Gas distribution assembly and magnetron sputter coating apparatus

Abstract

The utility model discloses a kind of air distribution assembly and magnetron sputtering coating equipment, air distribution assembly includes intake pipe and multiple air distribution pipes;Intake pipe is used to import working gas;Multiple air distribution pipes are used to be placed in coating chamber, and are all connected to intake pipe, multiple air distribution pipes circumferential array arrangement, and are surrounded with accommodating space, accommodating space is used to accommodate target material, each air distribution pipe is provided with multiple groups of air distribution ports in the direction away from intake pipe, the caliber of multiple groups of air distribution ports gradually increases in the direction away from intake pipe.The air distribution assembly in the scheme can effectively improve the uniformity of working gas input, avoid the difficulty in controlling coating thickness due to uneven distribution of working gas, and improve coating quality.

Description

Technical Field

[0001] This utility model relates to the field of magnetron sputtering coating technology, specifically to a gas distribution component and a magnetron sputtering coating equipment. Background Technology

[0002] In magnetron sputtering coating processes, whether for planar targets, moving targets, or rotating targets, gas distribution is required during normal operation. The distributed gases are usually divided into two categories: working gases (argon, Ar) and reactive gases (oxygen, O2, nitrogen, N2, etc.).

[0003] CN117721429A discloses a magnetron sputtering coating apparatus. During operation, the apparatus transports a substrate to the ion source and closes the coating chamber. The substrate is first impacted and cleaned. After cleaning, the substrate is transported to a target-face position. Argon gas is refilled, and a high-power target is activated, generating a glow discharge. Argon gas forms argon ions, which, under the combined action of an electric and magnetic field, accelerate and impact the target surface, depositing a film on the substrate surface.

[0004] The argon gas introduction device in this patent is connected to the coating generation chamber to introduce argon gas into the coating generation chamber. However, in the prior art, a pipe is usually used to directly connect the argon gas source to the side wall of the coating chamber for argon gas delivery, which easily leads to uneven distribution of argon gas in the coating chamber, increases the difficulty of coating thickness control, and reduces the quality of the film layer. Utility Model Content

[0005] The purpose of this invention is to overcome the above-mentioned technical deficiencies and propose a gas distribution component and a magnetron sputtering coating equipment. This solves the technical problem that in the prior art, the argon gas source is usually directly connected to the side wall of the coating chamber through a pipeline for argon gas transportation, which easily leads to uneven argon gas distribution in the coating chamber, increases the difficulty of coating thickness control, and reduces the quality of the coating layer.

[0006] To achieve the above-mentioned technical objectives, the present invention adopts the following technical solution: In a first aspect, this utility model provides an air distribution assembly, comprising: The intake pipe is used to introduce the working gas; and Multiple air distribution pipes are placed in the coating chamber and are all connected to the air inlet pipe. The multiple air distribution pipes are arranged in a circumferential array and surround a receiving space for accommodating the target material. Each air distribution pipe has multiple sets of air distribution ports along the direction away from the air inlet pipe, and the diameter of the multiple sets of air distribution ports increases sequentially along the direction away from the air inlet pipe.

[0007] In some embodiments, the air intake pipe has an air intake port that connects to the coating chamber; The air distribution pipe includes a connecting section and an air distribution section. The connecting section is connected to the air inlet port and extends radially along the air inlet port. The air distribution section is connected to the connecting section and extends axially along the air inlet port. A plurality of air distribution sections are arranged to form the accommodating space. The air distribution port is formed in the air distribution section.

[0008] In some embodiments, the air distribution section is located on the side of the connecting section away from the air intake pipe.

[0009] In some embodiments, the air distribution pipe further includes a transition section, the air distribution section being connected to the connecting section via the transition section, the transition section being arc-shaped and its arc-shaped opening facing the accommodating space.

[0010] In some embodiments, each group has multiple air distribution ports, and the multiple air distribution ports in the same group have the same diameter and are spaced apart in a direction away from the air inlet pipe.

[0011] In some embodiments, the number of air distribution ports is greater than or equal to three.

[0012] In some embodiments, the end of the air distribution pipe away from the air intake pipe is sealed off.

