A growth station assembly for synthesizing diamond

Abstract

The utility model provides a kind of for synthetic diamond's growth platform assembly, belong to the technical field of diamond prepared by chemical vapor deposition method.Growth platform assembly includes growth base, and the cooling water cavity in growth base is connected with the water pipe of downward extension that lifts and falls, and the water collection block is connected in water pipe of downward extension lower part, and the water collection block is connected with lifting and falling drive arrangement, and the top of water collection block is threadedly connected with nut cover, and water pipe of downward extension is inserted into water collection block and passes through nut cover, and the upper end aperture of water collection block is arranged with the outer peripheral surface between water pipe of downward extension, and the sealing ring for being extruded by nut cover is arranged to realize the sealing between water collection block and water pipe of downward extension that lifts and falls, and the clamp is fixedly connected on nut cover for being tightly fixed on water pipe of downward extension after nut cover installation is completed.Rigid connection between clamp and water pipe of downward extension indirectly realizes the fixation of water collection block and water pipe of downward extension that lifts and falls, and water collection block can stably drive water pipe of downward extension to move up and down when lifting and falling drive arrangement drives water collection block to move up and down, and sealing effect is good.

Description

Technical Field

[0001] This utility model relates to a growth stage assembly for synthesizing diamond, belonging to the field of diamond preparation technology by chemical vapor deposition. Background Technology

[0002] Microwave plasma chemical vapor deposition (MPCVD) is the preferred method for preparing high-quality single-crystal diamond. Because the growth of high-quality single-crystal diamond requires a special growth environment, higher demands are placed on the functionality of MPCVD equipment. The temperature required for single-crystal diamond growth has a significant impact on the quality and efficiency of the synthesis; therefore, ensuring the temperature and uniformity during the synthesis of single-crystal diamond wafers is crucial for the efficient preparation of high-quality single-crystal diamond.

[0003] The growth of single-crystal diamond is carried out on a growth stage assembly, which includes a water-cooled stage and a growth substrate. Traditionally, the growth substrate is a solid molybdenum stage. This type of growth substrate alters its overall temperature and heat dissipation distribution by adjusting its combination (integral, double-layer, triple-layer, or multi-layer configurations using high thermal conductivity copper as the bottom layer) and structural form (purely solid, or with a centrally located annular groove), thereby ensuring the temperature and uniformity of the single-crystal diamond wafer. This method introduces limitations to temperature control. Each temperature test requires a shutdown to adjust the growth substrate combination until a suitable combination is achieved. Furthermore, under high power and high pressure conditions (where the growth temperature of single-crystal diamond is far higher than the required process temperature), relying solely on the growth substrate to transfer heat to the water-cooled stage is insufficient for temperature control.

[0004] In response, Chinese invention patent application CN116695099A discloses a liftable MPCVD growth stage. The MPCVD growth stage includes a lower sealing plate, a lifting drive device, a first water-cooling component, and a second water-cooling component. A diamond growth stage is provided on the top of the lower sealing plate. The diamond growth stage is provided with a lifting channel and a positioning ring for placing a molybdenum support. The lifting drive device is connected to the positioning ring and controls its lifting and lowering within the lifting channel. The first water-cooling assembly is used to cool the positioning ring. It includes a first lifting water pipe and a second lifting water pipe nested from the outside to the inside. The bottom of the two lifting water pipes is connected to the first water nozzle sleeve, and the top of the two pipes is connected to the first cooling water inlet plate and the first cooling water outlet plate, respectively. A sealing water plate is provided below the positioning ring. The first cooling water inlet plate divides the inner cavity of the sealing water plate into an upper first cooling water inlet chamber and a lower first cooling water outlet chamber. The coolant enters the upper first cooling water inlet chamber through the second lifting water pipe, then enters the lower first cooling water outlet chamber through the connecting water hole on the first cooling water inlet plate, and then exits through the annulus between the first lifting water pipe and the second lifting water pipe, thereby cooling the positioning ring.

[0005] In addition, the second water-cooling assembly includes a fourth cooling water pipe, a third cooling water pipe, and a connecting water pipe nested from the outside to the inside. The lower ends of the three water pipes are connected to the second water nozzle sleeve, and the upper ends are respectively connected to the second cooling water outlet plate, the second cooling water inlet plate, and the diamond growth stage. The second cooling water inlet plate divides the inner cavity of the diamond growth stage into the upper second cooling water inlet cavity and the lower second cooling water outlet cavity. The first lifting water pipe passes through the connecting water pipe and its lower end is connected to the first water nozzle sleeve.

[0006] The aforementioned positioning ring, sealing water plate, first cooling water inlet plate, and first cooling water outlet plate constitute the growth platform for placing the molybdenum support (i.e., molybdenum stage). The diamond growth stage, second cooling water inlet plate, and second cooling water outlet plate constitute the water-cooled stage. The growth platform itself has a cooling chamber, and the growth platform can be raised and lowered relative to the water-cooled stage. The cooling and heat dissipation effect can be further controlled through the water-cooled stage.

[0007] The lifting drive device is fixed at the bottom of the first water nozzle sleeve (i.e., water collector). During the process of the lifting drive device driving the water collector and the lifting water pipe to move up and down, it is required that the lifting water pipe and the water collector be firmly fixed and sealed to avoid separation and cooling water leakage. However, the above-mentioned prior art does not disclose the specific fixing and sealing method. Based on this, this utility model is proposed. Utility Model Content

[0008] The purpose of this utility model is to provide a growth stage assembly for synthetic diamond, which clarifies the fixing and sealing method between the lifting water pipe and the water collector.

