Micro-nano imprinting device and micro-nano imprinting system

Abstract

A micro-nano imprinting device and a micro-nano imprinting system. The micro-nano imprinting device comprises a fixing part, an illumination part and a light shielding part. The fixing part is configured to fix an imprinting template, the imprinting template comprising a first surface and a second surface opposite to each other, and the first surface is provided with an imprinting pattern. The illumination part comprises a light source, the illumination part is located on one side of a reference plane away from the imprinting pattern, and the light source is configured to irradiate the imprinting template fixed by the fixing part. The light shielding part is arranged on the fixing part and located on one side of the reference plane away from the illumination part. The reference plane is a plane where the second surface of the imprinting template fixed by the fixing part is located, the light shielding part is in an annular structure, and the orthographic projection of the light source on the reference plane is in the enclosed area of the orthographic projection of the light shielding part on the reference plane. The micro-nano imprinting device integrates the fixing part, the illumination part and the light shielding part together, has high imprinting efficiency, and can perform multiple imprinting more efficiently. Meanwhile, under the shielding of the light shielding part, the splicing seam between adjacent patterns can be better reduced.

Description

Technical Field

[0001] Embodiments of this utility model relate to a micro-nano imprinting device and a micro-nano imprinting system. Background Technology

[0002] Nanoimprint lithography is a novel micro / nano fabrication technology that transfers micro / nano structures from a template onto the material to be processed. This technology achieves ultra-high resolution through mechanical transfer; simultaneously, the template can be reused, significantly reducing processing costs and effectively shortening processing time. It has become an important processing method in the fields of microelectronics and materials science, and is widely used in AR / VR, 3D displays, and various optical thin films.

[0003] The operation process of nanoimprinting is briefly described as follows: First, apply UV-curable adhesive or thermosetting adhesive to the template or the material to be processed. Then, press the template and the material to be processed together. Next, use UV light irradiation or heating according to different types of adhesives. Then, separate the template and the substrate. At this time, the micro-nano structure on the template is transferred to the material to be processed. Utility Model Content

[0004] In nanoimprinting, nanoimprinting is typically performed using either manually laid imprinting templates or by using photomasks. For example, using manually laid imprinting templates involves manually laying multiple templates onto a rigid substrate, then copying the imprinted pattern from the templates onto the substrate to complete the imprinting process. This method requires manual template laying, which is not only inefficient but also results in large gaps between the imprinted patterns and difficulty in proper alignment. Alternatively, using photomasks involves applying a curing adhesive to the substrate and then curing it using a mask. This method requires multiple steps to complete the imprinting process. Therefore, the degree of integration of the imprinting apparatus significantly impacts both the efficiency and the quality of the imprinted pattern.

[0005] At least one embodiment of this utility model provides a micro / nano imprinting device, comprising: a fixing part configured to fix an imprinting template, the imprinting template including a first surface and a second surface opposite to each other, the first surface being provided with an imprinting pattern; an illumination part including a light source, the illumination part being located on a reference plane away from the imprinting pattern, the light source being configured to illuminate the imprinting template fixed by the fixing part; and a light-shielding part disposed on the fixing part and located on the reference plane away from the illumination part, the reference plane being the plane on which the second surface of the imprinting template fixed by the fixing part is located, the light-shielding part having an annular structure, the orthographic projection of the light source on the reference plane being within the area enclosed by the orthographic projection of the light-shielding part on the reference plane.

[0006] For example, in a micro-nano imprinting device provided in one embodiment of the present invention, the material of the light-shielding part includes an elastic material.

[0007] For example, in a micro-nano imprinting device provided in one embodiment of the present invention, the material of the light-shielding part includes black rubber.

[0008] For example, in a micro-nano imprinting apparatus provided in one embodiment of the present invention, the side of the light-shielding portion that is farther from the reference plane is farther from the reference plane than the first surface of the imprinting template fixed by the fixing portion.

