A device for measuring the thickness of a crucible
Patent Information
- Application Number
- CN202522021103.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-19
- Publication Date
- 2026-09-08
- Estimated Expiration
- 2035-09-19
AI Technical Summary
[0003]在PBN坩埚生产的过程中，由于气流受坩埚外形影响较大，坩埚R角处气流流速不均匀，坩埚会出现厚度不均匀的情况；测量R角处厚度一般采用管厚规或者霍尔效应测厚仪，管厚规受坩埚形状影响，难以测量特定位置处厚度；霍尔效应测厚仪采用霍尔效应原理进行测量，不受坩埚形状限制；但是，在实际使用中发现，厚度测量值与坩埚被测位置与探头角度相关，直接使用霍尔效应测试仪测量坩埚R角处厚度时，需要以R角与探头的接触点为轴心人工旋转坩埚，而人工旋转无法保证旋转时所测R角一直在坩埚外沿的一条弧线上(参考图1)，导致测量结果不准确；另外，使用霍尔效应测试仪测试坩埚外沿R角时，测试装置中由于人工手持坩埚进行转动，坩埚外沿R角易于脱离旋转平面，这会由于脱离旋转平面导致测试磁珠与探头距离较远吸力失效，导致测试不便的问题；
[0013] The device for measuring crucible thickness of this utility model fixes the conical crucible to be measured in the limiting through holes of two mounting plates, and then adjusts the position of the test probe by moving the sliding plate so that the top of the test probe abuts against the bottom surface of the outer edge R-angle of the crucible to be measured. By rotating the rotating plate within a certain range, that is, rotating the crucible to be measured, the test probe and the magnetic bead are always kept on an arc line of the outer edge R-angle of the crucible to be measured, so as to accurately control the movement trajectory of the crucible and improve the measurement accuracy and efficiency.
Smart Images
Figure CN224731259U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of crucible testing devices, and in particular to a device for measuring crucible thickness. Background Technology
[0002] In fields such as materials science, metallurgy, and semiconductor manufacturing, crucibles are used to hold materials, and their service life is closely related to their thickness.
[0003] During the production of PBN crucibles, the airflow is significantly affected by the crucible's shape, resulting in uneven airflow velocity at the crucible's radius (R-corner), leading to uneven crucible thickness. Measuring the thickness at the R-corner typically involves using a pipe thickness gauge or a Hall effect thickness gauge. However, pipe thickness gauges are limited by the crucible's shape, making it difficult to measure thickness at specific locations. Hall effect thickness gauges, based on the Hall effect principle, are not limited by the crucible's shape. However, in practice, the measured thickness value is related to the measured position of the crucible and the probe angle. Directly measuring the thickness at the crucible's R-corner using a Hall effect thickness gauge requires manually rotating the crucible around the contact point between the R-corner and the probe. Manual rotation cannot guarantee that the measured R-corner will remain on an arc along the outer edge of the crucible during rotation (see reference). Figure 1 This can lead to inaccurate measurement results. In addition, when using a Hall effect tester to test the outer edge R angle of a crucible, the crucible is manually rotated by hand, and the outer edge R angle of the crucible is easily disengaged from the plane of rotation. This disengagement from the plane of rotation causes the magnetic bead to be too far from the probe, resulting in a loss of attraction and making the test inconvenient.
[0004] This application presents an auxiliary testing device designed for crucibles with a certain taper, used to assist in measuring the thickness at the R-corner of the crucible with a certain taper. Utility Model Content
[0005] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide an apparatus for measuring crucible thickness.
[0006] This utility model provides a device for measuring the thickness of a crucible, which, in conjunction with a Hall effect thickness gauge, measures the thickness at the radius (R) of the crucible. The Hall effect thickness gauge includes a test probe and a magnetic bead. The auxiliary testing device includes a support base with a mounting groove on its top surface. A sliding component for mounting the test probe is disposed inside the mounting groove. A rotating component is disposed on one side of the sliding component on the support base, and a mounting component for fixing the crucible is disposed on the rotating component. A limiting component is fixedly disposed on the top surface inside the mounting groove between the rotating component and the sliding component for limiting and supporting the rotating component.
[0007] In the test state, the top of the test probe is in contact with the bottom surface at the outer edge R-corner of the crucible to be tested, and the contact point between the top of the test probe and the bottom surface at the outer edge R-corner of the crucible to be tested is always on an arc line where the outer edge R-corner of the crucible to be tested is located.
[0008] Furthermore, the sliding assembly includes a sliding plate disposed inside the mounting groove; the two sides of the sliding plate are slidably connected to the two sides corresponding to the mounting groove, or the bottom surface of the sliding plate is slidably connected to the bottom of the mounting groove; the test probe is fixed in the vertical direction on the top surface of the sliding plate.
[0009] Furthermore, the rotating assembly includes mounting blocks symmetrically fixed on the top surface of the support base on both sides of the mounting groove, and a rotating plate is rotatably disposed between the two mounting blocks.
