Multi-ring grinding wheel

Abstract

The utility model provides a kind of multi-ring grinding wheel, including ring body, first ring type grinding unit and second ring type grinding unit.First ring type grinding unit is located adjacent the outside of the ring body, and first ring type grinding unit includes multiple first grinding parts with first spacing adjacent arrangement;Second ring type grinding unit is located adjacent the inside of ring body and corresponds first ring type grinding unit, and second ring type grinding unit includes multiple second grinding parts with second spacing adjacent arrangement, and second grinding part and first grinding part are mutually staggered with third spacing.Thereby, the ring body can be fixed to driving device, the first ring type grinding unit is carried out whole surface type grinding to the object to be ground, and at the same time, the outside of the object to be ground is partially ground by the second ring type grinding unit, so as to utilize the first ring type grinding unit to cooperate with the second ring type grinding unit to evenly force the object to be ground, control the grinding speed and precision of the object to be ground, and prolong the service life during grinding.

Description

Technical Field

[0001] This utility model relates to a multi-ring grinding wheel, and more particularly to a multi-ring grinding wheel that can achieve average force applied to the workpiece, thereby controlling the grinding speed and precision of the workpiece and extending its service life during grinding. Background Technology

[0002] Currently, after the wafer blank is cut off in the semiconductor front-end process, the surface of the wafer is usually polished by a grinding wheel using a mechanical polishing process to reduce the wafer thickness or to make its surface achieve mirror precision.

[0003] However, the grinding wheels used in general grinding are usually designed with a single ring, which not only fails to achieve better grinding speed and accuracy, but also affects the service life of the grinding wheel during grinding due to the single ring structure. Utility Model Content

[0004] The main objective of this invention is to provide a multi-ring grinding wheel, comprising: a ring-shaped body, at least one first ring-shaped grinding unit, and at least one second ring-shaped grinding unit. The first ring-shaped grinding unit is disposed on one side of the ring-shaped body, adjacent to the outer side of the ring-shaped body. The first ring-shaped grinding unit includes multiple first grinding portions, which are adjacent to each other at a first spacing, and each first spacing connects to the outer side of the ring-shaped body. The second ring-shaped grinding unit is disposed on one side of the ring-shaped body, adjacent to the inner side of the ring-shaped body and corresponding to one side of the first ring-shaped grinding unit. The second ring-shaped grinding unit includes multiple second grinding portions, which are adjacent to each other at a second spacing, and each second spacing connects to the inner side of the ring-shaped body. Each second grinding portion and each first grinding portion are staggered at a third spacing, and each third spacing connects each first spacing and each second spacing.

[0005] Therefore, the ring-shaped body can be fixed to the driving device, and the first ring-shaped grinding unit can perform full-surface grinding on the object to be ground, while the second ring-shaped grinding unit can perform local grinding on the outer side of the object to be ground. In this way, the first ring-shaped grinding unit and the second ring-shaped grinding unit can apply force evenly to the object to be ground, thereby controlling the grinding speed and precision of the object to be ground and extending the service life during grinding.

[0006] Optionally, the annular body is provided with multiple locking holes.

[0007] Optionally, each of the first grinding parts is integrally formed on one side of the annular body.

[0008] Optionally, each of the second grinding portions is integrally formed on one side of the annular body.

[0009] Optionally, one side of the annular body is provided with a plurality of first assembly parts, each first assembly part being adjacent to the outer side of the annular body and corresponding to one side of the second annular grinding unit, each first assembly part being arranged adjacent to each other with a first spacing, and each first grinding part being disposed in each first assembly part.

[0010] Optionally, one side of the annular body is provided with a plurality of second assembly parts, each second assembly part being adjacent to the inner side of the annular body and corresponding to one side of the first annular grinding unit, each second assembly part being arranged adjacent to each other with a second spacing, and each second grinding part being disposed in each second assembly part. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings required in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a front view schematic diagram of the first embodiment of this utility model.

[0013] Figure 2 This is a cross-sectional schematic diagram of the first embodiment of the present invention.

[0014] Figure 3 This is a cross-sectional schematic diagram of the second embodiment of the present invention.

[0015] Figure Labels 1 ring body 11 Locking Holes 12 First Assembly Section 13 Second Assembly Section 2 First Ring Grinding Unit 21 First Grinding Section 3 Second ring-shaped grinding unit 31 Second Grinding Section w1 First spacing w2 second spacing w3 third spacing Detailed Implementation The multi-ring grinding wheel of this utility model will be further described below with reference to the accompanying drawings.

