Display panel inspection system

By using ultraviolet light inspection in the non-display areas of the display panel, and taking advantage of the refractive properties and tilted surface structure of organic materials, the problem of detecting defects in organic layer coatings has been solved, achieving efficient defect identification and process reliability.

CN224933904UActive Publication Date: 2026-11-03SAMSUNG DISPLAY CO LTD
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Patent Information

Application Number
CN202522004903.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Priority Date
2024-10-24
Filing Date
2025-09-18
Publication Date
2026-11-03
Estimated Expiration
2035-09-18

AI Technical Summary

Technical Problem

During the organic layer deposition process of the display panel, defects caused by the coating of organic materials in non-display areas are difficult to detect accurately by automated optical inspection (AOI), especially in densely structured or narrowly spaced areas, and the stacked layers under the transparent organic layer make image capture difficult.

Method used

The ultraviolet light inspection method utilizes the refractive properties of organic materials. Ultraviolet light is irradiated onto the non-display area through an imaging unit, and the image is analyzed. The gray value of the target location is extracted by combining the tilted surface structure, and compared with the reference value to determine the presence of the organic layer.

Benefits of technology

This improves the visibility of organic materials in optical inspection, ensuring accurate defect identification and reliable manufacturing processes.

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Abstract

A display panel inspection system is provided, which includes an inspection stage, an imaging unit, a driving unit, and a control unit. The inspection stage allows a check target to be set thereon. The imaging unit irradiates ultraviolet light onto an organic layer inspection region located in a non-display region outside a display region surrounding the check target, and generates an image of the organic layer inspection region based on the irradiated ultraviolet light. The driving unit moves the imaging unit over the organic layer inspection region. The control unit determines whether an organic layer is present in the organic layer inspection region by analyzing the image generated by the imaging unit. With this display panel inspection system, defects in a display panel can be accurately determined.
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Description

[0001] This application claims priority and all benefits arising therefrom to Korean Patent Application No. 10-2024-0146383, filed on October 24, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0002] This disclosure relates to an inspection method and inspection system, and more specifically, to a method and system for inspecting the presence of organic materials in non-display areas after an organic encapsulation layer has been formed on a display panel. Background Technology

[0003] Automated Optical Inspection (AOI) systems are devices used to automatically inspect components or products for defects during the manufacturing process. By utilizing cameras and optical equipment to capture high-resolution images and then using software to analyze these images to assess quality, AOI systems identify defects in the inspected target. In the manufacturing processes of products such as printed circuit boards, semiconductors, or display panels, AOI is primarily used to detect defects related to product reliability.

[0004] In the encapsulation process of display panels, inorganic layers are used to block the penetration of moisture and air, while organic layers placed between the inorganic layers help to planarize and stabilize the inorganic layers. However, during the deposition of organic layers, defects such as pixel shrinkage or black spots may occur when organic materials are coated onto non-display areas. Therefore, AOI (Automated Optical Inspection) can be used to inspect organic materials coated onto non-display areas, thereby enabling defect detection and improving the reliability of display panels. Utility Model Content

[0005] In processes using automated optical inspection (AOI) to inspect organic materials coated onto non-display areas, challenges arise when the spacing between structures in the inspection area is narrow or the structure density is high. This reduces visibility during optical inspection and makes it difficult to visually confirm the presence of organic materials. Furthermore, if the organic layer is transparent, the captured image may reveal overlays beneath it. Therefore, improved methods may be needed to enhance the accuracy of AOI.

[0006] The purpose of this invention is to solve the above-mentioned problems by providing an inspection method and system that utilizes the refractive properties of organic materials. Specifically, an inspection method and system are disclosed that improve the visibility of organic materials during optical inspection by utilizing the characteristic that the refractive effect becomes more pronounced as the wavelength of light shortens.

[0007] A display panel inspection system according to a disclosed embodiment includes an inspection table, an imaging unit, a driving unit, and a control unit. In this embodiment, the inspection table allows an inspection target to be positioned thereon. In this embodiment, the imaging unit illuminates an organic layer inspection area with ultraviolet light and generates an image of the organic layer inspection area based on the illuminated ultraviolet light. The organic layer inspection area is located in a non-display area surrounding the inspection target and outside the display area. In this embodiment, the driving unit moves the imaging unit relative to the inspection target on the organic layer inspection area. In this embodiment, the control unit determines the presence of an organic layer in the organic layer inspection area by analyzing the image generated by the imaging unit.

[0008] In an embodiment, the organic layer inspection area may include the boundary between the area on the inspection target coated with an organic layer and the area without an organic layer.

[0009] In one embodiment, the control unit can extract the target location from a structure located in a non-display area of ​​the image for preventing the flow of organic material, and extract the grayscale value of the target location. In this embodiment, the structure for preventing the flow of organic material may include an inclined surface that protrudes from the target being inspected and is inclined in a direction intersecting the display direction. In this embodiment, the target location may be on the inclined surface.

[0010] In an embodiment, the control unit can compare the grayscale value extracted from the target location with a reference value, and determine that the organic layer can exist at the target location when the extracted grayscale value is greater than the reference value.

[0011] In an embodiment, when the target location where the organic layer exists is located further away from the display area than the reference location, the control unit can determine that the target being inspected is defective.

[0012] In an embodiment, when it is determined that there is no organic layer at the target location, the control unit may determine that there may be no organic layer in the area adjacent to the organic layer inspection area and not captured by the imaging unit.

[0013] In this embodiment, the imaging unit may include a light source unit, a light guide unit, an objective lens, a camera, and a semi-reflective mirror unit. In this embodiment, the light source unit can illuminate the organic layer inspection area with ultraviolet light. In this embodiment, the light guide unit may be positioned at one end of the light source unit. In this embodiment, the objective lens may be connected to one end of the light guide unit to allow ultraviolet light reflected from the organic layer inspection area to pass through. In this embodiment, the camera may be connected to the other end of the light guide unit to receive the ultraviolet light transmitted through the objective lens and form an image. In this embodiment, the semi-reflective mirror unit may be positioned within the light guide unit to guide the ultraviolet light illuminated by the light source unit to the organic layer inspection area and to guide the ultraviolet light reflected from the organic layer inspection area to the camera.

[0014] In one embodiment, the imaging unit may further include an ultraviolet bandpass filter disposed in front of the camera.

[0015] In this embodiment, the camera may be a monochrome camera or an ultraviolet (UV) camera.

[0016] In one embodiment, the semi-reflective mirror unit may include a first semi-reflective mirror and a second semi-reflective mirror. In this embodiment, the first semi-reflective mirror may reflect ultraviolet light incident from the light source unit along a first direction to change the direction of the reflected ultraviolet light to a second direction intersecting the first direction. In this embodiment, the second semi-reflective mirror may reflect ultraviolet light incident upon it along the second direction to change the direction of the incident light back to the first direction, thereby guiding the ultraviolet light to the organic layer inspection area and allowing ultraviolet light reflected from the organic layer inspection area to transmit through.

