Thermocouple device and machining apparatus

Abstract

The utility model provides a kind of thermocouple device and processing equipment, it is related to battery piece processing technical field, thermocouple device includes thermal couple and fixed base, the opposite ends of the thermal couple are working end and cold end;Fixed base is sleeved on the thermal couple;Wherein, the thermal couple and the fixed base one of them is equipped with limit groove, the other is equipped with the limit piece compatible with the limit groove, the limit piece slides in the limit groove, to drive the thermal couple and the fixed base relative motion;Thermocouple device of the embodiment, by the one of fixed base and thermal couple setting sliding slot, the other of them is set in the limit piece compatible with sliding slot, limit piece moves along the direction of extension of sliding slot under the guidance of sliding slot, thermal couple relative fixed base makes linear reciprocating motion between in furnace and outside furnace, so that the working end of thermocouple device is difficult to contact with the component of furnace body inner wall and short circuit, and the working of thermocouple is stable and reliable.

Description

Technical Field

[0001] This utility model relates to the field of battery cell processing technology, and in particular to a thermocouple device and processing equipment. Background Technology

[0002] Thermocouples are common temperature sensing elements. One end of a thermocouple is the working junction, and the other end is the cold junction. The working junction is connected to the medium being measured, and the cold junction is connected to a display instrument, which indicates the temperature of the medium being measured. Typically, thermocouples are configured to move linearly back and forth between the inside and outside of the furnace to accurately measure the temperature inside the furnace.

[0003] However, during the process of inserting the thermocouple into the furnace, the thermocouple may come into contact with components inside the furnace and short-circuit, affecting the normal operation of the thermocouple and resulting in poor working stability.

[0004] In view of this, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0005] The purpose of this invention is to provide a thermocouple device and processing equipment with high operational stability.

[0006] To achieve the above objectives, the present invention employs the following technical means:

[0007] A first aspect of this utility model provides a thermocouple device, comprising:

[0008] A thermocouple has two opposite ends: the working junction and the cold junction.

[0009] A mounting bracket is fitted onto the thermocouple.

[0010] The thermocouple and the fixed base are both provided with a limiting groove, and the other is provided with a limiting member that is adapted to the limiting groove. The limiting member slides in the limiting groove to drive the thermocouple and the fixed base to move relative to each other.

[0011] Optionally, the limiting element is sleeved on the thermocouple, and the limiting groove is provided on the fixed seat and extends along the axial direction of the fixed seat;

[0012] The thermocouple also includes a limiting part, which is fixedly disposed on the thermocouple and disposed near the cold end of the thermocouple relative to the limiting member; the limiting member and the fixed seat are interference fit, and the two opposing contact surfaces of the limiting member and the fixed seat are rough surfaces.

[0013] Optionally, the fixed base can switch between working and adjustment states; in the working state, both the limiting part and the limiting member are fixedly connected to the fixed base; in the adjustment state, the limiting part can move closer to or further away from the limiting member.

[0014] Optionally, a first opening is provided on the fixing base, through which a fastener passes and abuts against the limiting part; a second opening is provided on the fixing base, through which another fastener passes and abuts against the limiting part.

[0015] Optionally, the thermocouple also includes an insulating element disposed near the working end of the thermocouple.

[0016] Optionally, the thermocouple also includes an elastic part, one end of which is fixedly connected to the cold end of the thermocouple, and the other end abuts against the limiting member, having a tendency to push the limiting member toward the furnace.

[0017] Optionally, at least one opening is provided on the periphery of the mounting base.

[0018] Optionally, the mounting base has two opposing positioning ports in the direction of the working end of the thermocouple.

[0019] Optionally, the limiting member is fixedly connected to the thermocouple, and the limiting groove is provided in the fixed seat and extends along the axial direction of the fixed seat.

[0020] The second aspect of this utility model provides a processing device, including a furnace body and a thermocouple device as described above. The furnace body is provided with a positioning seat, and the thermocouple device is detachably connected to the furnace body through the positioning seat.

