reaction tube
CN309877593SActive Publication Date: 2026-03-27KOKUSAI DENKI KK
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2022-06-28
- Publication Date
- 2026-03-27
Smart Images
Figure 000007_ABST
Abstract
1. Name of the design product: reaction tube. 2. Use of the design product: The product is a reaction tube, which is housed inside a multi-stage arranged substrate in a substrate processing device and processed under a prescribed gas atmosphere. 3. Design points of the design product: in shape. 4. Picture or photograph best indicating the design points: perspective view.
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