[0009] To achieve the above objectives, the present invention adopts the following technical solution: A growth stage assembly for synthesizing diamond includes a growth base with an internal cooling water chamber. The growth base is connected to a lifting water pipe that communicates with the cooling water chamber and extends downward. A water collector is connected to the lower part of the lifting water pipe. The water collector has a connection structure for connecting a lifting drive device. A nut cap is threaded to the top of the water collector. The lifting water pipe extends into the water collector through the nut cap. A sealing ring is provided between the upper end opening of the water collector and the outer circumference of the lifting water pipe to achieve a seal between the water collector and the lifting water pipe by being squeezed by the nut cap. A clamp is fixedly connected to the nut cap for clamping and fixing it to the lifting water pipe after the nut cap is installed.

[0010] The beneficial effects of the above technical solution are as follows: This utility model is an improved invention, which limits the connection method between the lifting water pipe and the water collector. Specifically, the top of the water collector is threaded with a nut cap, and the lifting water pipe extends into the water collector through the nut cap. A sealing ring is provided between the upper end opening of the water collector and the outer circumference of the lifting water pipe. When the nut cap is tightened, the nut cap squeezes the sealing ring, which can achieve a seal between the water collector and the lifting water pipe. At the same time, a clamp is fixedly connected to the nut cap for clamping and fixing it to the lifting water pipe after the nut cap is installed. The clamp and the lifting water pipe are rigidly connected, so that the water collector is indirectly fixed to the lifting water pipe through the nut cap and the clamp. Therefore, when the lifting drive device moves the water collector up and down, the water collector can stably move the lifting water pipe up and down, and the sealing effect is good, which can prevent cooling water leakage.

[0011] Furthermore, a collar is provided below the nut cap and fitted onto the outside of the water collector. A clamp is located above the nut cap, and the clamp and the collar are fixedly connected by at least two bolts to clamp the nut cap between the clamp and the collar.

[0012] Furthermore, one of the bolts has an outwardly protruding substrate pressed between its bolt head and the clamp. The growth stage assembly also includes a displacement sensor, whose measuring contacts press against the substrate to detect the rise and fall data of the growth stage.

[0013] Furthermore, an outwardly extending substrate is fixed on the clamp or water collector, and the growth stage assembly also includes a displacement sensor, whose measuring contacts press against the substrate to detect the lifting data of the growth stage.

[0014] Furthermore, the upper opening of the water collector is a funnel shape.

[0015] Furthermore, the water collector includes a water collector body and a plug that is sealed and fixedly connected to the upper end of the water collector body. The plug is provided with an external thread that mates with the nut cap thread, and the diameter of the external thread is smaller than the outer diameter of the upper end of the water collector body.

[0016] Furthermore, the water collection block includes a water collection block body, which includes an upper block and a lower block fixed together. The cooling water chamber inside the growth base has two chambers, an upper one and a lower one. The lifting water pipe includes an inner lifting water pipe connected to the upper cooling water chamber and an outer lifting water pipe connected to the lower cooling water chamber. The inner and outer lifting water pipes are nested together. The lower end of the outer lifting water pipe extends into the upper block, and the lower end of the inner lifting water pipe passes through the outer lifting water pipe and extends into the lower block. An inner sealing ring is provided between the junction of the upper and lower blocks and the outer circumferential surface of the inner lifting water pipe.

[0017] Furthermore, the upper block and the lower block are fixedly connected by a flange, and an outer sealing ring is provided between the end faces of the upper block and the lower block. The outer sealing ring is coaxially arranged outside the inner sealing ring.

[0018] Furthermore, the cooling water chamber inside the growth substrate has two chambers, upper and lower. The lifting water pipes include an inner lifting water pipe connected to the upper cooling water chamber and an outer lifting water pipe connected to the lower cooling water chamber. The inner and outer lifting water pipes are nested together. The water collector is provided with a lower connector that communicates with the inner lifting water pipe and an upper connector that communicates with the annular space between the inner and outer lifting water pipes. The upper and lower connectors face the same side of the water collector.

[0019] Furthermore, a bottom threaded hole is provided on the bottom surface of the water collector, and the lifting drive device includes a screw connected to the bottom threaded hole. Attached Figure Description

[0020] Figure 1 This is a usage diagram of the growth stage assembly for synthesizing diamond according to this utility model; Figure 2 This is a perspective view of an embodiment of the growth stage assembly for synthesizing diamond according to this utility model; Figure 3 This is a front sectional view of the water-cooled stage assembly and the first water collector in the embodiment of the growth stage assembly for synthetic diamond of this utility model. Figure 4 This is a front sectional view of the growth stage assembly, the second water collector, and the lifting motor in the embodiment of the growth stage assembly for synthetic diamond of this utility model. Figure 5 This is a perspective view of the second water collector (without substrate installed) in an embodiment of the growth stage assembly for synthetic diamond of this utility model. Figure 6 This is a schematic diagram of the sealing device in the embodiment of the growth stage assembly for synthetic diamond of this utility model.

