Surface grinder complete

Abstract

The utility model provides a kind of end face grinder complete machine.The end face grinder complete machine includes end face grinder, and the end face grinder includes: base assembly;Workbench component, set in base assembly, workbench component includes the side of the workpiece that can be compressed or released compression passageway, compression passageway extends along X direction, and one end of workpiece is stretched out through compression passageway;Grinding head component, set in base assembly, grinding head component is located the end where workpiece is stretched out in compression passageway, and the grinding head of grinding head component is used to grind the end of workpiece.The technical scheme of the utility model solves the problem that the end face grinder complete machine in prior art lacks silicon rod end face grinding.

Description

Technical Field

[0001] This utility model relates to the field of grinding machine technology, and more specifically, to a face grinding machine. Background Technology

[0002] In the field of silicon material processing, grinding of silicon rods is a crucial step to remove surface defects and improve dimensional accuracy to meet the requirements of subsequent processing such as wafer slicing. In existing technologies, grinding is generally only performed on the four sides of the silicon rod to achieve surface flatness and dimensional consistency. While this method can control and achieve high precision on the four sides, the lack of grinding on the end faces makes it difficult to guarantee the perpendicularity between the ground sides and the end faces. This can lead to angular deviations between the sides and the end faces, which can affect the processing efficiency and wafer yield of subsequent silicon rods. Utility Model Content

[0003] The main purpose of this utility model is to provide a complete end face grinding machine to solve the problem that existing end face grinding machines lack the ability to grind the end face of silicon rods.

[0004] To achieve the above objectives, this utility model provides an end face grinding machine, including an end face grinding machine, which includes: a base assembly; a worktable assembly disposed on the base assembly, the worktable assembly including a clamping channel capable of clamping or releasing the side of a workpiece, the clamping channel extending along the X direction, one end of the workpiece extending out through the clamping channel; and a grinding head assembly disposed on the base assembly, the grinding head assembly being located at the end of the clamping channel where the workpiece extends out, the grinding head of the grinding head assembly being used to grind the end of the workpiece.

[0005] Furthermore, the worktable assembly includes: a table support, disposed on the base assembly; a table backing; a pushing member, the table backing and the pushing member being spaced apart along the Y direction on the table support, the pushing member including a pushing element movable relative to the table backing along the Y direction, the pushing element being able to approach or move away from the table backing to form a pressing channel; and a support member, disposed on the table support, the support member being located between the table backing and the pushing member, the support member having a support plane for supporting the bottom surface of the workpiece.

[0006] Furthermore, the table rest is provided with a first groove, which is recessed into the table rest from the top surface of the table rest and extends through the table rest along the Y direction; the support member is provided with a second groove, which is recessed into the support member from the support plane and extends through the support member along the Y direction; the end face grinder also includes a fork assembly disposed on the base assembly, the fork assembly being located on the side of the table rest away from the push member, the fork assembly including a fork movably disposed along the Z direction, and the table support being movably disposed on the base assembly along the Y direction, so that the fork can extend into or out of the second groove through the first groove.

[0007] Furthermore, the fork assembly also includes a bracket and a lifting member, the bracket being disposed on the base assembly, the lifting member being disposed on the bracket, the lifting member having a lifting end movably disposed relative to the bracket along the Z direction, the fork being connected to the lifting end; and / or, a pad is provided on the upper surface of the fork.

[0008] Furthermore, the extension direction of the clamping channel is perpendicular to the grinding surface of the grinding head.

[0009] Furthermore, the end face grinding machine also includes an upper spray assembly, which includes: a mounting frame, disposed on the top of the worktable assembly; an upper spray pipe, mounted on the mounting frame; and multiple upper spray elements, wherein the upper spray pipe is provided with multiple upper spray elements that communicate with the interior of the upper spray pipe at intervals, and the outlet of each upper spray element is arranged facing the pressing channel.

[0010] Furthermore, the end face grinding machine also includes a lower spray assembly disposed on the worktable assembly. The lower spray assembly is located below the clamping channel. The lower spray assembly includes a lower spray pipe and multiple lower spray elements disposed on the lower spray pipe. The outlets of the lower spray elements are arranged facing the clamping channel to spray the bottom surface of the workpiece.

[0011] Furthermore, the end face grinding machine also includes an end face detection assembly, which includes: a mounting base disposed on the grinding head assembly; a drive member disposed on the mounting base, the drive member having a drive end; and a probe member including an end face moving part and a plurality of end face probes, the end face moving part being connected to the drive end, the plurality of end face probes being connected to the side of the end face moving part facing the clamping channel, and the drive end being movably disposed relative to the mounting base for driving the end face probe member closer to or away from the workpiece.

[0012] Furthermore, the end face grinding machine also includes a reference plate assembly, which includes: a mounting component disposed on the worktable assembly; and a reference component connected to the mounting component. The reference component protrudes relative to the mounting component in the direction of the probe component, and a reference plane is provided on the side of the reference component facing the probe component.

[0013] Furthermore, the reference plate assembly also includes a water inlet component, which is disposed above the reference component. The water inlet component has a water inlet, a water inlet chamber, and multiple water outlets connected in sequence, with the multiple water outlets facing the reference plane.

