Gate valve device and vacuum coating apparatus

Abstract

The utility model provides a gate valve device and vacuum coating equipment, gate valve device is used for opening and closing the opening of chamber, and gate valve device includes first pivot and second pivot, and first pivot and second pivot are rotatoryly arranged respectively in both sides of opening, and first pivot fixedly installed has the pressure tightly, and second pivot fixedly installed has valve plate subassembly, and the length of force arm of pressure tightly is less than the length of force arm of valve plate subassembly, first drive subassembly is connected with first pivot transmission, and first drive subassembly is used for driving first pivot rotation to make pressure tightly press valve plate subassembly tightly in opening, second drive subassembly is connected with second pivot transmission, and second drive subassembly is used for driving second pivot rotation to make valve plate subassembly close to or far from opening. The pressure tightly of shorter force arm is used to press valve plate subassembly, and the sealing effect of valve plate subassembly to the opening of chamber is improved.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum coating, and more specifically, it relates to valve devices and vacuum coating equipment. Background Technology

[0002] Vacuum coating equipment typically uses valve devices at the inlet and outlet to open or close the inlet and outlet. Current valve devices mainly consist of a drive unit, a rotating shaft, and a valve plate. The rotating shaft is rotatably mounted on one side of the inlet and outlet, while the valve plate is fixedly mounted on the rotating shaft. The drive unit drives the rotating shaft, thereby closing the inlet and outlet by using the valve plate mounted on the rotating shaft. However, the contact pressure between the end of the valve plate furthest from the rotating shaft and the inlet / outlet sidewall is relatively low, resulting in insufficient sealing performance. Utility Model Content

[0003] The purpose of this invention is to provide a valve device and a vacuum coating equipment to solve the problem of poor valve sealing performance in the prior art.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0005] In a first aspect, a valve device is provided for opening and closing the opening of a chamber, comprising:

[0006] A first rotating shaft and a second rotating shaft are respectively rotatably disposed on both sides of the opening. A clamping component is fixedly installed on the first rotating shaft, and a valve plate assembly is fixedly installed on the second rotating shaft. The lever arm length of the clamping component is less than the lever arm length of the valve plate assembly.

[0007] A first drive assembly is connected to the first rotating shaft for driving the first rotating shaft to rotate, so that the clamping member presses the valve plate assembly against the opening.

[0008] A second drive assembly is connected to the second rotating shaft and is used to drive the second rotating shaft to rotate so that the valve plate assembly moves closer to or away from the opening.

[0009] Optionally, the valve plate assembly includes:

[0010] A swing arm is fixedly installed on the second rotating shaft. The swing arm is correspondingly arranged with the clamping member, and the lever arm length of the clamping member is less than the lever arm length of the swing arm.

[0011] A valve plate is disposed on the side of the swing arm facing the opening.

[0012] Optionally, there are multiple swing arms, which are spaced apart along the axial direction of the second rotating shaft. There are also multiple clamping members, which are spaced apart along the axial direction of the first rotating shaft. Each swing arm corresponds to one of the clamping members.

[0013] Optionally, there are seven swing arms, which are equidistantly installed on the second rotating shaft, and seven clamping members, which are equidistantly installed on the first rotating shaft.

[0014] Optionally, the end of the swing arm away from the second rotating shaft is provided with a contact platform, which selectively abuts against the clamping member, and the distance from the contact platform to the central axis of the second rotating shaft is greater than the distance from the far end of the clamping member to the central axis of the first rotating shaft.

[0015] Optionally, the swing arm has a recess on the side away from the valve plate, and the contact platform is formed on the side of the recess away from the second rotating shaft.

[0016] Optionally, the valve plate assembly further includes a sealing ring disposed on the side of the valve plate facing the opening.

[0017] Optionally, the first drive assembly includes a first drive cylinder and a first crank, the first drive cylinder is rotatably mounted in the chamber, one end of the first crank is hinged to the output end of the first drive cylinder, and the other end of the first crank is fixedly connected to the first rotating shaft.

[0018] And / or, the second drive assembly includes a second drive cylinder and a second crank, the second drive cylinder being rotatably mounted in the chamber, one end of the second crank being hinged to the output end of the second drive cylinder, and the other end of the second crank being fixedly connected to the second shaft.

