Substrate handler
CN309778329SActive Publication Date: 2026-02-06HIRATA CORPORATION
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Patent Information
- Application Number
- CN202530285726.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2025-03-11
- Filing Date
- 2025-05-21
- Publication Date
- 2026-02-06
- Estimated Expiration
- 2040-05-21
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Figure 000001_ABST
Abstract
1. Name of the design product: substrate handler. 2. Use of the design product: The product is used for handling glass substrates, semiconductor substrates, and the like. By supporting the substrate from below, the substrate can be removed from a substrate storage container or a substrate processing apparatus and transferred to another substrate storage container or substrate processing apparatus. 3. Design points of the design product: in shape. 4. Picture or photograph best indicating the design points: perspective view.
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