A device for preventing abnormal movement of a valve body

Abstract

The utility model discloses a device that prevents valve body movement exception, its technical scheme includes: valve body and valve core, the valve core is installed in the valve body, the valve body top is installed with control box, control box top one side is installed with the pneumatic cylinder, the pneumatic cylinder output shaft is installed with the lifting seat, pneumatic cylinder one side is installed with the gas pipe A close to the top, pneumatic cylinder one side is installed with the gas pipe B close to the bottom, the gas pipe A with the gas pipe B middle installation has the governing valve. A device that prevents valve body movement exception has solved the problem that the existing semiconductor power equipment gives a closing signal to the power source and a closing signal to the valve body at the same time when the process ends, the power source needs 600ms to reduce from high power to zero, however, the actual closing time of the valve body is shorter than 600ms, the power has not completely returned to zero, the valve body is detected to be closed in advance, at this time, the state detected by the system is inconsistent with the preset condition, which will trigger the machine alarm, reduces the alarm probability of the machine, thereby ensuring the normal use of the control valve.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor control valve technology, specifically a device for preventing abnormal valve body movement. Background Technology

[0002] Control valves are key actuators in industrial automation process control systems. Their main function is to precisely adjust parameters such as flow rate, pressure, temperature, and liquid level of the medium in the pipeline based on control signals. They are typically composed of an actuator and a valve body. By receiving instructions from the controller, they drive the valve core to move and change the flow channel area, thereby achieving dynamic control of process conditions. Due to their widespread application in semiconductor equipment, the reliability, accuracy, and stability of control valves are directly related to production safety, operating efficiency, and product quality, making them an indispensable piece of equipment in modern process industries.

[0003] Existing semiconductor power equipment sends a shutdown signal to the power source and a shutdown signal to the valve body at the end of the process. It takes 600ms for the power source to reduce from high power to zero. However, the actual closing time of the valve body is less than 600ms. The power has not completely returned to zero, and the valve body is detected to be closed in advance. At this time, the state detected by the system is inconsistent with the preset conditions, which will trigger the machine alarm. To this end, we propose a device to prevent abnormal valve body movement. Utility Model Content

[0004] The purpose of this invention is to provide a device to prevent abnormal valve body movement, thereby slowing down the gas exhaust rate and reducing the probability of machine alarms. This addresses the problem that existing semiconductor power equipment sends a shutdown signal to the power source and a shutdown signal to the valve body simultaneously at the end of the process. The power source needs 600ms to reduce from high power to zero, but the actual valve body closing time is less than 600ms. Before the power has completely returned to zero, the valve body is detected to be closed prematurely. At this time, the state detected by the system is inconsistent with the preset conditions, which will trigger a machine alarm.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a device for preventing abnormal movement of a valve body, comprising a valve body and a valve core, wherein the valve core is installed inside the valve body, a control box is installed on the top of the valve body, a positioning seat is installed on one side of the valve core, a cylinder is installed on one side of the top of the control box, a lifting seat is installed on the output shaft of the cylinder, a socket is installed between the positioning seat and the lifting seat, an air pipe A is installed on one side of the cylinder near the top, an air pipe B is installed on one side of the cylinder near the bottom, and a regulating valve is installed between the air pipe A and the air pipe B.

[0006] Preferably, a slot is provided between the positioning seat and the lifting seat, and the socket is fitted into the slot.

[0007] Preferably, a slider is installed inside the control box at the socket location via a sliding groove. A micro motor is installed on the front surface of the slider, and a lead screw is installed on the output shaft of the micro motor. The lead screw is sleeved inside the socket.

[0008] Preferably, an infrared sensor is installed on one side of the top of the control box, and a controller is installed in the middle of the top of the control box.

[0009] Preferably, a transmission box is installed on one side of the control box, a mobile motor is installed at the bottom of the transmission box, the output shaft of the mobile motor is located inside the transmission box and a rotating shaft is installed thereon, and clamps are installed on the outer surface of the rotating shaft near the top and near the bottom.

[0010] Preferably, the rotating shaft and the clamping plate are connected by a threaded connection, and the clamping plate is in frictional contact with the transmission box.

