Gas sparging head
CN309910862SActive Publication Date: 2026-04-10ADVANCED MICRO FAB EQUIP INC CHINA
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- ADVANCED MICRO FAB EQUIP INC CHINA
- Filing Date
- 2025-08-07
- Publication Date
- 2026-04-10
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Figure 000004_ABST
Abstract
1. The name of the design product: gas shower head. 2. The use of the design product: supplying process gas into semiconductor processing chamber. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view 1. 5. The rear view, left view, right view and front view are the same, and the rear view, left view and right view are omitted.
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