[0021] Optionally, the positioning seat is located on the periphery of the furnace body, and a third opening is provided on the positioning seat. Fasteners are inserted through the third opening to abut against the thermocouple, so as to fix the thermocouple device and the positioning seat.

[0022] Optionally, the furnace body has several temperature zones along its axial direction, and several positioning seats are provided on the periphery of the furnace body at intervals along the axial direction of the furnace body, with each positioning seat corresponding to a temperature zone.

[0023] Compared with the prior art, this utility model brings the following technical effects:

[0024] In this embodiment, the thermocouple device has a sliding groove on one of the fixed base and the thermocouple, and a limiting member adapted to the sliding groove on the other. The limiting member moves along the direction of the sliding groove under the guidance of the sliding groove. The thermocouple moves back and forth in a straight line between the fixed base and the furnace. As a result, the working end of the thermocouple device is unlikely to come into contact with the components on the inner wall of the furnace and short-circuit. The thermocouple device works stably and reliably. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 The following are schematic diagrams of the thermocouple devices according to some embodiments of the present invention;

[0027] Figure 2 A perspective view of a thermocouple device according to some embodiments of the present invention is shown;

[0028] Figure 3 A schematic diagram showing the relative positions of the thermocouple and the mounting base in some embodiments of this utility model is provided.

[0029] Figure 4 A schematic diagram showing the relative positions of the thermocouple and the mounting base in some embodiments of this utility model is provided.

[0030] Figure 5 A schematic diagram showing the relative positions of the thermocouple and the mounting base in some embodiments of this utility model is provided.

[0031] Figure 6 The diagram shows a usage scenario of a thermocouple device according to some embodiments of the present invention;

[0032] Figure 7 It shows Figure 6 A magnified view of a portion of the image;

[0033] Figure 8 A schematic diagram of the temperature zone distribution of the furnace in some embodiments of this example is shown.

[0034] Explanation of key component symbols:

[0035] 100-Thermocouple device; 200-Processing equipment; 210-Furnace body; 220-Positioning seat; 221-Third opening; 10-Thermocouple; 10a-Cold junction; 10b-Working end; 11-Limiting component; 12-Limiting part; 13-Insulating component; 14-Elastic part; 20-Fixed seat; 21-Limiting groove; 22-First opening; 23-Second opening; 24-Opening; 25-Positioning port. Detailed Implementation

[0036] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0037] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other. The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0038] Please see Figure 1 and Figure 2 The first aspect of this utility model provides a thermocouple device 100 for accurately measuring the temperature inside a furnace body 210. The thermocouple device 100 includes a thermocouple 10 and a fixing seat 20. The fixing seat 20 is sleeved on the thermocouple 10. One of the thermocouple 10 and the fixing seat 20 is provided with a sliding groove, and the other is provided with a limiting member 11 adapted to the sliding groove. The limiting member 11 slides in the sliding groove to allow relative movement between the thermocouple 10 and the fixing seat 20.

[0039] In this embodiment, the thermocouple device 100 has a sliding groove provided on one of the fixed base 20 and the thermocouple 10, and a limiting member 11 adapted to the sliding groove on the other. The limiting member 11 moves along the direction of the sliding groove under the guidance of the sliding groove. The thermocouple 10 moves back and forth in a straight line between the fixed base 20 and the furnace. As a result, the working end 10b of the thermocouple device 100 is unlikely to come into contact with the heating wire on the inner wall of the furnace body 210 and short-circuit. The thermocouple device 100 works stably and reliably.

[0040] The thermocouple 10 has a working junction 10b and a cold junction 10a at its two opposite ends. The working junction 10b measures the temperature inside the furnace body 210. The two thermocouple electrodes of the thermocouple 10 are connected to form a circuit. When the temperatures of the two junctions are different, a thermoelectric potential is generated in the circuit. The cold junction 10a is connected to an external display instrument (not shown), which displays the thermoelectric potential generated by the thermocouple 10, thereby allowing the temperature inside the furnace body 210 to be measured through the thermocouple 10. It should be noted that the working junction 10b and cold junction 10a of the thermocouple 10 are also the working junction 10b and cold junction 10a of the entire thermocouple device 100.