[0017] In one embodiment, the semi-reflective mirror unit may include a first semi-reflective mirror and a second semi-reflective mirror. In this embodiment, the first semi-reflective mirror can transmit ultraviolet light incident from the light source unit along a first direction to the organic layer inspection area, and reflect ultraviolet light reflected from the organic layer inspection area along a second direction intersecting the first direction. In this embodiment, the second semi-reflective mirror can reflect ultraviolet light incident on it along the second direction back to the first direction to guide the ultraviolet light to the camera.

[0018] In one embodiment, the driving unit may include a support member, a first moving track, and a second moving track. In this embodiment, the imaging unit may be mounted on the support member. In this embodiment, the first moving track may move the support member in a first direction. In this embodiment, the second moving track may move the imaging unit in a second direction intersecting the first direction.

[0019] In one embodiment, the drive unit may include a third moving track that moves the inspection table in a first direction.

[0020] A method for inspecting a display panel according to a disclosed embodiment includes the following steps: setting a light source and a camera together on an organic layer inspection area, the organic layer inspection area being located in a non-display area surrounding the display area of ​​the inspection target and located outside the display area; irradiating the organic layer inspection area with ultraviolet light using the light source; receiving the ultraviolet light reflected from the organic layer inspection area via the camera; and determining whether an organic layer exists in the organic layer inspection area by analyzing an image generated based on the received ultraviolet light.

[0021] In an embodiment, the organic layer inspection area may include the boundary between the area on the inspection target coated with an organic layer and the area without an organic layer.

[0022] In one embodiment, the step of determining the presence of an organic layer may include the following steps: extracting a target location from a structure located in a non-display area of ​​the image for preventing the flow of organic material; and extracting a grayscale value of the target location. In this embodiment, the structure for preventing the flow of organic material may include an inclined surface protruding from the target and tilted in a direction intersecting the display direction. In this embodiment, the target location may be on the inclined surface.

[0023] In an embodiment, the step of determining whether an organic layer exists may further include the following steps: comparing the gray value extracted from the target location with a reference value; and determining that an organic layer exists when the extracted gray value is greater than the reference value.

[0024] In an embodiment, the step of determining whether an organic layer exists may further include the following steps: if it is determined that an organic layer exists at the target location, and the target location is located further away from the display area than the reference location, it is determined that the target being inspected is defective.

[0025] In an embodiment, the step of determining whether an organic layer exists may further include the following steps: when the target location is determined to be free of an organic layer, determining that no organic layer exists in the area adjacent to the organic layer inspection area and not captured by the camera.

[0026] In this embodiment, the step of determining whether an organic layer exists can be performed substantially simultaneously with the step of setting up the light source and the camera together.

[0027] According to embodiments of this disclosure, the visibility of organic materials can be improved by irradiating them with short-wavelength light during optical inspection, utilizing the refractive effect.

[0028] In such an embodiment, by accurately identifying the areas coated with organic materials, defects in the display panel can be determined and the reliability of the manufacturing process can be ensured. Attached Figure Description

[0029] These and / or other features of the embodiments of this disclosure will become apparent and more readily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which: Figure 1 This is a block diagram of an inspection system according to an embodiment of the present disclosure; Figure 2 This is a perspective view of an inspection system according to an embodiment of the present disclosure; Figure 3 This is a plan view of an imaging unit according to an embodiment of the present disclosure; Figure 4 This is a flowchart illustrating an inspection method according to an embodiment of the present disclosure; Figure 5 This is a plan view of a display panel according to an embodiment of the present disclosure; Figure 6 It is along Figure 5 A cross-sectional view of the display panel taken by line I-I'; Figure 7A It is based on Figure 4 The inspection method along Figure 5 A cross-sectional view of the display panel taken by line I-I'; Figure 7B yes Figure 7A An enlarged view of region AA shown in the image; Figure 8A The image is an image of the inspection result formed in the absence of monomers according to an embodiment of the present disclosure; Figure 8B The image is an image of the inspection result formed in the presence of monomers according to an embodiment of the present disclosure; Figure 9A and Figure 9B Images showing the results of inspections according to embodiments of this disclosure; and Figure 10A and Figure 10B The image is an image of the inspection results according to an embodiment of the present disclosure. Detailed Implementation

[0030] The utility model will now be described more fully below with reference to the accompanying drawings, in which various embodiments are illustrated. However, the utility model may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the utility model to those skilled in the art. The same reference numerals throughout refer to the same elements.

[0031] It will be understood that when an element is referred to as being "on" another element, the element may be directly on said other element, or there may be an intermediary element between them. Conversely, when an element is referred to as being "directly on" another element, there is no intermediary element.

[0032] In the accompanying drawings, the thickness, ratios, and dimensions of the elements may not be precise proportions and may be exaggerated to facilitate the effective interpretation of the technical features associated with these elements. Therefore, this disclosure should not be limited to the thickness, ratios, dimensions, etc., shown in the accompanying drawings.

[0033] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, unless the context clearly indicates otherwise, “a,” “an,” “the,” and “at least one” do not indicate a limitation on quantity and are intended to include both singular and plural forms. Thus, an “a” element mentioned in a claim and subsequently referenced as “the” element includes one element and multiple elements. For example, unless the context clearly indicates otherwise, “a single element” has the same meaning as “at least one element.” “At least one” is not to be construed as limited to “a” or “an.” “Or” means “and / or.” As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items. It will also be understood that when the terms “comprising” and / or “including” and variations thereof are used in this specification, it indicates the presence of the stated features, areas, integrals, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, areas, integrals, steps, operations, elements, components and / or groups thereof.

[0034] It will be understood that although the terms “first,” “second,” “third,” etc., may be used herein to describe various elements, components, regions, layers, and / or parts, these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are used only to distinguish one element, component, region, layer, or part from another. Therefore, without departing from the teachings herein, “first element,” “first component,” “first region,” “first layer,” or “first part” discussed below may be referred to as a second element, second component, second region, second layer, or second part.

[0035] In this disclosure, any “system,” “module,” “unit,” or “component” is included in the implementation of computer-related software, hardware, or a combination of software and hardware.

[0036] In this disclosure, a first direction DR1, a second direction DR2, and a third direction DR3 can be defined. The display panel can be formed as pixels comprising a plane defined by the first direction DR1 and the second direction DR2. The third direction DR3 can be defined as the thickness direction of the display panel, and the first direction DR1, the second direction DR2, and the third direction DR3 can be orthogonal to each other or intersect each other.