[0009] For example, in a micro-nano imprinting apparatus provided in an embodiment of the present invention, in a direction perpendicular to the reference plane, the distance between the side of the light-shielding part away from the reference plane and the first surface of the imprinting template fixed by the fixing part is 1 mm to 2 mm.

[0010] For example, in a micro-nano imprinting device provided in an embodiment of the present invention, the light-shielding part surrounds the imprinting template fixed by the fixing part and is in contact with the imprinting template.

[0011] For example, in a micro-nano imprinting device provided in an embodiment of the present invention, the fixing part is an adsorption structure, the adsorption structure has an adsorption surface, the adsorption structure is configured to adsorb the second surface of the imprinting template through the adsorption surface, and the adsorption surface is configured to be light-transmitting.

[0012] For example, the micro-nano imprinting apparatus provided in one embodiment of the present invention further includes a moving part, and the fixed part and the illumination part are connected to the moving part.

[0013] For example, the micro-nano imprinting apparatus provided in one embodiment of the present invention further includes a vision unit disposed on the moving unit and configured to acquire position information of positioning marks on the substrate to be imprinted.

[0014] At least one embodiment of the present invention provides a micro-nano imprinting system, including the micro-nano imprinting device described in any one of the above claims and an imprinting template fixed by the fixing part.

[0015] For example, in a micro-nano imprinting system provided in an embodiment of the present invention, a cured adhesive layer is provided on the side of the imprinting template away from the light-illuminated part, and the imprinting pattern is provided on the side of the cured adhesive layer away from the light-illuminated part.

[0016] The micro-nano imprinting device provided by this invention integrates a fixing part, an illumination part, and a light-shielding part into one unit, resulting in high imprinting efficiency and high precision of the imprinted pattern. Under the shielding effect of the light-shielding part, the seams between adjacent imprinted patterns are relatively small, effectively reducing seams and improving splicing accuracy. When performing multiple nanoimprinting operations, only the position of the imprinting template relative to the substrate to be imprinted needs to be adjusted; no other adjustments are required for repeated nanoimprinting. Therefore, not only is the imprinting efficiency high and the consistency of the imprinted pattern good, but it also eliminates the need to fabricate multiple imprinting templates. Furthermore, when imprinting with different imprinting templates, only the imprinting template needs to be replaced, making operation simple and convenient and improving the versatility of the micro-nano imprinting device. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings of the embodiments will be briefly introduced below. Obviously, the drawings described below only involve some embodiments of this utility model, and are not intended to limit this utility model.

[0018] Figure 1 This is a cross-sectional schematic diagram of a micro / nano imprinting device provided in an embodiment of the present invention;

[0019] Figure 2 for Figure 1 A bottom view of a portion of the structure of the micro / nano imprinting device shown;

[0020] Figure 3 A schematic diagram of another micro / nano imprinting device provided in an embodiment of this utility model; and

[0021] Figure 4 This is a schematic diagram of a pattern imprinted on a substrate by a micro-nano imprinting device provided in an embodiment of the present invention. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the described embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0023] Unless otherwise defined, the technical or scientific terms used in this invention shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect.

[0024] Unless otherwise defined, the features such as "parallel," "perpendicular," and "identical" used in the embodiments of this utility model include the strictly defined cases of "parallel," "perpendicular," and "identical," as well as cases that include a certain margin of error, such as "approximately parallel," "approximately perpendicular," and "approximately identical." For example, the aforementioned "approximately" may indicate that the difference between the compared objects is within 10% or 5% of the average value of the compared objects. Unless otherwise specified in the following embodiments of this utility model, the quantity of a component or element is implied; it means that the component or element may be one or more, or can be understood as at least one. "At least one" refers to one or more, and "more" refers to at least two.