[0021] In the diagram: 1. Cavity; 2. Cavity base plate; 3. Water-cooled stage assembly; 3-1. Copper disk; 3-2. Water distribution plate; 3-3. Antenna disk; 3-4. Sealing groove; 3-5. Fastening screw; 3-6. First sealing ring; 3-7. Copper disk connector; 3-8. Water distribution plate connector; 3-9. Antenna mast; 4. Growth base assembly; 4-1. Upper stage; 4-2. Middle stage; 4-3. Lower stage; 4-4. Second sealing ring; 4-5. Beryllium copper spiral tube; 4-6. Middle stage connector Pipe; 4-7, Lower platform pipe; 5, Quartz ring; 6, Molybdenum platform; 7, Mode converter; 8, Spring; 9, Clamping ring threaded fitting; 10, Mounting frame; 10-1, Retaining ring; 11, First water collector; 11-1, First upper block; 11-2, First lower block; 11-3, First plug; 11-4, First nut cap; 11-5, First sealing ring; 11-6, Third sealing ring; 11-7, Fourth sealing ring; 11-8, Fifth sealing ring 11-9, First lower connector; 11-10, First upper connector; 12, Second water collector; 12-1, Second upper block; 12-2, Second lower block; 12-2-1, Side threaded hole; 12-3, Second plug; 12-4, Second nut cap; 12-5, Second sealing ring; 12-6, Sixth sealing ring; 12-7, Outer sealing ring; 12-8, Inner sealing ring; 12-9, Second lower connector; 12-10, Second upper connector; 12 -11. Connecting bolts; 13. Sealing device; 13-1. Telescopic cover; 13-2. Upper collar; 13-3. Upper nut cap; 13-4. Upper sealing ring; 13-5. Lower collar; 13-6. Lower nut cap; 13-7. Lower sealing ring; 14. Lifting motor; 15. Displacement sensor; 16. Clamp; 16-1. First clamp; 16-2. Second clamp; 16-3. Locking bolt; 17. Collar; 18. Fixing bolt; 19. Base plate. Detailed Implementation

[0022] The embodiment of the growth stage assembly (hereinafter referred to as the growth stage assembly) for synthesizing diamond in this utility model is as follows: like Figure 1 and Figure 2 As shown, the growth stage assembly includes a water-cooled stage assembly 3 and a growth stage assembly 4. The water-cooled stage assembly 3 includes a water-cooled stage and a connecting pipe that is connected to the water-cooled stage and extends downward. The growth stage assembly 4 includes a growth stage and a connecting pipe that is connected to the growth stage and extends downward. The top surface of the growth stage is used to place a molybdenum stage 6, on which single-crystal diamond is grown.

[0023] During assembly, the water-cooled stage assembly 3 and the growth stage assembly 4 are assembled together. The main body is located inside the cavity 1 of the MPCVD equipment and mounted on the quartz ring 5. The connecting pipe extends through the central hole of the cavity base plate 2 to the bottom of the cavity base plate 2. From top to bottom, the outside of the connecting pipe is equipped with a mode converter 7, a spring 8, and a threaded retainer 9. The mode converter 7 is located below the cavity base plate 2, and the spring 8 is located between the mode converter 7 and the threaded retainer 9. The threaded retainer 9 is tightly mounted on the outermost tube of the connecting pipe by a retainer. By rotating the threaded sleeve, the spring 8 can be squeezed, thereby enabling the water-cooled stage assembly 3 to squeeze the quartz ring 5 and the cavity base plate 2, thus connecting them into one unit.

[0024] The growth stage assembly also includes a first water collector 11 connected to the lower part of the water-cooling stage connector and a second water collector 12 connected to the lower part of the growth substrate connector. The second water collector 12 is connected to a lifting drive device, which is used to control the vertical movement of the second water collector 12 and the growth substrate assembly 4, thereby changing the vertical height of the molybdenum stage 6 and the cooling effect of the water-cooling stage on the growth substrate. In this embodiment, the lifting drive device is a lifting motor 14; in other embodiments, a hydraulic cylinder or a pneumatic cylinder may also be used.

[0025] Furthermore, the growth platform assembly also includes a mounting frame 10, which is fixed in position relative to the cavity 1. The first water collector 11 is fixed to the top of the mounting frame 10, and the lifting motor 14 is fixed to the bottom of the mounting frame 10. The top output end of the lifting motor 14 is fixedly connected to the second water collector 12.

[0026] like Figure 3 As shown, the water-cooled stage includes a copper disk 3-1, a water distribution plate 3-2, and an antenna disk 3-3. A sealing groove 3-4 is provided on the bottom surface of the copper disk 3-1 to achieve a seal with the quartz ring 5. The copper disk 3-1 also has an upper groove with an upward opening and a lower groove with a downward opening. The upper groove allows the growth stage to sink into it. The lower groove is a stepped groove, and the water distribution plate 3-2 is located within the stepped groove. The antenna disk 3-3 is fixed to the copper disk 3-1 by fastening screws 3-5, which press the water distribution plate 3-2 between them. A first sealing ring 3-6 is provided between the antenna disk 3-3 and the copper disk 3-1 to achieve a seal between them.

[0027] The water divider plate 3-2 divides the space in the lower groove into two cooling water chambers, specifically, the water divider plate 3-2 and the bottom of the lower groove form a first water inlet chamber, and the water divider plate 3-2 and the antenna disk 3-3 form a first water outlet chamber. The first water outlet chamber is located below the first water inlet chamber. The water divider plate 3-2 has a first connecting hole near the outer circle that connects the first water inlet chamber and the first water outlet chamber.