[0037] Furthermore, relative terms such as “below” or “bottom” and “above” or “top” may be used here to describe the relationship between one element and another, as shown in the accompanying drawings. It will be understood that, in addition to the orientations depicted in the drawings, the relative terms are intended to cover different orientations of the device. For example, if the device in one of the drawings is flipped, an element described as being “below” the other element will subsequently be oriented to be “above” the other element. Thus, depending on the specific orientation of the drawing, the term “below” can cover both “below” and “above” orientations. Similarly, if the device in one of the drawings is flipped, an element described as being “below” or “under” the other element will subsequently be oriented to be “above” the other element. Thus, the terms “below” or “under” can cover both “above” and “below” orientations.

[0038] As used herein, “about” or “approximately” includes the stated value and indicates an acceptable deviation of the particular value as determined by a person skilled in the art taking into account the measurement involved and the error associated with the measurement of the particular quantity (i.e., the limitations of the measurement system). For example, “about” may mean within one or more standard deviations or within ±30%, ±20%, ±10%, or ±5% of the stated value.

[0039] Unless otherwise defined, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure pertains. It will also be understood that, unless expressly so defined herein, terms (such as those defined in a general dictionary) shall be interpreted as having a meaning consistent with their meaning in the context of the relevant field and in this disclosure, and shall not be interpreted in an idealized or overly formalized sense.

[0040] The embodiments are described herein with reference to cross-sectional views as schematic illustrations of idealized embodiments. Therefore, variations in the shapes illustrated will be expected, for example, due to manufacturing techniques and / or tolerances. Consequently, the embodiments described herein should not be construed as limited to the specific shapes of the areas shown herein, but will include shape deviations, for example, due to manufacturing processes. For example, areas shown or described as flat may generally have rough and / or non-linear characteristics. Furthermore, sharp corners shown may be rounded. Therefore, the areas shown in the figures are schematic in nature, and their shapes are not intended to show the precise shapes of the areas, nor are they intended to limit the scope of the presented claims.

[0041] Figure 1 This is a block diagram of an inspection system 1000 according to an embodiment of the present disclosure. Embodiments of the inspection system 1000 may include an inspection unit DU and a control unit CU. The inspection unit DU may include an inspection table 100, a drive unit 200, and an imaging unit 300.

[0042] The inspection table 100 can be a flat surface or device on which an inspection target (e.g., a display panel) is disposed. The inspection table 100 can be configured to stably fix the inspection target to ensure that the inspection is performed without vibration.

[0043] The drive unit 200 can be configured to control the position of the inspection table 100 or the imaging unit 300 to inspect a specific area of ​​the target. Here, it should be understood that the inspection area or specific area can refer to at least a portion of the target that may have defects. (Refer to...) Figure 4 The inspection area is described in detail. The drive unit 200 can be configured to receive coordinates from the control unit CU, which are position information corresponding to the inspection area. The drive unit 200 can be configured to control the movement of the inspection stage 100 or the imaging unit 300 via, for example, a moving track, a drive motor, and / or an actuator, to inspect the inspection area corresponding to the received coordinates.

[0044] The imaging unit 300 may be spaced apart from the inspection target disposed on the inspection table 100 and is configured to capture the inspection area to form an image. The imaging unit 300 may include a light source unit 310, a semi-reflective mirror unit 320, and a camera 330.

[0045] The light source unit 310 can be configured to illuminate an inspection area. The intensity of the light can be adjustable to select the optimal intensity for each inspection condition. Furthermore, the light source unit 310 can be configured to use a filter to allow only light of a specific wavelength to pass through, or it can be configured to utilize a light source that emits light of a specific wavelength band to adjust the wavelength of the light. In an embodiment, the light source unit 310 can be configured to emit ultraviolet light (e.g., light with a wavelength of about 400 nanometers (nm) or less) to perform the inspection.

[0046] The semi-reflective mirror unit 320 can be configured to reflect a portion of the incident light while transmitting the remaining light, thereby splitting the optical path. Therefore, the semi-reflective mirror unit 320 can be configured to control the optical path, allowing simultaneous processing of light illumination via the light source unit 310 and image formation via the camera 330. The semi-reflective mirror unit 320 may include at least one semi-reflective mirror. The specific reflectance and transmittance of the semi-reflective mirror can be selected according to the purpose and conditions of the inspection.

[0047] Camera 330 may be configured to receive light reflected from the inspection area and form an image. Camera 330 may be configured to convert the light received by its image sensor into an electrical signal, and further into a digital signal to generate an image. Camera 330 may include a storage device configured to store captured images of the inspection area, and may be configured to transmit these images to a control unit CU. In embodiments, camera 330 may be a monochrome camera or an ultraviolet (UV) camera.

[0048] The control unit CU can be configured to manage, execute, and control the overall operation of the inspection system 1000. The control unit CU can be configured to perform inspection operations, control inspection conditions, and determine defects. During inspection operations, the control unit CU can be configured to receive information related to the inspection progress (such as the start and end of the inspection) and be configured to perform the inspection accordingly. The control unit CU can be configured to automatically manage the inspection procedure and enable the inspection system 1000 to perform predetermined tasks for each step. Furthermore, the control unit CU can be configured to provide information to the drive unit 200 and / or the imaging unit 300 or control the drive unit 200 and / or the imaging unit 300 to adjust inspection conditions. In an embodiment, for example, the control unit CU can be configured to obtain coordinate information corresponding to the location of the inspection area and transmit the coordinate information to the drive unit 200 to adjust the imaging position. Additionally, the control unit CU can be configured to control the imaging unit 300 to adjust resolution, light intensity, or illumination angle. During defect determination (or inspection) operations, the control unit CU can be configured to analyze the images obtained from the imaging unit 300 to identify defects in the inspection target. The control unit (CU) can be configured to determine defects based on defect criteria and tolerances set according to the type and characteristics of the inspection. (Refer to...) Figure 4 Describe in detail the defect determination operation performed by the control unit (CU).

[0049] The control unit (CU) may include a processor, memory, and storage. The inspection operations, inspection condition control, and defect determination operations of the control unit CU may be implemented in firmware or software. In embodiments, for example, the firmware may be stored in storage and loaded into memory during execution. The processor may be configured to execute the firmware loaded into memory. However, the disclosure is not limited to this configuration, and the control unit CU may be configured with separate hardware to perform the operations. In embodiments, for example, to perform the defect determination operation, the control unit CU may be implemented using dedicated logic circuitry such as a field-programmable gate array (FPGA) or an application-specific integrated circuit (ASIC). Furthermore, the control unit CU may include a display unit (such as a monitor or tablet computer) to display received information or defect determination results.

