Euv grating monochromator
CN309717293SActive Publication Date: 2026-01-02ANHUI CHUANGPU INSTR TECH CO LTD
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Patent Information
- Application Number
- CN202530287425.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-21
- Publication Date
- 2026-01-02
- Estimated Expiration
- 2040-05-21
Smart Images
Figure 000007_ABST
Abstract
1. Name of the design product: Euv grating monochromator. 2. Use of the design product: The product is used to separate the light emitted by the light source into the required monochromatic light. 3. Design points of the design product: in shape. 4. Picture or photo that best shows the design points: perspective view.
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