Substrate handler

Abstract

1. Name of the design product: substrate handler. 2. Use of the design product: The product is used for handling substrates such as glass substrates, semiconductor substrates, etc. By supporting the substrate from below, the substrate can be removed from a substrate container or a substrate processing apparatus and transferred to another substrate container or substrate processing apparatus. 3. Design points of the design product: in shape. 4. Picture or photograph best indicating the design points: perspective view. 5. Other circumstances or explanations: The use state is shown in Figs. 1 and 2, which show the state of the substrate handler fork when it is retracted.

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