[0050] Figure 2 This is a perspective view of an inspection system 1000 according to an embodiment of the present disclosure. (Refer to...) Figure 2 An embodiment of the inspection unit DU may include an inspection table 100, a support member 210, an imaging unit moving track 220, an inspection table moving track 230, a support member moving track 240, and an imaging unit 300. Here, the support member 210, the imaging unit moving track 220, the inspection table moving track 230, and the support member moving track 240 may be included in the above-mentioned... Figure 1 In the described drive unit 200 (or among the elements of drive unit 200), the control unit CU can be connected to the inspection unit DU via wired or wireless communication. In embodiments where the control unit CU is connected to the inspection unit DU via a wired connection, the control unit CU can be connected via a cable or optical fiber to transmit signals. In embodiments where the control unit CU is connected to the inspection unit DU via a wireless connection, the control unit CU can be connected via a communication interface (such as Wi-Fi). ® or Bluetooth ® )connect.

[0051] The inspection table 100 allows the display panel 10, which is the target of inspection, to be placed on it. The inspection table 100 can be configured to move in a second direction DR2 via the inspection table movement track 230. By moving the inspection table 100 while keeping the imaging unit 300 stationary, the inspection area of ​​the display panel 10 can be imaged. Furthermore, for continuous inspection, the inspection table 100 can sequentially move multiple display panels 10 via the inspection table movement track 230.

[0052] The support member 210 serves to securely mount and stabilize the imaging unit 300. The support member 210 can be configured to move along a support member movement track 240 in the second direction DR2, causing the imaging unit 300 to move simultaneously with the support member 210. The support member movement track 240 can be driven to move the imaging unit 300 along the second direction DR2 while the display panel 10 remains stationary. Furthermore, the support member 210 allows the imaging unit movement track 220 to be mounted thereon. The imaging unit 300 can be configured to move along the imaging unit movement track 220 in the first direction DR1.

[0053] The drive unit 200 can be configured to drive the imaging unit movement track 220, the inspection table movement track 230, and the support movement track 240 to move the inspection table 100 or the imaging unit 300 to a position corresponding to the coordinates received from the control unit CU. This will allow for precise identification of the inspection position and enable the imaging unit 300 to capture images of the inspection area.

[0054] The imaging unit 300 can be mounted on the support 210 and spaced apart from the display panel 10 on the inspection table 100 on the third-party DR3 to capture images of the inspection area. Furthermore, the imaging unit 300 can be configured to transmit the captured images to the control unit CU. For defect inspection, after capturing images of the inspection area, the inspection results can be transmitted to the control unit CU, which is connected to the inspection unit DU via wired or wireless communication. It should be understood that the mounting structure of the imaging unit 300 is not limited to... Figure 3 The installation structure shown.

[0055] Figure 3 This is a plan view of the imaging unit 300 according to an embodiment of the present disclosure. (Refer to...) Figure 3 An embodiment of the imaging unit 300 may include a light source unit 310, a semi-reflective mirror unit 320, a camera 330, an objective lens 340, and a light guide unit 350.

[0056] In an embodiment, such as Figure 3 As shown, light emanating from the light source unit 310 can pass through the light guide unit 350 located at one end of the light source unit 310 and be incident on the semi-reflective mirror unit 320 located inside the light guide unit 350. The light incident on the semi-reflective mirror unit 320 can be reflected or transmitted and transmitted to the inspection area. The light reflected from the inspection area can pass through the objective lens 340 connected to one end of the light guide unit 350 and be received by the camera 330 connected to the other end (or opposite end) of the light guide unit 350.

[0057] The semi-reflective mirror unit 320 may include a plurality of semi-reflective mirrors. In the disclosed embodiments, such as Figure 3As shown, the semi-reflective mirror unit 320 may include a first semi-reflective mirror and a second semi-reflective mirror. The first semi-reflective mirror is configured to reflect light incident from the light source unit 310 along a first direction and redirect the light to a second direction intersecting the first direction. The second semi-reflective mirror is configured to reflect light incident thereon along the second direction back to the first direction and transmit the light to the inspection area, while transmitting light reflected from the inspection area. Optionally, by changing the orientation of the semi-reflective mirrors, the semi-reflective mirror unit 320 may include: a first semi-reflective mirror configured to transmit light incident from the light source unit 310 along the first direction to the inspection area and reflect light reflected from the inspection area along the second direction; and a second semi-reflective mirror configured to reflect light incident thereon along the second direction back to the first direction to transmit the light to the camera 330.

[0058] Objective lens 340 can be configured to focus light reflected from the examination area. In an embodiment, objective lens 340 can be an ultraviolet (UV) lens configured to transmit light in the ultraviolet band (ultraviolet or UV light) while blocking visible or infrared light. Although Figure 3 An embodiment is shown in which light irradiated from the light source unit 310 passes through the objective lens 340 to reach the inspection area, and light reflected from the inspection area is received by the same objective lens 340. However, the path of light is not limited to this configuration. In the embodiment, although the objective lens 340 may be located at the position to receive light reflected from the inspection area, the aperture through which the light irradiated from the light source unit 310 is emitted to the inspection area may be different or can be adjusted to change the path.

[0059] The light guide unit 350 can provide a path for light and minimize light loss. In an embodiment, a semi-reflective mirror unit 320 can be positioned inside the light guide unit 350. Furthermore, a UV bandpass filter can be positioned inside the light guide unit 350 in front of the lens of the camera 330 to ensure that the camera 330 receives only ultraviolet light. The shape of the light guide unit 350 is not limited to this. Figure 3 The shape of the plan shown.

[0060] Figure 4 This is a flowchart illustrating an inspection method according to an embodiment of the present disclosure. (Refer to...) Figure 4 An embodiment of the display panel inspection method may include the following steps: setting a light source and a camera together on an inspection area (S100); illuminating the inspection area with light (S200); receiving light reflected from the inspection area (S300); and determining the presence of an organic layer by analyzing an image formed by (or based on) the received light (S400). The display panel and the elements contained therein identified in the following description of the display panel inspection method are referenced. Figures 1 to 3 The described display panel and the components it contains are the same.

[0061] In embodiments of this disclosure, if organic material diffuses into or overflows into non-display areas during the encapsulation process when forming the organic layer, moisture or air can penetrate the organic layer located in the non-display areas, causing defects such as pixel shrinkage or black spots. Therefore, a display panel inspection method can be performed to detect defects in an organic layer inspection area, which includes the boundary of an area in a non-display area surrounding the display area of ​​the inspection target and located outside the display area where the organic layer is coated.

[0062] In the process of setting the light source and camera together on the inspection area (S100), the control unit CU can control the drive unit 200 to position the imaging unit 300 on the inspection area of ​​the display panel 10. Therefore, the control unit CU can receive the coordinates of the organic layer inspection area and instruct the drive unit 200 to move the inspection stage 100 or the imaging unit 300.