[0028] The bottom of the upper groove of the copper plate 3-1 has a through-hole, and a downward-extending copper plate connector 3-7 is connected to the central groove. The connector 3-7 communicates with the upper groove. The center of the water distribution plate 3-2 has a central hole, and a downward-extending water distribution plate connector 3-8 is connected to the central hole. The connector 3-8 is nested outside the copper plate connector 3-7, forming an annular space between them, which communicates with the first water inlet cavity. The center of the antenna plate 3-3 has a central hole, and a downward-extending antenna rod 3-9 (i.e., the antenna plate connector) is connected to the central hole. The antenna rod 3-9 is nested outside the water distribution plate connector 3-8, also forming an annular space between them, which communicates with the first water outlet cavity.

[0029] The first water collector 11 includes a first water collector body and a first plug 11-3 that is sealed and fixedly connected to the lower end of the first water collector body. The first water collector body includes a first upper block 11-1 and a first lower block 11-2. The lower end of the antenna rod 3-9 extends into the first upper block 11-1 and is threadedly connected to the first upper block 11-1. A fifth sealing ring 11-8 is provided between the lower end face of the antenna rod 3-9 and the first upper block 11-1. After the two are tightened and fixed, the fifth sealing ring 11-8 is compressed to achieve a seal between the two.

[0030] The first upper block 11-1 and the first lower block 11-2 are connected by a threaded fit. The lower end of the water distribution plate pipe 3-8 extends through the antenna rod 3-9 and through the first upper block 11-1 into the first lower block 11-2. A fourth sealing ring 11-7 is provided between the junction of the first upper block 11-1 and the first lower block 11-2 and the outer circumference of the water distribution plate pipe 3-8. In this way, when the first upper block 11-1 and the first lower block 11-2 are tightened, both the two are fixedly connected and sealed. At the same time, the water distribution plate pipe 3-8 is sealed with the two blocks, preventing the annular space between the copper plate pipe 3-7 and the water distribution plate pipe 3-8 from communicating with the annular space between the water distribution plate pipe 3-8 and the antenna rod 3-9.

[0031] The first plug 11-3 is threaded to the lower end hole of the first lower block 11-2. A third sealing ring 11-6 is provided between the first plug 11-3 and the lower end face of the first lower block 11-2 to achieve a seal between the two.

[0032] The copper disc connector 3-7 extends out of the water distribution plate connector 3-8 and through the first plug 11-3. The lower part of the first plug 11-3 is threadedly connected to the first nut cap 11-4. The copper disc connector 3-7 passes through the first nut cap 11-4 and extends below the first nut cap 11-4. A first sealing ring 11-5 is provided between the lower end opening of the first plug 11-3 (which is a flared opening) and the outer circumferential surface of the copper disc connector 3-7. When the first nut cap 11-4 is tightened, the first nut cap 11-4 compresses the first sealing ring 11-5, thereby achieving a seal between the first plug 11-3 and the copper disc connector 3-7, preventing liquid from leaking out of the annulus between the copper disc connector 3-7 and the water distribution plate connector 3-8.

[0033] Furthermore, the first lower block 11-2 is provided with a first lower connector 11-9 that communicates annularly with the copper plate connecting pipe 3-7 and the water distribution plate connecting pipe 3-8, and the first upper block 11-1 is provided with a first upper connector 11-10 that communicates annularly with the water distribution plate connecting pipe 3-8 and the antenna mast 3-9. In this embodiment, the first lower connector 11-9 and the first upper connector 11-10 are arranged facing the same side of the first water collector 11 to facilitate connection with an external cooling system. In other embodiments, the orientation of the two connectors may be different depending on the specific circumstances.

[0034] In this embodiment, the first lower connector 11-9 is a water inlet connector, and the first upper connector 11-10 is a water outlet connector. The coolant enters the annular space between the copper plate connecting pipe 3-7 and the water distribution plate connecting pipe 3-8 through the first lower connector 11-9, then flows upwards to the first water inlet chamber above the water-cooled platform. The coolant disperses from the center outwards and flows along the first connecting hole on the water distribution plate 3-2 into the first water outlet chamber below. After converging from the surroundings to the center, the coolant flows downwards along the annular space between the water distribution plate connecting pipe 3-8 and the antenna mast 3-9 to the first water collector 11, and finally flows through the first upper connector 11-10 to the external cooling system, thus cooling the water-cooled platform. In other embodiments, the first lower connector 11-9 can also be a water outlet connector, in which case the first upper connector 11-10 is a water inlet connector.

[0035] like Figure 4 As shown, the growth platform includes an upper platform 4-1, a middle platform 4-2, and a lower platform 4-3. The fixing method of the three platforms can be the same as that of the water-cooled platform; that is, the lower platform 4-3 is fixed to the upper platform 4-1 with fastening screws, and the middle platform 4-2 is clamped between the two. A second sealing ring 4-4 ​​is provided between the lower platform 4-3 and the upper platform 4-1 to ensure a seal between them. Similarly, the growth platform has two cooling water chambers, specifically, the middle platform 4-2 and the upper platform 4-1 form a second water inlet chamber, and the middle platform 4-2 and the lower platform 4-3 form a second water outlet chamber. The middle platform 4-2 is provided with a second connecting hole that connects the second water inlet chamber and the second water outlet chamber.

[0036] The middle platform 4-2 has a central hole at its center, and a downwardly extending middle platform connector 4-6 is connected to the central hole. The middle platform connector 4-6 communicates with the second water inlet chamber. The lower platform 4-3 has a central hole at its center, and a downwardly extending lower platform connector 4-7 is connected to the central hole. The lower platform connector 4-7 is nested outside the middle platform connector 4-6, forming an annular space between them. This annular space communicates with the second water outlet chamber.

