Substrate handler

CN309778329SActive Publication Date: 2026-02-06HIRATA CORPORATION
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202530285726.3
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Priority Date
2025-03-11
Filing Date
2025-05-21
Publication Date
2026-02-06
Estimated Expiration
2040-05-21

Smart Images

  • Figure 000001_ABST
    Figure 000001_ABST
Patent Text Reader

Abstract

1. Name of the design product: substrate handler. 2. Use of the design product: The product is used for handling glass substrates, semiconductor substrates, and the like. By supporting the substrate from below, the substrate can be removed from a substrate storage container or a substrate processing apparatus and transferred to another substrate storage container or substrate processing apparatus. 3. Design points of the design product: in shape. 4. Picture or photograph best indicating the design points: perspective view.
Need to check novelty before this filing date? Find Prior Art