[0010] Furthermore, the mounting assembly includes two mounting plates fixedly disposed on one side of the rotating plate away from the limiting assembly. Both mounting plates are perpendicular to the surface of the rotating plate. Limiting through holes are provided on the surface of the mounting plates corresponding to the conical crucible body for fixing and limiting the conical crucible body on the two mounting plates.
[0011] Furthermore, the limiting component includes a limiting block fixedly disposed on the top surface of the mounting groove, located below the rotating plate on the side near the sliding component, for limiting and supporting the rotating plate.
[0012] Compared with the prior art, the beneficial effects of this utility model are:
[0013] The device for measuring crucible thickness of this utility model fixes the conical crucible to be measured in the limiting through holes of two mounting plates, and then adjusts the position of the test probe by moving the sliding plate so that the top of the test probe abuts against the bottom surface of the outer edge R-angle of the crucible to be measured. By rotating the rotating plate within a certain range, that is, rotating the crucible to be measured, the test probe and the magnetic bead are always kept on an arc line of the outer edge R-angle of the crucible to be measured, so as to accurately control the movement trajectory of the crucible and improve the measurement accuracy and efficiency.
[0014] In addition, this auxiliary device avoids the problem of the magnetic beads being easily lost when manually rotating the crucible to measure the thickness of the outer edge R-angle of the crucible using a Hall effect thickness gauge, thus saving costs.
[0015] It should be understood that the content described in the utility model description section is not intended to limit the key or important features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model.
[0016] Other features of this invention will become readily apparent from the following description. Attached Figure Description
[0017] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:
[0018] Figure 1 This is a schematic diagram of the longitudinal cross-section of the crucible to be tested;
[0019] Figure 2 A schematic diagram of one side of a device for measuring crucible thickness under test conditions, provided in an embodiment of this utility model;
[0020] Figure 3 A schematic diagram of the other side of a device for measuring crucible thickness under test conditions, provided in an embodiment of this utility model;
[0021] Figure 4 This is a schematic diagram of the auxiliary testing device;
[0022] The following are labeled in the diagram: 1. Support base; 2. Mounting groove; 3. Sliding plate; 4. Test probe; 5. Mounting block; 6. Rotating plate; 7. Mounting plate; 8. Limiting through hole; 9. Limiting block; 10. Magnetic bead; 11. Crucible to be tested. Detailed Implementation
[0023] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.
[0024] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.
[0025] Among existing methods for testing the radius (R) thickness of crucibles, using a Hall effect thickness gauge has significant advantages. This method is fast and does not damage the crucible. However, when using this method to test the R-corner thickness, the crucible needs to be manually rotated for more accurate measurement. If the central axis of the crucible cannot rotate along a plane during the rotation, the data displayed by the Hall effect thickness gauge will not accurately represent the R-corner thickness. Figure 1 As shown ( Figure 1 The crucible is only shown at the outer edge R-corner. Figure 1The crucible shape shown is not intended as a structural illustration of a conical crucible body not present in this application. The arrow indicates the location for the R-angle thickness test, and the arc is the arc of the longitudinal section along the outer edge of the crucible (see [link]). Figure 1 The two arrows at point A indicate the thickness value to be measured at the outer edge R-corner of the crucible, and the curve between the two dashed lines at point A is the arc mentioned above. This application provides an auxiliary testing device designed for crucibles with a certain taper, as follows:
[0026] Please refer to Figures 1-4 This utility model provides a device for measuring crucible thickness, which, in conjunction with a Hall effect thickness gauge, measures the thickness at the radius (R) of the crucible. The Hall effect thickness gauge includes a test probe 4 and a magnetic bead 10. The auxiliary testing device of this application includes a support base 1, with a mounting groove 2 on the top surface of the support base 1, which extends through the top surface of the support base 1. A sliding component for mounting the test probe 4 is provided inside the mounting groove 2, facilitating adjustment of the position of the test probe 4 and improving testing efficiency. A rotating component is provided on one side of the sliding component on the support base 1, and a mounting component for fixing the crucible is provided on the rotating component. The rotating component is used to rotate the mounting component and the crucible to be tested on the mounting component. A limiting component is fixedly provided on the top surface inside the mounting groove 2 between the rotating component and the sliding component for limiting and supporting the rotating component.
[0027] In the test state, the top of the test probe 4 is in contact with the bottom surface of the outer edge R corner of the crucible 11 to be tested, and the contact point between the top of the test probe 4 and the bottom surface of the outer edge R corner of the crucible 11 to be tested is always on an arc line where the outer edge R corner of the crucible 11 to be tested is located; in addition, the magnetic bead 10 is set on the top surface of the outer edge R corner of the crucible 11 to be tested, and works with the test probe 4 to measure the thickness at the outer edge R corner of the crucible 11 to be tested.
