A vertical evaporation source for evaporation deposition

Abstract

The utility model relates to vacuum evaporation technology field discloses a vertical evaporation source of evaporating, including frame, the top of frame is equipped with feeding mechanism, and the side or both sides of feeding mechanism detachably installs evaporation source body, evaporation source body includes water cooling shell, and the upper and lower distribution of water cooling shell far away from the one end of feeding mechanism is equipped with a plurality of material bins, and the top of material bin detachably installs bin cover, and the lower end of material bin is connected with the material conveying pipe through the ball valve, and the lower end of material conveying pipe is connected with the crucible in water cooling shell, and the opening of lower end of material conveying pipe is equipped with the door subassembly, and the front and back two side walls of crucible evenly distribute and are equipped with the heating wire one that links to each other, and the side of crucible in water cooling shell is close to feeding mechanism is equipped with the heating cavity that communicates with the crucible, and the one end far away from crucible of heating cavity is embedded and is equipped with a plurality of sprayers, through side -mounting evaporation source body, optimizing steam flow guide structure, setting sealing door subassembly and temperature control heat preservation device, both solve the problem of large wide substrate deformation, improve the coating quality, improve material utilization, reduce the cost.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation technology, and in particular to a vertical evaporation source for evaporation. Background Technology

[0002] Vacuum evaporation, as one of the core processes in thin film preparation, is widely used in display panels, optical devices, semiconductors, and other fields. This process involves heating and vaporizing evaporating materials in a vacuum environment, causing gaseous particles to deposit on the substrate surface to form a uniform thin film. The evaporation source, as a key device for material vaporization and particle transport, directly affects evaporation efficiency, film quality, and material utilization. Currently, conventional linear evaporation equipment in the industry generally adopts a layout where the evaporation source is located below the glass substrate, achieving deposition through the upward movement of vapor. This approach is technically mature and highly stable when processing narrow, wide glass substrates, meeting the production needs of early small-to-medium-sized products. However, with the market's increasing demand for larger display panels and other products, the application of large-format wide glass substrates has become an industry trend, highlighting the growing need for structural adaptability and performance optimization in evaporation equipment.

[0003] However, the existing "bottom-mounted evaporation source" layout has significant technical limitations when adapting to large-format glass substrates: on the one hand, the increased weight of the large-format glass substrate makes it prone to sagging and deformation under the long-term effects of gravity during the evaporation process, resulting in uneven relative distance between the substrate surface and the evaporation source, which in turn causes problems such as poor film thickness consistency and localized coating defects; on the other hand, the vapor diffusion path of the bottom-mounted evaporation source is dispersed, and a large number of gaseous particles are deposited on the surface of the equipment chamber or other components without reaching the substrate, resulting in extremely low utilization of the evaporation material, which not only causes a large waste of raw materials, but also significantly increases production costs. Utility Model Content

[0004] Given that the conventional layout of "evaporation source located below glass substrate" cannot solve the coating quality problem caused by the sagging and deformation of large-format glass substrates due to gravity during evaporation, and also suffers from low material utilization and high production costs, this utility model is proposed.

[0005] To solve the above technical problems, the present invention provides the following technical solution: a vertical vapor deposition evaporation source, including a base, a feeding mechanism on the top of the base, and an evaporation source body detachably installed on one or both sides of the feeding mechanism;

[0006] The evaporation source body includes a water-cooled shell. Several material bins are arranged vertically at the end of the water-cooled shell away from the feeding mechanism, and the top of the material bins is detachably covered. The lower end of the material bins is connected to a conveying pipe through a ball valve. The lower end of the conveying pipe is connected to a crucible inside the water-cooled shell. A door assembly is provided at the opening of the lower end of the conveying pipe. A heating wire is evenly distributed and connected on the front and rear side walls of the crucible. A heating chamber communicating with the crucible is provided on the side of the crucible inside the water-cooled shell near the feeding mechanism. Several nozzles are embedded and installed at the end of the heating chamber away from the crucible.