[0037] Combination Figure 3 and Figure 4 As shown, when assembling the water-cooled stage assembly 3 and the growth stage assembly 4, the lower stage connector 4-7 and the middle stage connector 4-6 of the growth stage assembly 4 pass through the copper disk connector 3-7 of the water-cooled stage assembly 3, and the growth stage is placed into the upper groove of the copper disk 3-1. A beryllium copper spiral tube 4-5 is installed on the outer periphery of the lower stage 4-3. The beryllium copper spiral tube 4-5 cooperates with the groove wall of the upper groove of the copper disk 3-1, serving to position and shield microwaves. Under the action of the upper groove of the copper disk 3-1, the growth stage sinks further relative to the surface of the water-cooled stage. This not only increases the possibility of matching the water-cooled stage surface with a higher height or more combinations of molybdenum stages 6, but also results in a larger contact area between the sunken growth stage and the water-cooled stage, leading to better cooling.

[0038] like Figure 4 As shown, the lower part of the lower platform pipe 4-7 and the middle platform pipe 4-6 are connected to the second water collector 12. When the lifting motor 14 drives the second water collector 12 to move up and down, the second water collector 12 drives the lower platform pipe 4-7 and the middle platform pipe 4-6 to move up and down. Therefore, the lower platform pipe 4-7 and the middle platform pipe 4-6 constitute lifting water pipes connected to the two cooling water chambers in the growth base. Since the lower platform pipe 4-7 is nested outside the middle platform pipe 4-6, the lower platform pipe 4-7 constitutes an external lifting water pipe connected to the second water outlet chamber (i.e., the lower cooling water chamber), and the middle platform pipe 4-6 constitutes an internal lifting water pipe connected to the second water inlet chamber (i.e., the upper cooling water chamber).

[0039] The second water collector 12 includes a second water collector body and a second plug 12-3 that is sealed and fixedly connected to the upper end of the second water collector body. The second water collector body includes a second upper block 12-1 and a second lower block 12-2. The second plug 12-3 is threaded to the upper end opening of the second upper block 12-1. A sixth sealing ring 12-6 is provided at the mating surface between the second plug 12-3 and the second upper block 12-1 to achieve a seal between the two.

[0040] The lower end of the lower connecting pipe 4-7 passes through the second plug 12-3 and extends into the second upper block 12-1. The second upper block 12-1 is provided with a stepped hole that runs vertically through it, which includes a large diameter hole, a medium diameter hole, and a small diameter hole from top to bottom. The large diameter hole is a threaded hole that is threaded to the second plug 12-3. The medium diameter hole and the small diameter hole are both smooth holes. The lower end of the lower connecting pipe 4-7 extends into the medium diameter hole and abuts against the stepped surface between the medium diameter hole and the small diameter hole.

[0041] The top of the second plug 12-3 is threaded with a second nut cap 12-4. The lower platform pipe 4-7 passes through the second nut cap 12-4. A second sealing ring 12-5 is provided between the upper end opening of the second plug 12-3 and the outer peripheral surface of the lower platform pipe 4-7. When the second nut cap 12-4 is tightened, the second nut cap 12-4 squeezes the second sealing ring 12-5, thereby achieving a seal between the second plug 12-3 and the lower platform pipe 4-7, preventing the liquid in the second water collector 12 from leaking outward. At the same time, under the friction of the second sealing ring 12-5, there is a certain bonding force between the second water collector 12 and the lower platform pipe 4-7.

[0042] In this embodiment, the upper opening of the second plug 12-3 is a flared opening. This allows for better pressure on the second sealing ring 12-5 as the second nut cap 12-4 is pressed down, resulting in a better seal between the sealing ring and the lower connecting pipe 4-7. In other embodiments, the upper opening of the second plug 12-3 can also be a cylindrical hole. As long as the second sealing ring 12-5 protrudes from the upper surface of the second plug 12-3, a sealing effect can be achieved under pressure.

[0043] The second plug 12-3 has an external thread that engages with the second nut cap 12-4. In this embodiment, the diameter of the external thread is smaller than the outer diameter of the upper end of the second upper block 12-1. This allows for a smaller size of the second nut cap 12-4 through the transition of the second plug 12-3, facilitating its configuration. Alternatively, in other embodiments, the second plug 12-3 can be omitted, and the second water collector 12 may only include the second water collector body. In this case, the second nut cap 12-4 is directly threaded to the second upper block 12-1, and the second sealing ring 12-5 is positioned between the upper opening of the second upper block 12-1 and the outer circumferential surface of the lower platform pipe 4-7. In other embodiments, the second water collector body can also be a single, integrated structure, without distinguishing between the upper and lower blocks. In this case, the second nut cap 12-4 is directly threaded to the second water collector body, and the second sealing ring 12-5 is positioned between the upper opening of the second water collector body and the outer circumferential surface of the lower platform pipe 4-7.

[0044] A clamp 16 is fixedly connected to the second nut cap 12-4 for tightening and fixing it to the lower platform pipe 4-7 after the second nut cap 12-4 is installed. After the second nut cap 12-4 is tightened to achieve a seal between the second sealing ring 12-5 and the lower platform pipe 4-7, the rigid connection between the clamp 16 and the lower platform pipe 4-7 indirectly fixes the second water collector 12 to the lower platform pipe 4-7. Therefore, when the lifting motor 14 moves the second water collector 12 up and down, the second water collector 12 can stably move the lower platform pipe 4-7 up and down, preventing slippage of the connection position during lifting or water pressure fluctuations. The lower platform pipe 4-7 and the middle platform pipe 4-6 are fixed to the growth base, so they move up and down together.