[0013] In some embodiments, the air distribution assembly further includes a pipe connector, an air inlet threaded sleeve, and a plurality of air distribution threaded sleeves. The pipe connector has an air inlet thread and a plurality of air distribution threaded heads that are in communication with each other. The plurality of air distribution threaded heads are arranged circumferentially around the air inlet thread. The air inlet threaded sleeve is rotatably disposed on the air inlet pipe and is threadedly connected to the air inlet thread. The plurality of air distribution threaded sleeves are respectively rotatably disposed on the plurality of air distribution pipes and correspond one-to-one with the plurality of air distribution threaded heads. Each air distribution threaded sleeve is threadedly connected to the corresponding air distribution threaded head.

[0014] In some embodiments, the gas distribution assembly further includes a plurality of gas mass flow controllers, which are respectively disposed on a plurality of gas distribution pipes, with each gas mass flow controller located at the end of the corresponding gas distribution pipe near the inlet pipe.

[0015] Secondly, this utility model also provides a magnetron sputtering coating device, which includes the gas distribution component as described in any of the above.

[0016] Compared with existing technologies, the gas distribution assembly provided by this utility model places the target material within a accommodating space formed by multiple gas distribution pipes. This ensures the gas distribution pipes are evenly distributed around the target material, placing it at the center of the working gas atmosphere. Simultaneously, the diameter of the multiple gas distribution ports on the gas distribution pipes increases sequentially away from the inlet pipe. This arrangement allows the smaller diameter gas distribution ports near the inlet pipe to slow the gas flow rate and prevent sudden pressure drops in certain areas. The larger diameter ports further away from the inlet pipe compensate for gas diffusion losses, maintaining a stable pressure at the end of the pipe and improving overall gas uniformity. Furthermore, the smaller diameter ports near the inlet pipe increase local resistance, reducing airflow impact in high-pressure areas; while the larger diameter ports further away reduce resistance, compensating for pressure attenuation due to pipe length and achieving a smooth transition of the pressure gradient. In addition, the progressive aperture design reduces eddies caused by sudden airflow changes, suppresses high-frequency noise and mechanical vibration, making it particularly suitable for noise-sensitive precision coating equipment applications.

[0017] Therefore, the gas distribution assembly in this case can effectively improve the uniformity of working gas input, avoid the difficulty in controlling the coating thickness due to uneven distribution of working gas, and improve the coating quality. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the gas distribution component and the target material provided in this embodiment of the utility model. Figure 2 yes Figure 1 Schematic diagram of the gas distribution assembly; Figure 3 yes Figure 1 A schematic diagram showing the gas distribution components and the target material placed in the coating chamber.

[0019] Explanation of reference numerals in the attached figures: 1. Inlet pipe; 2. Air distribution pipe; 2a. Accommodation space; 2b. Air distribution port; 21. Connecting section; 22. Air distribution section; 23. Transition section; 3. Pipe joint; 31. Inlet threaded head; 32. Air distribution threaded head; 4. Inlet threaded sleeve; 5. Air distribution threaded sleeve; 6. Target material; 7. Coating chamber; 8. Rotary seat. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0021] To address the technical problem that existing technologies typically use pipes to directly connect the argon source to the side wall of the coating chamber for argon delivery, which easily leads to uneven argon distribution within the coating chamber, increasing the difficulty of controlling coating thickness and reducing film quality, this invention provides a gas distribution component that can effectively improve the uniformity of working gas input, avoid the difficulty in controlling coating thickness due to uneven working gas distribution, and improve coating quality.

[0022] It should be noted that the gas distribution component described in this utility model is used in, but not limited to, magnetron sputtering coating equipment. For ease of explanation, this utility model only uses the application of the gas distribution component in magnetron sputtering coating equipment as an example. The principle of the gas distribution component in other types of equipment is essentially the same as that in magnetron sputtering coating equipment, and will not be described in detail here.

