Graphical User Interface for the Process of Establishing an Optical Proximity Effect Correction Model for Electronic Device Displays

Abstract

1. Name of the Design Product: Graphical User Interface for the Process of Establishing an Optical Proximity Effect Correction Model for Electronic Device Displays. 2. Use of the Design Product: An electronic device. 3. Design Key Points of the Design Product: The graphical user interface on the screen. 4. Picture or Photo that Best Illustrates the Design Key Points: Interface Variation State Diagram 2. 5. Use of the Graphical User Interface: The graphical user interface of this product is a graphical user interface for the process of establishing an optical proximity effect correction model. 6. Human-Computer Interaction Method of the Graphical User Interface: The main view is the initial image import page of the Gauge Analysis module. The "Gauge List" pane displays the measurement file names, and a model error trend graph is displayed below the "Gauge List" pane. Click the first add icon on the left above the "Gauge List" in the main view, and it is displayed as Interface Variation State Diagram 1. After selecting the file to be loaded in the pop-up dialog box, it is displayed as Interface Variation State Diagram 2. After the file is successfully loaded, it is displayed as Interface Variation State Diagram 3. In Interface Variation State Diagram 3, the "Gauge Table" interface is displayed on the right side of the "Gauge List" pane, and the model error trend is displayed below the "Gauge List" pane. After clicking an item in the "Gauge(C)" list in the "Gauge Table", it is displayed as Interface Variation State Diagram 4. A pop-up window appears after right-clicking the cursor in Interface Variation State Diagram 4, and it is displayed as Interface Variation State Diagram 5. Click "Error Filter" in Interface Variation State Diagram 5, and it is displayed as Interface Variation State Diagram 6. After the operation is completed, it is displayed as Interface Variation State Diagram 7, and incorrect gauge data in the execution of the gauge inspection operation can be viewed. Move the cursor to the Gauge Plot model error trend graph in the lower left corner to view the image changes in different display modes. Among them, in the scatter plot mode, view the qualitative analysis and how many points are out of spec and exceed the spec respectively. Zoom in and view by rolling the mouse wheel in the area of the model error trend graph, and it is displayed as Interface Variation State Diagram 8. Click the filtering icon on the right side of the "ALLO" item below "Group Name" in the Gauge RMS module in the lower right corner, and it is displayed as Interface Variation State Diagram 9. Different options can be set to view the distribution results based on the set parameters.

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