[0025] In nanoimprinting, nanoimprinting typically involves either manually laying out imprinting templates or using photomasks. For example, using manual imprinting templates involves laying multiple templates onto a rigid substrate, then copying the imprinted pattern from the templates onto the substrate to complete the imprinting process. This method requires manual template laying, which is not only inefficient but also results in large gaps between the imprinted patterns and difficulty in proper alignment. Alternatively, using photomasks involves applying UV-curable adhesive to the substrate and then curing it using a shielding photomask. This method requires multiple steps to complete the imprinting process. Therefore, the degree of integration of the imprinting apparatus significantly impacts both the efficiency and the quality of the imprinted pattern.

[0026] To address this, this utility model provides a micro / nano imprinting apparatus and a micro / nano imprinting system. The micro / nano imprinting apparatus includes a fixing part, an illumination part, and a light-shielding part. The fixing part is configured to fix an imprinting template, which includes a first surface and a second surface facing each other. An imprinting pattern is formed on the first surface. The illumination part includes a light source, located on the side of a reference plane away from the imprinting pattern, and is configured to illuminate the imprinting template fixed by the fixing part. The light-shielding part is disposed on the fixing part and located on the side of the reference plane away from the illumination part. The reference plane is the plane containing the second surface of the imprinting template fixed by the fixing part. The light-shielding part has a ring-shaped structure, and the orthographic projection of the light source onto the reference plane is within the area enclosed by the orthographic projection of the light-shielding part onto the reference plane.

[0027] In the micro-nano imprinting apparatus provided in this embodiment, the fixing part is used to fix the imprinting template, the light source of the illumination part is used to cure the imprinted adhesive (e.g., ultraviolet light curable adhesive), and the annular light-shielding part is disposed on the fixing part, which can block the light source from illuminating the area outside the area surrounded by the light-shielding part, acting as an open mask to ensure that the adhesive outside the area surrounded by the light-shielding part will not be cured, so that the curing of the adhesive only occurs in the area directly below the imprinting template. This micro-nano imprinting apparatus integrates the fixing part, the illumination part, and the light-shielding part together. During micro-nano imprinting, the fixing part fixes the imprinting template and copies the imprinting pattern on the imprinting template onto the substrate to be imprinted. Then, the adhesive in the area directly below the imprinting template is cured by the light source, thereby completing one nanoimprinting process. With this micro-nano imprinting apparatus, it is not necessary to move the relative position of the imprinting template and the fixing part, nor is it necessary to adjust or move the illumination part and the light-shielding part during one nanoimprinting process. Therefore, the imprinting efficiency is high and the accuracy of the imprinted pattern is high. The light-shielding effect prevents the curing adhesive outside the area enclosed by the light-shielding part from curing, resulting in smaller seams between adjacent imprinted patterns, effectively reducing seams and improving splicing accuracy. When performing multiple nanoimprintings on the substrate, only the position of the imprinting template relative to the substrate needs adjustment; no other adjustments are required for repeated nanoimprinting. Therefore, not only is the imprinting efficiency high and the consistency of the imprinted patterns good, but it also eliminates the need to fabricate multiple imprinting templates. Furthermore, when imprinting with different imprinting templates, only the imprinting template needs to be replaced, simplifying operation and improving the versatility of this micro / nano imprinting device.

[0028] The micro-nano imprinting device and micro-nano imprinting system provided in the embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0029] One embodiment of this utility model provides a micro-nano imprinting device. Figure 1 This is a cross-sectional schematic diagram of a micro / nano imprinting device provided in an embodiment of the present invention; Figure 2 for Figure 1 The diagram shows a partial top view of the micro / nano imprinting device. (See attached image.) Figure 1 and Figure 2 As shown, the micro / nano imprinting apparatus 100 includes a fixing part 110, an illumination part 120, and a light-shielding part 130. The fixing part 110 is configured to fix an imprinting template 210, which includes a first surface 211 and a second surface 212 facing each other. An imprinting pattern 213 is provided on the first surface 211. The illumination part 120 includes a light source 121, located on the side of the reference plane P away from the imprinting pattern 213. The light source 121 is configured to illuminate the imprinting template 210 fixed by the fixing part 110. The light-shielding part 130 is disposed on the fixing part 110 and located on the side of the reference plane P away from the illumination part 120. The reference plane P is the plane containing the second surface 212 of the imprinting template 210 fixed by the fixing part 110. The light-shielding part 130 has a ring structure, and the orthographic projection of the light source 121 onto the reference plane P is within the area enclosed by the orthographic projection of the light-shielding part 130 onto the reference plane P. It should be noted that... Figure 2 The light-shielding part 130 and the embossing template 210 are shown only schematically, while other structures such as the embossing pattern 213 are omitted.