[0023] Please see Figure 1 and Figure 2 , Figure 1 and Figure 2 This is a schematic diagram of the structure of the gas distribution assembly in one embodiment of the present invention. The gas distribution assembly includes an air inlet pipe 1 and multiple gas distribution pipes 2. The air inlet pipe 1 is used to introduce working gas. The multiple gas distribution pipes 2 are placed in the coating chamber 7 and are all connected to the air inlet pipe 1. The multiple gas distribution pipes 2 are arranged in a circumferential array and surround a receiving space 2a. The receiving space 2a is used to receive the target material 6. Each gas distribution pipe 2 has multiple sets of gas distribution ports 2b along the direction away from the air inlet pipe 1. The diameter of the multiple sets of gas distribution ports 2b increases sequentially along the direction away from the air inlet pipe 1.

[0024] In the gas distribution assembly provided by this utility model, the target material 6 is placed in a receiving space 2a formed by multiple gas distribution pipes 2, so that the gas distribution pipes 2 are evenly distributed around the target material 6, thereby placing the target material 6 at the center of the working gas atmosphere. At the same time, the diameter of the multiple sets of gas distribution ports 2b on the gas distribution pipes 2 increases sequentially in the direction away from the inlet pipe 1. This arrangement can slow down the gas flow rate by using the small-diameter gas distribution ports 2b near the inlet pipe 1, avoiding sudden drops in local pressure; while the large-diameter gas distribution ports 2b far from the inlet pipe 1 can compensate for gas diffusion losses, so that the airflow can still maintain a stable pressure at the end of the pipe, thereby improving the overall gas uniformity. In addition, the small-diameter gas distribution ports 2b near the inlet pipe 1 can increase local resistance and reduce the airflow impact in the high-pressure area; while the large-diameter gas distribution ports 2b far from the inlet pipe 1 can reduce resistance, compensate for the pressure attenuation caused by the pipe length, and achieve a smooth transition of the pressure gradient. Furthermore, the progressive aperture design can reduce eddies caused by sudden changes in airflow, suppress high-frequency noise and mechanical vibration, and is especially suitable for applications of precision coating equipment that are sensitive to noise.

[0025] Therefore, the gas distribution assembly in this case can effectively improve the uniformity of working gas input, avoid the difficulty in controlling the coating thickness due to uneven distribution of working gas, and improve the coating quality.

[0026] It should be noted that the air distribution port 2b can be set as a triangle, circle, or square, etc. In this embodiment, the air distribution port 2b is set as a circular air distribution hole.

[0027] In one embodiment, the air inlet pipe 1 has an air inlet port that connects to the coating chamber 7; the air distribution pipe 2 includes a connecting section 21 and an air distribution section 22, the connecting section 21 is connected to the air inlet port and extends radially along the air inlet port, the air distribution section 22 is connected to the connecting section 21 and extends axially along the air inlet port, and a plurality of air distribution sections 22 are arranged to form an accommodating space 2a; an air distribution port 2b is formed in the air distribution section 22.

[0028] In this embodiment, the gas distribution sections 22 of the multiple gas distribution pipes 2 extend along the axial direction of the air inlet pipe 1, so that the multiple gas distribution sections 22 are parallel to each other and located on the periphery of the target material 6, so that the gas distribution ports 2b on the multiple gas distribution sections 22 can uniformly deliver working gas, further improving the uniformity of working gas.

[0029] In one embodiment, the air distribution section 22 is located on the side of the connecting section 21 away from the air intake pipe 1.

[0030] In this embodiment, when part of the air inlet pipe 1 is located inside the coating chamber 7, the air distribution section 22 can be extended relative to the connecting section 21 in a direction away from the air inlet pipe 1, thereby placing the air inlet pipe 1 outside the accommodating space 2a, avoiding the air inlet pipe 1 occupying the target material 6 installation space, and improving the utilization rate of the accommodating space 2a.

[0031] In one embodiment, the air distribution pipe 2 further includes a transition section 23, through which the air distribution section 22 is connected to the connecting section 21. The transition section 23 is arc-shaped and its arc-shaped opening faces the accommodating space 2a.

[0032] In this embodiment, the working gas transported by the connecting section 21 can be smoothly transmitted to the gas distribution section 22 via the transition section 23, further avoiding the formation of eddies between the connecting section 21 and the gas distribution section 22, thereby achieving stable delivery of the working gas and improving uniformity.

[0033] In one embodiment, each group has multiple air distribution ports 2b, and the multiple air distribution ports 2b in the same group have the same diameter and are spaced apart in a direction away from the air inlet pipe 1.