[0007] As a preferred embodiment, a heating wire is wound around the outside of the heating chamber, a guide plate and a nozzle plate are provided inside the heating chamber, and the guide plate is located on the side close to the crucible. Several through grooves are opened on the side wall of the guide plate, and a discharge port communicating with the crucible is opened on one side of the heating chamber.

[0008] As a preferred embodiment, the door assembly includes a sealing plate located inside the crucible, with one end of the sealing plate hinged to the top wall of the crucible. The top of the sealing plate is attached to the lower end of the feed pipe. A guide frame is provided on the top of the sealing plate inside the feed pipe. A push rod is provided on one side of the guide frame, and one end of the push rod passes through the feed pipe and is connected to a handle outside the water-cooled shell. A connecting post is connected to the inner side of the push rod near the guide frame, and the connecting post is located inside the guide frame.

[0009] As a preferred embodiment, the water-cooled shell is provided with an insulation plate at one end near the feeding mechanism, one end of the nozzle penetrates through the insulation plate, and a plurality of nozzles are arranged in a linear equidistant array, with the holes on the nozzle plate arranged in a linear distribution.

[0010] As a preferred embodiment, the outer side of the silo is symmetrically provided with support frames, and the two ends of the support frames are fixedly connected to the silo and the water-cooled shell respectively. The side wall of the water-cooled shell is provided with a water channel for cooling water to circulate.

[0011] As a preferred embodiment, a sealing gasket is provided between the sealing plate and the conveying pipe, the guide frame is rectangular, the lower end of the push rod is U-shaped, and the connecting column is located inside the U-shaped structure at the lower end of the push rod.

[0012] Compared with the prior art, the present invention has at least the following beneficial effects:

[0013] 1. This utility model detachably mounts the evaporation source body to the side of the feeding mechanism, abandoning the traditional "bottom-mounted" layout. The large-format glass substrate does not need to bear the downward pressure caused by its own weight, fundamentally avoiding the problem of uneven relative distance between the substrate and the evaporation source caused by substrate deformation. At the same time, the through grooves of the guide plate in the heating chamber guide the orderly flow of gaseous particles. Combined with the linearly distributed spray plate and the equally spaced array of nozzles, the vapor particles are uniformly deposited on the substrate surface, effectively improving the consistency of film thickness and reducing local coating defects. Furthermore, the evaporation source body can be installed at corresponding positions on both sides of the feeding mechanism as needed, so as to achieve simultaneous spraying of materials on both sides of the substrate, or to place two substrates at the same time and process them simultaneously, thereby improving processing efficiency.

[0014] 2. This utility model features a door assembly with a sealing gasket at the lower end of the feed pipe. The sealing plate fits snugly against the feed pipe to prevent gaseous particles in the crucible from diffusing back into the hopper and causing losses. The heating wire on the outside of the heating chamber can reheat the gaseous particles, preventing them from condensing and depositing on the chamber wall in advance. In addition, the guide plate and nozzle plate guide the steam flow in a directional manner, reducing ineffective steam diffusion, significantly reducing raw material waste, and thus reducing the cost of vapor deposition. At the same time, the combination structure of the evaporation source body and the feeding mechanism is compact, shortening the distance between the evaporation source body and the substrate, making the sprayed material more concentrated and improving the material utilization rate.

[0015] 3. The independent water circuit inside the water-cooled shell of this utility model can effectively control the working temperature and avoid damage to components due to high temperature; the support frame fixes the hopper and the insulation plate insulates the heating chamber, further improving the stability and reliability of the equipment operation. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the structure of the evaporation source body of this utility model;

[0018] Figure 3 This is a partial cross-sectional structural diagram of the evaporation source body of this utility model;

[0019] Figure 4 For the present utility model Figure 3 A schematic diagram of a partial cross-sectional structure;

[0020] Figure 5 This is a partial cross-sectional structural diagram of the water-cooled shell of this utility model;

[0021] Figure 6 For the present utility model Figure 3 Enlarged structural diagram at point A;