[0011] Preferably, a side plate is installed on one side of the valve core in the gap between the clamping plates.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. This utility model achieves the effect of slowing down the gas exhaust rate by setting up a cylinder, air pipe A, air pipe B, and a regulating valve, thereby reducing the probability of machine alarms. Air pipe A is set near the top on one side of the cylinder, and air pipe B is set near the bottom on the other side of the cylinder. A regulating valve is set between air pipe A and air pipe B. This solves the problem that in existing semiconductor power equipment, when a power source is given a shutdown signal at the end of the process, a valve body is also given a shutdown signal. It takes 600ms for the power source to reduce from high power to zero, but the actual closing time of the valve body is less than 600ms. The power has not completely returned to zero, and the valve body is detected to be closed in advance. At this time, the state detected by the system is inconsistent with the preset conditions, which will trigger a machine alarm. This reduces the probability of machine alarms and ensures the normal use of the control valve.

[0013] 2. This utility model achieves the effect of controlling the movement of the valve core when the cylinder fails by setting up an infrared sensor, a rotating shaft, a clamping plate, a side plate, and a moving motor. This solves the problem that existing control valves use cylinders as actuators, and once the cylinder fails, it will directly lead to the failure of the control valve, thereby affecting the normal operation of the entire fluid transportation process. This ensures the normal use of the control valve, thereby ensuring the normal transportation of fluid.

[0014] 3. This utility model achieves the effect of separating the valve core and the cylinder by setting up a micro motor, lead screw, socket and slot, so as to solve the problem that when the cylinder fails, it will hinder or interfere with the normal movement of the valve core, thereby directly affecting the operation and use of the clamping plate, and ensuring the smooth operation of the valve core. Attached Figure Description

[0015] Figure 1This is a schematic diagram of the main structure of this utility model; Figure 2 for Figure 1 A magnified structural diagram of A; Figure 3 This is a cross-sectional structural diagram of the present invention; Figure 4 for Figure 3 A magnified structural diagram of B in the diagram; Figure 5 This is a side view of the control box of this utility model.

[0016] Reference numerals in the attached diagram: 1. Valve body; 2. Transmission box; 3. Controller; 4. Cylinder; 5. Control box; 6. Air pipe A; 7. Regulating valve; 8. Air pipe B; 9. Infrared sensor; 10. Side plate; 11. Clamping plate; 12. Rotating shaft; 13. Moving motor; 14. Valve core; 15. Lifting seat; 16. Slide groove; 17. Positioning seat; 18. Socket; 19. Lead screw; 20. Slot; 21. Slider; 22. Micro motor. Detailed Implementation

[0017] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0018] Example 1

[0019] like Figures 1-4 As shown, to achieve the above objectives, this utility model provides the following technical solution: a device for preventing abnormal movement of a valve body, comprising a valve body 1 and a valve core 14, wherein the valve core 14 is installed inside the valve body 1, a control box 5 is installed on the top of the valve body 1, a positioning seat 17 is installed on one side of the valve core 14, a cylinder 4 is installed on one side of the top of the control box 5, a lifting seat 15 is installed on the output shaft of the cylinder 4, a socket 18 is installed between the positioning seat 17 and the lifting seat 15, an air pipe A6 is installed near the top on one side of the cylinder 4, an air pipe B8 is installed near the bottom on one side of the cylinder 4, a regulating valve 7 is installed between the air pipe A6 and the air pipe B8, a slot 20 is provided between the adjacent gaps of the positioning seat 17 and the lifting seat 15, and the socket 18 is snapped into the slot 20 to connect the positioning seat 17 and the lifting seat 15.

[0020] like Figure 3-5 As shown, inside the control box 5, a slider 21 is installed at the socket 18 position via a slide groove 16. A micro motor 22 is installed on the front surface of the slider 21. A lead screw 19 is installed on the output shaft of the micro motor 22. The lead screw 19 is sleeved inside the socket 18, and the socket 18 is moved by the lead screw 19. An infrared sensor 9 is installed on one side of the top of the control box 5 to monitor the position of the side plate 10, thereby monitoring the position of the valve core 14. A controller 3 is installed in the middle of the top of the control box 5.

