Main body of inspection substrate of substrate processing apparatus and battery cover

Abstract

1. Name of the design product: main body of the substrate for inspection of the substrate processing apparatus and battery cover. 2. Use of the design product: the overall use of the product is the substrate for inspection of the substrate processing apparatus such as coating and developing apparatus, which is used to check whether the positional relationship between the substrate to be processed and various components of the substrate processing apparatus is appropriate. The partial use is the main body of the substrate for inspection of the substrate processing apparatus and battery cover. 3. Design points of the design product: the shape of the claimed partial design. 4. Picture or photograph best indicating the design points: perspective view 1. 5. Other circumstances requiring explanation Other explanation: the design claimed is a partial design, the part represented by solid lines is the claimed part, and the part represented by dashed lines is not claimed.

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