[0014] Furthermore, the end face detection assembly also includes a first guide rail and a slider that slides with the first guide rail. The first guide rail is disposed on the mounting base, and the end face moving member is connected to the drive end through the slider. And / or, the end face detection assembly also includes a pusher located below the plurality of end face probes. The pusher is connected to the side of the end face moving member facing the worktable assembly, and the pusher protrudes from the top of the plurality of end face probes.

[0015] Furthermore, the end face grinding machine also includes a side inspection assembly, which includes: a mounting member disposed on the base assembly along the Y direction, the mounting member being located on one side of the worktable assembly; a drive member disposed on the mounting member, the drive member having a drive section; and a probe member including a side moving member and a plurality of side probes, the side moving member being connected to the drive section, the plurality of side probes being connected to the side of the side moving member facing the clamping channel, and the drive section being movably disposed relative to the mounting member to drive the probe member closer to or away from the workpiece.

[0016] Furthermore, the end face grinding machine also includes a robot arm assembly disposed on one side of the end face grinding machine, the robot arm assembly including a robot arm for gripping and moving the workpiece.

[0017] Furthermore, the end face grinding machine also includes a drying air box disposed on one side of the end face grinding machine. The drying air box includes: a box body with an opening on one circumferential side; a fan disposed in the box body; and an air knife with at least one air knife disposed on at least one of the top wall, bottom wall, left inner wall and right inner wall of the box body, and the air knife being connected to the outlet of the fan through an air duct.

[0018] The technical solution of this utility model is provided with a pressing channel in the worktable assembly. The channel extends along the X-axis and can effectively press the side of the workpiece to ensure the stable positioning of the workpiece during the grinding process. The grinding head assembly is set at the protruding end of the workpiece and performs precise grinding on the end of the workpiece, thereby improving the perpendicularity of the two end faces of the workpiece to the surrounding area, which in turn improves the processing efficiency and wafer yield of the subsequent silicon rod. Attached Figure Description

[0019] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0020] Figure 1 A schematic diagram of the structure of an embodiment of the end face grinding machine of this utility model is shown;

[0021] Figure 2 It shows Figure 1 A schematic diagram of the structure of the end face grinding machine;

[0022] Figure 3 It shows Figure 2 A schematic diagram of the worktable assembly of an end face grinder;

[0023] Figure 4 It shows Figure 2 A schematic diagram of the feed fork assembly of an end face grinder from one perspective;

[0024] Figure 5 It shows Figure 2 A schematic diagram of the feed fork assembly of an end face grinder from another perspective;

[0025] Figure 6 It shows Figure 2 A schematic diagram of the upper and lower spray components of the end face grinding machine;

[0026] Figure 7 It shows Figure 2 A schematic diagram of the end face inspection component of an end face grinder;

[0027] Figure 8 It shows Figure 2 A schematic diagram of the reference plate assembly of the end face grinder;

[0028] Figure 9 It shows Figure 2 A schematic diagram of the side inspection component of the end face grinder;

[0029] Figure 10 It shows Figure 1 A schematic diagram of the drying air box of the end face grinding machine.

[0030] The above figures include the following reference numerals:

[0031] 1. End face grinder; 100. Workpiece; 101. Clamping channel; 11. Base assembly; 111. Table support; 112. Table backing; 1121. First groove; 1131. Second groove; 113. Support component; 114. Pushing component; 115. Reference plate assembly; 116. Lower spray assembly; 12. Grinding head assembly; 121. Lifting component; 122. Support; 123. Fork; 124. Pad; 125. Linear guide; 126. Bellows cover; 13. End face inspection assembly; 14. Fork assembly; 15. Side inspection assembly; 16. Worktable assembly; 2. Drying air box; 21. Box body; 24. Fan; 22. Air... 3. Knife; 4. Robotic arm assembly; 5. Mounting bracket; 6. Upper spray pipe; 7. Water distribution block; 8. Upper spray component; 9. Lower spray pipe; 10. Lower spray component; 11. Mounting component; 2. Water inlet component; 32. Reference component; 43. Mounting component; 54. Detection box; 55. Side moving component; 56. Side probe; 57. Nylon top block; 68. Second guide rail; 59. Inductive switch; 60. Drive component; 61. Flip cover; 62. Cable entry block; 63. Mounting base; 64. Mounting plate; 65. First guide rail; 66. Drive component; 77. End face moving component; 88. Probe mounting plate; 99. End face probe; 10. Pushing component; 11. Cable chain. Detailed Implementation

[0032] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0033] It should be noted that workpiece 100 is a silicon rod.

[0034] like Figures 1 to 10 As shown, an embodiment of this utility model provides a complete end face grinding machine, including an end face grinding machine 1. The end face grinding machine 1 includes: a base assembly 11; a worktable assembly 16 disposed on the base assembly 11, the worktable assembly 16 including a clamping channel 101 capable of clamping or releasing the side of a workpiece 100, the clamping channel 101 extending along the X direction, one end of the workpiece 100 extending out through the clamping channel 101; and a grinding head assembly 12 disposed on the base assembly 11, the grinding head assembly 12 being located at the end of the clamping channel 101 where the workpiece 100 extends out, the grinding head of the grinding head assembly 12 being used to grind the end of the workpiece 100.