[0045] Below the second nut cap 12-4, a collar 17 is provided, which is fitted outside the second plug 12-3 (in other embodiments, if there is no second plug 12-3, it is fitted outside the second upper block 12-1 or the integral second water collector body). The clamp 16 is located above the second nut cap 12-4. The clamp 16 and the collar 17 are fixedly connected by at least two fixing bolts 18 to clamp the second nut cap 12-4 between the clamp 16 and the collar 17.

[0046] like Figure 5 As shown, the clamp 16 includes two separate clamping rings, namely the first clamping ring 16-1 and the second clamping ring 16-2. Each clamping ring has an arc-shaped groove for clamping the outer circumference of the lower platform pipe 4-7. The two clamping rings are fixedly connected by two locking bolts 16-3. To avoid the locking bolts 16-3, two fixing bolts 18 are provided in this embodiment. Of course, in other embodiments, depending on the specific dimensions of the clamping rings, two fixing bolts 18 can be connected to one clamping ring, resulting in a total of four fixing bolts 18.

[0047] During assembly, after the second nut cap 12-4 is installed, first pre-tighten the fixing bolt 18 to give the two retaining rings and collar 17 an initial clamping force on the middle second nut cap 12-4, but not to clamp it completely, otherwise the position of the two retaining rings will be fixed and the lower stage pipe 4-7 cannot be clamped. Then install the locking bolt 16-3, using the gap between the fixing bolt 18 and the bolt holes on the retaining rings to allow the two retaining rings to move relative to each other to clamp the outer circumference of the lower stage pipe 4-7. Of course, at the same time as installation, the fixing bolt 18 also needs to be tightened to ensure that the clamp 16 clamps the lower stage pipe 4-7, and the clamp 16 and collar 17 also clamp the second nut cap 12-4. Alternatively, the locking bolt 16-3 can be pre-tightened to give the two retaining rings an initial clamping force on the lower stage pipe 4-7, but not to clamp it completely, and then the fixing bolt 18 can be installed, and the locking bolt 16-3 can be tightened at the same time.

[0048] In other embodiments, the clamp 16 and the second nut cover 12-4 can also be fixed in other ways. For example, the clamp 16 includes a hinge seat and two rings, one end of which is hinged to the hinge seat. Both rings can rotate around the hinge position, and the other ends of the two rings are fixed by locking bolts to clamp the lower platform pipe 4-7. The hinge seat is fixed to the top surface of the second nut cover 12-4. In this case, after the second nut cover 12-4 is installed, the locking bolts can be installed directly without considering other bolts, making the operation more convenient.

[0049] Furthermore, combined Figure 2 and Figure 4 As shown, a substrate 19 extending outwards is pressed between the bolt head of one of the fixing bolts 18 and the clamp 16. The growth stage assembly also includes a displacement sensor 15. A fixing ring 10-1 is provided on the mounting frame 10. The displacement sensor 15 is mounted on the fixing ring 10-1, and the measuring contact of the displacement sensor 15 presses against the substrate 19. Figure 2 (In the unassembled and unpressed state), when the growth platform moves up and down under the control of the lifting motor 14, the substrate 19 moves up and down accordingly, and the displacement sensor 15 can accurately record the values ​​of rising and falling.

[0050] The substrate 19 is mounted using existing fixing bolts 18, which simplifies the structure and reduces the number of parts. In other embodiments, the substrate 19 can also be fixed to the clamp 16 using additional bolts, or fixed to a suitable position on the second water collector 12. In other embodiments, a displacement sensor may not be required, in which case the substrate does not need to be installed.

[0051] like Figure 4 As shown, the lower end of the middle platform connector 4-6 extends through the lower platform connector 4-7, passes through the second upper block 12-1, and enters the second lower block 12-2. An inner sealing ring 12-8 is provided between the junction of the second upper block 12-1 and the second lower block 12-2 and the outer peripheral surface of the middle platform connector 4-6. Both the second upper block 12-1 and the second lower block 12-2 have flanges, which are fixedly connected by connecting bolts 12-11. When fixed, the end faces of the two blocks press against the inner sealing ring 12-8 to achieve a seal between the two blocks, as well as a seal between the middle platform connector 4-6 and the two blocks, preventing coolant in the second lower block 12-2 from entering the annulus between the middle platform connector 4-6 and the lower platform connector 4-7 through the gap between the middle platform connector 4-6 and the two blocks.

[0052] An outer sealing ring 12-7 is also provided between the end faces of the second upper block 12-1 and the second lower block 12-2. The outer sealing ring 12-7 is coaxially arranged outside the inner sealing ring 12-8, further enhancing the sealing effect between the two blocks. Of course, in other embodiments, only the inner sealing ring 12-8 may be provided, and the outer sealing ring 12-7 may not be provided.

[0053] In other embodiments, the second upper block 12-1 and the second lower block 12-2 can be fixed in the same way as the first upper block 11-1 and the first lower block 11-2, using a threaded connection, and the inner sealing ring 12-8 is also set in the same way as the fourth sealing ring 11-7. Of course, in other embodiments, the second upper block 12-1 and the second lower block 12-2 can also be integrally connected. In this case, a sealing ring can be fitted around the outer periphery of the central platform connecting pipe 4-6, or a sealing ring can be embedded in the inner wall of the block to achieve a seal between the central platform connecting pipe 4-6 and the block.