[0022] Figure 7For the present utility model Figure 4 Enlarged structural diagram at point B;

[0023] Figure 8 For the present utility model Figure 4 A magnified structural diagram at point C.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1. Base; 2. Feeding mechanism; 3. Evaporation source body; 4. Water-cooled shell; 5. Insulation board; 6. Support frame; 7. Hopper; 8. Ball valve; 9. Conveying pipe; 10. Crucible; 11. Heating chamber; 12. Heating wire one; 13. Heating wire two; 14. Discharge port; 15. Guide plate; 16. Spray plate; 17. Through groove; 18. Nozzle; 19. Sealing plate; 20. Guide frame; 21. Push rod; 22. Connecting column; 23. Hopper cover. Detailed Implementation

[0026] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0027] Reference Figure 1 - Figure 8 As shown, a vertical vapor deposition evaporation source is provided, including a base 1. A feeding mechanism 2 is provided on the top of the base 1. An evaporation source body 3 is detachably installed on one or both sides of the feeding mechanism 2. The evaporation source body 3 includes a water-cooled shell 4. Several material bins 7 are distributed vertically at the end of the water-cooled shell 4 away from the feeding mechanism 2, and bin covers 23 are detachably installed on the top of the material bins 7. The lower end of the material bins 7 is connected to a conveying pipe 9 through a ball valve 8. The lower end of the conveying pipe 9 is connected to a crucible 10 inside the water-cooled shell 4. A door assembly is provided at the opening of the lower end of the conveying pipe 9. Heating wires 12 are evenly distributed on the front and rear side walls of the crucible 10. In this example, the heating wires 12 are distributed in a meandering curve to increase contact. The area is increased to improve the heating efficiency of the crucible 10; a heating chamber 11 connected to the crucible 10 is provided on the side of the crucible 10 near the feeding mechanism 2 inside the water-cooled shell 4, and several nozzles 18 are embedded and installed at the end of the heating chamber 11 away from the crucible 10; the traditional "bottom-mounted" layout is abandoned to avoid uneven coating caused by the deformation of the large-area glass substrate due to gravity; the material bin 7 and the removable bin cover 23 facilitate material replenishment, the ball valve 8 can control the loading and unloading, and facilitates the subsequent vacuum treatment of the material bin 7 and the crucible 10, avoiding the impact of the feeding on the vacuum state inside the crucible 10; the heating wire 12 provides a stable heat source for the vaporization of the material inside the crucible 10, and the nozzles 18 realize the directional spraying of steam, improving the controllability of the vapor deposition.

[0028] In this example, a second heating wire 13 is wound around the outside of the heating chamber 11. A guide plate 15 and a nozzle plate 16 are provided inside the heating chamber 11. The guide plate 15 is located near the crucible 10. Several through slots 17 are opened on the side wall of the guide plate 15. A discharge port 14 communicating with the crucible 10 is opened on one side of the heating chamber 11. The second heating wire 13 reheats the gaseous particles in the heating chamber 11 to prevent premature condensation and waste. The through slots 17 of the guide plate 15 and the nozzle plate 16 cooperate to guide the orderly flow of steam, avoid diffusion loss, improve material utilization, and at the same time ensure steam uniformity to optimize coating quality.

[0029] In this example, the door assembly includes a sealing plate 19, which is located inside the crucible 10. One end of the sealing plate 19 is hinged to the top wall of the crucible 10, and the top of the sealing plate 19 is attached to the lower end of the feed pipe 9. A guide frame 20 is provided on the top of the sealing plate 19 inside the feed pipe 9. A push rod 21 is provided on one side of the guide frame 20, and one end of the push rod 21 passes through the feed pipe 9 and is connected to a handle outside the water-cooled shell 4. A connecting post 22 is connected to the inner side of the push rod 21 near the guide frame 20, and the connecting post 22 is located inside the guide frame 20. The sealing plate 19 and the feed pipe 9 are attached to prevent gaseous particles inside the crucible 10 from diffusing back to the hopper 7, reducing material loss. The opening and closing of the sealing plate 19 can be flexibly controlled by the push rod 21, the connecting post 22 and the guide frame 20, which is convenient to operate and has good sealing performance, further reducing waste.