[0019] In a second aspect, a vacuum coating apparatus is provided, including a chamber and a valve device as described above. The chamber has an opening, the valve device is installed in the chamber, the first rotating shaft and the second rotating shaft are respectively rotatably disposed on both sides of the opening, and the first driving assembly and the second driving assembly are both rotatably installed in the chamber.

[0020] Optionally, the first rotating shaft and the second rotating shaft are arranged parallel to each other;

[0021] The first rotating shaft and the second rotating shaft are vertically arranged in the cavity, or the first rotating shaft and the second rotating shaft are horizontally arranged in the cavity.

[0022] The beneficial effects of the valve device and vacuum coating equipment provided by this utility model are as follows: When it is necessary to close the opening of the chamber, the second drive assembly drives the second rotating shaft to rotate forward around its own central axis. The second rotating shaft drives the valve plate assembly to approach the opening, and the valve plate assembly closes the opening. The first drive assembly drives the first rotating shaft to rotate forward around its own central axis. The first rotating shaft drives the clamping member to approach the valve plate assembly, and the clamping member presses the valve plate assembly against the opening. Since the lever arm length of the clamping member is less than the lever arm length of the valve plate assembly, the clamping member can apply greater pressure to the valve plate assembly, and the sealing performance between the valve plate assembly and the opening of the chamber is effectively improved, thereby ensuring the sealing effect. When it is necessary to open the opening of the chamber, the first drive assembly drives the first rotating shaft to rotate in the opposite direction around its own central axis. The first rotating shaft drives the clamping member away from the valve plate assembly. The second drive assembly drives the second rotating shaft to rotate in the opposite direction around its own central axis, and the second rotating shaft drives the valve plate assembly away from the opening. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a partial structural schematic diagram of the vacuum coating equipment in a specific embodiment;

[0025] Figure 2 This is a first-view structural schematic diagram of the valve device in a specific embodiment;

[0026] Figure 3 for Figure 2 A magnified view of a portion of position A in the middle;

[0027] Figure 4 for Figure 3 A magnified view of a portion of position B in the middle;

[0028] Figure 5 This is a structural schematic diagram of the valve device in a specific embodiment from a second perspective.

[0029] Figure 6 for Figure 5 A magnified view of the area at position C.

[0030] The main markings in the attached figures are as follows:

[0031] 100. Valve device; 200. Chamber;

[0032] 1. First rotating shaft; 2. Second rotating shaft; 3. Clamping component; 4. Valve plate assembly; 41. Swing arm; 411. Contact platform; 412. Recess; 42. Valve plate; 43. Sealing ring; 5. First drive assembly; 51. First drive cylinder; 52. First crank; 6. Second drive assembly; 61. Second drive cylinder; 62. Second crank. Detailed Implementation

[0033] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0034] like Figures 2 to 6 As shown, this embodiment provides a valve device 100 for opening and closing the opening of a chamber 200. The valve device 100 includes a first rotating shaft 1, a second rotating shaft 2, a first driving assembly 5, and a second driving assembly 6. The first rotating shaft 1 and the second rotating shaft 2 are respectively rotatably disposed on both sides of the opening. A clamping member 3 is fixedly installed on the first rotating shaft 1, and a valve plate assembly 4 is fixedly installed on the second rotating shaft 2. The lever arm length of the clamping member 3 is less than the lever arm length of the valve plate assembly 4. The first driving assembly 5 is drivenly connected to the first rotating shaft 1 and is used to drive the first rotating shaft 1 to rotate so that the clamping member 3 presses the valve plate assembly 4 against the opening. The second driving assembly 6 is drivenly connected to the second rotating shaft 2 and is used to drive the second rotating shaft 2 to rotate so that the valve plate assembly 4 moves closer to or further away from the opening.

