showerhead plate
CN309581902SActive Publication Date: 2025-11-04ASM IP HLDG BV
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Patent Information
- Application Number
- CN202530081586.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2024-08-30
- Filing Date
- 2025-02-25
- Publication Date
- 2025-11-04
- Estimated Expiration
- 2040-02-25
Smart Images
Figure 000001_ABST
Abstract
1. Name of the designed product: shower plate. 2. Use of the designed product: The designed product is a shower plate used in the semiconductor manufacturing industry to process substrates using substrate processing equipment to distribute plasma and gases into a reaction chamber. 3. Design points of the designed product: in shape. 4. Picture or photo best indicating the design points: perspective view 1.
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