[0030] In this example, the water-cooled shell 4 is provided with an insulation plate 5 near the feeding mechanism 2, and one end of the nozzle 18 passes through the insulation plate 5. Several nozzles 18 are arranged in a linear equidistant array, and the holes on the nozzle plate 16 are arranged in a linear distribution. The insulation plate 5 reduces heat loss in the heating chamber 11, reduces energy consumption, and maintains temperature stability. The linear distribution design of the nozzles 18 and the nozzle plate 16 ensures that the steam uniformly covers the substrate, solves the problem of inconsistent coating thickness in the traditional layout, and improves the product qualification rate.

[0031] In this example, a support frame 6 is symmetrically provided on the outside of the hopper 7, and the two ends of the support frame 6 are fixedly connected to the hopper 7 and the water-cooled shell 4 respectively. The water-cooled shell 4 has a water channel for cooling water to circulate inside its side wall. The support frame 6 enhances the installation stability of the hopper 7 and avoids shaking during equipment operation, which affects the material conveying accuracy. The water channel of the water-cooled shell 4 can effectively remove excess heat from the equipment, prevent components from being damaged due to high temperature, extend the service life of the equipment, and ensure operational reliability.

[0032] In this example, a sealing gasket is provided between the sealing plate 19 and the conveying pipe 9, the guide frame 20 is rectangular, the lower end of the push rod 21 is U-shaped, and the connecting post 22 is located inside the U-shaped structure at the lower end of the push rod 21. The sealing gasket further improves the sealing performance between the sealing plate 19 and the conveying pipe 9, completely blocking the reverse diffusion of gaseous particles. The rectangular guide frame 20 and the U-shaped push rod 21 work together to make the opening and closing action of the sealing plate 19 more stable and precise, the operation is smooth and the structure is durable, reducing maintenance costs.

[0033] During use, in the feeding and equipment assembly stage: the substrate to be vapor-deposited is positioned and installed by the feeding mechanism 2 on the top of the base 1, and blind plates are installed at both ends of the feeding mechanism 2 to seal it. At the same time, the inside of the feeding mechanism 2 is vacuumed. According to production needs, the evaporation source body 3 can be detachably installed on one or both sides of the feeding mechanism 2 to achieve flexible switching between single-sided vapor deposition or double-sided synchronous vapor deposition. Open the detachable cover 23 on the top of the hopper 7, add the corresponding amount of evaporation material into the hopper 7 according to the required vapor deposition needs, and then close the cover 23. Vacuum treatment is performed inside the hopper 7. The symmetrical support frame 6 on the outside of the hopper 7 ensures the stable installation of the hopper 7.

[0034] Material conveying and control stage: Open the ball valve 8 at the lower end of the hopper 7, and the evaporated material is conveyed to the crucible 10 in the water-cooled shell 4 through the conveying pipe 9; by operating the handle of the door assembly at the lower end of the conveying pipe 9, the push rod 21 is pushed to drive the connecting column 22 to move along the guide frame 20, thereby controlling the opening and closing of the sealing plate 19 and adjusting the material conveying rate. At the same time, the sealing gasket between the sealing plate 19 and the conveying pipe 9 can prevent gaseous particles in the crucible 10 from diffusing back to the hopper 7.

[0035] Material vaporization stage: The heating wires 12, which are evenly distributed on the outside of the crucible 10, are activated. The heating wires 12 are energized and heat up the evaporating material in the crucible 10, so that it reaches the vaporization temperature and forms gaseous particles. The gaseous particles enter the heating chamber 11 through the discharge port 14 on one side of the heating chamber 11.

[0036] Steam flow and secondary heating stage: The heating wire 13 wrapped around the outside of the heating chamber 11 is energized to perform secondary heating on the gaseous particles in the chamber, so as to prevent them from condensing and depositing in advance; Under the guidance of the guide plate 15, the gaseous particles flow through several through slots 17 on the side wall of the guide plate 15 to the nozzle plate 16, and are further evenly distributed through the linearly distributed holes on the nozzle plate 16.