[0035] Specifically, when it is necessary to close the opening of chamber 200, the second drive assembly 6 drives the second rotating shaft 2 to rotate forward around its own central axis. The second rotating shaft 2 drives the valve plate assembly 4 to approach the opening, and the valve plate assembly 4 closes the opening. The first drive assembly 5 drives the first rotating shaft 1 to rotate forward around its own central axis. The first rotating shaft 1 drives the clamping member 3 to approach the valve plate assembly 4, and the clamping member 3 presses the valve plate assembly 4 against the opening. Since the lever arm length of the clamping member 3 is less than the lever arm length of the valve plate assembly 4, the clamping member 3 can apply greater pressure to the valve plate assembly 4, and the sealing performance between the valve plate assembly 4 and the opening of chamber 200 is effectively improved, thereby ensuring the sealing effect. When it is necessary to open the opening of chamber 200, the first drive assembly 5 drives the first rotating shaft 1 to rotate in the opposite direction around its own central axis. The first rotating shaft 1 drives the clamping member 3 away from the valve plate assembly 4. The second drive assembly 6 drives the second rotating shaft 2 to rotate in the opposite direction around its own central axis, and the second rotating shaft 2 drives the valve plate assembly 4 away from the opening.

[0036] Optionally, the valve plate assembly 4 includes a rocker arm 41 and a valve plate 42. The rocker arm 41 is fixedly installed on the second rotating shaft 2. The rocker arm 41 is correspondingly arranged with the clamping member 3. The lever arm length of the clamping member 3 is less than the lever arm length of the rocker arm 41. The valve plate 42 is arranged on the side of the rocker arm 41 facing the opening.

[0037] The distal end of the clamping member 3 refers to the end of the clamping member 3 that is away from the central axis of the first rotating shaft 1, and the distal end of the swing arm 41 refers to the end of the swing arm 41 that is away from the central axis of the second rotating shaft 2. When the distal end of the clamping member 3 is pressed against the distal end of the swing arm 41, the length from the contact point between the two to the central axis of the first rotating shaft 1 is less than the length from the contact point to the central axis of the second rotating shaft 2. That is, the lever arm length of the clamping member 3 is less than the lever arm length of the swing arm 41. When the output torque of the first drive assembly 5 remains unchanged, the pressure increases when the lever arm is shortened. That is, the pressure applied by the clamping member 3 to the swing arm 41 is increased, and the sealing performance between the valve plate 42 and the opening of the chamber 200 is improved. The larger the ratio of the lever arm length of the swing arm 41 to the lever arm length of the clamping member 3, the greater the pressure applied by the clamping member 3 to the swing arm 41.

[0038] The terms "forward rotation" and "reverse rotation" mentioned above are only used to indicate that the first shaft 1 and the second shaft 2 can rotate forward and backward around their own central axis, and do not refer to a specific direction.

[0039] Optionally, multiple swing arms 41 are provided, spaced apart along the axial direction of the second rotating shaft 2. Multiple clamping members 3 are also provided, spaced apart along the axial direction of the first rotating shaft 1. Each swing arm 41 corresponds to one clamping member 3. By arranging the multiple swing arms 41 and clamping members 3 in a one-to-one correspondence, the positions on the valve plate 42 where the swing arms 41 are mounted are all subjected to the clamping force of the clamping members 3 along the spacing direction of the multiple swing arms 41, thereby improving the density of the valve plate 42's double-leaf mechanism.

[0040] In this embodiment, there are seven swing arms 41, which are installed at equal intervals on the second rotating shaft 2. There are also seven clamping members 3, which are installed at equal intervals on the first rotating shaft 1.

[0041] In other embodiments, the number of swing arms 41 and the number of clamping members 3 can be set according to actual needs, such as 1, 2, 3 or even more.

[0042] Optionally, the end of the swing arm 41 away from the second rotating shaft 2 is provided with a contact platform 411, which selectively abuts against the clamping member 3. The distance from the contact platform 411 to the central axis of the second rotating shaft 2 is greater than the distance from the far end of the clamping member 3 to the central axis of the first rotating shaft 1.

[0043] The contact platform 411 is the position furthest from the central axis of the second rotating shaft 2 of the swing arm 41. Extending the lever arm length of the swing arm 41 and shortening the lever arm length of the clamping member 3 increases the clamping force of the clamping member 3 on the swing arm 41. Furthermore, the distance from the contact platform 411 to the central axis of the second rotating shaft 2 remains constant. During the rotation of the first rotating shaft 1 and the second rotating shaft 2, the contact point between the clamping member 3 and the swing arm 41 is always located at the contact platform 411, making it easier to calculate the lever arm lengths of the swing arm 41 and the clamping member 3.