[0030] In the micro-nano imprinting apparatus 100 provided in this embodiment of the present invention, the fixing part 110 is used to fix the imprinting template 210, the light source 121 of the illumination part 120 is used to cure the imprinted curing adhesive (e.g., ultraviolet curing adhesive), and the annular light-shielding part 130 is disposed on the fixing part 110, which can block the area outside the area surrounded by the light source 121 from being irradiated, and acts as an open mask to ensure that the curing adhesive outside the area surrounded by the light-shielding part 130 will not be cured, so that the curing of the curing adhesive only occurs in the area directly below the imprinting template 210. The micro-nano imprinting apparatus 100 integrates the fixing part 110, the illumination part 120 and the light-shielding part 130 together. During micro-nano imprinting, the fixing part 110 fixes the imprinting template 210 and copies the imprinting pattern 213 on the imprinting template 210 onto the substrate to be imprinted, and then the curing adhesive in the area directly below the imprinting template 210 is cured by the light source 121, thereby completing one nanoimprinting process. With this micro / nano imprinting device 100, during a single nanoimprinting process, it is not necessary to move the relative positions of the imprinting template 210 and the fixing part 110, nor is it necessary to adjust or move the illumination part 120 and the light-shielding part 130. Therefore, the imprinting efficiency is high, and the accuracy of the imprinted pattern is high. Under the shielding effect of the light-shielding part 130, the curing adhesive outside the area surrounded by the light-shielding part 130 can be prevented from curing. Therefore, the seams between adjacent imprinted patterns are smaller, effectively reducing seams and improving seam accuracy. When performing multiple nanoimprintings on the substrate to be imprinted, only the position of the imprinting template 210 relative to the substrate needs to be adjusted; no other adjustments are required to repeat the nanoimprinting process. Therefore, not only is the imprinting efficiency high and the consistency of the imprinted pattern good, but it also eliminates the need to fabricate multiple imprinting templates 210. Meanwhile, when imprinting with different imprint templates 210, only the imprint template 210 needs to be replaced, which not only makes the operation simple and convenient, but also improves the versatility of the micro-nano imprinting device 100.

[0031] In some examples, such as Figure 1 and Figure 2 As shown, the material of the light-shielding part 130 includes an elastic material. Therefore, the elastic light-shielding part 130 can absorb assembly errors between the light-shielding part 130 and the imprinting template 210, which is beneficial for the assembly of the imprinting template 210 and the fixation of the imprinting template 210 by the fixing part 110; the elastic light-shielding part 130 can be easily installed onto the fixing part 110, and can be easily replaced when needed; during the imprinting process, the elastic light-shielding part 130 will not damage the substrate to be imprinted; the elastic light-shielding part 130 also has the advantages of low cost and light weight, which can reduce the cost of the micro-nano imprinting device 100 and facilitate device maintenance. Of course, this embodiment of the invention does not limit the material of the light-shielding part 130.

[0032] For example, the material of the light-shielding part 130 can be a porous elastic material. For example, the light-shielding part 130 can be a sponge.

[0033] In some examples, such as Figure 1 and Figure 2 As shown, the material of the light-shielding part 130 includes black rubber. Therefore, the light-shielding part 130 can better block the light irradiated by the light source 121, preventing the cured adhesive outside the area surrounded by the light-shielding part 130 from curing. Consequently, the seams between adjacent embossed patterns can be smaller, effectively reducing seams and improving splicing accuracy. For example, the light-shielding part 130 can be made of sponge rubber, etc.