[0016] The foregoing and other technical contents, features, and effects of the utility model will be clearly presented in the following detailed description of the preferred embodiments with reference to the accompanying drawings. It is worth noting that the directional terms mentioned in the following embodiments, such as up, down, left, right, front, or back, are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting the utility model. Furthermore, in the following embodiments, the same or similar components will be referred to by the same or similar reference numerals.

[0017] The detailed description and technical content of this utility model are explained below with reference to the accompanying drawings. For ease of explanation, the drawings in this utility model are not necessarily drawn to actual scale, and the drawings and their scales are not intended to limit the scope of this utility model.

[0018] The term "one side" as used in this utility model can specifically refer to the upper side, lower side, left side, right side, front side, rear side of the corresponding object, or be located at any adjacent position of the object, or be directly or indirectly connected to the object, etc., but this utility model is not limited to these.

[0019] In some embodiments disclosed herein, terms such as "setup," "connection," and similar terms, unless specifically defined, may refer to two components in direct contact, or to two components not in direct contact, wherein an additional connecting component is located between the two structures. Terms such as "setup" and "connection" may also include cases where both structures are movable or both structures are fixed.

[0020] Furthermore, the terms "first," "second," and similar terms used in this specification or the claims are used to name different components or to distinguish different embodiments or scopes, and are not used to limit the upper or lower limit of the number of components, nor to limit the manufacturing order or installation order of the components.

[0021] The directional terms used in this invention, such as "up," "down," "left," "right," and similar terms, refer to the directions in the reference drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting the scope of this disclosure.

[0022] Please refer to Figure 1 and Figure 2 As shown in the figure, this utility model provides a multi-ring grinding wheel, which includes: a ring-shaped body 1, at least one first ring-shaped grinding unit 2 and at least one second ring-shaped grinding unit 3.

[0023] The ring-shaped body 1 is provided with multiple locking holes 11.

[0024] The first annular grinding unit 2 is disposed on one side of the annular body 1, and the first annular grinding unit 2 is adjacent to the outer side of the annular body 1. The first annular grinding unit 2 includes a plurality of first grinding parts 21, and each first grinding part 21 is arranged adjacent to each other with a first spacing w1. Each first spacing w1 connects to the outer side of the annular body 1, that is, each first grinding part 21 of the first annular grinding unit 2 is disposed at the outer ring position of the annular body 1.

[0025] The second annular grinding unit 3 is disposed on one side of the annular body 1, and the second annular grinding unit 3 is adjacent to the inner side of the annular body 1 and corresponds to one side of the first annular grinding unit 2. The second annular grinding unit 3 includes a plurality of second grinding parts 31, and each second grinding part 31 is arranged adjacent to each other with a second spacing w2. Each second spacing w2 connects to the inner side of the annular body 1. That is, each second grinding part 31 of the second annular grinding unit 3 is disposed in the inner ring position of the annular body 1, and each second grinding part 31 and each first grinding part 21 are staggered with each other with a third spacing w3. Each third spacing w3 connects each first spacing w1 and each second spacing w2.

[0026] Based on the above embodiments, the annular body 1 can be fixed to the required driving device via the locking hole 11 during installation. The annular body 1 abuts against the workpiece through the first annular grinding unit 2 and the second annular grinding unit 3. The driving device drives the annular body 1 to rotate, while the outer ring of each first grinding part 21 of the first annular grinding unit 2 performs full-surface grinding on the workpiece. Simultaneously, the inner ring of each second grinding part 31 of the second annular grinding unit 3 performs partial grinding on the outer side of the workpiece. The connected first spacing w1, second spacing w2, and third spacing w3 facilitate drainage (or chip removal) during grinding. In this way, the annular body 1 can be fixed to the driving device, the first annular grinding unit 2 performs full-surface grinding on the workpiece, and the second annular grinding unit 3 performs partial grinding on the outer side of the workpiece. This allows the first annular grinding unit 2 and the second annular grinding unit 3 to apply force evenly to the workpiece, thereby controlling the grinding speed and precision and extending the service life during grinding.

[0027] In addition to the above embodiments, in one embodiment of this utility model, the difference from the above embodiments is that each first grinding part 21 and each second grinding part 31 can be integrally formed on one side of the annular body 1. In this way, the structural strength between each first grinding part 21, each second grinding part 31 and the annular body 1 can be increased, so that the multi-ring grinding wheel of this utility model has better structural stability and thus extends its service life during grinding.