[0044] Optionally, the swing arm 41 has a recess 412 on the side away from the valve plate 42, and the contact platform 411 is formed on the side of the recess 412 away from the second rotating shaft 2. This reduces the cost of obtaining the contact platform 411 and ensures stable contact between the contact platform 411 and the clamping member 3.

[0045] Optionally, the valve plate assembly 4 also includes a sealing ring 43, which is disposed on the side of the valve plate 42 facing the opening. The sealing ring 43 is pressed against the periphery of the opening to seal it.

[0046] Optionally, the first drive assembly 5 includes a first drive cylinder 51 and a first crank 52. The first drive cylinder 51 is rotatably mounted in the chamber 200. One end of the first crank 52 is hinged to the output end of the first drive cylinder 51, and the other end of the first crank 52 is fixedly connected to the first rotating shaft 1.

[0047] Optionally, the second drive assembly 6 includes a second drive cylinder 61 and a second crank 62. The second drive cylinder 61 is rotatably mounted in the chamber 200. One end of the second crank 62 is hinged to the output end of the second drive cylinder 61, and the other end of the second crank 62 is fixedly connected to the second rotating shaft 2.

[0048] In this embodiment, the first drive assembly 5 and the second drive assembly 6 are both located on the outer side between the first rotating shaft 1 and the second rotating shaft 2. When the output end of the first drive cylinder 51 and the output end of the second drive cylinder 61 are both extended, the valve plate 42 device tends to close the opening. When the output end of the first drive cylinder 51 and the output end of the second drive cylinder 61 are both retracted, the valve plate 42 device tends to open the opening.

[0049] In some other embodiments, the first drive assembly 5 and the second drive assembly 6 are both located inside the first rotating shaft 1 and the second rotating shaft 2. When the output end of the first drive cylinder 51 and the output end of the second drive cylinder 61 are both contracted, the valve plate 42 device tends to close the opening. When the output end of the first drive cylinder 51 and the output end of the second drive cylinder 61 are both extended, the valve plate 42 device tends to open the opening.

[0050] In this embodiment, when it is necessary to close the opening of the chamber 200, the output end of the second drive cylinder 61 extends, the second crank 62 drives the second rotating shaft 2, the valve plate assembly 4 mounted on the second rotating shaft 2 moves closer to the opening of the chamber 200, the output end of the first drive cylinder 51 extends, the first crank 52 drives the first rotating shaft 1, and the clamping member 3 mounted on the first rotating shaft 1 moves closer to the valve plate assembly 4; when it is necessary to open the opening of the chamber 200, the output end of the second drive cylinder 61 retracts, the valve plate assembly 4 mounted on the second rotating shaft 2 moves away from the opening of the chamber 200, the output end of the first drive cylinder 51 retracts, and the clamping member 3 mounted on the first rotating shaft 1 moves away from the valve plate assembly 4.

[0051] like Figure 1 As shown, this embodiment also provides a vacuum coating device, including a chamber 200 and a valve device 100 as described above. The chamber 200 has an opening, the valve device 100 is installed in the chamber 200, the first rotating shaft 1 and the second rotating shaft 2 are respectively rotatably disposed on both sides of the opening, and the first driving component 5 and the second driving component 6 are both rotatably installed in the chamber 200.

[0052] Specifically, the body of the first drive cylinder 51 is rotatably mounted in the chamber 200. When the output end of the first drive cylinder 51 retracts, the first drive cylinder 51 rotates relative to the chamber 200. The body of the second drive cylinder 61 is rotatably mounted in the chamber 200. When the output end of the second drive cylinder 61 retracts, the second drive cylinder 61 rotates relative to the chamber 200.

[0053] Optionally, the first rotating shaft 1 and the second rotating shaft 2 are arranged in parallel.

[0054] In this embodiment, the first rotating shaft 1 and the second rotating shaft 2 are vertically arranged in the chamber 200, the valve plate assembly 4 rotates around the vertical line, and the substrate enters the opening of the chamber 200 in a vertical posture.

