Reference light measuring device

Abstract

The utility model relates to a kind of reference light measuring devices, including cavity, movable standard sample assembly, three-dimensional adjusting mechanism, detection mechanism and first cover, cavity has first inner cavity, first cover is equipped with first through-hole;Movable standard sample assembly includes drive mechanism, sample holder and standard sample, sample holder is equipped with second through-hole, standard sample is fixed on sample holder and covers second through-hole, detection mechanism includes the detection support in first inner cavity and photoelectric detector, detection support is equipped with third through-hole, photoelectric detector is fixed on detection support, three-dimensional adjusting mechanism is connected with detection support, for making detection support along X, Y and Z direction translation;First through-hole is used for X-ray to pass through to enter first inner cavity, in first inner cavity, X-ray transmission along X direction and sequentially pass through standard sample, second through-hole and third through-hole, standard sample generates current and fluorescence under the irradiation of X-ray, photoelectric detector is used to receive fluorescence.

Description

Technical Field

[0001] This utility model relates to the field of reference light measurement technology, and more specifically to a reference light measurement device. Background Technology

[0002] As an important platform for modern scientific research, the real-time monitoring of the beam intensity and energy of synchrotron radiation sources is crucial to ensuring the accuracy and reliability of experimental data. In experiments such as X-ray absorption spectroscopy, scattering spectroscopy, and imaging, fluctuations in the incident beam directly affect the accuracy of measurement results. Therefore, a reference beam measurement device capable of monitoring the beam state in real time and accurately is needed.

[0003] Currently, traditional reference light monitoring devices only use either total electron yield or fluorescence signal for detection, which has the following significant limitations: While total electron yield measurement is sensitive to surfaces, it is easily affected by surface contamination and charge accumulation effects on standard samples, leading to signal distortion; while fluorescence measurement is suitable for bulk analysis, the signal is weak for low-concentration standard samples and cannot provide information on surface electronic structure. The data from these two modes are fragmented and difficult to cross-calibrate, hindering further improvements in measurement accuracy. Utility Model Content

[0004] The purpose of this invention is to provide a reference light measurement device that can simultaneously detect a light beam using both all-electron yield and fluorescence dual modes, effectively overcoming the shortcomings of the existing technology.

[0005] Based on the above objectives, this utility model provides a reference light measurement device, which includes a cavity, a movable standard sample assembly, a three-dimensional adjustment mechanism, a detection mechanism, and a first cover. The cavity has a first inner cavity, and the cavity has a first opening, a second opening, and a third opening that communicate with the first inner cavity. The first cover is fixed to the cavity and covers the first opening. The first cover has a first through hole that communicates with the first inner cavity.

[0006] The movable standard sample assembly includes a driving mechanism, a sample holder, and at least one standard sample. The sample holder has the same number of second through holes as the standard samples, and each second through hole corresponds to one of the standard samples. Each standard sample is fixed on the sample holder and covers the corresponding second through hole. The sample holder is located in the first inner cavity, and the standard samples face the first cover. The driving mechanism is fixed on the cavity and covers the second opening. The driving mechanism is connected to the sample holder and is used to move the sample holder along the Y direction so that at least one second through hole is aligned with the first through hole along the X direction.

[0007] The detection mechanism includes a detection bracket and at least one photodetector. Both the detection bracket and the photodetector are located in the first inner cavity. The detection bracket has a third through hole. The photodetector is fixed on the detection bracket. The first cover, the sample holder, and the detection bracket are arranged sequentially along the X direction. The three-dimensional adjustment mechanism is fixed to the cavity and covers the third opening. The three-dimensional adjustment mechanism is connected to the detection bracket and is used to translate the detection bracket along the X, Y, and Z directions so that the third through hole is aligned with the first through hole along the X direction.

[0008] The first through-hole is used to allow X-rays to pass through and enter the first inner cavity. In the first inner cavity, the X-rays are transmitted along the X-axis and pass through the standard sample, the second through-hole, and the third through-hole in sequence. The standard sample generates current and fluorescence under the irradiation of the X-rays, and the photodetector is used to receive the fluorescence.

[0009] Optionally, the cavity is provided with a fourth opening, which is used to connect to a molecular pump so that the first inner cavity is in a vacuum environment by means of the molecular pump.