[0035] In the above technical solution, the worktable assembly 16 is provided with a clamping channel 101, which extends along the X-axis direction and can effectively clamp the side of the workpiece 100 to ensure the stable positioning of the workpiece 100 during the grinding process. The grinding head assembly 12 is set at the protruding end of the workpiece 100 and is aligned with the end of the workpiece 100 for precise grinding, thereby improving the perpendicularity of the two end faces of the workpiece 100 to the surrounding area, which in turn improves the processing efficiency and wafer yield of the subsequent silicon rods.

[0036] It should be noted that in the embodiments of this utility model, the specific structure of the grinding head assembly 12 can adopt the existing technology, which will not be described in detail here.

[0037] like Figures 1 to 10 As shown in the embodiment of this utility model, the workbench assembly 16 includes: a table support 111, disposed on the base assembly 11; a table backrest 112; a push-back member 114, wherein the table backrest 112 and the push-back member 114 are spaced apart along the Y direction on the table support 111, and the push-back member 114 includes a push-back member that is movably disposed relative to the table backrest 112 along the Y direction, and the push-back member can approach or move away from the table backrest 112 to form a pressing channel 101; and a support member 113, disposed on the table support 111, wherein the support member 113 is located between the table backrest 112 and the push-back member 114, and the support member 113 has a support plane for supporting the bottom surface of the workpiece 100.

[0038] In the above technical solution, the table support 112 and the pusher component 114 are arranged at intervals along the Y direction. The pusher component 114 includes a pusher that can move along the Y direction. This pusher can dynamically adjust its position, moving closer to or further away from the table support 112, thereby precisely forming the clamping channel 101. This enables reliable clamping and positioning of the side of the workpiece 100. The support component 113 is located between the table support 112 and the pusher component 114, and has a support plane to support the bottom surface of the workpiece, ensuring the stability and perpendicularity of the workpiece during the grinding process. Therefore, through dynamic clamping and precise support, the perpendicularity accuracy of the grinding of the two end faces of the workpiece 100 is effectively improved, thereby increasing the efficiency and yield of subsequent slicing processes.

[0039] Furthermore, by adjusting the position of the pusher, it can accommodate workpieces 100 of different sizes.

[0040] In some embodiments, the pushing member 114 is a cylinder or an electric push rod, and the pushing member is the output end of the cylinder or a block structure connected to the output end of the cylinder.

[0041] In some embodiments, the countertop support 112 is a countertop backing plate; the support member 113 is a countertop pad.

[0042] In some embodiments, the table support 112 and the support member 113 are both mounted on the table bracket 111 to position the bottom and side surfaces of the silicon rod, respectively, ensuring that the silicon rod is perpendicular to the grinding head. The table support 112 and the support member 113 are both made of nylon to prevent scratching the silicon rod. The push member 114 pushes the silicon rod to ensure that the silicon rod is in contact with the table support 112. The reference plate assembly 115 is a reference plate. Before each end face inspection, the probe hits the reference plate to ensure that the probe value is accurate. The lower spray assembly 116 rinses the bottom surface of the silicon rod after processing.

[0043] like Figures 1 to 10 As shown in the embodiment of this utility model, the table support 112 is provided with a first groove 1121, which is recessed into the table support 112 from the top surface of the table support 112 and extends through the table support 112 along the Y direction; the support member 113 is provided with a second groove 1131, which is recessed into the support member 113 from the support plane and extends through the support member 113 along the Y direction; the end face grinder 1 also includes a fork assembly 14 disposed on the base assembly 11, the fork assembly 14 being located on the side of the table support 112 away from the push member 114, the fork assembly 14 including a fork 123 movably disposed along the Z direction, and the table support 111 being movably disposed on the base assembly 11 along the Y direction, so that the fork 123 can extend into or out of the second groove 1131 through the first groove 1121.

[0044] In the above technical solution, the fork 123 of the fork assembly 14 can move freely in the Z direction (vertical direction), while the table support 111 can move along the Y direction (lateral direction) on the base assembly 11. In this way, it can be ensured that the fork 123 can extend into or out of the second groove 1131 through the first groove 1121 to achieve smooth picking up and putting down of the workpiece 100, so as to realize the transfer of the workpiece 100 and thus improve the efficiency of automated loading and unloading.

[0045] like Figures 1 to 10 As shown in the embodiment of the present invention, the fork assembly 14 further includes a bracket 122 and a lifting member 121. The bracket 122 is disposed on the base assembly 11, and the lifting member 121 is disposed on the bracket 122. The lifting member 121 has a lifting end that is movably disposed relative to the bracket 122 along the Z direction. The fork 123 is connected to the lifting end; and / or, a pad 124 is provided on the upper surface of the fork 123.

[0046] In the above technical solution, the lifting end of the lifting member 121 is movably disposed relative to the bracket 122 along the Z-direction (vertical direction), and is connected to the fork 123, enabling the picking and placing of the workpiece 100. Specifically, when the workpiece needs to be moved out of the grinding position, the table bracket 111 is moved, and the fork 123 extends into the second groove 1131 through the first groove 1121, so that the fork 123 is located at the bottom of the workpiece 100. Then, the lifting end of the lifting member 121 drives the fork 123 to move upward, smoothly lifting the workpiece 100 and transferring it to the next process, and vice versa.

