Gas sparging head

CN309910860SActive Publication Date: 2026-04-10ADVANCED MICRO FAB EQUIP INC CHINA
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2025-08-07
Publication Date
2026-04-10

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Abstract

1. The name of the design product: gas shower head. 2. The use of the design product: supplying process gas into semiconductor processing chamber. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view 1. 5. The rear view, left view, right view and front view are the same, and the rear view, left view and right view are omitted.
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