Wafer contact portion of a positioning pin for a wafer cleaning apparatus

Abstract

1. Name of the designed product: wafer contact part of wafer cleaning device positioning pin. 2. Use of the designed product: the product as a whole is a wafer cleaning device positioning pin used for fixing wafer at a specified position inside wafer cleaning device. The part shown by solid line is wafer contact part of wafer cleaning device positioning pin. 3. Design points of the designed product: the shape of the part shown by solid line. 4. Picture or photo best indicating the design points: enlarged view of design 1A. 5. Design 1 is designated as the basic design. 6. Other circumstances needing explanation Other explanation: the part shown by solid line is the claimed part. The dotted line is the boundary line used to distinguish the claimed part from other parts.

Images