Flower basket fixing structure and cleaning equipment

Abstract

The embodiment of the utility model provides a kind of flower basket fixing structure and cleaning equipment, it is related to wafer cleaning technical field, to improve the technical problem that current technology cannot clamp larger size flower basket in cleaning equipment.It includes connecting plate and fixed component;Fixed component includes at least a pair of symmetrically arranged hanger plate and a pair of fixed plate detachably arranged on a pair of hanger plate;Fixed hole is opened in connecting plate, and hanger plate is detachably connected with connecting plate by fixed hole;A plurality of width adjustment holes are opened in second direction on hanger plate, and fixed plate is detachably connected with hanger plate by width adjustment hole.The utility model in the present application can adjust interval according to the size of flower basket, to adapt to different size flower basket, so as to realize the fixed clamping of different size flower basket.

Description

Technical Field

[0001] This utility model relates to the field of wafer cleaning technology, and more specifically, to a basket fixing structure and cleaning equipment. Background Technology

[0002] During processing, wafers can become contaminated with process residues, environmental particles, metal contaminants, and other impurities. To ensure yield, the wafer surface needs to be cleaned.

[0003] During the wafer cleaning process, the cleaning equipment can hold a basket and use the basket to move the wafer into the cleaning tank to clean the wafer.

[0004] Currently, as wafer size increases, the size of the basket also increases accordingly, but cleaning equipment cannot hold larger baskets. Utility Model Content

[0005] The purpose of this utility model is to provide a flower basket fixing structure and a cleaning device to improve the technical problem that the existing cleaning devices cannot hold large-sized flower baskets.

[0006] The embodiments of this utility model can be implemented as follows: Firstly, this utility model provides a flower basket fixing structure, suitable for fixing flower baskets, including: Connecting plate; A fixing assembly, the fixing assembly comprising at least a pair of symmetrically arranged hanging plates and a pair of fixing plates detachably disposed on the pair of hanging plates; The connecting plate has fixing holes, and the hanging plate is detachably connected to the connecting plate through the fixing holes; The mounting plate has multiple width adjustment holes along the second direction, and the fixing plate is detachably connected to the mounting plate through the width adjustment holes; The first direction and the second direction are set perpendicular to each other.

[0007] In an optional embodiment, the mounting plate includes a mounting plate body and an extension portion; One end of the extension is connected to the mounting plate body, and the other end extends along the first direction. A height adjustment hole is provided on the extension along the first direction.

[0008] In an optional embodiment, the plurality of width adjustment holes include a first width adjustment hole and a second width adjustment hole; The spacing between the corresponding first width adjustment holes on the pair of mounting plates is The spacing between the corresponding second width adjustment holes on a pair of mounting plates is ,in, .

[0009] In an optional embodiment, the height of the first width adjustment hole in the first direction is The height of the second width adjustment hole in the first direction is The height of the height adjustment hole in the first direction is ,in, .

[0010] In an optional embodiment, the number of the first width adjustment hole, the second width adjustment hole, and the height adjustment hole is multiple and arranged sequentially along the first direction.

[0011] In an optional embodiment, the mounting plate body is provided with a connecting groove, and the mounting plate body is slidably connected to the connecting plate through the connecting groove.

[0012] In an optional embodiment, the fixing plate includes a fixing part and a guide part disposed on one side of the fixing part. The guide part is inclined so that the flower basket can be hung on the fixing part under the action of the guide part.

[0013] In an optional embodiment, the connecting plate has multiple weight-reduction holes.

[0014] Secondly, this utility model provides a cleaning device, including the flower basket fixing structure described in any of the foregoing embodiments.

[0015] In an optional implementation, a robotic arm is included, and the basket fixing structure is connected to the cleaning equipment via the robotic arm.