[0041] The processing equipment 200 is a furnace body capable of completing processes such as diffusion, oxidation, annealing, doping, PECVD (Plasma Enhanced Chemical Vapor Deposition), and LPCVD (Low Pressure Chemical Vapor Deposition) in the photovoltaic industry.

[0042] In one specific embodiment, the limiting member 11 is sleeved on the thermocouple 10, and the inner wall of the fixing seat 20 is provided with a sliding groove extending along the axial direction of the fixing seat 20. Specifically, the limiting member 11 is a protruding disc, or it can be a slider extending in the direction of the sliding groove. The fixing seat 20 is generally cylindrical, and the direction of the sliding groove is the axial direction of the cylinder.

[0043] In one specific embodiment, the thermocouple 10 further includes a limiting part 12, which is fixedly connected to the thermocouple 10. A limiting member 11 is disposed on the thermocouple 10, and the limiting part 12 is disposed closer to the cold end 10a of the thermocouple 10 than the limiting member 11.

[0044] The limiting part 12 is a step with a diameter slightly larger than that of the thermocouple 10.

[0045] The limiting member 11 is interference-fitted with the fixed base 20. The two contact surfaces of the limiting member 11 and the thermocouple 10 are rough surfaces, so that there is a certain friction between the limiting member 11 and the thermocouple 10.

[0046] In addition, the limiting member 11 is detachably connected to the thermocouple 10, that is, the limiting member 11 can be installed or removed from the thermocouple 10 as a separate part.

[0047] It should be noted that when the force applied to the limiting member 11 by the thermocouple 10 as it moves into the furnace is less than the frictional force between them, the thermocouple 10 and the limiting member 11 remain relatively stationary, and the limiting member 11 moves synchronously with the thermocouple 10. When the limiting member 11 moves to the limit position of the limiting groove 21, the limiting groove 21 applies a thrust to the limiting member 11 in the same direction as the thermocouple 10's movement into the furnace. At this point, the resultant force formed by the thrust of the limiting groove 21 on the limiting member 11 and the force of the thermocouple 10 on the limiting member 11 is greater than the frictional force between the limiting member 11 and the thermocouple 10, and the limiting member 11 and the thermocouple 10 begin to move relative to each other.

[0048] Please see Figures 3-5 This demonstrates the process of thermocouple 10 moving towards the furnace to its maximum length. Furthermore, it illustrates the changes in the positional relationship between the limiting member 11 and the slide groove, the positional relationship between the limiting member 11 and the limiting part 12, and the connection method between the limiting member 11 and the thermocouple 10 during this process. Figures 3-5The arrow in the diagram indicates the direction of movement of thermocouple 10, that is, thermocouple 10 moves towards the furnace.

[0049] Please see Figure 3 When thermocouple 10 moves towards the furnace, it drives limiting member 11 to move synchronously until limiting member 11 reaches the limit position of the slide groove. Then, limiting part 12 moves towards limiting member 11 under the influence of thermocouple 10. Please refer to... Figure 4 As the thermocouple 10 continues to move into the furnace, the limiting member 11 is limited by the sliding groove, causing slippage between the limiting member 11 and the thermocouple 10. That is, as the thermocouple 10 continues to move into the furnace, the limiting member 11 stops at the extreme end position of the sliding groove. The limiting part 12 continues to move towards the limiting member 11 under the influence of the thermocouple 10. Please refer to... Figure 5 When the limiting part 12 abuts against the limiting member 11 under the action of the thermocouple 10, the thermocouple 10 can no longer move further into the furnace, thereby limiting the extension length of the thermocouple 10 inside the furnace. At this time, the extension length of the thermocouple 10 inside the furnace reaches its maximum.