[0034] In this embodiment, the diameters of multiple air distribution ports 2b in the same group are set to be the same. That is, the diameter of the air distribution ports 2b on the air distribution pipe 2 is gradually increased in segments along the air delivery direction. This increases the synchronous disturbance capability of the same segment of air distribution ports 2b, and also facilitates the installation of standardized valves or pressure gauges at the multiple air distribution ports 2b in the same group, enabling rapid deployment.

[0035] It should be noted that the number of air distribution ports 2b in the same group can be adjusted adaptively according to the air source pressure and the size of the target material 6. Specifically, in this solution, there are three groups of air distribution ports 2b, and each group has three air distribution ports 2b. In addition, in one embodiment, each air distribution port 2b is equipped with a valve to achieve flexible adjustment of air intake and improve practicality.

[0036] In one embodiment, the end of the air distribution pipe 2 away from the air intake pipe 1 is sealed off.

[0037] In this embodiment, the end of the gas distribution pipe 2 is sealed to prevent the working gas pressure from leaking out from the end, ensuring that the working gas can diffuse to the area where the target material 6 is located.

[0038] In one embodiment, the air distribution assembly further includes a pipe connector 3, an air inlet threaded sleeve 4, and a plurality of air distribution threaded sleeves 5. The pipe connector 3 has an air inlet threaded head 31 and a plurality of air distribution threaded heads 32 that are in communication with each other. The plurality of air distribution threaded heads 32 are arranged circumferentially around the air inlet threaded head 31. The air inlet threaded sleeve 4 is rotatably disposed on the air inlet pipe 1 and is threadedly connected to the air inlet threaded head 31. The plurality of air distribution threaded sleeves 5 are respectively rotatably disposed on the plurality of air distribution pipes 2 and correspond one-to-one with the plurality of air distribution threaded heads 32. Each air distribution threaded sleeve 5 is threadedly connected to the corresponding air distribution threaded head 32.

[0039] In this embodiment, the intake pipe 1 and multiple air distribution pipes 2 are detachably assembled through the cooperation of the pipe connector 3 and the threaded sleeve. The operation is simple and convenient, and the corresponding air distribution pipe 2 or intake pipe 1 can be quickly disassembled and assembled as needed, so as to facilitate the maintenance and replacement of the air distribution pipe 2 and intake pipe 1. Multiple air distribution threaded sleeves 5 correspond one-to-one with multiple air distribution pipes 2.

[0040] It should be noted that the aforementioned threaded head refers to the pipe fitting 3, whose outer wall has external threads and whose internal channels are interconnected. A threaded sleeve, on the other hand, refers to a sleeve with internal threads within its channels, used to connect the pipe to the pipe fitting 3.

[0041] In one embodiment, the gas distribution assembly further includes a plurality of gas mass flow controllers, which are respectively disposed on a plurality of gas distribution pipes 2, with each gas mass flow controller located at the end of the corresponding gas distribution pipe 2 near the inlet pipe 1.

[0042] In this embodiment, a gas mass flow controller is installed on each gas distribution pipe 2, thereby adjusting the gas flow rate to each gas distribution pipe 2 according to the requirements of the target material 6, improving flexibility. Multiple gas mass flow controllers correspond one-to-one with multiple gas distribution pipes. It should be noted that the specific structure and principle of the gas mass flow controller are existing technologies and will not be elaborated here. Furthermore, in this solution, there are two gas distribution pipes 2.

[0043] Furthermore, this utility model also provides a magnetron sputtering coating apparatus, which includes the gas distribution assembly described in any of the above embodiments. It should be noted that the detailed structure of the gas distribution assembly of the magnetron sputtering coating apparatus can be referred to the embodiments of the gas distribution assembly described above, and will not be repeated here. Since the above-mentioned gas distribution assembly is used in the magnetron sputtering coating apparatus of this utility model, the embodiments of the magnetron sputtering coating apparatus of this utility model include all the technical solutions of all the embodiments of the above-mentioned gas distribution assembly, and the achieved technical effects are also completely the same, and will not be repeated here.