[0010] Optionally, the three-dimensional adjustment mechanism includes a first support, a second support, a slide, a bellows, a second cover, and a connecting rod. The first end of the bellows is fixed to the cavity and covers the third opening. The second cover is connected to the second end of the bellows and covers the second end of the bellows. The first support is connected to the first end of the bellows. The second support is slidably connected to the first support and can slide relative to the first support in the Z direction. The slide is slidably connected to the second support and can move relative to the second support in the X and Y directions. The second end of the bellows is fixed to the slide. The connecting rod is located in the bellows and the first inner cavity. One end of the connecting rod is fixed to the second cover, and the other end of the connecting rod is fixed to the detection support.

[0011] Optionally, the three-dimensional adjustment mechanism further includes a first motor, a second motor, and a third motor. The first motor is mounted on the first support and connected to the second support, and is used to drive the second support to move relative to the first support along the Z direction. The second motor and the third motor are both mounted on the second support and connected to the slide table. The second motor is used to drive the slide table to move relative to the second support along the X direction, and the third motor is used to drive the slide table to move relative to the second support along the Y direction.

[0012] Optionally, there are multiple photodetectors, and each photodetector is arranged around the third through hole.

[0013] Optionally, the second cover is provided with a first BNC connector that is the same number as the photodetectors and corresponds one-to-one with the photodetectors. Each photodetector is connected to the first BNC connector corresponding to the photodetector through a first wire, so as to lead out the signal detected by the photodetector through the first BNC connector.

[0014] Optionally, there are multiple standard samples, which are arranged sequentially along the Y direction, and each standard sample has a different thickness.

[0015] Optionally, the drive mechanism is configured to move any one of the standard samples into the optical path of the X-ray by moving the sample holder along the Y direction.

[0016] Optionally, the driving mechanism includes a fixed seat, a slide rod, and a connector. The fixed seat is fixed to the cavity and covers the second opening. The slide rod is slidably connected to the fixed seat and can move relative to the fixed seat in the Y direction. Both the fixed seat and the slide rod are located outside the first inner cavity. One end of the connector is connected to the slide rod, and the other end of the connector is connected to the sample holder.

[0017] Optionally, the sample holder is made of metal, the connector is made of insulating material, the mounting base is provided with a second BNC connector, and the sample holder is electrically connected to the second BNC connector via a second wire to draw out the current generated by the standard sample through the second BNC connector.

[0018] This invention's reference light measurement device achieves simultaneous acquisition of all-electron yield current and X-ray fluorescence within a compact space, breaking through the limitations of traditional single detection modes and providing more comprehensive data support for beamline diagnostics and real-time monitoring. Through a movable standard sample assembly, standard samples of different thicknesses can be quickly switched, enabling flexible control of current and fluorescence signal intensity and improving the device's adaptability to different energy X-rays and experimental requirements. The detection bracket with a third through-hole allows X-rays to pass through without damage, improving fluorescence signal collection efficiency while ensuring minimal loss of beam flux. Combined with a three-dimensional adjustment mechanism, X-rays can accurately pass through the third through-hole, and the spatial orientation of the photodetector relative to the standard sample can be optimized, further improving the signal-to-noise ratio and measurement accuracy of the fluorescence signal. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the reference light measurement device according to an embodiment of the present invention from one perspective;

[0020] Figure 2 This is a schematic diagram of the reference light measurement device according to another perspective of an embodiment of the present invention;

[0021] Figure 3 This is a schematic diagram of the cavity of the reference light measurement device according to an embodiment of the present invention from one perspective;

[0022] Figure 4 This is a structural schematic diagram of the cavity of the reference light measurement device according to an embodiment of the present invention from another perspective;

[0023] Figure 5 This is a schematic diagram of the reference light measuring device according to an embodiment of the present invention after the first cover has been removed;

[0024] Figure 6 This is a schematic diagram of the structure of the reference light measurement device according to an embodiment of the present invention after removing the first support, the second support, and the slide of the three-dimensional adjustment mechanism;

[0025] Figure 7 This is a schematic diagram of the reference light measurement device according to an embodiment of the present invention after removing the first support, second support, slide, and bellows of the three-dimensional adjustment mechanism.