[0037] Evaporation deposition stage: The uniformly distributed gaseous particles are directionally sprayed onto the substrate surface on the feeding mechanism 2 through several nozzles 18 embedded at one end of the heating chamber 11 away from the crucible 10, thus completing the thin film deposition.

[0038] During the equipment temperature control and stable operation phase: Cooling water is introduced into the water channels inside the side wall of the water-cooled shell 4 to remove excess heat generated during equipment operation and prevent components from being damaged due to high temperature; the insulation plate 5 reduces heat loss in the heating chamber 11, maintains stable temperature inside the chamber, and ensures that the vapor deposition process continues to be efficient.

[0039] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A vertical evaporation source for evaporation of a material, comprising a base (1), characterized in that: The base (1) is provided with a feeding mechanism (2) at the top, and the feeding mechanism (2) has an evaporation source body (3) detachably installed on one or both sides; The evaporation source body (3) includes a water-cooled shell (4). Several material bins (7) are arranged vertically at the end of the water-cooled shell (4) away from the feeding mechanism (2). A bin cover (23) is detachably installed on the top of the material bin (7). A conveying pipe (9) is connected to the lower end of the material bin (7) through a ball valve (8). A crucible (10) is connected to the lower end of the conveying pipe (9) inside the water-cooled shell (4). A door assembly is provided at the lower opening of the conveying pipe (9). Heating wires (12) are evenly distributed on the front and rear side walls of the crucible (10). A heating chamber (11) communicating with the crucible (10) is provided on the side of the crucible (10) inside the water-cooled shell (4) near the feeding mechanism (2). Several nozzles (18) are embedded and installed at the end of the heating chamber (11) away from the crucible (10).

2. A vertical evaporation source according to claim 1, characterized in that: Heating wire 2 (13) is wound around the outside of the heating chamber (11). A guide plate (15) and a nozzle plate (16) are provided inside the heating chamber (11). The guide plate (15) is located on the side close to the crucible (10). Several through grooves (17) are opened on the side wall of the guide plate (15). A discharge port (14) communicating with the crucible (10) is opened on one side of the heating chamber (11).

3. A vertical evaporation source as claimed in claim 2, characterized in that: The door assembly includes a sealing plate (19), which is located inside the crucible (10). One end of the sealing plate (19) is hinged to the top wall of the crucible (10). The top of the sealing plate (19) is attached to the lower end of the feed pipe (9). A guide frame (20) is provided on the top of the sealing plate (19) inside the feed pipe (9). A push rod (21) is provided on one side of the guide frame (20). One end of the push rod (21) passes through the feed pipe (9) and is connected to a handle outside the water-cooled shell (4). A connecting post (22) is connected to the inner side of the push rod (21) near the guide frame (20). The connecting post (22) is located inside the guide frame (20).

4. A vertical evaporation source according to claim 3, characterized in that: The water-cooled shell (4) is provided with a heat insulation plate (5) at one end near the feeding mechanism (2), and one end of the nozzle (18) penetrates through the heat insulation plate (5). Several nozzles (18) are arranged in a linear equidistant array, and the holes opened on the nozzle plate (16) are arranged in a linear distribution.

5. A vertical evaporation source as claimed in claim 4, characterized in that: The hopper (7) is symmetrically provided with support frames (6) on the outside, and the two ends of the support frames (6) are fixedly connected to the hopper (7) and the water-cooled shell (4) respectively. The water-cooled shell (4) has a water channel for cooling water to flow inside its side wall.

6. A vertical evaporation source as claimed in claim 5, characterized in that: A sealing gasket is provided between the sealing plate (19) and the conveying pipe (9). The guide frame (20) is rectangular. The lower end of the push rod (21) is U-shaped. The connecting column (22) is located inside the U-shaped structure at the lower end of the push rod (21).

Images