[0047] Furthermore, the pad 124 added to the upper surface of the fork 123 not only ensures stable support for the workpiece during the transfer process and avoids surface damage that may be caused by direct contact between the workpiece 100 and the fork 123, but also the pad 124 is made of flexible materials such as nylon, which can further reduce hard contact and ensure the integrity of the workpiece.

[0048] In some embodiments, the lifting member 121 is a cylinder or an electric push rod. After the cylinder is vented, it extends and the fork 123 is lifted.

[0049] In some embodiments, the lifting end of the lifting member 121 is welded to the fork via a connecting seat.

[0050] like Figures 1 to 10 As shown in the embodiment of this utility model, the extending direction of the clamping channel 101 is perpendicular to the grinding surface of the grinding head. This ensures the perpendicularity of the workpiece 100 during the grinding process, improves the machining accuracy, and thus ensures the perpendicularity of the ground end face to the surrounding area.

[0051] In some embodiments, the fork assembly 14 further includes a linear guide 125 and an accordion cover 126. The linear guide 125 is mounted on the bracket 122, and a slider on the linear guide is connected to the fork 123. The accordion cover 126 covers the bracket 122 to protect the linear guide and the lifting member 121. The fork 123 extends out of the accordion cover 126.

[0052] like Figures 1 to 10 As shown in the embodiment of this utility model, the end face grinding machine 1 further includes an upper spray assembly, which includes: a mounting frame 31, disposed on the top of the worktable assembly 16; an upper spray pipe 32, mounted on the mounting frame 31; and a plurality of upper spray elements 34, wherein the upper spray pipe 32 is provided with a plurality of upper spray elements 34 that communicate with the interior of the upper spray pipe 32 at intervals, and the outlet of each upper spray element 34 is disposed toward the pressing channel 101.

[0053] In the above technical solution, the mounting bracket 31 is stably set on the top of the worktable assembly 16, and an upper spray pipe 32 is mounted on it. Coolant or cleaning agent flows inside the pipe. Multiple upper spray elements 34 are evenly distributed on the upper spray pipe 32, and the outlet direction of each spray element is aligned with the clamping channel 101. This ensures that during the grinding of the workpiece 100, the coolant or cleaning agent can be directly sprayed onto the grinding area to immediately remove the heat and debris generated during grinding, maintain a clean and low-temperature grinding environment, effectively prevent the workpiece from deforming or being damaged due to high temperature, and also extend the service life of the grinding head assembly 12. The workpiece can also be cleaned after grinding.

[0054] In some embodiments, the upper spray pipe 32 is connected to a supply tank that stores coolant or cleaning agent.

[0055] In some embodiments, there are two upper spray pipes 32, and the outlets of the spray elements of the two upper spray pipes 32 are oriented differently.

[0056] In some embodiments, the mounting bracket 31 is fixed to the protective cover at the upper end of the workbench assembly 16 and remains stationary. The protective cover is made of sheet metal. The upper spray pipe 32 is fixed to the mounting bracket 31. The spray water enters the water distribution block 33 through the hose and then enters the two upper spray pipes 32 respectively. Several upper spray elements 34 are installed on each upper spray pipe 32. The upper spray elements 34 are upper nozzles. The water outlet of the upper nozzles is fan-shaped. The angle of the upper spray elements 34 on each pipe is adjusted to be consistent. However, the included angle of the upper spray elements 34 on the two pipes is adjusted to a certain angle so that the upper surface and the left and right sides of the silicon rod can be fully covered.

[0057] like Figures 1 to 10As shown in the embodiment of this utility model, the end face grinding machine 1 further includes a lower spray assembly 116 disposed on the worktable assembly 16. The lower spray assembly 116 is located below the pressing channel 101. The lower spray assembly 116 includes a lower spray pipe 35 and a plurality of lower spray elements 36 disposed on the lower spray pipe 35. The outlet of the lower spray elements 36 is disposed toward the pressing channel 101 to spray the bottom surface of the workpiece 100.

[0058] In the above technical solution, after grinding is completed, coolant or cleaning agent is delivered to each lower spray component 36 through the lower spray pipe 35, thereby spraying onto the bottom surface of the workpiece. This can effectively remove grinding heat, clean the grinding debris from the bottom surface, and prevent impurities from remaining and affecting the machining accuracy and surface quality.

[0059] In some embodiments, the lower spray pipe 35 is connected to a supply tank that stores coolant or cleaning agent.

[0060] In some embodiments, the lower spray pipe 35 is fixed on the worktable assembly 16, below the silicon rod, and a row of lower spray elements 36 are also installed on the lower spray pipe 35 to spray the lower end face of the silicon rod.