[0026] Figure 8 This is a schematic diagram of the reference light measurement device according to an embodiment of the present invention after removing the cavity, the first cover, and the first support, the second support, the slide, and the bellows of the three-dimensional adjustment mechanism;

[0027] Figure 9 for Figure 8 Enlarged view of part I. Detailed Implementation

[0028] The preferred embodiments of this utility model are given below with reference to the accompanying drawings and described in detail.

[0029] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Figure 9As shown, this embodiment of the present invention provides a reference light measurement device, which includes a cavity 100, a movable standard sample assembly 200, a three-dimensional adjustment mechanism 300, a detection mechanism 400, and a first cover 500. The cavity 100 is hollow inside and defines a first inner cavity 110. The cavity 100 has a first opening 120, a second opening 130, and a third opening 140 communicating with the first inner cavity 110. The first cover 500 is fixed to the cavity 100 and covers the first opening 120. The first cover 500 has a first through hole 510. The movable standard sample assembly 200 includes a drive mechanism 210, a sample holder 220, and at least one standard sample 230. The sample holder 220 has a number of second through holes that correspond one-to-one with the standard samples 230. Each standard sample 230 is fixed on the sample holder 220 and covers the corresponding second through hole. The sample holder 220 is located in the first inner cavity 110, and the standard samples 230 face the first opening 120 and the first cover 500. The drive mechanism 210 is fixed on the cavity 100 and covers the second opening 120. Port 130, drive mechanism 210 is connected to sample holder 220, used to move sample holder 220 along the Y direction. The Z-direction height of the second through hole on sample holder 220 is the same as the Z-direction height of the first through hole 510. By moving sample holder 220 along the Y direction, any second through hole on sample holder 220 can be aligned with the first through hole 510 along the X direction. Detection mechanism 400 includes detection bracket 410 and at least one photodetector 420. Detection bracket 410 and photodetector 420 are both located in the first inner cavity 110. The measuring bracket 410 is provided with a third through hole 411. The photodetector 420 is fixed on the measuring bracket 410. The first cover 500, the sample holder 220 and the measuring bracket 410 are arranged in sequence along the X direction. The three-dimensional adjustment mechanism 300 is fixed to the cavity 100 and covers the third opening 140. The three-dimensional adjustment mechanism 300 is connected to the measuring bracket 410 and is used to make the measuring bracket 410 translate along the X, Y and Z directions. By making the measuring bracket 410 translate along the Y and Z directions, the third through hole 411 can be aligned with the first through hole 510 along the X direction.When the third through hole 411 and the second through hole are aligned with the first through hole 510, the first through hole 510, the second through hole and the third through hole 411 are aligned sequentially along the X-axis. At this time, the X-ray to be tested can be transmitted along the X-axis and enter the first inner cavity 110 through the first through hole 510. After entering the first inner cavity 110, the X-ray to be tested passes through the standard sample 230, the second through hole and the third through hole 411 sequentially. When the X-ray to be tested irradiates the standard sample 230, it will excite the standard sample 230 to generate a total electron yield (TEY) current and fluorescence. The fluorescence is received by the photodetector 420. By collecting the TEY current, the intensity information of the X-ray to be tested based on the total electron yield mode can be obtained. By collecting the signal detected by the photodetector 420, the intensity information of the X-ray to be tested based on the fluorescence mode can be obtained. Therefore, the reference light measurement device of this utility model embodiment can simultaneously use two modes to measure the X-ray to be tested. The measurement results of the two modes can be mutually corrected, thereby improving the measurement accuracy. By opening a third through-hole 411 on the detector bracket 410, the X-rays to be measured can pass through without damage, thereby improving the collection efficiency of the fluorescence signal while ensuring that the beam flux is basically not lost.

[0030] The first inner cavity 110 can be in a vacuum environment, thereby eliminating the scattering and absorption effects of air on X-rays and improving measurement accuracy. Specifically, the cavity 100 can be provided with a fourth opening 150, which can be connected to a molecular pump. The molecular pump can then be used to evacuate the first inner cavity 110, thus creating a vacuum environment. The vacuum level of the first inner cavity 110 can be 1.0 × 10⁻⁶. -8 mbar.