[0016] The beneficial effects of the flower basket fixing structure and cleaning equipment provided in this embodiment of the utility model include: This utility model provides a flower basket fixing structure and a cleaning device having the flower basket fixing structure. The flower basket fixing structure includes a connecting plate and a fixing component. The fixing component includes a pair of symmetrically arranged hanging plates and a pair of fixing plates detachably mounted on the pair of hanging plates. The hanging plates have multiple width adjustment holes along a second direction, and the fixing plates are detachably connected to the hanging plates through the width adjustment holes. By connecting the fixing plates to different width adjustment holes, the spacing between the fixing plates can be changed, thereby enabling the fixing plates to fix flower baskets of different sizes, thus solving the problem that the cleaning device cannot hold larger flower baskets. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall structure of the flower basket fixing structure provided in this embodiment; Figure 2 This is a schematic diagram of the connecting plate in the flower basket fixing structure provided in this embodiment; Figure 3 This is a schematic diagram of the hanging plate in the flower basket fixing structure provided in this embodiment; Figure 4 This is a schematic diagram of the fixing plate in the flower basket fixing structure provided in this embodiment; Figure 5 This is a schematic diagram showing the positional relationship between the width adjustment hole and the height adjustment hole in the flower basket fixing structure provided in this embodiment.

[0019] Icons: 100 - Connecting plate; 110 - Fixing hole; 120 - Weight reduction hole; 200-Fixing component; 210-Hanging plate; 211-Width adjustment hole; 2111-First width adjustment hole; 2112-Second width adjustment hole; 212-Hanging plate body; 213-Extension; 214-Height adjustment hole; 215-Connecting groove; 220-Fixing plate; 221-Fixing part; 222-Guide part. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0022] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0023] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0024] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0025] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0026] During the wafer cleaning process, the cleaning equipment can clamp a basket and use the basket to move the wafer into the cleaning tank to achieve wafer cleaning. However, as the wafer size increases, the size of the basket used to hold the wafer also increases accordingly. Existing cleaning equipment cannot clamp larger baskets. Therefore, this utility model provides a basket fixing structure, which enables the cleaning equipment to clamp baskets of different sizes.

[0027] The following describes in detail the overall structure, working principle, and technical effects of the flower basket fixing structure and cleaning equipment provided by this utility model through embodiments and in conjunction with the accompanying drawings.

[0028] This embodiment provides a flower basket fixing structure for connecting a flower basket to a cleaning device. This flower basket fixing structure can hold flower baskets of different sizes, thereby enabling the cleaning device with this flower basket fixing structure to perform cleaning work on flower baskets of various sizes.

[0029] Please refer to Figure 1 The flower basket fixing structure provided in this embodiment includes a connecting plate 100 and a fixing component 200 detachably disposed on the connecting plate 100. The fixing component 200 includes a pair of symmetrically arranged hanging plates 210 and a pair of fixing plates 220 detachably disposed on the pair of hanging plates 210.

[0030] Please see Figure 2Furthermore, the connecting plate 100 has fixing holes 110 on both sides along the first direction, and a pair of hanging plates 210 can be detachably connected to the connecting plate 100 through the fixing holes 110. The hanging plates 210 have multiple width adjustment holes 211 along the second direction. The fixing plate 220 can be detachably connected to the hanging plate 210 through the width adjustment holes 211, and can also be connected to different width adjustment holes 211 to adjust the clamps of the pair of fixing plates 220, thereby achieving the fixed clamping of flower baskets of different sizes.

[0031] As is understandable, the symmetrical arrangement of the aforementioned pair of hanging plates 210 and fixing plates 220 specifically means that they are symmetrical about the central axis of the connecting plate 100 and are respectively arranged on both sides of the connecting plate 100 in the second direction. One side of the flower basket (e.g., the H-side of the flower basket) can be fixed by the pair of fixing plates 220. The size of the gap between the pair of fixing plates 220 is related to the size of the flower basket that can be fixed. When the gap between the pair of fixing plates 220 is larger, the size of the flower basket that can be fixed is also larger. When the gap between the pair of fixing plates 220 is smaller, the size of the flower basket that can be fixed is also smaller.

[0032] In addition, in this embodiment, the first direction can be the height direction of the flower basket, and the second direction can be the width direction of the flower basket; it should be noted that the portion of the flower basket size that increases with the wafer size is mainly the width size of the flower basket.

[0033] This embodiment provides a flower basket fixing structure. By connecting the fixing plate 220 with the hanging plate 210 through different width adjustment holes 211, the distance between a pair of fixing plates 220 can be changed, thereby enabling the pair of fixing plates 220 to fix flower baskets of different sizes, thus solving the problem that the cleaning equipment cannot hold larger flower baskets.

