Non-dispersive infrared gas concentration endpoint detection device
CN309602007SActive Publication Date: 2025-11-14SHANGHAI CHEYITIAN TECH CO LTD
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Patent Information
- Application Number
- CN202530199567.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-14
- Publication Date
- 2025-11-14
- Estimated Expiration
- 2040-04-14
Smart Images
Figure 000007_ABST
Abstract
1. Name of the product in this design: Non-dispersive infrared gas concentration endpoint detection device. 2. Application of this design: For endpoint detection of chamber cleaning in the semiconductor field. 3. The key design features of this product are the combination of shape and pattern. 4. The image or photograph that best illustrates the design's key points: a 3D model.
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