 is located at the end of the furnace tube 20, and the first sealing element 61 is located on the mounting flange 63 and abuts against the furnace tube 20 and the furnace body 10. Specifically, the end of the furnace tube 20 can be installed on the mounting flange 63, and the mounting flange 63 can be connected to the furnace body 10, thereby improving the connection strength between the furnace tube 20 and the furnace body 10. The first sealing element 61 is provided on the mounting flange 63, which can seal the gap between the furnace tube 20 and the furnace body 10 to prevent gas leakage. In some examples, the first sealing element 61 can be made of high-temperature rubber. It is understood that the end temperature of the furnace tube 20 is about 400°C, requiring a high-temperature seal. Therefore, a high-temperature rubber seal can be used to isolate most of the gas.

[0074] Furthermore, the first sealing element 61 has a through hole, through which the furnace tube 20 can be inserted and press-fitted with the inner circumferential wall of the through hole to improve the sealing performance of the tubular furnace 100.

[0075] This is the first sealing structure.

[0076] The mounting flange 63 has a mounting cavity 631, which contains an insulation component and an airtight layer. The insulation component prevents heat loss from the heating furnace cavity 11, while an inert gas, such as nitrogen, is introduced into the mounting cavity 631. The nitrogen creates a localized high pressure within the mounting cavity 631, thereby constructing an airtight layer to further isolate the atmosphere inside the furnace body 10. It is understood that the insulation component can be made of insulation materials such as insulation cotton.

[0077] This is the second sealing structure.

[0078] The sealing assembly 60 also includes a second seal 62, which is located on the mounting flange 63 and is a water-cooled rubber ring seal. This further seals the tube furnace 100 and cools it down by water, keeping the second seal 62 within a suitable temperature range and extending its service life.

[0079] The second sealing element 62 includes a rubber sealing ring and a water-cooling structure. The rubber sealing ring is fitted between the furnace tube 20 and the mounting flange 63 to seal the gap between the furnace tube 20 and the mounting flange 63 to prevent atmosphere leakage, and the water-cooling structure is used to achieve temperature control.

[0080] This is the third sealing structure.

[0081] like Figure 1 and Figure 2In some embodiments of this application, the furnace tubes 20 include a plurality of tubes arranged side by side; specifically, in the tube furnace 100, there are a plurality of furnace tubes 20 arranged side by side along the height direction. The plurality of furnace tubes 20 can increase the output of the tube furnace 100 and reduce the production cost. Moreover, the plurality of furnace tubes 20 are concentrated in the same furnace body 10 and perform heating and cooling operations in the same way, which is beneficial to the simplification and management of the entire production system.

[0082] In this application, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or a point connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0083] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0084] In all embodiments of this application, "large" and "small" are relative terms, "more" and "less" are relative terms, and "upper" and "lower" are relative terms. The embodiments of this application will not elaborate further on the expression of such relative terms.

[0085] It should be understood that the phrases "in this embodiment," "in this application embodiment," or "as an optional implementation" throughout the specification mean that a specific feature, structure, or characteristic related to an embodiment is included in at least one embodiment of this application. Therefore, the phrases "in this embodiment," "in this application embodiment," or "as an optional implementation" appearing throughout the specification do not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Those skilled in the art should also understand that the embodiments described in the specification are all optional embodiments, and the actions and modules involved are not necessarily essential to this application.

[0086] In the various embodiments of this application, it should be understood that the sequence number of each process does not necessarily imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0087] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of protection of the claims.

Claims

1. A tubular furnace, characterized in that, include: Furnace body (10), the furnace body (10) having a heating furnace cavity (11); Furnace tube (20), wherein the furnace tube (20) is disposed in the heating furnace cavity (11); A heating assembly (30) is disposed in the heating furnace cavity (11) and configured to heat the furnace tube (20); Temperature regulation component (40) is disposed in the heating furnace cavity (11) and configured to regulate the heat distribution of the heating furnace cavity (11) by means of airflow drive.

2. The tubular furnace according to claim 1, characterized in that, The temperature regulating component (40) includes a gas supply pipe (41), one end of which is connected to the heating furnace cavity (11), and the other end is used to connect to a gas source.

3. The tubular furnace according to claim 2, characterized in that, The heating component (30) is configured to generate heat when energized and has multiple air holes (311) and an airflow channel (312) connecting the multiple air holes (311). The multiple air holes (311) are connected to the heating furnace cavity (11), and one end of the gas supply pipe (41) is connected to the airflow channel (312).

4. The tubular furnace according to claim 3, characterized in that, The heating assembly (30) includes a first heating element and a second heating element having the air blowing hole (311). The heating furnace cavity (11) includes an upper temperature zone (111) and a lower temperature zone (112). The first heating element is located in the upper temperature zone (111), and the second heating element is located in the lower temperature zone (112).

5. The tubular furnace according to claim 2, characterized in that, The temperature regulating component (40) also includes an exhaust pipe (42), one end of which is connected to the heating furnace cavity (11) and the other end is connected to the external space of the furnace body (10).

6. The tubular furnace according to any one of claims 2-5, characterized in that, The temperature regulation component (40) further includes an airflow drive and a temperature detection component. The temperature detection component is located inside the heating furnace cavity (11). The airflow drive is connected to the gas supply pipe (41) and is communicatively connected to the temperature detection component.

7. The tubular furnace according to claim 6, characterized in that, The temperature detection element includes multiple elements, with a portion of the multiple temperature detection elements located in the upper part of the heating furnace cavity (11) and another portion located in the lower part of the heating furnace cavity (11).

8. The tubular furnace according to any one of claims 1-5, characterized in that, It also includes a heat insulation component (50) disposed on the inner surface of the heating furnace cavity (11).

9. The tubular furnace according to claim 8, characterized in that, The heat insulation assembly (50) includes a first heat insulation layer, a second heat insulation layer and a third heat insulation layer, which are arranged sequentially in the direction from the edge of the heating furnace cavity (11) to the center. The first insulation layer includes a vacuum insulation board, the second insulation layer includes a cotton board, and the third insulation layer includes refractory bricks and / or cotton blocks.

10. The tubular furnace according to any one of claims 1-5, characterized in that, It also includes a sealing assembly (60), the end of the furnace tube (20) extending out of the furnace body (10), the sealing assembly (60) being disposed at the end of the furnace tube (20) and configured to seal the gap between the furnace tube (20) and the furnace body (10).

11. The tubular furnace according to claim 10, characterized in that, The sealing assembly (60) includes a first sealing element (61), a second sealing element (62), and a mounting flange (63). The mounting flange (63) is located at the end of the furnace tube (20). The first sealing element (61) is located on the mounting flange (63) and is used to fill the gap between the furnace tube (20) and the furnace body (10). The mounting flange (63) has a mounting cavity (631). The mounting cavity (631) is provided with a heat insulation element and an airtight layer. The second sealing element (62) is located on the mounting flange (63) and is configured as a water-cooled rubber ring seal.

12. The tubular furnace according to any one of claims 1-5, characterized in that, The furnace tubes (20) comprise multiple tubes arranged side by side.

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