[0021] The working principle of the device for preventing abnormal valve body movement based on Embodiment 1 is as follows: After the device is installed, it is connected to the conveying pipeline. When it is necessary to cut off the conveying pipeline, air is introduced through air pipe A6 and exhaust is performed through air pipe B8. At the same time, the regulating valve 7 on air pipe B8 is adjusted to adjust the gas passage area and reduce the exhaust speed of air pipe B8, thereby delaying the movement of valve core 14. The cylinder 4 drives valve core 14 to move downward, cutting off valve body 1. When it is necessary to connect the conveying pipeline, air is introduced through air pipe B8 and exhaust is performed through air pipe A6. The air is regulated... The regulating valve 7 on pipe A6 adjusts the gas passage area, reducing the exhaust speed of pipe A6, thereby delaying the movement of valve core 14. Cylinder 4 then drives valve core 14 upwards, connecting it to valve body 1. During operation, infrared sensor 9 measures the position of side plate 10. If cylinder 4 fails, micro motor 22 is activated, driving lead screw 19 to rotate. Lead screw 19 then moves socket 18 laterally, releasing the restrictions on positioning seat 17 and lifting seat 15. Clamping plate 11 then drives valve core 14 to move, thus completing the workflow of this equipment.

[0022] Example 2

[0023] like Figure 3-5 As shown, the present invention proposes a device to prevent abnormal movement of the valve body. Compared with Embodiment 1, this embodiment further includes: a transmission box 2 installed on one side of the control box 5, a moving motor 13 installed at the bottom of the transmission box 2, a rotating shaft 12 installed inside the transmission box 2 on the output shaft of the moving motor 13, clamping plates 11 installed on the outer surface of the rotating shaft 12 near the top and near the bottom, the rotating shaft 12 and the clamping plates 11 are connected by threaded engagement, the clamping plates 11 are in frictional contact with the transmission box 2, which facilitates the stable movement of the clamping plates 11, and a side plate 10 is installed on one side of the valve core 14 in the gap of the clamping plates 11.

[0024] In this embodiment, when the valve core 14 needs to be adjusted, the position of the side plate 10 is measured by the infrared sensor 9. After the controller 3 receives the adjustment information and senses that the valve core 14 cannot be moved by the infrared sensor 9, the moving motor 13 is started. The moving motor 13 drives the rotating shaft 12 to rotate, and the rotating shaft 12 drives the clamping plate 11 to move. The clamping plate 11 squeezes the side plate 10, thereby driving the valve core 14 to move, thereby realizing the connection of the valve body 1 or the closure of the valve body 1.

[0025] The above specific embodiments are merely several preferred embodiments of this utility model. Based on the technical solution of this utility model and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A device for preventing abnormal movement of a valve body, comprising a valve body (1) and a valve core (14), characterized in that: The valve body (1) is equipped with a valve core (14), and a control box (5) is installed on the top of the valve body (1). A positioning seat (17) is installed on one side of the valve core (14). A cylinder (4) is installed on one side of the top of the control box (5). A lifting seat (15) is installed on the output shaft of the cylinder (4). A socket (18) is installed between the positioning seat (17) and the lifting seat (15). An air pipe A (6) is installed near the top on one side of the cylinder (4). An air pipe B (8) is installed near the bottom on one side of the cylinder (4). A regulating valve (7) is installed between the air pipe A (6) and the air pipe B (8).

2. The device for preventing abnormal movement of the valve body according to claim 1, characterized in that: The positioning seat (17) and the lifting seat (15) are provided with a slot (20) in the adjacent gap, and the socket (18) is fitted into the slot (20).

3. The device for preventing abnormal movement of the valve body according to claim 1, characterized in that: Inside the control box (5), a slider (21) is installed at the socket (18) via a slide groove (16). A micro motor (22) is installed on the front surface of the slider (21). A lead screw (19) is installed on the output shaft of the micro motor (22). The lead screw (19) is sleeved inside the socket (18).

4. The device for preventing abnormal movement of the valve body according to claim 1, characterized in that: An infrared sensor (9) is installed on one side of the top of the control box (5), and a controller (3) is installed in the middle of the top of the control box (5).

5. The device for preventing abnormal movement of the valve body according to claim 1, characterized in that: A transmission box (2) is installed on one side of the control box (5). A mobile motor (13) is installed at the bottom of the transmission box (2). The output shaft of the mobile motor (13) is located inside the transmission box (2) and a rotating shaft (12) is installed. Clamping plates (11) are installed on the outer surface of the rotating shaft (12) near the top and near the bottom.

6. The device for preventing abnormal movement of the valve body according to claim 5, characterized in that: The rotating shaft (12) and the clamping plate (11) are connected by a threaded connection, and the clamping plate (11) is in frictional contact with the transmission box (2).

7. The device for preventing abnormal movement of the valve body according to claim 6, characterized in that: A side plate (10) is installed on one side of the valve core (14) in the gap of the clamping plate (11).

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