Spacer pin holding member in a heat treatment device of a substrate processing device

Abstract

1. Name of the design product: spacer pin holding member in heat treatment device of substrate processing device 2. Use of the design product: the product is a holding member for fixing a spacer pin to a recess formed in a heat plate in a heat treatment device of a substrate processing device, the spacer pin being used for supporting a substrate as a processing target on the heat plate with a gap. 3. Design points of the design product: in the shape. 4. Picture or photograph best indicating the design points: perspective view.

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