[0061] like Figures 1 to 10 As shown in the embodiment of this utility model, the end face grinding machine 1 further includes an end face detection component 13. The end face detection component 13 includes: a mounting base disposed on the grinding head assembly 12; a driving component 64 disposed on the mounting base, the driving component 64 having a driving end; and a probe component including an end face moving member 66 and a plurality of end face probes 68. The end face moving member 66 is connected to the driving end, and the plurality of end face probes 68 are connected to the side of the end face moving member 66 facing the pressing channel 101. The driving end is movably disposed relative to the mounting base to drive the end face probe 68 component closer to or away from the workpiece 100.

[0062] In the above technical solution, at the start of the inspection, the drive component 64 moves the end face probe 68 to a position contacting the workpiece end face. Through nine pre-set inspection points (three positions: front, middle, and rear, with three points at each position), the flatness of the workpiece end face and the required grinding amount can be comprehensively evaluated, ensuring the accuracy and efficiency of the subsequent grinding process. This enables high-precision inspection of the workpiece end face, providing accurate data support for the grinding operation. It not only improves the workpiece's machining quality by ensuring the perpendicularity of the ground end face to its surroundings but also optimizes grinding parameters, avoiding over- or under-grinding and thus reducing material waste.

[0063] In some embodiments, the drive member 64 is an electric push rod or a cylinder, and the end probe 68 can adopt existing technology, which will not be described in detail here.

[0064] like Figures 1 to 10As shown in the embodiment of this utility model, the end face grinding machine 1 further includes a reference plate assembly 115. The reference plate assembly 115 includes: a mounting member 41, which is disposed on the worktable assembly 16; and a reference member 43, which is connected to the mounting member 41. The reference member 43 protrudes relative to the mounting member 41 in the direction of the probe member, and a reference plane is provided on the side of the reference member 43 facing the probe member.

[0065] In the above technical solution, the end face probe 68 needs to contact the reference plane before each inspection. By touching the reference plane of the reference plate, the end face probe 68 can correct its own position information, eliminate potential position deviations, and ensure that the end face inspection component 13 can perform zero-point calibration before inspection. This ensures that the subsequent end face inspection results of the workpiece 100 are highly accurate. In this way, the accumulation of position errors caused by long-term use of the probe or external factors is effectively avoided, and the reliability of the inspection data is improved to maintain the inspection accuracy.

[0066] In some embodiments, the table support 111 of the worktable assembly 16 is movably disposed along the Y direction, such that the end face probe 68 can contact the end face of the reference member 43 and the workpiece, respectively.

[0067] like Figures 1 to 10 As shown in the embodiment of this utility model, the reference plate assembly 115 further includes a water inlet 42, which is disposed above the reference component 43. The water inlet 42 has a water inlet, a water inlet cavity and a plurality of water outlets connected in sequence, and the plurality of water outlets are arranged facing the reference plane.

[0068] In the above technical solution, before testing, the cleaning fluid enters the water inlet chamber through the water inlet and is then evenly sprayed onto the reference plane through the water outlet. This not only removes any possible dust and impurities but also provides lubrication for the probe's contact, reducing wear and ensuring the sensitivity and testing accuracy when the probe contacts the reference plane. It also avoids testing errors caused by surface dirt or dryness, thus ensuring the accuracy of the test and protecting precision components from damage.

[0069] In some embodiments, the inlet of the water inlet 42 is connected to a supply tank storing coolant or cleaning agent.

[0070] In some embodiments, the mounting component 41 is mounted on the workbench assembly 16, and the water inlet component 42 is mounted on the mounting component 41. Spray water enters the water inlet component 42 through a hose. During the grinding process, the spray water sprays onto the reference component 43 through a row of water outlets at the lower end of the water inlet component 42 to prevent silica sludge from accumulating on the reference component 43.

[0071] like Figures 1 to 10As shown in the embodiment of this utility model, the end face detection assembly 13 further includes a first guide rail 63 and a sliding member that slides with the first guide rail 63. The first guide rail 63 is disposed on the mounting base, and the end face moving member 66 is connected to the driving end through the sliding member; and / or, the end face detection assembly 13 further includes a push member 69 located below the plurality of end face probes 68. The push member 69 is connected to the side of the end face moving member 66 facing the worktable assembly 16, and the push member 69 protrudes from the top of the plurality of end face probes 68.

[0072] In the above technical solution, the first guide rail 63 can play a guiding role to ensure the smooth movement of the end face moving part 66 and the multiple end face probes 68 on it, so that the probe can move along the preset path when detecting the end face of the workpiece 100, avoiding detection errors caused by unstable movement trajectory, and significantly improving detection accuracy and repeatability; at the same time, since the worktable assembly 16 is equipped with a protective cover, the protective cover can protect the worktable assembly 16, the reference plate assembly 115, the fork assembly 14, the upper spray assembly and the lower spray assembly 116. By setting the pusher 69, the openable door plate on the protective cover can be opened first, so that the end face probes 68 can be inserted into the protective cover to contact the reference plane.

[0073] In some embodiments, the mounting base includes a mounting base 61 and a mounting plate 62, the mounting plate 62 is disposed on the mounting base 61, the first guide rail 63 is disposed on the mounting plate 62, the driving member 64 is disposed on the mounting plate 62, and the mounting base 61 is disposed on the grinding head assembly 12.