[0050] The thermocouple device 100 of this embodiment provides a limiting part 12 on the thermocouple 10 and creates a certain friction between the thermocouple 10 and the limiting member 11, thereby allowing the thermocouple 10 to have a longer extension distance without increasing the length of the slide. Furthermore, by having the limiting part 12 abut against the limiting member 11, the movement of the thermocouple 10 further toward the furnace is restricted, effectively controlling the maximum length of the thermocouple 10 extending into the furnace.

[0051] As an alternative embodiment, the limiting member 11 is magnetically connected to the thermocouple 10. For example, the limiting member 11 has a magnetic element on the side facing the thermocouple 10, and the contact portion between the thermocouple 10 and the limiting member 11 is made of a magnetic material.

[0052] Magnetic materials can generally be Fe, Co, Ni elements and their alloys, rare earth elements and their alloys.

[0053] The magnetic attraction between the magnetic component and the magnetic material enables the synchronous movement of the limiting component 11 and the thermocouple 10. Furthermore, after the limiting component 11 reaches the limit position of the limiting groove 21, the resultant force of the thrust of the groove wall of the limiting groove 21 and the thrust of the thermocouple 10 continuing to move is greater than the magnetic attraction force, and the limiting component 11 moves relative to the thermocouple 10.

[0054] In other alternative embodiments, the limiting member 11 is fixedly connected to the thermocouple 10.

[0055] Specifically, please refer to Figure 3 When thermocouple 10 moves towards the furnace, it will cause the limiting member 11 to move synchronously. Please refer to [link / reference]. Figure 4As the thermocouple 10 continues to move toward the furnace, it continues until the limiting member 11 reaches the limit position of the slide groove. The movement of the limiting member 11 is limited by the slide groove, and the thermocouple 10 stops moving toward the furnace.

[0056] In other words, when the limiting member 11 is fixedly connected to the thermocouple 10, the thermocouple 10 reaches its maximum extension length in the furnace body 210 when the limiting member 11 moves to the limit position of the limiting groove 21.

[0057] Please refer to it again. Figure 1 and Figure 2 In one specific embodiment, the fixing base 20 further includes a first opening 22 and a second opening 23, through which a fastener (not shown) passes through the first opening 22 and abuts against the limiting part 12, and through which another fastener (not shown) passes through the second opening 23 and abuts against the limiting member 11.

[0058] In one specific embodiment, the thermocouple device 100 has an adjustment state and an operating state, and can switch between the adjustment state and the operating state.

[0059] In the adjustment state, the thermocouple 10 slides in the limiting groove 21 via the limiting member 11 to adjust its length extending into or out of the furnace body 210. For example, when the thermocouple 10 extends too deep into the furnace, it is controlled to move towards the outside of the furnace. When the thermocouple 10 extends too shortly into the furnace, it is moved further into the furnace.

[0060] In operation, after the thermocouple 10 is adjusted to a suitable length, one of its fasteners passes through the first opening 22 to abut against the limiting part 12, and the other fastener passes through the second opening 23 to abut against the limiting part 11, so as to fix the thermocouple 10 in the fixing base 20.

[0061] The thermocouple device 100 in this embodiment can switch between the adjustment state and the working state by simply removing and installing two fasteners. It has a simple and reliable structure and is easy and quick to disassemble.

[0062] In one specific embodiment, the thermocouple device 100 further includes an insulating member 13 disposed near the working end 10b of the thermocouple device 100.

[0063] The insulating member 13 is positioned closer to the working end 10b of the thermocouple device 100 than the limiting member 11. The insulating member 13 is made of a high-temperature resistant insulating material, which can be ceramic or tile.

[0064] In this embodiment, the thermocouple device 100, through the insulating member 13 installed outside the thermocouple 10, can prevent the working end 10b of the thermocouple device 100 from directly contacting the heating wire and causing a short circuit, thereby further improving the working stability of the thermocouple device 100.

[0065] Furthermore, the insulating element 13 is detachably fitted onto the thermocouple 10. When inserted into the furnace body 210, the insulating element 13 is fitted onto the thermocouple 10. When the thermocouple device 100 ceases operation and the insulating element 13 needs replacement, it can be removed from the thermocouple. For example, if the insulating element 13 is damaged, resulting in a significant decrease in its insulation performance, the insulating element 13 is pulled out from the free end of the thermocouple device 100.