[0044] It should be noted that you should refer to [link / reference]. Figure 3 The coating chamber 7 of the magnetron sputtering coating equipment is provided with a rotating seat 8. The rotating seat 8 is located below the gas distribution assembly and can rotate around its axis. The workpiece is placed on top of it.

[0045] To better understand this utility model, the following is combined with... Figures 1 to 3 The technical solution of this utility model is described in detail below: The gas distribution assembly in this scheme includes an air inlet pipe 1 located above the target material 6, a left gas distribution pipe 2 located on the left side of the target material 6 and extending along the length of the target material 6, a right gas distribution pipe 2 located on the right side of the target material 6 and extending along the length of the target material 6, and gas control components connected to each gas distribution pipe 2 respectively. The gas distribution pipes 2 on both sides include at least three gas distribution ports 2b arranged sequentially along the length of the target material 6, with the diameter of the gas distribution ports 2b gradually increasing from top to bottom.

[0046] Compared with existing technologies, the advantages of this invention are as follows: By rationally configuring the gas distribution pipe 2, the uniformity of the working gas distribution is improved, thereby enhancing the quality and uniformity of the magnetron sputtering coating. Through segmented design of the size and arrangement of the gas distribution ports 2b, the working gas can form a more uniform and dense plasma, further improving the coating quality.

[0047] The specific embodiments of this utility model described above do not constitute a limitation on the scope of protection of this utility model. Any other corresponding changes and modifications made based on the technical concept of this utility model should be included within the scope of protection of the claims of this utility model.

Claims

1. An air distribution assembly, characterized in that, include: The intake pipe is used to introduce the working gas; and Multiple air distribution pipes are placed in the coating chamber and are all connected to the air inlet pipe. The multiple air distribution pipes are arranged in a circumferential array and surround a receiving space for accommodating the target material. Each air distribution pipe has multiple sets of air distribution ports along the direction away from the air inlet pipe, and the diameter of the multiple sets of air distribution ports increases sequentially along the direction away from the air inlet pipe.

2. The air distribution assembly according to claim 1, characterized in that, The air inlet pipe has an air inlet port that connects to the coating chamber; The air distribution pipe includes a connecting section and an air distribution section. The connecting section is connected to the air inlet port and extends radially along the air inlet port. The air distribution section is connected to the connecting section and extends axially along the air inlet port. A plurality of air distribution sections are arranged to form the accommodating space. The air distribution port is formed in the air distribution section.

3. The air distribution assembly according to claim 2, characterized in that, The air distribution section is located on the side of the connecting section away from the air intake pipe.

4. The air distribution assembly according to claim 2, characterized in that, The air distribution pipe also includes a transition section, which is connected to the connecting section. The transition section is arc-shaped and its arc-shaped opening faces the accommodating space.

5. The air distribution assembly according to claim 1, characterized in that, Each group has multiple air distribution ports, and the multiple air distribution ports in the same group have the same diameter and are spaced apart in a direction away from the air inlet pipe.

6. The air distribution assembly according to claim 1, characterized in that, The number of air distribution ports is greater than or equal to three.

7. The air distribution assembly according to claim 1, characterized in that, The end of the air distribution pipe away from the air intake pipe is sealed off.

8. The air distribution assembly according to claim 1, characterized in that, The air distribution assembly further includes a pipe connector, an air inlet threaded sleeve, and multiple air distribution threaded sleeves. The pipe connector has an air inlet thread and multiple air distribution threaded heads that are in communication with each other. The multiple air distribution threaded heads are arranged circumferentially around the air inlet thread. The air inlet threaded sleeve is rotatably disposed on the air inlet pipe and is threadedly connected to the air inlet thread. The multiple air distribution threaded sleeves are respectively rotatably disposed on the multiple air distribution pipes and correspond one-to-one with the multiple air distribution threaded heads. Each air distribution threaded sleeve is threadedly connected to the corresponding air distribution threaded head.

9. The air distribution assembly according to claim 1, characterized in that, The gas distribution assembly also includes multiple gas mass flow controllers, which are respectively disposed on multiple gas distribution pipes, with each gas mass flow controller located at the end of the corresponding gas distribution pipe near the inlet pipe.

10. A magnetron sputtering coating apparatus, characterized in that, Includes the air distribution assembly as described in any one of claims 1-9.

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