[0028] In addition to the above embodiments, in one embodiment of this utility model, the difference from the above embodiments is that, in actual application, each first spacing w1 can be greater than, less than, or equal to each second spacing w2, and each third spacing w3 can be greater than, less than, or equal to each first spacing w1 and each second spacing w2. Thus, according to different grinding requirements, the first spacing w1, each second spacing w2, and each third spacing w3 can be adjusted during the manufacturing of the multi-ring grinding wheel to set each first grinding part 21 and each second grinding part 31 to have the same or different dimensions and thicknesses, thereby meeting the needs of different materials to be ground. The first ring-shaped grinding unit 2, in conjunction with the second ring-shaped grinding unit 3, applies force evenly to the material to be ground, thereby controlling the grinding speed and accuracy of the material and extending its service life during grinding.

[0029] Please refer to Figure 3 As shown in the figure, in addition to the above embodiments, in one embodiment of the present invention, the difference from the above embodiments is that one side of the annular body 1 is provided with a plurality of first assembly parts 12, each first assembly part 12 is adjacent to the outer side of the annular body 1 and corresponds to one side of the second grinding module 3, each first assembly part 12 is arranged adjacent to each other with a first spacing w1, each first grinding part 21 is provided on each first assembly part 12, and one side of the annular body 1 is provided with a plurality of second assembly parts 13, each second assembly part 13 is adjacent to the inner side of the annular body 1 and corresponds to one side of the first grinding module 2, each second assembly part 13 is arranged adjacent to each other with a second spacing w2, and each second grinding part 31 is provided on each second assembly part 13.

[0030] Based on the above embodiments, each first grinding part 21 and each second grinding part 31 can be arranged in a single-cavity embedded combination on the annular body 1. In addition to controlling the number and spacing of each first grinding part 21 and each second grinding part 31 as needed, the structural strength between each first grinding part 21, each second grinding part 31 and the annular body 1 can also be increased, so that the multi-ring grinding wheel of this utility model has better structural stability and thus extends the service life during grinding.

[0031] In summary, this utility model can fix the ring-shaped body to the driving device, and the first ring-shaped grinding unit performs full-surface grinding on the object to be ground, while the second ring-shaped grinding unit performs partial grinding on the outer side of the object to be ground. In this way, the first ring-shaped grinding unit and the second ring-shaped grinding unit apply force evenly to the object to be ground, thereby controlling the grinding speed and precision of the object to be ground and extending the service life during grinding.

[0032] The present invention has been described in detail above. However, the above description is only one preferred embodiment of the present invention and should not be construed as limiting the scope of the present invention. All equivalent changes and modifications made in accordance with the scope of the patent application of the present invention should still fall within the patent coverage of the present invention.

Claims

1. A multi-ring grinding wheel, characterized in that, include: ring body; At least one first annular grinding unit is disposed on one side of the annular body, and the first annular grinding unit is adjacent to the outer side of the annular body. The first annular grinding unit includes a plurality of first grinding parts, which are arranged adjacent to each other at a first spacing, and each first spacing communicates with the outer side of the annular body; and At least one second annular grinding unit is disposed on one side of the annular body, and the second annular grinding unit is adjacent to the inner side of the annular body and corresponds to one side of the first annular grinding unit. The second annular grinding unit includes a plurality of second grinding parts, each second grinding part is arranged adjacent to each other with a second spacing, each second spacing is connected to the inner side of the annular body, and each second grinding part is staggered from each first grinding part with a third spacing, each third spacing is connected to each first spacing and each second spacing.

2. The multi-ring grinding wheel according to claim 1, characterized in that, The ring-shaped body is provided with multiple locking holes.

3. The multi-ring grinding wheel according to claim 1, characterized in that, Each first grinding part is integrally formed on one side of the annular body.

4. The multi-ring grinding wheel according to claim 1, characterized in that, Each second grinding part is integrally formed on one side of the annular body.

5. The multi-ring grinding wheel according to claim 1, characterized in that, One side of the annular body is provided with a plurality of first assembly parts. Each first assembly part is adjacent to the outer side of the annular body and corresponds to one side of the second annular grinding unit. Each first assembly part is arranged adjacent to each other with a first spacing, and each first grinding part is disposed in each first assembly part.

6. The multi-ring grinding wheel according to claim 1, characterized in that, One side of the annular body is provided with a plurality of second assembly parts. Each second assembly part is adjacent to the inner side of the annular body and corresponds to one side of the first annular grinding unit. The second assembly parts are arranged adjacent to each other with a second spacing, and each second grinding part is provided in each second assembly part.

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