[0074] In some embodiments, when the end face probe 68 contacts the workpiece, the pusher 69 is misaligned with the workpiece 100; when the end face probe 68 contacts the reference part, the pusher 69 is misaligned with the reference part.

[0075] In some embodiments, the mounting base 61 is mounted on the grinding head assembly and moves forward and backward simultaneously with the grinding head assembly. The mounting plate 62 is mounted on the mounting base 61. The first guide rail 63 and the drive component 64 are mounted on the mounting plate 62. The end-face moving component 66 is mounted on the slider of the first guide rail 63 and can move back and forth. Simultaneously, the end-face moving component 66 is connected to the piston rod of the drive component 64 (cylinder). The cylinder moves back and forth when ventilated, causing the end-face moving component 66 to slide. The pusher 69 (nylon pusher block) is mounted on the end-face moving component 66. When the cylinder extends, the pusher 69 first pushes open the door panel on the protective cover. The end-face probe 68 is mounted on the probe mounting plate 67, which is fixed to the end-face moving component 66. As the probes move forward, the end-face probe 68 extends and contacts the end face of the silicon rod. The end-face value of the silicon rod is determined by the values ​​of the three end-face probes 68, thus achieving detection. The cable chain 70 is mounted at both ends on the mounting plate 62 and the end-face moving component 66, respectively, for probe routing.

[0076] like Figures 1 to 10 As shown in the embodiment of this utility model, the end face grinding machine 1 further includes a side detection assembly 15. The side detection assembly 15 includes: a mounting member 51, disposed on the base assembly 11 along the Y direction, the mounting member 51 being located on one side of the worktable assembly 16; a driving member 58, disposed on the mounting member 51, the driving member 58 having a driving part; and a probe member, including a side moving member 53 and a plurality of side probes 54, the side moving member 53 being connected to the driving part, the plurality of side probes 54 being connected to the side of the side moving member 53 facing the pressing channel 101, the driving part being movably disposed relative to the mounting member 51 to drive the probe member closer to or away from the workpiece 100.

[0077] In the above technical solution, when the side detection is started, the driving part of the driving component 58 is activated, which drives the side moving part 53 and the side probe 54 to approach the workpiece 100 as a whole. The side probe 54 touches the side of the workpiece 100. By feeding back the coordinate information of each point on the side of the workpiece 100, the side detection component 15 can quickly and accurately determine whether the side of the workpiece 100 is parallel to the table surface abutment 112, so as to ensure that the subsequent grinding process can be adjusted to the optimal state according to the detection results, and avoid the low perpendicularity accuracy of the two end faces and the surrounding area of ​​the workpiece 100, thereby ensuring the high quality of the grinding operation.

[0078] In some embodiments, the drive component 58 is an electric push rod or a cylinder.

[0079] In some embodiments, the side detection component 15 includes two side probes 54. If the side of the workpiece 100 is not parallel to the table surface support 112, the difference in the measured values ​​of the two side probes 54 is relatively large. In this way, the support component can be pushed again. If it is still not parallel, it can be checked manually.

[0080] In some embodiments, the mounting member 51 is mounted on the base assembly 11, the detection box 52 is mounted on the mounting member 51, the second guide rail 56 and the drive component 58 are mounted on the detection box 52, and the side moving member 53 (sliding plate) is mounted on the slider of the second guide rail 56 and can move back and forth. At the same time, the side moving member 53 is connected to the piston rod of the drive component 58 (cylinder). When the cylinder is ventilated, it moves back and forth, causing the side moving member 53 to slide. The nylon top block 55 is mounted on the side moving member 53. When the cylinder extends, the nylon top block 55 first pushes open the flip cover 59 on the detection box 52. The side probe 54 is mounted on the side moving member 53 and moves forward at the same time. After the side probe 54 extends, it contacts the side of the silicon rod. The side value of the silicon rod is determined by the values ​​of the two side probes 54 to realize the detection. The induction switch 57 is mounted on the detection box 52 to determine whether the flip cover 59 flips back after the cylinder retracts (flipping due to gravity). The inlet block 60 is used to run the air pipe and the induction switch line to prevent water from entering the detection box 52.

[0081] like Figures 1 to 10 As shown in the embodiment of this utility model, the end face grinding machine also includes a robot arm assembly 3 disposed on one side of the end face grinding machine 1. The robot arm assembly 3 includes a robot arm for gripping and moving the workpiece 100.

[0082] In the above technical solution, the robotic arm can smoothly grasp and move the workpiece 100, reducing manual intervention, realizing automatic loading and unloading of the workpiece 100, and improving production efficiency.

[0083] In some embodiments, the specific structure of the robotic arm component 3 can adopt existing technology, which will not be described in detail here.

[0084] like Figures 1 to 10 As shown in the embodiment of this utility model, the end face grinding machine also includes a drying air box 2 disposed on one side of the end face grinding machine 1. The drying air box 2 includes: a box body 21, with an opening on one circumferential side of the box body 21; a fan 24 disposed in the box body 21; and an air knife 22, with at least one air knife 22 disposed on at least one of the top wall, bottom wall, left inner wall and right inner wall of the box body 21. The air knife 22 is connected to the outlet of the fan 24 through an air duct.