[0063] The organic layer inspection area can include multiple areas on the display panel 10. Since the structure of the areas where the organic layer is coated during the encapsulation process is consistent (or constant) with the boundary structure of the non-display areas, the coating pattern of the organic layer can also remain consistent. Therefore, inspecting only specific locations, rather than inspecting the entire boundary of the organic layer located in the non-display areas, is sufficient to determine the presence of defects (i.e., whether the organic layer is present in the non-display areas). Thus, by not inspecting every boundary of the non-display areas, the computational burden for defect detection can be reduced, and the detection speed can be improved.

[0064] The process of illuminating the inspection area with light (S200) can be performed by the imaging unit 300. Having received inspection-related instructions from the control unit CU, the imaging unit 300 can illuminate the organic layer inspection area with light from the light source unit 310. In this embodiment, the wavelength of the emitted light can be approximately 400 nm or less.

[0065] In the process of receiving light reflected from the inspection area (S300), the camera 330 can receive the light reflected from the inspection area after the process of illuminating the inspection area (S200) to generate an image of the inspection area. In an embodiment, since the refractive and absorption characteristics of the elements differ with wavelength, a UV filter can be applied to the camera 330 to allow the camera 330 to selectively receive ultraviolet light (i.e., light in the ultraviolet band). Furthermore, the camera 330 can be a UV camera to capture ultraviolet light, or a monochrome camera can be used to generate high-resolution and high-precision images.

[0066] In the process (S400) of determining the presence of an organic layer by analyzing an image formed by the received light, the imaging unit 300 can form an image using the light received in the process (S300) of receiving light reflected from the inspection area. The control unit CU can receive and analyze the image formed by the imaging unit 300 to determine the presence of the organic layer and detect defects. To determine the defect, the control unit CU can extract a target location from a structure located in a non-display area for preventing the flow of organic material based on the captured image. The structure for preventing the flow of organic material may include a first inclined surface protruding from the display panel 10, which is the inspection target, and inclined in a direction intersecting the display direction. Therefore, the target location extracted by the control unit CU can be set or defined on the first inclined surface.

[0067] In this embodiment, the control unit CU can extract grayscale values ​​of target locations used as criteria for defect determination. In a digital image, grayscale values ​​representing the brightness of each pixel can range from 0 (pure black) to 255 (pure white), with intermediate values ​​representing various grayscale levels. In this embodiment, the control unit CU can extract grayscale values ​​from multiple target locations separately.

[0068] In this embodiment, the control unit (CU) can compare a grayscale value extracted from a target location with a reference grayscale value. When the grayscale value at the target location is greater than the reference grayscale value, it is determined that the target location contains an organic layer, and a defect can be identified based on this determination. The organic layer can be composed of organic materials such as monomers or polymers. Therefore, the organic layer can be transparent, and its transparency makes it difficult to detect using visible light. Therefore, by utilizing the refractive property that the refractive index of the organic layer is higher than that of air, ultraviolet light with a shorter wavelength can be used to improve the visibility of the organic layer. When ultraviolet light, rather than visible light, illuminates the area inspected for the organic layer, the area containing the organic layer (i.e., the area where organic material is present) exhibits a more pronounced refractive effect, causing the captured image to defocus and thus reducing image sharpness. The reduction in sharpness results in a grayscale value higher than the grayscale value when sharpness is not reduced. Therefore, by setting a specific reference grayscale value for areas without organic material, the presence of an organic layer can be determined by comparing the extracted grayscale value with the reference value. This can improve the visibility of the organic layer and improve the accuracy of defect detection. In other words, when the grayscale value at the target location is greater than the reference value, the refraction effect reduces image sharpness, thus confirming the presence of organic material. (The reference value is then used.) Figures 8A to 10B The embodiments related thereto are described in more detail.

[0069] Furthermore, in the process of determining the presence of an organic layer by analyzing an image formed by the received light (S400), the control unit CU can determine whether the target being inspected is defective based on the determined location of the organic layer. When it is determined that an organic layer exists at the target location, if the target location containing the organic layer is farther from the display area than a reference location, the control unit CU can determine that the target being inspected is defective. The control unit CU can also determine whether the target being inspected is defective based on the boundary location of the organic layer evaluated by comparing grayscale values. (Referencing...) Figures 8A to 10B The detailed process for determining defects in the control unit (CU) is described in further detail.

[0070] When it is determined in process (S400) that an organic layer is not present at the target location by analyzing an image formed from received light, the control unit CU can determine that an organic layer is not present in an adjacent area of ​​the organic layer inspection area that was not captured by the camera 330. Therefore, by inspecting multiple organic layer inspection areas that do not overlap with each other, the control unit CU can detect defects without inspecting the entire non-display area. The process (S400) of determining the presence of an organic layer by analyzing an image formed from received light can be executed substantially simultaneously with the process (S100) of setting the light source and camera together on the inspection area (e.g., immediately after a minimal delay).

[0071] Figure 5 This is a plan view of the display panel 10 according to an embodiment of the present disclosure. (Refer to...) Figure 5 The display panel 10 may have a display area DA and a non-display area NDA defined therein. The display area DA may be configured to display an image and may include multiple pixels that implement the image. The display panel 10 may be configured to control the pixels to display various images. Each pixel may include a transistor and a light-emitting diode. The light-emitting diode may include an organic light-emitting diode or a nano-light-emitting diode. The non-display area NDA may surround the display area DA and may be shaped to be located outside the display area DA.

[0072] Figure 6 It is along Figure 5 The cross-sectional view of the display panel 10 taken by line I-I'. (Refer to...) Figure 6 The display panel 10 may include a substrate layer BL, a circuit layer CL, a light-emitting diode LD, a pixel-defining layer PDL, a spacer SPC, a packaging layer TFE, a first dam DM1, and a second dam DM2.

[0073] The circuit layer CL may include a buffer layer BFL, gate insulating layers GI1 and GI2, interlayer insulating layer ILD, circuit insulating layer VIA, and transistor T1.

[0074] The encapsulation layer TFE can seal the light-emitting diode (LD), pixel limiting layer (PDL), and spacer (SPC) to protect the layer containing the LD from external oxygen or moisture.

[0075] A buffer layer BFL can be disposed on one surface of the substrate layer BL. The buffer layer BFL can be configured to prevent impurities in the substrate layer BL from entering the pixel during the manufacturing process. Specifically, the buffer layer BFL can prevent impurities from diffusing into the active region ACL of the transistor T1 that constitutes the pixel. In addition, the buffer layer BFL can prevent moisture from penetrating into the pixel from external sources.

[0076] The active region ACL constituting transistor T1 can be disposed on the buffer layer BFL. The active region ACL can include polycrystalline silicon or amorphous silicon, or optionally, it can include metal-oxide-semiconductor. The active region ACL can include a channel region through which electrons or holes can move, and a first ion-doped region and a second ion-doped region located therebetween. The active region ACL can be disposed in the display area DA.

