Single-table LDI exposure machine

CN309380230SActive Publication Date: 2025-07-11HEFEI CHIP FOUND MICROELECTRONICS EQUIP CO LTD
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Patent Information

Application Number
CN202430676628.8
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2024-10-25
Publication Date
2025-07-11
Estimated Expiration
2039-10-25

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Abstract

1. Name of the design product: Single-table LDI exposure machine. 2. Use of the design product: Exposure equipment for directly etching templates or photographic films using laser beams. 3. Design key points of the design product: The combination of shape and pattern. 4. Picture or photo that best shows the design key points: Perspective view. 5. The back of this design product is a part that is not easily seen or not seen during use, so the rear view is omitted; the bottom surface of this design product is a part that is not easily seen or not seen during use, so the bottom view is omitted.
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