[0031] The cavity 100 may be provided with a fifth opening 160. The fifth opening 160 is used to connect with other vacuum cavities (e.g., vacuum tubes). The fifth opening 160 is opposite to the first opening 120 in the X direction. After the X-ray to be tested passes through the third through hole 411, it can leave the first inner cavity 110 through the fifth opening 160 and enter other vacuum cavities for subsequent experiments (e.g., X-ray absorption spectroscopy experiments).

[0032] To ensure a vacuum environment in the first inner cavity 110, the cavity 100 is sealed to other components (including the first cover 500, the drive mechanism 210, and the three-dimensional adjustment mechanism 300) at each opening. For example, flange connections can be used, with sealing rings at the flanges. The first through hole 510 of the first cover 500 can also be covered by a covering (such as a graphene window) to achieve a vacuum environment in the first inner cavity 110.

[0033] The three-dimensional adjustment mechanism 300 includes a first support 310, a second support 320, a slide 330, a bellows 340, a second cover 350, and a connecting rod 360. The first end of the bellows 340 is fixed to the cavity 100 and covers the third opening 140. The second cover 350 is connected to the second end of the bellows 340 and covers its second end. The first support 310 is fixedly connected to the first end of the bellows. The second support 320 is slidably connected to the first support 310 and can slide relative to the first support 310 in the Z direction. The slide 330 is slidably connected to the second support 320 and can move relative to the second support 320 in the X and Y directions. The second end of the bellows 340 is fixed to the slide 330. The connecting rod 360 is located in the bellows 340 and the first inner cavity 110. One end of the connecting rod 360 is fixed to the second cover 350, and the other end extends along the Z direction into the first inner cavity 110 and is fixed to the detection support 410. Because the bellows 340 is elastic, relative displacement can occur between its first and second ends, thus allowing the second cover 350 to move relative to the cavity 100. When the second support 320 slides along the Z-direction, the slide 330, the second cover 350, the connecting rod 360, and the detection support 410 will all slide along the Z-direction along with the second support 320. When the slide 330 moves along the X-direction or the Y-direction, the second cover 350, the connecting rod 360, and the detection support 410 will all move along the X-direction or the Y-direction along with the slide 330. Therefore, through the above structure, the detection support 410 can be translated along the X, Y, and Z directions.

[0034] The three-dimensional adjustment mechanism 300 may further include a first motor 370, a second motor 380, and a third motor 390. The first motor 370 is mounted on the first support 310 and can be connected to the second support 320 through the first transmission mechanism to drive the second support 320 to slide along the Z direction. The second motor 380 and the third motor 390 are both mounted on the second support 320 and are connected to the slide table 330 through the second transmission mechanism and the third transmission mechanism, respectively. The second motor 380 is used to drive the slide table 330 to move along the X direction, and the third motor 390 is used to drive the slide table 330 to move along the Y direction.

[0035] The X-axis distance between the photodetector 420 and the standard sample 230 can be adjusted by moving the detector bracket 410 along the X-axis through the three-dimensional adjustment mechanism 300, thereby maximizing the intensity of the received fluorescence signal. The angle of the photodetector 420 relative to the standard sample 230 can be adjusted by moving the detector bracket 410 along the Y and Z axes through the three-dimensional adjustment mechanism 300, thereby optimizing the fluorescence receiving angle.

[0036] When the movable standard sample assembly 200 includes multiple standard samples 230, the standard samples 230 can be arranged sequentially along the Y direction. Correspondingly, the second through holes are also arranged sequentially along the Y direction. Each standard sample 230 has a different thickness. Thus, by moving the sample holder 220 along the Y direction via the driving mechanism 210, any one of the standard samples 230 can be aligned with the optical path (i.e., the standard sample 230 and its corresponding second through hole are moved onto the X-ray optical path). This allows for switching between standard samples 230 of different thicknesses, acquiring TEY current and fluorescence signals from standard samples 230 of different thicknesses, and obtaining the strongest fluorescence by comparing the fluorescence signals of standard samples 230 of different thicknesses. For example, it may include three standard samples 230 with different thicknesses: 2 micrometers, 10 micrometers, and 20 micrometers, respectively. The standard samples 230 can be metal foils, such as aluminum foil.