[0034] It is understood that, since the spacing between the fixing plates 220 can be adjusted, the flower basket fixing structure provided in this embodiment is also suitable for clamping smaller flower baskets; the range of flower basket sizes that can be adapted is related to the opening position of the width adjustment hole 211, and those skilled in the art can select the opening position of the width adjustment hole 211 in the second direction according to actual working needs.

[0035] Please see 1 and Figure 3 In this embodiment, the hanging plate 210 includes a hanging plate body 212 and an extension portion 213. The aforementioned plurality of width adjustment holes 211 are formed on the hanging plate body 212. The extension portion 213 is used to extend the hanging plate body 212 in a first direction. When the fixing plate 220 is fixed to the extension portion 213, the fixed height of the flower basket relative to the connecting plate 100 can be further changed to adapt to actual working needs.

[0036] Specifically, one end of the extension 213 is connected to the mounting plate body 212, and the other end extends along the first direction. A height adjustment hole 214 is provided on the extension 213 along the first direction.

[0037] Understandably, when the extension 213 extends upward along the first direction and the fixing plate 220 is connected to the height adjustment hole 214, the flower basket can be raised further from its original height; when the extension 213 extends downward along the first direction and the fixing plate 220 is connected to the height adjustment hole 214, the flower basket can be lowered further from its original height.

[0038] For example, the extension 213 extends downward in a first direction to overcome the problem that the limited descent distance of the robotic arm in existing cleaning equipment prevents large flower baskets from being fully submerged in the cleaning tank.

[0039] Please continue reading. Figure 3 In this embodiment, the plurality of width adjustment holes 211 include a first width adjustment hole 2111 and a second width adjustment hole 2112 opened from the outside to the inside along the second direction.

[0040] Please see Figure 5 Specifically, the spacing between the corresponding first width adjustment holes 2111 on a pair of mounting plates 210 is... The spacing between the corresponding second width adjustment holes 2112 on a pair of mounting plates 210 is ,in, .

[0041] Understandably, when the fixing plate 220 is connected to the hanging plate 210 through the first width adjustment hole 2111, there is a large gap between the pair of fixing plates 220, which can accommodate larger flower baskets; when the fixing plate 220 is connected to the hanging plate 210 through the second width adjustment hole 2112, there is a small gap between the pair of fixing plates 220, which can accommodate smaller flower baskets.

[0042] In other embodiments, multiple width adjustment holes 211 can be provided to allow the flower basket fixing structure to adapt to flower baskets of various sizes.

[0043] Furthermore, the height of the first width adjustment hole 2111 in the first direction is The height of the second width adjustment hole 2112 in the first direction is The height of the height adjustment hole 214 in the first direction is ,in, .

[0044] In order to reliably connect the fixing plate 220 and the hanging plate 210, in this embodiment, the number of the first width adjustment hole 2111, the second width adjustment hole 2112 and the height adjustment hole 214 is multiple and arranged sequentially along the first direction; the fixing plate 220 and the hanging plate 210 can be connected by screws, and by increasing the number of connection points between the fixing plate 220 and the hanging plate 210, a reliable connection between the fixing plate 220 and the hanging plate 210 can be achieved.

[0045] In addition, in this embodiment, the relative position of the hanging plate 210 and the connecting plate 100 in the first direction can also be adjusted, thereby realizing the adjustment of the relative height of the flower basket and the robotic arm of the cleaning equipment in the first direction.

[0046] In order to facilitate the fixing of the mounting plate 210 and the adjustment of the relative position between the mounting plate 210 and the connecting plate 100, in this embodiment, the mounting plate body 212 is provided with a connecting groove 215, and the mounting plate body 212 is slidably connected to the connecting plate 100 through the connecting groove 215.

[0047] Please see Figure 4 Furthermore, the fixing plate 220 includes a fixing part 221 and a guide part 222 disposed on one side of the fixing part 221; wherein, the fixing part 221 is used to fix the flower basket, and one side of the flower basket (e.g., the H side of the flower basket) can be hung on the fixing part 221; during the connection process between the flower basket and the fixing plate 220, the edge of the flower basket can be hung on the fixing part 221 under the action of the guide part 222, so as to facilitate the connection between the flower basket and the fixing plate 220.

[0048] Specifically, the guide part 222 is inclined, and the inclination direction is from the outside to the inside along the second direction. Therefore, when fixing the flower basket, the edge of the flower basket can be placed on the guide part 222, so that the edge of the flower basket can be hung on the fixing part 221 under the action of the guide part 222.