[0034] For example, the material of the light-shielding part 130 may also include metal. For example, the light-shielding part 130 may be made of the same material as the fixing part 110. For example, the light-shielding part 130 may be integrally formed with the fixing part 110.

[0035] In some examples, such as Figure 1 and Figure 2 As shown, the side of the light-shielding portion 130 of the micro / nano imprinting apparatus 100 that is farther from the reference plane P is further away from the first surface 211 of the imprinting template 210 fixed by the fixing portion 110 than the reference plane P. Therefore, when the material of the light-shielding portion 130 is an elastic material, the light-shielding portion 130 can better block the light emitted by the light source 121. For example, it can also better block the diffraction of light generated at the edge of the light-shielding portion 130, thereby reducing the seam between two adjacent imprinted patterns on the substrate to be imprinted and improving the splicing efficiency. At the same time, it can also prevent the cured adhesive from overflowing from the edge of the light-shielding portion 130 when the imprinting template 210 and the substrate to be imprinted are bonded, reducing the impact on the thickness of the cured adhesive at the edge of the light-shielding portion 130, thereby improving the quality of the imprinted pattern.

[0036] In some examples, such as Figure 1 and Figure 2 As shown, in the direction perpendicular to the reference plane P, the distance L between the side of the light-shielding part 130 away from the reference plane P and the first surface 211 of the imprint template 210 fixed by the fixing part 110 is 1 mm to 2 mm. For example, the distance L can be 1 mm, 1.2 mm, 1.5 mm, 1.7 mm, or 2 mm. Of course, this embodiment of the present invention does not limit the value of the distance L, and it can be designed and matched according to the specific parameters of the micro-nano imprint apparatus 100.

[0037] In some examples, such as Figure 1 and Figure 2As shown, the light-shielding part 130 surrounds the imprinting template 210 fixed by the fixing part 110 and fits into the imprinting template 210. Therefore, the design of the light-shielding part 130 fitting into the imprinting template 210 allows the light-shielding part 130 to better block the light irradiated by the light source 121, and allows the splicing seam between adjacent imprinted patterns to be smaller, which can effectively reduce the splicing seam and improve the splicing accuracy.

[0038] In some examples, such as Figure 1 As shown, the fixing part 110 can be an adsorption structure with an adsorption surface 111. The adsorption structure is configured to adsorb the second surface 212 of the imprinting template 210 through the adsorption surface 111, and the adsorption surface 111 is configured to be light-transmitting. Therefore, the adsorption structure can better fix the imprinting template 210, allowing it to fit evenly and tightly against the adsorption surface 111. This results in a more uniform imprinted pattern copied onto the substrate, improving imprinting efficiency and the accuracy of the imprinted pattern. Furthermore, the adsorption structure allows for convenient replacement of the imprinting template 210.

[0039] In some examples, such as Figure 1 As shown, the fixing part 110 can be a vacuum chamber. Multiple vacuum holes 111a can be provided on the side of the vacuum chamber near the impression template 210, allowing the impression template 210 to be adsorbed onto the vacuum chamber through these holes. The material on the side of the vacuum chamber near the impression template 210 can be a light-transmitting material, allowing the light source 121 to pass through this side of the vacuum chamber to cure the adhesive.

[0040] For example, such as Figure 1 As shown, multiple vacuum holes 111a can be uniformly arranged on the side of the vacuum chamber near the imprint template 210. As a result, the second surface 212 of the imprint template 210 can be subjected to a more uniform adsorption force, thereby allowing it to adhere more evenly and tightly to the adsorption surface 111.

[0041] In some examples, such as Figure 1 As shown, the material on the side of the vacuum chamber closest to the imprinting template 210 can be transparent optical glass or transparent acrylic. Of course, this embodiment of the invention does not limit the material used.