[0028] In a preferred embodiment, the sliding assembly includes a sliding plate 3 disposed inside the mounting groove 2; wherein, one of the sliding connection methods of the sliding plate 3 is that the two sides of the sliding plate 3 are respectively slidably connected to the two sides corresponding to the mounting groove 2; another sliding connection method of the sliding plate 3 is that the bottom surface of the sliding plate 3 is slidably connected to the bottom of the mounting groove 2; the test probe 4 is fixedly disposed on the top surface of the sliding plate 3 in the vertical direction, that is, the position of the test probe 4 is adjusted by adjusting the position of the sliding plate 3 in the mounting groove 2.
[0029] In a preferred embodiment, the rotating assembly includes mounting blocks 5 symmetrically fixed on the top surface of the support base 1, located on both sides of the mounting groove 2. A rotating plate 6 is rotatably arranged between the two mounting blocks 5. The rotation can be achieved by adding rotating shafts between the two sides of the rotating plate 6 and the two mounting blocks 5 respectively.
[0030] In a preferred embodiment, the mounting assembly includes two mounting plates 7 fixedly disposed on the side of the rotating plate 6 away from the limiting assembly. The mounting plates 7 are arranged parallel to each other, and both mounting plates 7 are perpendicular to the surface of the rotating plate 6. Limiting through holes 8 are provided on the surface of the mounting plates 6 corresponding to the conical crucible body. The diameters of the two limiting through holes 8 correspond to the outer diameters of the upper and lower sections of the conical crucible body, with the diameter of the upper limiting through hole 8 being larger than that of the lower limiting through hole 8. The conical crucible body passes through the two limiting through holes 8, i.e., the conical crucible body is fitted inside the two limiting through holes 8, thereby fixing and limiting the conical crucible body on the two mounting plates 7.
[0031] In a preferred embodiment, the limiting component includes a limiting block 9 fixedly disposed on the top surface of the mounting groove 2, located below the rotating plate 6 on the side near the sliding component, for limiting and supporting the rotating plate 6.
[0032] The working principle of this utility model:
[0033] During testing, the crucible 11 with a certain taper is inserted into the two limiting through holes 8, that is, the crucible 11 is fixed on the two mounting plates 7. Then, the sliding plate 3 is slid, which drives the test probe 4 on the sliding plate 3 to move. The test probe 4 moves to the bottom surface of the outer edge R corner of the crucible 11. Then, the magnetic bead 10 is placed on the top surface of the outer edge R corner of the crucible 11. By rotating the rotating plate 6 within a certain range, it is ensured that the test probe 4 and the magnetic bead 10 always collect data on the arc line where the outer edge R corner is located during the rotation of the crucible 11. The minimum value is selected as the thickness value at the outer edge R corner of the crucible 11.
[0034] In the description of this specification, the terms "connection," "installation," and "fixing," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0035] In the description of this specification, the terms "one embodiment," "some embodiments," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0036] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A device for measuring the thickness of a crucible, which is used in combination with a Hall-effect thickness gauge to measure the thickness of the crucible at the R corner, the Hall-effect thickness gauge comprising a test probe and a magnetic bead; characterized in that, The device includes a support base with a mounting groove on its top surface; a sliding assembly for mounting the test probe is disposed inside the mounting groove; a rotating assembly is disposed on one side of the sliding assembly on the support base, and a mounting assembly for fixing the crucible is disposed on the rotating assembly; a limiting assembly is fixedly disposed on the top surface inside the mounting groove between the rotating assembly and the sliding assembly for limiting and supporting the rotating assembly. In the test state, the top of the test probe is in contact with the bottom surface at the outer edge R-corner of the crucible to be tested, and the contact point between the top of the test probe and the bottom surface at the outer edge R-corner of the crucible to be tested is always on an arc line where the outer edge R-corner of the crucible to be tested is located, and the magnetic bead is attracted at the upper inner R-corner.
2. The apparatus for measuring the thickness of a crucible according to claim 1, wherein The sliding assembly includes a sliding plate disposed inside the mounting groove; the two sides of the sliding plate are slidably connected to the two sides corresponding to the mounting groove, or the bottom surface of the sliding plate is slidably connected to the bottom of the mounting groove; the test probe is fixed in the vertical direction on the top surface of the sliding plate.
3. The apparatus for measuring the thickness of a crucible according to claim 1, wherein The rotating assembly includes symmetrically fixed mounting blocks on the top surface of the support base located on both sides of the mounting groove, and a rotating plate is rotatably arranged between the two mounting blocks.
4. The apparatus for measuring the thickness of a crucible according to claim 3, wherein The mounting assembly includes two mounting plates fixedly disposed on one side of the rotating plate away from the limiting assembly. Both mounting plates are perpendicular to the surface of the rotating plate. Limiting through holes are provided on the surface of the mounting plates corresponding to the conical crucible body for fixing and limiting the conical crucible body on the two mounting plates.
5. The apparatus for measuring the thickness of a crucible according to claim 3, wherein The limiting component includes a limiting block fixedly disposed on the top surface of the mounting groove, located below the rotating plate on the side closer to the sliding component, for limiting and supporting the rotating plate.