[0077] A first gate insulating layer GI1 covering the active region ACL can be disposed on the buffer layer BFL. The first gate insulating layer GI1 may include an organic film and / or an inorganic film. The first gate insulating layer GI1 may include multiple inorganic thin films, which may contain silicon nitride and silicon oxide layers. A control electrode GE1 constituting transistor T1 can be disposed on the first gate insulating layer GI1. The control electrode GE1 can be disposed in the display area DA.

[0078] A second gate insulating layer GI2 covering the control electrode GE1 may be disposed on the first gate insulating layer GI1. The second gate insulating layer GI2 may include an organic film and / or an inorganic film. The second gate insulating layer GI2 may include or be defined by multiple inorganic thin films, which may include a silicon nitride layer and a silicon oxide layer.

[0079] An interlayer insulating layer (ILD) may be disposed on the second gate insulating layer (GI2). The ILD may include organic films and / or inorganic films. The ILD may include or be defined by multiple inorganic films, which may include a silicon nitride layer and a silicon oxide layer.

[0080] The first electrode ED1 and the second electrode ED2 of transistor T1 can be disposed on the interlayer insulating layer ILD located in the display area DA. The first electrode ED1 and the second electrode ED2 can be connected to the corresponding active area ACL through contact holes that respectively penetrate (defined as passing through or formed to pass through) the gate insulating layers GI1 and GI2 and the interlayer insulating layer ILD.

[0081] The circuit insulating layer VIA covering the first electrode ED1 and the second electrode ED2 can be disposed on the interlayer insulating layer ILD. The circuit insulating layer VIA may include an organic film and / or an inorganic film. The circuit insulating layer VIA can provide a flat surface. The circuit insulating layer VIA disposed in the display area DA can cover the transistor T1 in the display area DA.

[0082] The buffer layer BFL and gate insulating layers GI1 and GI2 can cover the entire display area DA and the non-display area NDA, which are located between the substrate layer BL and the interlayer insulating layer ILD. Although for ease of explanation, Figure 6 Only one transistor T1 is shown in the display area DA, but the number of transistors in the display area DA is not limited to this. Figure 6 The quantities shown.

[0083] The light-emitting diode (LD) and pixel limiting layer (PDL) can be disposed on the circuit insulating layer (VIA) located in the display area (DA). The LD may include an anode electrode (AE), a hole control layer (not shown), an emitter layer (EML), an electronic control layer (not shown), and a cathode electrode (CE).

[0084] The anode electrode AE ​​can be disposed on the circuit insulating layer VIA and can be connected to the first electrode ED1 or the second electrode ED2. The anode electrode AE ​​can be disposed on the transistor T1 and electrically connected to the transistor T1.

[0085] A pixel defining layer (PDL) can be disposed on a circuit insulating layer (VIA). The PDL can cover pixels and define and separate individual pixels. Furthermore, the PDL can have pixel holes that expose at least a portion of the anode electrode (AE).

[0086] The emitting layer EML can be disposed on the anode electrode AE ​​exposed through the pixel aperture of the pixel defining layer PDL. The emitting layer EML can be positioned within the pixel aperture and can be placed between the anode electrode AE ​​and the cathode electrode CE. The emitting layer EML may include an organic light-emitting material.

[0087] The cathode electrode CE can be disposed on the emitter layer EML, and can also be disposed on the entire pixel-defining layer PDL.

[0088] Spacer components (SPCs) can be disposed on the pixel-defining layer (PDL). The SPCs can be configured to maintain a separation distance during the formation of the emitter layer (EML), effectively preventing layer overlap or damage. The SPCs can be formed simultaneously with the PDL to ensure uniform interlayer arrangement.

[0089] The encapsulation layer TFE can be disposed on the cathode electrode CE. The encapsulation layer TFE can cover the light-emitting diode LD and includes at least one inorganic encapsulation layer and at least one organic encapsulation layer. In an embodiment, the encapsulation layer TFE may include a first inorganic encapsulation layer ENL1, an organic encapsulation layer ENL2, and a second inorganic encapsulation layer ENL3.

[0090] The first inorganic encapsulation layer ENL1 can be disposed on the cathode electrode CE. The first inorganic encapsulation layer ENL1 and the second inorganic encapsulation layer ENL3 can be configured to cover the entire display area DA and the non-display area NDA. In an embodiment, the first inorganic encapsulation layer ENL1 and the second inorganic encapsulation layer ENL3 can be disposed on the first dam DM1 and the second dam DM2.

[0091] An organic encapsulation layer ENL2 may be disposed on the first inorganic encapsulation layer ENL1. The organic encapsulation layer ENL2 may cover the display area DA. The organic encapsulation layer ENL2 may comprise or be made of organic materials (such as monomers or polymers). The organic encapsulation layer ENL2 may be positioned between the first inorganic encapsulation layer ENL1 and the second inorganic encapsulation layer ENL3 to prevent delamination of the encapsulation layer TFE caused by foreign matter. Furthermore, the organic encapsulation layer ENL2 may have a refractive index greater than that of air.

[0092] First dam DM1 and second dam DM2 can be disposed in the non-display area NDA. First dam DM1 and second dam DM2 can be configured to prevent the leakage of organic materials (such as monomers) during the formation of the organic encapsulation layer ENL2. Therefore, both first dam DM1 and second dam DM2 can serve as structures to prevent the flow of organic materials. In an embodiment, first dam DM1 and second dam DM2 can prevent organic materials from leaking outward in the non-display area NDA (i.e., in the first direction DR1). If no leakage occurs, the organic encapsulation layer ENL2 can remain inside the first dam DM1. In this case, the boundary of the organic encapsulation layer ENL2 can be located in the first region A1.

[0093] The first dam DM1 and the second dam DM2 can be disposed on the second gate insulating layer GI2 in the non-display area NDA. In an embodiment, the first dam DM1 can be spaced apart from the display area DA in the first direction DR1 and located in the first dam area DMA1. Furthermore, the second dam DM2 can be spaced apart from the first dam DM1 in the first direction DR1, located outside the first dam DM1, and located in the second dam area DMA2.

[0094] The first dam DM1 and the second dam DM2 can both form a multi-layered structure. In an embodiment, the first dam DM1 and the second dam DM2 can both include a first layer DL1, a second layer DL2, and a third layer DL3. In an embodiment, for example, the first layer DL1 can be formed substantially simultaneously with the circuit insulating layer VIA. The second layer DL2 can be formed simultaneously with the pixel defining layer PDL, and the third layer DL3 can be formed simultaneously with the spacer SPC. Although Figure 6 An embodiment of each of the first dam DM1 and the second dam DM2 having a three-layered stacked structure is shown, but the number of dams and the internal stacked structure of the dams in the non-shown area NDA are not limited to this construction.