[0037] When the detection mechanism 400 includes multiple photodetectors 420, each photodetector 420 can be arranged around the third through-hole 411 to improve fluorescence receiving efficiency. For example, there are four photodetectors 420, which are arranged in a four-quadrant configuration with the third through-hole 411 as the origin. This symmetrical layout improves fluorescence collection efficiency.

[0038] The second cover 350 may be provided with a number of first BNC connectors 351 that correspond one-to-one with the number of photodetectors 420. A portion of the first BNC connector 351 is located inside the bellows 340, and a portion is located outside the bellows 340. Each photodetector 420 can be connected via a first wire 430 (see...). Figure 8 and Figure 9 The signal detected by the photodetector 420 is connected to the first BNC connector 351 corresponding to the photodetector 420, thereby extracting the signal. The first BNC connector 351 can be connected to an external processing device so that the external processing device can process the signal.

[0039] like Figure 5 , Figure 8 and Figure 9 As shown, the drive mechanism 210 includes a fixed base 211, a slide rod 212, and a connector 213. The fixed base 211 is fixed to the cavity 100 and covers the second opening 130. The slide rod 212 is slidably connected to the fixed base 211 and can move relative to the fixed base 211 in the Y direction. Both the fixed base 211 and the slide rod 212 are located outside the first inner cavity 110. One end of the connector 213 is connected to the slide rod 212, and the other end is connected to the sample holder 220. That is, the slide rod 212 is connected to the sample holder 220 through the connector 213. In this way, when the slide rod 212 moves in the Y direction, it can move the sample holder 220 together in the Y direction.

[0040] The fixing base 211 may have a second inner cavity that communicates with the first inner cavity 110. Part of the slide rod 212 is located in the second inner cavity, and part of it is located outside the second inner cavity. Part of the connector 213 is located in the first inner cavity 110, and part of it is located in the second inner cavity. For example, the fixing base 211 may be a three-way vacuum tube.

[0041] The sample holder 220 may be made of metal, such as aluminum, so that the TEY current generated by the excitation of the standard sample 230 can be conducted to the sample holder 220. The connector 213 is made of an insulating material (e.g., polytetrafluoroethylene) to insulate the slide bar 212 from the sample holder 220. A second BNC connector may be provided on the mounting base 211, and the sample holder 220 is connected to the second BNC connector via a second wire 240 to lead out the TEY current. The second BNC connector can be connected to an external processing device for processing of the TEY current.

[0042] The reference light measurement device of this embodiment achieves simultaneous acquisition of all-electron yield current and X-ray fluorescence within a compact space, breaking through the limitations of traditional single detection modes and providing more comprehensive data support for beamline diagnosis and real-time monitoring. The movable standard sample assembly 200 allows for rapid switching between standard samples 230 of different thicknesses, enabling flexible control of current and fluorescence signal intensity and improving the device's adaptability to different energy X-rays and experimental requirements. The detector bracket 410 with a third through-hole 411 allows X-rays to pass through without damage, improving fluorescence signal collection efficiency while ensuring minimal loss of beam flux. Combined with the three-dimensional adjustment mechanism 300, X-rays can accurately pass through the third through-hole 411, and the spatial orientation of the photodetector 420 relative to the standard sample 230 is optimized, further improving the signal-to-noise ratio and measurement accuracy of the fluorescence signal. This invention achieves efficient and adjustable acquisition of dual-mode signals while essentially maintaining the incident beam, providing a high-precision, low-interference reference light measurement solution for synchrotron radiation experiments.

[0043] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of this utility model. Various variations can be made to the above embodiments of this utility model. That is, all simple and equivalent changes and modifications made based on the claims and description of this utility model application fall within the protection scope of the claims of this utility model patent. Any aspects of this utility model not described in detail are conventional technical content.