[0042] In some examples, such as Figure 1As shown, the illumination section 120 can be disposed within the vacuum chamber, thereby allowing the light source 121 of the illumination section 120 to pass through the side of the vacuum chamber near the imprinting template 210 to cure the adhesive. Of course, this embodiment of the invention does not limit the position of the illumination section 120. For example, it can also be disposed outside the vacuum chamber. In this case, the material on the side of the vacuum chamber near the illumination section 120 is a light-transmitting material, thereby allowing the light source 121 of the illumination section 120 to pass through the vacuum chamber to cure the adhesive.

[0043] In some examples, such as Figure 1 As shown, the micro-nano imprinting apparatus 100 also includes a movable part 140, a fixed part 110, and an illumination part 120 connected to the movable part 140. Thus, the fixed part 110, the imprinting template 210 fixed by the fixed part 110, and the illumination part 120 can be moved by the movable part 140.

[0044] In some examples, such as Figure 1 As shown, the moving part 140 can have multiple degrees of freedom. For example, the moving part 140 can have three degrees of freedom of movement and three degrees of freedom of rotation in space. Therefore, the movement of the imprinting template 210 can be controlled more precisely by the moving part 140, thereby improving splicing accuracy and imprinting efficiency.

[0045] In some examples, such as Figure 1 As shown, the moving part 140 can be a robotic arm. For example, the robotic arm has six degrees of freedom in space. Of course, the form of the moving part 140 is not limited in this embodiment of the invention. For example, the moving part 140 can also be a structure that moves via multiple guide rails in different directions.

[0046] In some examples, such as Figure 1 As shown, the micro / nano imprinting apparatus 100 also includes a vision unit 150, which is disposed on the moving unit 140 and configured to acquire position information of positioning marks on the substrate to be imprinted. Thus, the vision unit 150 can acquire position information of positioning marks on the substrate to be imprinted, and then the moving unit 140 can be controlled to move according to this position information, so that the imprinting template 210 is aligned with the substrate to be imprinted. This not only allows for more efficient imprinting but also improves the splicing accuracy between adjacent imprinted patterns, avoiding problems such as misalignment and large gaps between adjacent imprinted patterns.

[0047] For example, the micro-nano imprinting device 100 may also be provided with positioning marks corresponding to the positioning marks on the substrate to be imprinted. When the two positioning marks coincide, the imprinting template 210 can be made to fit with the substrate to be imprinted.

[0048] In some examples, such as Figure 1As shown, the vision unit 150 can be a CCD system. Of course, this embodiment of the invention does not limit the form of the vision unit 150; for example, the vision unit 150 can also be an optical microscope. Furthermore, this embodiment of the invention does not limit the position of the vision unit 150 on the moving part 140.

[0049] In some examples, such as Figure 1 As shown, the light source 121 of the micro / nano imprinting device 100 can be an ultraviolet light-emitting diode (UV LED), and correspondingly, the curing adhesive is an ultraviolet light-curing adhesive. For example, the wavelength and power of the UV LED can be selected according to the composition of the UV light-curing adhesive. For example, the switching time and on-time of the light source 121 can also be controlled to better control the curing of the UV light-curing adhesive.

[0050] The composition of the UV-curable adhesive in this embodiment is not limited.

[0051] Figure 3 This is a schematic diagram of another micro / nano imprinting device provided in an embodiment of the present invention. Figure 3 As shown, the fixing part 110 of the micro-nano imprinting device 100 can be a clamping structure. Therefore, the clamping structure not only clamps and fixes the imprinting template 210, but also allows for the replacement of imprinting templates 210 of different sizes simply by adjusting the opening size of the clamping structure, thus making the micro-nano imprinting device 100 more versatile. Of course, this invention does not limit the structure and form of the fixing part 110; for example, it can also be connected to the imprinting template 210 by a detachable method such as screwing or snap-fitting.