[0085] In the above technical solution, the high-pressure dry air generated by the blower 24 is sprayed through the air knife 22, which can effectively remove moisture and debris from the surface of the workpiece 100, maintain the cleanliness of the workpiece 100, and ensure the smooth progress of subsequent processing.

[0086] In some embodiments, the specific structure of the air blade 22 can adopt existing technology, which will not be described in detail here.

[0087] In some embodiments, the blower 24 is a blower; the housing 21 is fixed to the ground with expansion bolts, the blower blows out high-pressure dry air, and the blower 24 is connected to the air knife 22 through an air duct. There are five air knives 22, which are responsible for drying the left, right, top, and bottom surfaces of the silicon rod. Specifically, there is one air knife on the bottom, left, and right sides of the housing 21, and one on each of the left and right diagonally above the top surface, so that the robotic arm can grab the silicon rod and enter from the top surface.

[0088] In some embodiments, the end face grinder 1 can grind a single or both ends of a silicon rod; the drying air box 2 can dry the ground silicon rod to keep it clean; the robot arm assembly 3 is responsible for picking up the silicon rod from the conveyor line onto the worktable assembly 16 of the end face grinder 1. After the end face grinder 1 starts processing, the robot arm picks up the second silicon rod and waits on the upper part of the end face grinder 1 to finish processing. After the first silicon rod is processed, the worktable assembly 16 of the end face grinder 1 moves the silicon rod above the feed fork 123. The feed fork 123 lifts the silicon rod, the worktable assembly 16 returns to the standby position, the robot arm puts down the second silicon rod, and then the robot arm picks up the first silicon rod on the feed fork 123 and puts the first silicon rod into the drying air box 2 for drying. After drying, the silicon rod is picked up and returned to the conveyor line. At the same time, the end face grinder starts processing the second silicon rod, and so on. Specifically, after the workpiece is placed on the table by the robot arm, the pushing component 114 pushes the workpiece to ensure that it fits against the table support component 112. Then, the side detection component 15 detects the side of the silicon rod to ensure that the workpiece and the support surface of the table support component 112 are parallel. Next, the end face detection component 13 detects the end face of the silicon rod, detecting a total of 9 points in three positions (front, middle, and rear) to determine the flatness and grinding amount of the end face. After the detection is completed, the spray on the grinding head assembly 12 is turned on to start grinding the end face of the silicon rod. After grinding is completed, the worktable assembly 16 moves the silicon rod to a position above the feed fork 123. The feed fork 123 lifts the silicon rod, and then the worktable assembly 16 returns to the standby position. The robot arm places the next silicon rod on the worktable assembly 16. After it is placed down, the robot arm picks up the first silicon rod from the feed fork and moves out to continue processing.

[0089] It should be noted that the end face grinding machine of this application grinds both end faces of the silicon rod, ensuring that the perpendicularity between the ground end face and the periphery is within 0.03mm, which can improve the processing efficiency and wafer yield of the back-end wafer slicing.

[0090] As can be seen from the above description, the above embodiments of this utility model achieve the following technical effects: the worktable assembly is provided with a pressing channel that extends along the X-axis direction, which can effectively press the side of the workpiece to ensure the stable positioning of the workpiece during the grinding process. The grinding head assembly is set at the protruding end of the workpiece and is aligned with the end of the workpiece for precise grinding, thereby improving the perpendicularity of the two end faces of the workpiece to the surrounding area, which in turn improves the processing efficiency and wafer yield of the subsequent silicon rods.

[0091] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A complete end face grinding machine, characterized in that, Includes a face grinding machine (1), said face grinding machine (1) comprising: Base assembly (11); A worktable assembly (16) is disposed on the base assembly (11). The worktable assembly (16) includes a clamping channel (101) capable of clamping or releasing the side of a workpiece (100). The clamping channel (101) extends in the X direction, and one end of the workpiece (100) extends out through the clamping channel (101). A grinding head assembly (12) is disposed on the base assembly (11). The grinding head assembly (12) is located at the end of the clamping channel (101) that extends out of the workpiece (100). The grinding head of the grinding head assembly (12) is used to grind the end of the workpiece (100).

2. The end face grinding machine according to claim 1, characterized in that, The workbench assembly (16) includes: A tabletop support (111) is disposed on the base assembly (11). Tabletop support (112); Pushing member (114), the table support (112) and the pushing member (114) are spaced apart along the Y direction on the table support (111), the pushing member (114) includes a pushing member that is movably disposed relative to the table support (112) along the Y direction, the pushing member being able to approach or move away from the table support (112) to form the pressing channel (101). A support member (113) is disposed on the table support (111). The support member (113) is located between the table backing member (112) and the push member (114). The support member (113) has a support plane for supporting the bottom surface of the workpiece (100).

3. The end face grinding machine according to claim 2, characterized in that, The tabletop support (112) is provided with a first groove (1121), the first groove (1121) is recessed into the tabletop support (112) from the top surface of the tabletop support (112), and the first groove (1121) passes through the tabletop support (112) along the Y direction. The support member (113) is provided with a second groove (1131), the second groove (1131) is recessed into the support member (113) from the support plane, and the second groove (1131) passes through the support member (113) along the Y direction. The end face grinder (1) further includes a fork assembly (14) disposed on the base assembly (11). The fork assembly (14) is located on the side of the table support (112) away from the push member (114). The fork assembly (14) includes a fork (123) movably disposed along the Z direction. The table support (111) is movably disposed on the base assembly (11) along the Y direction, so that the fork (123) can extend into or out of the second groove (1131) through the first groove (1121).