[0049] Please see Figure 1 and Figure 2 In order to save costs and reduce the load on the robotic arm of the cleaning equipment, in this embodiment, multiple weight-reducing holes 120 are provided on the connecting plate 100.

[0050] In this embodiment, in order to adapt to the cleaning environment of the wafer, all components in the basket fixing structure are made of polytetrafluoroethylene.

[0051] It should be noted that the flower basket fixing structure provided in this embodiment can also be used as an intermediate connection structure in cleaning equipment in many other fields. In other fields, the components of the flower basket fixing structure can also be made of other materials, such as metal.

[0052] This embodiment also provides a cleaning device, which includes a robotic arm, and the aforementioned flower basket fixing structure is connected to the cleaning device through the robotic arm.

[0053] Specifically, the flower basket is fixed by a pair of fixing plates 220, which are mounted on the connecting plate 100 by a pair of hanging plates 210. One end of the connecting plate 100 is connected to the robotic arm, which can drive the connecting plate 100 to move (e.g., transplanting, lifting, etc.). By placing the flower basket in the cleaning tank, the cleaning work of the wafer is completed.

[0054] The flower basket fixing structure provided by this utility model has at least the following beneficial effects: By providing multiple width adjustment holes 211, the fixing plate 220 can adjust the spacing according to the size of the flower basket to accommodate flower baskets of different sizes and achieve fixed clamping of flower baskets of different sizes. By detachably connecting the hanging plate 210 to the connecting plate 100 and providing the extension 213, the relative height between the flower basket and the robotic arm can be adjusted to meet actual work needs.

[0055] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A flower basket fixing structure, characterized in that, Suitable for securing flower baskets, including: Connecting plate (100); The fixing assembly (200) includes at least a pair of symmetrically arranged hanging plates (210) and a pair of fixing plates (220) detachably disposed on the pair of hanging plates (210). The connecting plate (100) has fixing holes (110) on both sides along the first direction, and the hanging plate (210) is detachably connected to the connecting plate (100) through the fixing holes (110). The mounting plate (210) has a plurality of width adjustment holes (211) along the second direction, and the fixing plate (220) is detachably connected to the mounting plate (210) through the width adjustment holes (211); The first direction and the second direction are set perpendicular to each other.

2. The flower basket fixing structure according to claim 1, characterized in that, The mounting plate (210) includes a mounting plate body (212) and an extension (213). One end of the extension (213) is connected to the mounting plate body (212), and the other end extends along the first direction. A height adjustment hole (214) is provided on the extension (213) along the first direction.

3. The flower basket fixing structure according to claim 2, characterized in that, The plurality of width adjustment holes (211) include a first width adjustment hole (2111) and a second width adjustment hole (2112); The spacing between the corresponding first width adjustment holes (2111) on the pair of mounting plates (210) is The spacing between the corresponding second width adjustment holes (2112) on the pair of mounting plates (210) is ,in, .

4. The flower basket fixing structure according to claim 3, characterized in that, The height of the first width adjustment hole (2111) in the first direction is The height of the second width adjustment hole (2112) in the first direction is The height of the height adjustment hole (214) in the first direction is ,in, .

5. The flower basket fixing structure according to claim 3, characterized in that, The first width adjustment hole (2111), the second width adjustment hole (2112), and the height adjustment hole (214) are provided in multiple ways and are arranged sequentially along the first direction.

6. The flower basket fixing structure according to claim 2, characterized in that, The mounting plate body (212) is provided with a connecting groove (215), and the mounting plate body (212) is slidably connected to the connecting plate (100) through the connecting groove (215).

7. The flower basket fixing structure according to claim 1, characterized in that, The fixing plate (220) includes a fixing part (221) and a guide part (222) disposed on one side of the fixing part (221). The guide part (222) is inclined and allows the flower basket to be hung on the fixing part (221) under the action of the guide part (222).

8. The flower basket fixing structure according to claim 1, characterized in that, The connecting plate (100) has multiple weight-reducing holes (120).

9. A cleaning device, characterized in that, Includes the flower basket fixing structure as described in any one of claims 1-8.

10. The cleaning equipment according to claim 9, characterized in that, Includes a robotic arm, and the flower basket fixing structure is connected to the cleaning equipment via the robotic arm.

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