[0052] It should be noted that, Figure 3 The micro-nano imprinting apparatus 100 shown differs from the structure of the fixing part 110 in the micro-nano imprinting apparatus 100 described above, except that the structure of the fixing part 110 is different from that in the micro-nano imprinting apparatus 100 described above. All other structural features provided by any of the above embodiments are applicable to this embodiment, and therefore have corresponding beneficial technical effects, which will not be repeated here.

[0053] In some examples, such as Figure 3 As shown, the clamping structure may include at least two clamping units 112. For example, the clamping structure may include four clamping units 112, located on the four sides of the impression template 210 respectively.

[0054] In some examples, such as Figure 3As shown, the clamping structure has a stepped structure at the position where it fits against the side wall of the impression template 210, thereby better clamping the impression template 210. Of course, this embodiment of the invention is not limited to this; for example, this structure may be omitted. For example, the clamping structure may have concave-convex structures on the side wall of the impression template 210 that mate with the side wall of the impression template 210, thereby better clamping and applying pressure to the impression template 210. Of course, this embodiment of the invention is not limited to the clamping structure.

[0055] In some examples, such as Figure 3 As shown, the light-shielding part 130 can be provided on the clamping structure and located on the side of the reference plane P away from the light-illuminating part 120.

[0056] In some examples, such as Figure 3 As shown, the fixing part 110 may further include a pressure plate 112, which is attached to the imprinting template 210. The material of the pressure plate 112 is a light-transmitting material. For example, the material of the pressure plate 112 may be transparent optical glass. Thus, the pressure plate 112 can be used to more evenly replicate the imprinting pattern 213 on the imprinting template 210 onto the substrate to be imprinted. Of course, this embodiment of the invention does not limit the cooperation structure between the pressure plate 112, the imprinting template 210, and the clamping structure.

[0057] Figure 4 This is a schematic diagram illustrating a pattern imprinted on a substrate by a micro / nano imprinting apparatus according to an embodiment of the present invention. Figure 4 As shown, a plurality of positioning marks 11 are provided on the substrate 10 to be imprinted. The vision unit 150 on the micro-nano imprinting device 100 can acquire the position information of the positioning marks 11 on the substrate 10 to be imprinted, and control the fixing unit 110 to move according to the acquired position information, so that the imprinting template 210 moves to the designated position to replicate the imprinting pattern. After completing one imprinting pattern replication, the vision unit 150 on the micro-nano imprinting device 100 acquires the position information of the next positioning mark 11 again to perform a second imprinting pattern replication. Figure 4 The diagram only schematically shows four positioning marks 11 and the imprinted pattern formed on the substrate 10 after four imprinting processes. In practice, multiple positioning marks 11 can be set as needed, and multiple imprinted patterns can be replicated. Thus, this micro-nano imprinting device 100 can efficiently form multiple imprinted patterns, and the seams between adjacent imprinted patterns can be controlled to be very small. At the same time, adjacent imprinted patterns are arranged neatly, improving the utilization rate of the substrate 10 and increasing the imprinting efficiency.

[0058] In some examples, such as Figure 4 As shown, the substrate 10 to be imprinted can be a rigid substrate or a flexible substrate, and this embodiment of the present invention does not limit this.

[0059] An embodiment of this utility model also provides a micro-nano imprinting system. This micro-nano imprinting system includes the micro-nano imprinting device 100 provided in any of the above embodiments and an imprinting template 210 fixed by a fixing part 110. Therefore, this micro-nano imprinting system has the beneficial effects corresponding to those of the micro-nano imprinting device 100, which will not be elaborated further here.

[0060] In some examples, a cured adhesive layer is provided on the side of the embossing template 210 away from the light-receiving portion 120, and an embossing pattern 213 is provided on the side of the cured adhesive layer away from the light-receiving portion 120. Of course, the present invention does not limit the formation method of the embossing pattern 213.