[0055] In some other embodiments, the first rotating shaft 1 and the second rotating shaft 2 are horizontally disposed in the chamber 200, the valve plate assembly 4 rotates around the horizontal line, and the substrate enters the opening of the chamber 200 in a horizontal posture.

[0056] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A valve device for opening and closing the opening of a chamber (200), characterized in that, include: The first rotating shaft (1) and the second rotating shaft (2) are respectively rotatably disposed on both sides of the opening. The first rotating shaft (1) is fixedly installed with a clamping member (3), and the second rotating shaft (2) is fixedly installed with a valve plate assembly (4). The lever arm length of the clamping member (3) is less than the lever arm length of the valve plate assembly (4). The first drive assembly (5) is connected to the first rotating shaft (1) for driving the first rotating shaft (1) to rotate so that the clamping member (3) presses the valve plate assembly (4) against the opening; The second drive assembly (6) is connected to the second rotating shaft (2) for driving the second rotating shaft (2) to rotate so that the valve plate assembly (4) moves closer to or away from the opening.

2. The valve device according to claim 1, characterized in that, The valve plate assembly (4) includes: A swing arm (41) is fixedly installed on the second rotating shaft (2). The swing arm (41) is correspondingly arranged with the clamping member (3). The lever arm length of the clamping member (3) is less than the lever arm length of the swing arm (41). A valve plate (42) is disposed on the side of the swing arm (41) facing the opening.

3. The valve device according to claim 2, characterized in that, The swing arms (41) are provided in multiples, and the multiple swing arms (41) are arranged at intervals along the axial direction of the second rotating shaft (2). The clamping members (3) are provided in multiples, and the multiple clamping members (3) are arranged at intervals along the axial direction of the first rotating shaft (1). The multiple swing arms (41) and the multiple clamping members (3) are arranged in a one-to-one correspondence.

4. The valve device according to claim 3, characterized in that, There are seven swing arms (41), which are installed at equal intervals on the second rotating shaft (2). There are seven clamping members (3), which are installed at equal intervals on the first rotating shaft (1).

5. The valve device according to claim 2, characterized in that, The swing arm (41) has a contact platform (411) at one end away from the second rotating shaft (2). The contact platform (411) selectively abuts against the clamping member (3). The distance from the contact platform (411) to the central axis of the second rotating shaft (2) is greater than the distance from the far end of the clamping member (3) to the central axis of the first rotating shaft (1).

6. The valve device according to claim 5, characterized in that, The swing arm (41) has a recess (412) on the side away from the valve plate (42), and the contact platform (411) is formed on the side of the recess (412) away from the second rotating shaft (2).

7. The valve device according to claim 2, characterized in that, The valve plate assembly (4) also includes a sealing ring (43) disposed on the side of the valve plate (42) facing the opening.

8. The valve device according to claim 1, characterized in that, The first drive assembly (5) includes a first drive cylinder (51) and a first crank (52). The first drive cylinder (51) is rotatably mounted in the chamber (200). One end of the first crank (52) is hinged to the output end of the first drive cylinder (51), and the other end of the first crank (52) is fixedly connected to the first rotating shaft (1). And / or, the second drive assembly (6) includes a second drive cylinder (61) and a second crank (62), the second drive cylinder (61) is rotatably mounted in the chamber (200), one end of the second crank (62) is hinged to the output end of the second drive cylinder (61), and the other end of the second crank (62) is fixedly connected to the second rotating shaft (2).

9. A vacuum coating apparatus, characterized in that, Includes a chamber (200) and a valve device (100) as described in any one of claims 1-8, wherein the chamber (200) has an opening, the valve device (100) is installed in the chamber (200), the first rotating shaft (1) and the second rotating shaft (2) are respectively rotatably disposed on both sides of the opening, and the first driving assembly (5) and the second driving assembly (6) are both rotatably installed in the chamber (200).

10. The vacuum coating equipment according to claim 9, characterized in that, The first rotating shaft (1) is arranged parallel to the second rotating shaft (2); The first rotating shaft (1) and the second rotating shaft (2) are vertically arranged in the chamber (200), or the first rotating shaft (1) and the second rotating shaft (2) are horizontally arranged in the chamber (200).

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