[0095] In this embodiment, since the first dam DM1 and the second dam DM2 are stacked in the display direction (i.e., on the third direction DR3), the first dam DM1 and the second dam DM2 can have slopes in the direction intersecting the third direction DR3. Therefore, the first dam DM1 and the second dam DM2 can respectively include first inclined surfaces L11 and L21 and second inclined surfaces L12 and L22. In this embodiment, in order to analyze the presence of the organic layer, the positions of the inclined surfaces L11, L12, L21 and L22 of the first dam DM1 and the second dam DM2 can be detected or extracted, and the grayscale values ​​of these positions can be detected or extracted.

[0096] Figure 7A and Figure 7B It is shown Figure 4 The inspection method described herein illustrates a cross-sectional view of an embodiment of inspecting the illumination of the light LT. In this embodiment, the inspection system 1000 can be configured to inspect the presence of the organic encapsulation layer ENL2 in the non-display area NDA. By using... Figure 4 The inspection method examines the non-display area NDA, which can detect defects in the display panel 10, thereby ensuring reliability. In this embodiment, inspection light LT can be irradiated after the organic encapsulation layer ENL2 is formed. Since the transmittance of the organic encapsulation layer ENL2 and the second inorganic encapsulation layer ENL3 differs depending on the wavelength of light, and the organic encapsulation layer ENL2 is stacked thicker than the second inorganic encapsulation layer ENL3, the refractive effect of the organic encapsulation layer ENL2 can be more pronounced. Therefore, the organic encapsulation layer ENL2 can be inspected even after the second inorganic encapsulation layer ENL3 is formed.

[0097] Figure 7A It is based on Figure 4 The inspection method along Figure 5 The sectional view of the display panel 10 is taken by line I-I'. Figure 7AThis illustrates a scenario where, during the formation of the organic encapsulation layer ENL2, the leakage of organic materials (such as monomers) causes the organic encapsulation layer ENL2 to extend into a second region A2 outside the first dam DM1. In this case, the boundary of the organic encapsulation layer ENL2 may be located within the second region A2.

[0098] Reference Figure 7A The inspection light LT can be used to illuminate the organic layer inspection area located in the non-display area NDA. Figure 7A An example of inspection light LT illuminating the first dam DM1 is shown.

[0099] Figure 7B yes Figure 7A An enlarged view of area AA of the display panel 10 shown. (See attached image.) Figure 7B As shown, Figure 7A The inspection light LT is divided into incident light at the first dam DM1 (see Figure 7A The incident light LT11, the second incident light LT21, and the third incident light LT31 are incident on the organic encapsulation layer ENL2. When the incident light LT11, LT21, and LT31 are incident on the organic encapsulation layer ENL2, the organic material forming the organic encapsulation layer ENL2, which has a refractive index higher than that of air, will cause the incident light LT11, LT21, and LT31 to be refracted into the first refracted light LT12, the second refracted light LT22, and the third refracted light LT32, respectively. Figure 7B Examples of the refraction angles and directions of refracted light LT12, LT22, and LT32 are shown.

[0100] As the wavelength of the inspection light LT decreases, the refractive effect can increase. In an embodiment, by irradiating the inspection light LT with a wavelength shorter than that of visible light in the ultraviolet band, the refractive effect can be enhanced when the inspection light LT is incident on the organic encapsulation layer ENL2. Figure 7B As shown, with increasing refraction, incident lights LT11, LT21, and LT31 exhibit larger refraction angles and are refracted into corresponding refracted lights LT12, LT22, and LT32 at the boundary of the organic encapsulation layer ENL2. Unlike the case without the organic encapsulation layer ENL2, the change in refraction angle can lead to a defocusing effect, preventing the focus from converging on a single point. Therefore, when defocusing occurs, the area containing the organic encapsulation layer ENL2 can exhibit reduced sharpness in the captured image, resulting in higher grayscale values ​​in the corresponding area.

[0101] In an embodiment, high-resolution locations (such as the inclined surfaces L11, L12, L21, and L22 of the first dam DM1 and the second dam DM2) can be extracted from the image (see...). Figure 6The presence of the organic encapsulation layer ENL2 is determined by comparing the gray values ​​at these locations with a reference gray value. In an embodiment, for example, the presence of the organic encapsulation layer ENL2 can be determined when the reference gray value is 40 and the gray values ​​of the inclined surfaces L11, L12, L21, and L22 of the first dam DM1 and the second dam DM2 exceed 40.

[0102] Figure 8A and Figure 8B An image showing the result of an inspection formed according to an embodiment of the present disclosure is illustrated. Figure 8A and Figure 8B The results of inspecting the inspection area of ​​the display panel 10 using the inspection system 1000 are shown. Each of these images represents the result obtained when ultraviolet light is irradiated onto the inspection area and subsequently captured by a camera, based on the presence or absence of monomers. Figure 8A An image showing the inspection result when no monomer is present, according to an embodiment of the present disclosure, is illustrated. Figure 8B An image formed as an inspection result when a single entity is present, according to an embodiment of the present disclosure, is shown. Multiple pixels PX may exist in the display area DA, and a first dam area DMA1, a second dam area DMA2, and a third dam area DMA3 may exist in the non-display area NDA. The interval between the display area DA and each dam area may be represented as multiple areas A1, A2, A3, and A4.

[0103] To identify the coated areas of the monomer, the positions of the inclined surfaces L10 of the display area DA, L11 and L12 of the first dam DM1, L21 and L22 of the second dam DM2, and L31 and L32 of the third dam can be extracted from the image. By extracting the grayscale values ​​of these positions and comparing the grayscale values ​​with and without monomers, it can be confirmed that the grayscale value is higher when monomers are present. (Refer to...) Figure 8A and Figure 8B When a monomer (i.e., an organic encapsulation layer ENL2) is present, such as Figure 8B As shown, the sharpness of the tilted surfaces L10, L11, L12, L21, L22, L31, and L32 is reduced. Therefore, the grayscale values ​​of the regions where the organic encapsulation layer ENL2 is present can have higher values.

[0104] Figure 9A and Figure 9B An image showing the inspection results according to an embodiment of the present disclosure is displayed. Figure 9A and Figure 9B This represents an image of the inspection result for the same inspection area, which contains a single entity but was captured using inspection light of different wavelengths. Figure 9AThe image shown is formed when visible light (wavelength range of 400nm-800nm) is used as the inspection light. Figure 9B The image formed when ultraviolet light is used as the examination light is shown.