[0061] For example, the cured adhesive layer can be treated to have anti-stick properties. As a result, the embossing template 210 can better separate from the substrate to be embossed after the embossing process is completed, thus improving the forming quality of the embossed pattern.

[0062] In some examples, the imprinting template 210 is made of a transparent optical material. For example, the imprinting template 210 can be made of transparent optical glass, PET, PC, etc. Of course, this embodiment of the invention does not limit the material of the imprinting template 210.

[0063] In some examples, photoresist can be applied to the imprinting template 210. For instance, photoresist can be applied to the imprinting template 210 via a spin coating process. In this case, the imprinting template 210 needs to be transferred from the micro / nano imprinting device 100 to the spin coating device, and then transferred back to the micro / nano imprinting device 100 after coating. The fixing part 110, which employs an adsorption structure or a clamping structure, allows for convenient assembly and disassembly of the imprinting template 210. Alternatively, photoresist can be applied to the substrate to be imprinted, thereby improving the efficiency of imprinting. This embodiment of the invention does not limit the method or location of photoresist application.

[0064] The following points need to be explained:

[0065] (1) The accompanying drawings of the embodiments of this utility model only involve the structures involved in the embodiments of this utility model. Other structures can be referred to the general design.

[0066] (2) Where there is no conflict, the features of the same embodiment and different embodiments of the present invention can be combined with each other.

[0067] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A micro-nanoimprint apparatus, characterized by, include: The fixing part is configured to fix the embossing template, the embossing template including a first surface and a second surface opposite to each other, and an embossing pattern is provided on the first surface; The illumination section includes a light source, the illumination section being located on the side of the reference plane away from the embossed pattern, and the light source being configured to illuminate the embossed template fixed by the fixing section; as well as A light-shielding part is provided on the fixing part and located on the side of the reference plane away from the illumination part. The reference plane is the plane on which the second surface of the imprint template is fixed by the fixing part, the light-shielding part is a ring structure, and the orthographic projection of the light source on the reference plane is within the area enclosed by the orthographic projection of the light-shielding part on the reference plane.

2. The micro-nano imprinting device according to claim 1, wherein The material of the light-shielding part includes an elastic material.

3. The micro-nanoimprint apparatus according to claim 2, wherein The material of the light-shielding part includes black rubber.

4. The micro-nano imprinting device according to claim 2, wherein The side of the light-shielding portion that is farther from the reference plane is farther from the reference plane than the first surface of the embossing template that is fixed by the fixing portion.

5. The micro-nanoimprint apparatus according to claim 4, wherein In a direction perpendicular to the reference plane, the distance between the side of the light-shielding part away from the reference plane and the first surface of the imprinting template fixed by the fixing part is 1 mm to 2 mm. 6.The micro-nano imprinting device according to claim 1, wherein The light-shielding part surrounds the embossing template fixed by the fixing part and fits against the embossing template. 7.The micro-nano imprinting device according to claim 1, wherein The fixing part is an adsorption structure, the adsorption structure has an adsorption surface, the adsorption structure is configured to adsorb the second surface of the imprint template through the adsorption surface, and the adsorption surface is configured to be light-transmitting.

8. The micro-nanoimprint apparatus according to any one of claims 1 to 7, wherein It also includes a movable part, and the fixed part and the illumination part are connected to the movable part. 9.The micro-nano imprinting device according to claim 8, wherein, It also includes a vision unit, which is disposed on the moving part and configured to acquire position information of the positioning marks on the substrate to be imprinted.

10. The micro / nano imprinting apparatus according to claim 1, characterized in that, The light source is an ultraviolet light-emitting diode.

11. A micro-nanoimprint system, characterized in that, It includes the micro-nano imprinting apparatus according to any one of claims 1-10 and the imprinting template fixed by the fixing part.

12. The micro-nanoimprint system of claim 11, wherein, A cured adhesive layer is provided on the side of the embossing template away from the light source, and the embossing pattern is provided on the side of the cured adhesive layer away from the light source.

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