Claims

1. A reference light measurement device, characterized in that, The device includes a cavity, a movable standard sample assembly, a three-dimensional adjustment mechanism, a detection mechanism, and a first cover. The cavity has a first inner cavity, and the cavity has a first opening, a second opening, and a third opening that communicate with the first inner cavity. The first cover is fixed to the cavity and covers the first opening. The first cover has a first through hole that communicates with the first inner cavity. The movable standard sample assembly includes a driving mechanism, a sample holder, and at least one standard sample. The sample holder has the same number of second through holes as the standard samples, and each second through hole corresponds to one of the standard samples. Each standard sample is fixed on the sample holder and covers the corresponding second through hole. The sample holder is located in the first inner cavity, and the standard samples face the first cover. The driving mechanism is fixed on the cavity and covers the second opening. The driving mechanism is connected to the sample holder and is used to move the sample holder along the Y direction so that at least one second through hole is aligned with the first through hole along the X direction. The detection mechanism includes a detection bracket and at least one photodetector. Both the detection bracket and the photodetector are located in the first inner cavity. The detection bracket has a third through hole. The photodetector is fixed on the detection bracket. The first cover, the sample holder, and the detection bracket are arranged sequentially along the X direction. The three-dimensional adjustment mechanism is fixed to the cavity and covers the third opening. The three-dimensional adjustment mechanism is connected to the detection bracket and is used to translate the detection bracket along the X, Y, and Z directions so that the third through hole is aligned with the first through hole along the X direction. The first through-hole is used to allow X-rays to pass through and enter the first inner cavity. In the first inner cavity, the X-rays are transmitted along the X-axis and pass through the standard sample, the second through-hole, and the third through-hole in sequence. The standard sample generates current and fluorescence under the irradiation of the X-rays, and the photodetector is used to receive the fluorescence.

2. The reference light measurement device according to claim 1, characterized in that, The cavity is provided with a fourth opening, which is used to connect to a molecular pump so that the first inner cavity is in a vacuum environment through the molecular pump.

3. The reference light measurement device according to claim 1, characterized in that, The three-dimensional adjustment mechanism includes a first support, a second support, a slide, a bellows, a second cover, and a connecting rod. The first end of the bellows is fixed to the cavity and covers the third opening. The second cover is connected to the second end of the bellows and covers the second end of the bellows. The first support is connected to the first end of the bellows. The second support is slidably connected to the first support and can slide relative to the first support in the Z direction. The slide is slidably connected to the second support and can move relative to the second support in the X and Y directions. The second end of the bellows is fixed to the slide. The connecting rod is located in the bellows and the first inner cavity. One end of the connecting rod is fixed to the second cover, and the other end of the connecting rod is fixed to the detection support.

4. The reference light measurement device according to claim 3, characterized in that, The three-dimensional adjustment mechanism further includes a first motor, a second motor, and a third motor. The first motor is mounted on the first support and connected to the second support, and is used to drive the second support to move relative to the first support along the Z direction. The second motor and the third motor are both mounted on the second support and connected to the slide table. The second motor is used to drive the slide table to move relative to the second support along the X direction, and the third motor is used to drive the slide table to move relative to the second support along the Y direction.

5. The reference light measurement device according to claim 1, characterized in that, There are multiple photodetectors, and each photodetector is arranged around the third through hole.

6. The reference light measurement device according to claim 3, characterized in that, The second cover is provided with a number of first BNC connectors that are the same as the number of photodetectors and correspond one-to-one with the photodetectors. Each photodetector is connected to the first BNC connector corresponding to the photodetector through a first wire, so as to lead out the signal detected by the photodetector through the first BNC connector.

7. The reference light measurement device according to claim 1, characterized in that, There are multiple standard samples, which are arranged sequentially along the Y direction, and each standard sample has a different thickness.

8. The reference light measurement device according to claim 7, characterized in that, The drive mechanism is configured to move any one of the standard samples into the X-ray path by moving the sample holder along the Y direction.

9. The reference light measurement device according to claim 1, characterized in that, The driving mechanism includes a fixed seat, a sliding rod, and a connecting member. The fixed seat is fixed to the cavity and covers the second opening. The sliding rod is slidably connected to the fixed seat and can move relative to the fixed seat in the Y direction. Both the fixed seat and the sliding rod are located outside the first inner cavity. One end of the connecting member is connected to the sliding rod, and the other end of the connecting member is connected to the sample holder.

10. The reference light measurement device according to claim 9, characterized in that, The sample holder is made of metal, the connector is made of insulating material, and the mounting base is provided with a second BNC connector. The sample holder is electrically connected to the second BNC connector via a second wire so that the current generated by the standard sample can be led out through the second BNC connector.

Images