[0066] Of course, in other embodiments, the insulating element 13 may also be fixedly sleeved on the thermocouple 10.

[0067] In another specific embodiment, the thermocouple 10 further includes an elastic portion 14, which is disposed near the cold end 10a of the thermocouple 10. The elastic portion 14 abuts against the limiting member 11 and has a tendency to push the limiting member 11 toward the furnace. Specifically, the elastic portion 14 is closer to the cold end 10a of the thermocouple 10 than the limiting portion 12. Specifically, the elastic portion 14 may be a spring.

[0068] One end of the elastic part 14 is fixedly connected to the cold end 10a of the thermocouple 10, and the other end abuts against the limiting member 11. Furthermore, the elastic part 14 drives the limiting member 11 to move within the limiting groove 21.

[0069] In other words, the elastic part 14 is used to continuously abut against the limiting member 11, so that the thermocouple 10 extends into the furnace for a longer length and the measurement is more accurate.

[0070] In one specific embodiment, the mounting base 20 has at least one opening 24 on its periphery.

[0071] In this embodiment, the fixing base 20 includes two openings 24, located on opposite sides of the periphery of the fixing base 20. Of course, the fixing base 20 may also have one, three, or four openings 24, not limited by the specific embodiment. The openings 24 are generally elliptical in shape.

[0072] By opening 24 on the periphery of the fixed base 20, the length of the thermocouple 10 entering and exiting the furnace body 210 can be observed through the opening 24, which facilitates the adjustment of the thermocouple 10. The multiple openings 24 allow users to observe from various angles, making it flexible and convenient to use.

[0073] For example, the length of the thermocouple 10 extending into the furnace body 210 is determined by the relative position of the limiting member 11 and the limiting part 12. Specifically, when the limiting part 12 is closer to the limiting member 11, the thermocouple 10 extends a longer distance into the furnace body 210. When the limiting part 12 is farther from the limiting member 11, the thermocouple 10 extends a shorter distance into the furnace body 210.

[0074] Optionally, a position indicator can be provided on the thermocouple 10 to further assist the user in quantitatively determining the length of the thermocouple 10 extending into the furnace. For example, a scale or ruler can be provided on the thermocouple 10.

[0075] Please see Figure 6 In one specific embodiment, a positioning seat 220 is provided on the peripheral wall of the furnace body 210 of the processing equipment 200, and the thermocouple device 100 is detachably installed on the furnace body 210 through the positioning seat 220. The positioning seat 220 is provided with an insertion hole (not shown). When the thermocouple 10 needs to work, it is inserted into the insertion hole of the positioning seat 220, and the working end 10b of the thermocouple device 100 extends into the furnace body 210. After the furnace body 210 has finished working, the thermocouple device 100 is pulled out, and the positioning seat 220 is removed from the fixed base 20.

[0076] Please see Figure 7 Specifically, the furnace body 210 is provided with a positioning seat 220, and the fixing seat 20 of the thermocouple device 100 is sleeved on the positioning seat 220. The fixing seat 20 is provided with a third opening 221, and the fixing seat 20 is provided with a positioning port 25 that is adapted to the third opening 221.

[0077] When the fixing seat 20 of the thermocouple device 100 is fitted outside the positioning seat 220, a fastener (not shown) passes through the positioning opening 25 and the third opening 221 and abuts against the thermocouple 10, thereby fixing the positioning seat 220 relative to the fixing seat 20. The fastener can be a screw, bolt, or stud. Correspondingly, when it is necessary to remove the thermocouple device 100 from the positioning seat 220, the fastener can be removed from the third opening 221.

[0078] The positioning port 25 avoids the third opening 221 of the positioning seat 220, allowing the fastener to pass through the third opening 221 without interfering with the fixing seat 20. The positioning seat 220 and the fixing seat 20 are fixed only by the fastener passing through the third through hole, which saves time and effort in disassembly and installation.