[0054] Furthermore, the second upper block 12-1 is provided with a second upper connector 12-10 that communicates annularly with the middle platform pipe 4-6 and the lower platform pipe 4-7, and the second lower block 12-2 is provided with a second lower connector 12-9 that communicates with the middle platform pipe 4-6. In this embodiment, the second lower connector 12-9 and the second upper connector 12-10 are arranged facing the same side of the second water collector 12, facilitating connection with an external cooling system. In other embodiments, the orientation of the two connectors may differ depending on the specific circumstances.

[0055] In this embodiment, the second lower connector 12-9 serves as the water inlet connector, and the second upper connector 12-10 serves as the water outlet connector. The coolant enters the middle platform pipe 4-6 through the second lower connector 12-9, then flows upward to the second water inlet chamber above the growth substrate. The coolant flows from the center to the outer periphery, and then flows along the second connecting hole on the middle platform 4-2 into the lower second water outlet chamber. After converging at the center, it flows downward along the annular space between the middle platform pipe 4-6 and the lower platform pipe 4-7 to the second water collector 12, and finally flows through the second upper connector 12-10 to the external cooling system, thus cooling the growth substrate. In other embodiments, the second lower connector 12-9 can also serve as the water outlet connector, in which case the second upper connector 12-10 serves as the water inlet connector.

[0056] The bottom surface of the second lower block 12-2 is provided with a bottom threaded hole. The lifting drive device includes a screw connected to the bottom threaded hole, that is, the top output end of the lifting motor 14 is the screw, and the bottom threaded hole constitutes a connection structure for connecting the lifting drive device. At the same time, a side threaded hole 12-2-1 is provided on the side of the second lower block 12-2, which is perpendicularly connected to the bottom threaded hole. A set screw is installed in the side threaded hole 12-2-1 to tighten the screw, so as to prevent the connection between the lifting motor 14 and the second water collector 12 from becoming loose, and also to adjust the position of the screw screwed into the bottom threaded hole. In other embodiments, depending on the specific form of the output end of the lifting drive device, there may be other connection methods between the lifting drive device and the second water collector 12. For example, when the output end of the lifting drive device is a connecting plate, the connecting plate can be attached to the bottom surface of the second water collector 12 and the two can be fixed by screws. Alternatively, a fixing stud can be welded to the bottom surface of the second water collector 12. In this case, a through hole is provided on the connecting plate for the stud to pass through, and then a nut is used to fix the output end of the lifting drive device and the second water collector 12. In this case, the stud constitutes a connection structure for connecting the lifting drive device.

[0057] In addition, combined Figures 1-4 As shown, the lower end of the copper disk connector 3-7 extends into the mounting frame 10. A sealing device 13 is installed on the outside of the copper disk connector 3-7 and the lower stage connector 4-7. The upper end of the sealing device 13 is sealed and fixed to the outer peripheral surface of the copper disk connector 3-7, and the lower end is sealed and fixed to the outer peripheral surface of the lower stage connector 4-7. The sealing device 13 is retractable, which does not affect the vertical movement of the lower stage connector 4-7 relative to the copper disk connector 3-7, while ensuring the seal between the two. This ensures the vacuum tightness of the interlayer formed by the inner periphery of the copper disk connector 3-7 and the outer periphery of the lower stage connector 4-7, thereby ensuring the vacuum tightness inside the MPCVD chamber during the lifting and lowering of the growth stage.

[0058] like Figure 6 As shown, the sealing device 13 includes a telescopic cover 13-1 that covers the lower end of the copper disc connector 3-7 and the lower platform connector 4-7 and is telescopic. The telescopic cover 13-1 is a bellows. The upper end of the telescopic cover 13-1 is provided with an upper connector that is sealed and fixed to the outer peripheral surface of the copper disc connector 3-7, and the lower end of the telescopic cover 13-1 is provided with a lower connector that is sealed and fixed to the outer peripheral surface of the lower platform connector 4-7, so as to seal the gap between the lower platform connector 4-7 and the copper disc connector 3-7.

[0059] Specifically, the upper connector includes an upper collar 13-2 fixed to the upper end of the telescopic cover 13-1 and sleeved on the outside of the copper disc tube 3-7; an upper nut cap 13-3 sleeved on the outside of the copper disc tube 3-7 and threadedly connected to the upper part of the upper collar 13-2; and an upper sealing ring 13-4 located at the upper end opening of the upper collar 13-2 and pressed against the outer circumferential surface of the copper disc tube 3-7 by the upper nut cap 13-3. Through the tight contact between the upper sealing ring 13-4 and the outer circumferential surface of the copper disc tube 3-7, both sealing between the upper connector and the copper disc tube 3-7 are achieved, and a fixed connection between the upper connector and the copper disc tube 3-7 is achieved through static friction. This structure of the upper connector facilitates installation and facilitates sealing and fixing between the upper connector and the copper disc tube 3-7.