[0105] To identify the coating areas of the monomers, the positions of the tilted surfaces L10 of the display area DA, L11 and L12 of the first dam DM1, L21 and L22 of the second dam DM2, and L31 and L32 of the third dam can be extracted from the image. After extracting the grayscale values ​​of these tilted surfaces, the results shown in Table 1 are obtained: Table 1

[0106] Analysis of the grayscale values ​​of tilted surfaces L10, L11, L12, L21, L22, L31, and L32 confirmed that when using ultraviolet inspection light, the grayscale values ​​of locations containing monomers (such as the tilted surface L10 of display area DA and the first tilted surface L11 of the first dam DM1) are higher than those of other locations. However, when using visible light, the difference in grayscale values ​​between locations with and without monomers is small, resulting in lower accuracy. Therefore, using short-wavelength ultraviolet inspection light can improve the visibility of monomers and increase the accuracy of determining the presence of the organic encapsulation layer ENL2.

[0107] Furthermore, in the embodiments, such as Figure 9A and Figure 9B As shown, the boundary of the organic encapsulation layer ENL2 can be determined based on the location of the identified monomers (i.e., the inclined surface L10 of the display area DA and the first inclined surface L11 of the first dam DM1). In an embodiment, for example, when a monomer is found on the first inclined surface L11 of the first dam DM1 but not on the second inclined surface L12 of the first dam DM1, the boundary of the organic encapsulation layer ENL2 may be located in the first region A1. The boundary of the organic encapsulation layer ENL2 can also be used to assess defects in the inspection target. In an embodiment, for example, when a defect in the display panel 10 is determined, if the boundary of the organic encapsulation layer ENL2 is located in the first region A1, the second region A2, and the third region A3, it can be determined that the display panel 10 is not defective. In this embodiment, if the boundary is located in the fourth region A4, it can be determined that the display panel 10 is defective. Figure 9B In the embodiment shown, the inspection results indicate that the boundary of the organic encapsulation layer ENL2 is located in the first region A1, thus confirming that the display panel 10 is free of defects.

[0108] Figure 10A and Figure 10BAn image showing the inspection results according to an embodiment of the present disclosure is displayed. Figure 10A and Figure 10B This represents an image of the inspection result for the same inspection area, which contains a single entity but was captured using inspection light of different wavelengths. Figure 10A The image shown is formed when visible light (wavelength range of 400nm-800nm) is used as the inspection light. Figure 10B The image shown is formed when ultraviolet light is used as the examination light.

[0109] To identify the coating areas of the monomers, the positions of the tilted surfaces L10 of the display area DA, L11 and L12 of the first dam DM1, L21 and L22 of the second dam DM2, and L31 and L32 of the third dam can be extracted from the image. After extracting the grayscale values ​​of these tilted surfaces, the results shown in Table 2 are obtained: Table 2

[0110] Analysis of the grayscale values ​​of tilted surfaces L10, L11, L12, L21, L22, L31, and L32 confirmed that, under ultraviolet inspection light, the grayscale value of the second tilted surface L32, where no monomers are present, is smaller compared to other locations. However, when using visible light, the grayscale value difference between locations with and without monomers is not significant, resulting in lower detection accuracy. Therefore, using short-wavelength ultraviolet inspection light can improve the visibility of monomers and increase the accuracy of determining the presence of the organic encapsulation layer ENL2.

[0111] Furthermore, the boundary of the organic encapsulation layer ENL2 can be determined based on the location where monomers are found. Figure 10A and Figure 10B In the case shown, it is confirmed that the monomer exists up to the first inclined surface L31 of the third dam, so the boundary of the organic encapsulation layer ENL2 can be located in the third region A3. When evaluating defects in the inspection target based on the boundary of the organic encapsulation layer ENL2, if the organic encapsulation layer ENL2 is present in the fourth region A4, it can be determined that the display panel 10 is defective. Figure 10B In the case shown, since the inspection results indicate that the organic encapsulation layer ENL2 is located in the third region A3, it can be determined that the display panel 10 is free of defects.

[0112] The utility model should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the inventive concept to those skilled in the art.

[0113] Although the utility model has been specifically shown and described with reference to embodiments thereof, those skilled in the art will understand that various changes in form and detail may be made without departing from the spirit or scope of the utility model as defined by the appended claims.

Claims

1. A display panel inspection system, characterized in that, The display panel inspection system includes: Inspection table, the inspection target is set on the inspection table; An imaging unit irradiates an organic layer inspection area with ultraviolet light and generates an image of the organic layer inspection area based on the irradiated ultraviolet light. The organic layer inspection area is located in a non-display area, which surrounds the display area of ​​the inspection target and is located outside the display area. The driving unit moves the imaging unit relative to the inspection target on the organic layer inspection area; and The control unit determines whether an organic layer exists in the organic layer inspection area by analyzing the image generated by the imaging unit.

2. The display panel inspection system according to claim 1, characterized in that, The organic layer inspection area includes the boundary between the area on the inspection target coated with the organic layer and the area not coated with the organic layer.

3. The display panel inspection system according to claim 1, characterized in that, The control unit extracts the target location from the structure for preventing the flow of organic material located in the non-display area of ​​the image, and extracts the grayscale value of the target location. The structure for preventing the flow of organic material includes an inclined surface that protrudes from the inspection target and is inclined in a direction intersecting the display direction. The target location is on the inclined surface.

4. The display panel inspection system according to claim 3, characterized in that, The control unit compares the grayscale value extracted from the target location with a reference value, and determines that the organic layer exists at the target location when the extracted grayscale value is greater than the reference value.

5. The display panel inspection system according to claim 4, characterized in that, When the target location where the organic layer exists is located further away from the display area than the reference location, the control unit determines that the inspection target is defective.

6. The display panel inspection system according to claim 4, characterized in that, When it is determined that there is no organic layer in the target location, the control unit determines that there is no organic layer in the area adjacent to the organic layer inspection area and not captured by the imaging unit.

7. The display panel inspection system according to claim 1, characterized in that, The imaging unit includes: The light source unit irradiates the organic layer inspection area with ultraviolet light; A light guide unit is positioned at one end of the light source unit; An objective lens is attached to one end of the light guide unit, wherein the objective lens allows the ultraviolet light reflected from the organic layer inspection area to be transmitted through; A camera, connected to the other end of the light guide unit, wherein the camera receives the ultraviolet light transmitted through the objective lens to form the image; and A semi-reflective mirror unit is disposed within the light guide unit, wherein the semi-reflective mirror unit guides the ultraviolet light irradiated from the light source unit to the organic layer inspection area, and guides the ultraviolet light reflected from the organic layer inspection area to the camera.

8. The display panel inspection system according to claim 7, characterized in that, The imaging unit also includes an ultraviolet bandpass filter disposed in front of the camera.

9. The display panel inspection system according to claim 7, characterized in that, The camera is a monochrome camera or an ultraviolet camera.

10. The display panel inspection system according to claim 1, characterized in that, The driving unit includes: The imaging unit is mounted on the support member. A first moving track allows the support member to move in a first direction; and The second moving track causes the imaging unit to move in a second direction that intersects with the first direction.

Citation Information

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