[0079] Optionally, the positioning base 220 is provided with a plurality of third openings 221 arranged at equal intervals along the circumference of the positioning base 220, and the third openings 221 correspond one-to-one with the positioning ports 25. For example, the positioning base 220 has two third openings 221, and the fixing base 20 has positioning ports 25 that are adapted to the two third openings 221. Correspondingly, fasteners with the same number of third openings 221 need to be configured.

[0080] By inserting several fasteners through several third openings 221, the stability of the fixed base 20 installed on the positioning base 220 can be further improved.

[0081] Please see Figures 6-8 The second aspect of this utility model provides a processing device 200. The processing device 200 includes a furnace body 210 and a thermocouple device 100 of any of the above embodiments. A positioning seat 220 is provided on the periphery of the furnace body 210, and the thermocouple device 100 is detachably connected to the thermocouple 100 through the positioning seat 220.

[0082] The processing equipment 200 of this embodiment adopts the thermocouple device 100 of any of the above embodiments. The thermocouple device 100 has a slide groove provided on one of the fixed base 20 and the thermocouple 10, and a limiting member 11 adapted to the slide groove on the other. The limiting member 11 moves along the direction of the slide groove under the guidance of the slide groove, so that the working end 10b of the thermocouple device 100 is difficult to contact the heating wire of the furnace body 210 and short-circuit. The thermocouple device 100 provides stable and reliable temperature detection inside the furnace body 210.

[0083] It should be noted that the positioning seat 220 has an insertion hole (not shown). When the thermocouple 10 needs to work, it is inserted into the insertion hole of the positioning seat 220, and the working end 10b of the thermocouple device 100 extends into the furnace body 210 of the processing equipment 200. After the furnace body 210 has finished working, the thermocouple device 100 is pulled out, and the positioning seat 220 is removed from the fixed seat 20. That is, the thermocouple device 100 is arranged generally horizontally around the periphery of the furnace body 210.

[0084] The positioning seat 220 is located on the periphery of the furnace body 210, so that the thermocouple device 100 can be horizontally positioned on the periphery of the furnace body 210 via the positioning seat 220.

[0085] See Figure 7 Specifically, the furnace body 210 is provided with a positioning seat 220, and the fixing seat 20 of the thermocouple device 100 is sleeved on the positioning seat 220. The fixing seat 20 is provided with a third opening 221, and the fixing seat 20 is provided with a positioning port 25 that is adapted to the third opening 221.

[0086] When the fixing seat 20 of the thermocouple device 100 is fitted outside the positioning seat 220, a fastener (not shown) passes through the positioning opening 25 and the third opening 221 and abuts against the thermocouple 10, thereby fixing the positioning seat 220 relative to the fixing seat 20. The fastener can be a screw, bolt, or stud. Correspondingly, when it is necessary to remove the thermocouple device 100 from the positioning seat 220, the fastener can be removed from the third opening 221.

[0087] Compared to the thermocouple 10 which is vertically installed inside the furnace body 210, the thermocouple device 100 in this embodiment is horizontally installed around the furnace body 210, which can reduce the overall length of the thermocouple device 100, thereby saving the cost of using the thermocouple device 100 and avoiding unnecessary cost increases.

[0088] Please see Figure 8 In one specific embodiment, the furnace body 210 is provided with a plurality of temperature zones extending circumferentially along the furnace body 210, and each temperature zone is provided with heating wires to control the temperature of a single temperature zone. For example, the furnace body 210 includes a first temperature zone, a second temperature zone, a third temperature zone, a fourth temperature zone, a fifth temperature zone, and a sixth temperature zone arranged from top to bottom.

[0089] In one specific embodiment, the processing equipment 200 is provided with a plurality of positioning seats 220 arranged at intervals along the circumference of the furnace body 210 and along the axial direction of the furnace body 210. The positioning seats 220 are arranged one-to-one with the temperature zones. That is, a positioning seat 220 is provided for each of the first temperature zone, the second temperature zone, the third temperature zone, the fourth temperature zone, the fifth temperature zone, and the sixth temperature zone.