[0060] The lower connector includes a lower collar 13-5 fixed to the lower end of the telescopic cover 13-1 and sleeved on the outside of the lower platform pipe 4-7; a lower nut cap 13-6 sleeved on the outside of the lower platform pipe 4-7 and threaded to the lower part of the lower collar 13-5; and a lower sealing ring 13-7 located at the lower end opening of the lower collar 13-5 and pressed against the outer circumferential surface of the lower platform pipe 4-7 by the lower nut cap 13-6. The tight contact between the lower sealing ring 13-7 and the lower platform pipe 4-7 achieves both sealing between the lower connector and the lower platform pipe 4-7 and a fixed connection between the lower connector and the lower platform pipe 4-7 through static friction. This structure of the lower connector facilitates installation and enables sealing and fixation between the lower connector and the lower platform pipe 4-7.

[0061] In other embodiments, the upper connector can be a clamp structure, including a two-part clamping ring. The two halves of the clamping ring clamp and fix the upper end of the telescopic cover 13-1 to the outer peripheral surface of the copper disc connecting pipe 3-7, achieving sealing and fixation. Alternatively, an upper sealing ring can be provided between the telescopic cover 13-1 and the copper disc connecting pipe 3-7 to improve the sealing effect. Similarly, in other embodiments, the lower connector can be a clamp structure, including a two-part clamping ring. The two halves of the clamping ring clamp and fix the lower end of the telescopic cover 13-1 to the outer peripheral surface of the lower platform connecting pipe 4-7, achieving sealing and fixation. Alternatively, a lower sealing ring can be provided between the telescopic cover 13-1 and the lower platform connecting pipe 4-7 to improve the sealing effect.

[0062] In other embodiments of the growth stage assembly: the two lifting water pipes connected to the growth base may not be nested, but arranged in parallel with intervals, and the lower ends of the two water pipes are still connected to a water collection block.

[0063] In other embodiments of the growth stage assembly: the water-cooled stage may be a solid stage and no longer have a cooling function.

Claims

1. A growth stage assembly for synthesizing diamond, comprising a growth stage with an internal cooling water chamber, a lifting water pipe connected to the growth stage and extending downward in communication with the cooling water chamber, a water collector connected to the lower part of the lifting water pipe, and a connection structure on the water collector for connecting a lifting drive device, characterized in that... The top of the water collector is threaded with a nut cap, and the lifting water pipe extends into the water collector through the nut cap. A sealing ring is provided between the upper end opening of the water collector and the outer circumference of the lifting water pipe to achieve a seal between the water collector and the lifting water pipe by the pressure of the nut cap. A clamp is fixedly connected to the nut cap to hold and fix it to the lifting water pipe after the nut cap is installed.

2. The growth stage assembly for synthesizing diamond according to claim 1, characterized in that, A collar is provided below the nut cap and fitted onto the outside of the water collector. A clamp is located above the nut cap. The clamp and the collar are fixedly connected by at least two bolts to clamp the nut cap between the clamp and the collar.

3. The growth stage assembly for synthesizing diamond according to claim 2, characterized in that, One of the bolts has an outwardly protruding substrate pressed between its bolt head and the clamp. The growth stage assembly also includes a displacement sensor, whose measuring contacts press against the substrate to detect the rise and fall data of the growth stage.

4. The growth stage assembly for synthesizing diamond according to claim 1, characterized in that, A substrate with outward extension is fixed on the clamp or water collector. The growth stage assembly also includes a displacement sensor. The measuring probe of the displacement sensor presses against the substrate to detect the lifting data of the growth stage.

5. The growth stage assembly for synthesizing diamond according to any one of claims 1 to 4, characterized in that, The upper opening of the water collector is a funnel shape.

6. The growth stage assembly for synthesizing diamond according to any one of claims 1 to 4, characterized in that, The water collector includes a water collector body and a plug that is sealed and fixedly connected to the upper end of the water collector body. The plug is provided with an external thread that mates with the nut cap thread. The diameter of the external thread is smaller than the outer diameter of the upper end of the water collector body.

7. The growth stage assembly for synthesizing diamond according to any one of claims 1 to 4, characterized in that, The water collection block includes a water collection block body, which includes an upper block and a lower block fixed together. The cooling water chamber inside the growth base has two chambers, an upper one and a lower one. The lifting water pipe includes an inner lifting water pipe connected to the upper cooling water chamber and an outer lifting water pipe connected to the lower cooling water chamber. The inner and outer lifting water pipes are nested together. The lower end of the outer lifting water pipe extends into the upper block, and the lower end of the inner lifting water pipe passes through the outer lifting water pipe and extends into the lower block. An inner sealing ring is provided between the junction of the upper and lower blocks and the outer circumferential surface of the inner lifting water pipe.

8. The growth stage assembly for synthesizing diamond according to claim 7, characterized in that, The upper block and the lower block are fixedly connected by a flange. An outer sealing ring is provided between the end faces of the upper block and the lower block, and the outer sealing ring is coaxially arranged outside the inner sealing ring.

9. The growth stage assembly for synthesizing diamond according to any one of claims 1 to 4, characterized in that, The growth substrate has two cooling water chambers, one above the other. The lifting water pipes include an inner lifting water pipe connected to the upper cooling water chamber and an outer lifting water pipe connected to the lower cooling water chamber. The inner and outer lifting water pipes are nested together. The water collector is provided with a lower connector that communicates with the inner lifting water pipe and an upper connector that communicates with the annular space between the inner and outer lifting water pipes. The upper and lower connectors face the same side of the water collector.

10. The growth stage assembly for synthesizing diamond according to any one of claims 1 to 4, characterized in that, The bottom surface of the water collector is provided with a bottom threaded hole, and the lifting drive device includes a screw connected to the bottom threaded hole.

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