Crossbeam for the position detection sensor bracket of the substrate transport arm

Abstract

1. Name of the product of this design: Crossbeam for a bracket of a position detection sensor for a substrate conveyor arm. 2. Purpose of the product of this design: The overall purpose of this product is to fix a position detection sensor for detecting the position deviation of a substrate and / or to increase the rigidity of the substrate conveying arm in a substrate conveying arm used in a semiconductor manufacturing device such as a coating and developing device (a device used to perform coating, developing, heat treatment, etc. on substrates such as semiconductor wafers). The local purpose of this product is to serve as a crossbeam for a bracket for a position detection sensor of the substrate conveying arm. 3. The key design feature of this design product lies in the shape of the part for which protection is requested. 4. The picture or photo that best illustrates the design points: Stereoscopic drawing 1. 5. Other circumstances that require explanation: This design requests partial design protection. The portion indicated by the solid line is the portion for which protection is requested, and the portion indicated by the dotted line is the portion for which protection is not requested.

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