[0090] The thermocouple device 100 can measure the real-time temperature of the corresponding temperature zone inside the furnace body 210, and adjust the heat output of the heating wire in each temperature zone according to the real-time temperature measured by the thermocouple device 100, so that the temperature of each temperature zone in the furnace body 210 can be kept consistent and meet the ideal battery cell processing temperature, thereby improving the processing quality of the battery cells.

[0091] Furthermore, several pairs of thermocouple devices 100 and positioning seats 220 can be arranged in the same temperature zone. For example, three positioning seats 220 can be distributed at equal intervals along the periphery of the furnace body 210. Three thermocouple devices 100 are installed on the three positioning seats 220. By arranging several thermocouple devices 100 in the same temperature zone and analyzing and calculating the measured values ​​of each thermocouple device 100, the temperature accuracy of the same temperature zone can be further improved.

[0092] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom still fall within the protection scope of this invention.

Claims

1. A thermocouple device, characterized in that, include: A thermocouple, wherein the two opposite ends of the thermocouple are the working end and the cold end; A mounting base is fitted onto the thermocouple; The thermocouple and the fixed base are provided with a limiting groove, and the other is provided with a limiting member adapted to the limiting groove. The limiting member slides in the limiting groove to drive the thermocouple and the fixed base to move relative to each other.

2. The thermocouple device according to claim 1, characterized in that, The limiting member is sleeved on the thermocouple, and the limiting groove is provided on the fixed base and extends along the axial direction of the fixed base; The thermocouple also includes a limiting part, which is fixedly disposed on the thermocouple and disposed near the cold end of the thermocouple relative to the limiting member; the limiting member is interference-fitted with the fixed base, and the two opposing contact surfaces of the limiting member and the fixed base are both rough surfaces.

3. The thermocouple device according to claim 2, characterized in that, The fixed base can switch between a working state and an adjustment state; in the working state, both the limiting part and the limiting member are fixedly connected to the fixed base; in the adjustment state, the limiting part moves closer to or further away from the limiting member.

4. The thermocouple device according to claim 3, characterized in that, The fixing base has a first opening, through which a fastener passes and abuts against the limiting part; the fixing base has a second opening, through which another fastener passes and abuts against the limiting part.

5. The thermocouple device according to claim 1, characterized in that, The thermocouple also includes an insulating element disposed near the working end of the thermocouple.

6. The thermocouple device according to claim 1, characterized in that, The thermocouple also includes an elastic part, one end of which is fixedly connected to the cold end of the thermocouple, and the other end abuts against a limiting member, having a tendency to push the limiting member toward the furnace.

7. The thermocouple device according to any one of claims 1 to 6, characterized in that, The mounting base has at least one opening on its periphery.

8. The thermocouple device according to any one of claims 1 to 6, characterized in that, The mounting base has two opposing positioning openings in the direction of the working end of the thermocouple.

9. The thermocouple device according to claim 1, characterized in that, The limiting member is fixedly connected to the thermocouple, and the limiting groove is provided on the fixed base and extends along the axial direction of the fixed base.

10. A processing device, characterized in that, The device includes a furnace body and a thermocouple device as described in any one of claims 1 to 9, wherein the furnace body is provided with a positioning seat, and the thermocouple device is detachably connected to the furnace body through the positioning seat.

11. The processing equipment according to claim 10, characterized in that, The positioning seat is located on the periphery of the furnace body. A third opening is provided on the positioning seat, and a fastener is inserted through the third opening to abut against the thermocouple, so as to fix the thermocouple device to the positioning seat.

12. The processing equipment according to claim 11, characterized in that, The furnace body has several temperature zones along its axial direction, and several positioning seats are provided on the periphery of the furnace body at intervals along the axial direction of the furnace body. The positioning seats are arranged in a one-to-one correspondence with the temperature zones.

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