Microwave plasma device (G type)

Abstract

1. Name of the product in this design: Microwave Plasma Equipment (Type G). 2. Purpose of this design: A microwave plasma device for generating microwave plasma and / or providing microwave plasma to other equipment (such as photoresist removal equipment, atomic layer deposition equipment, etching equipment, dry cleaning equipment, etc.). 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: 3D view 1.

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