4. The end face grinding machine according to claim 3, characterized in that, The fork assembly (14) further includes a bracket (122) and a lifting member (121), the bracket (122) being disposed on the base assembly (11), the lifting member (121) being disposed on the bracket (122), the lifting member (121) having a lifting end movably disposed relative to the bracket (122) along the Z direction, the fork (123) being connected to the lifting end; and / or, A pad (124) is provided on the upper surface of the fork (123).

5. The end face grinding machine according to claim 1, characterized in that, The extension direction of the clamping channel (101) is perpendicular to the grinding surface of the grinding head.

6. The end face grinding machine according to any one of claims 1 to 5, characterized in that, The end face grinding machine (1) further includes an upper spray assembly, which includes: Mounting bracket (31) is disposed on top of the workbench assembly (16); The upper spray pipe (32) is installed on the mounting bracket (31); Multiple upper spray elements (34) are provided on the upper spray pipe (32) at intervals and communicating with the interior of the upper spray pipe (32). The outlet of each upper spray element (34) is arranged facing the pressing channel (101).

7. The end face grinding machine according to any one of claims 1 to 5, characterized in that, The end face grinding machine (1) further includes a lower spray assembly (116) disposed on the worktable assembly (16). The lower spray assembly (116) is located below the clamping channel (101). The lower spray assembly (116) includes a lower spray pipe (35) and a plurality of lower spray elements (36) disposed on the lower spray pipe (35). The outlet of the lower spray elements (36) is disposed toward the clamping channel (101) to spray the bottom surface of the workpiece (100).

8. The end face grinding machine according to any one of claims 1 to 5, characterized in that, The end face grinding machine (1) further includes an end face detection component (13), which includes: Mounting base, disposed on the grinding head assembly (12): A driving component (64) is disposed on the mounting base, and the driving component (64) has a driving end; The probe component includes an end face moving part (66) and a plurality of end face probes (68), the end face moving part (66) being connected to the drive end, and the plurality of end face probes (68) being connected to the side of the end face moving part (66) facing the clamping channel (101). The drive end is movably disposed relative to the mounting base for driving the end face probe (68) component closer to or away from the workpiece (100).

9. The end face grinding machine according to claim 8, characterized in that, The end face grinding machine (1) further includes a reference plate assembly (115), the reference plate assembly (115) comprising: Mounting component (41) is disposed on the worktable assembly (16). A reference member (43) is connected to the mounting member (41). The reference member (43) protrudes relative to the mounting member (41) in the direction of the probe member. A reference plane is provided on the side of the reference member (43) facing the probe member.

10. The end face grinding machine according to claim 9, characterized in that, The reference plate assembly (115) further includes a water inlet (42), which is disposed above the reference plate (43). The water inlet (42) has a water inlet, a water inlet cavity and a plurality of water outlets connected in sequence, and the plurality of water outlets are arranged facing the reference plane.

11. The end face grinding machine according to claim 8, characterized in that, The end face detection component (13) further includes a first guide rail (63) and a sliding member that slidably engages with the first guide rail (63). The first guide rail (63) is disposed on the mounting base, and the end face moving member (66) is connected to the driving end through the sliding member; and / or, The end face detection assembly (13) further includes a pusher (69) located below the plurality of end face probes (68), the pusher (69) being connected to the side of the end face moving member (66) facing the stage assembly (16), the pusher (69) protruding from the top of the plurality of end face probes (68).

12. The end face grinding machine according to any one of claims 1 to 5, characterized in that, The end face grinding machine (1) further includes a side inspection assembly (15), which includes: Mounting member (51) is disposed on the base assembly (11) along the Y direction, and the mounting member (51) is located on one side of the worktable assembly (16): A drive component (58) is disposed on the mounting member (51), and the drive component (58) has a drive section; The probe component includes a side moving member (53) and a plurality of side probes (54). The side moving member (53) is connected to the drive unit, and the plurality of side probes (54) are connected to the side of the side moving member (53) facing the clamping channel (101). The drive unit is movably disposed relative to the mounting member (51) to drive the probe component closer to or away from the workpiece (100).

13. The end face grinding machine according to any one of claims 1 to 5, characterized in that, The end face grinding machine also includes a robot arm assembly (3) disposed on one side of the end face grinding machine (1), the robot arm assembly (3) including a robot arm for gripping and moving the workpiece (100).

14. The end face grinding machine according to any one of claims 1 to 5, characterized in that, The end face grinding machine also includes a drying air box (2) disposed on one side of the end face grinding machine (1), the drying air box (2) comprising: The box (21) has an opening on one circumferential side; A fan (24) is installed in the housing (21); At least one of the top wall, bottom wall, left inner wall and right inner wall of the housing (21) is provided with an air knife (22), and the air knife (22) is connected to the outlet of the fan (24) through an air duct.

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